JP2009105092A - Electronic component mounting apparatus and mounting method - Google Patents

Electronic component mounting apparatus and mounting method Download PDF

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JP2009105092A
JP2009105092A JP2007272990A JP2007272990A JP2009105092A JP 2009105092 A JP2009105092 A JP 2009105092A JP 2007272990 A JP2007272990 A JP 2007272990A JP 2007272990 A JP2007272990 A JP 2007272990A JP 2009105092 A JP2009105092 A JP 2009105092A
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substrate
electronic component
sheet
mounting
tcp
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JP5324769B2 (en
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Takeshi Aoyama
剛士 青山
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to JP2007272990A priority Critical patent/JP5324769B2/en
Priority to KR1020107010530A priority patent/KR101056100B1/en
Priority to PCT/JP2008/067755 priority patent/WO2009051004A1/en
Priority to CN2008801121275A priority patent/CN101828256B/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67144Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1345Conductors connecting electrodes to cell terminals
    • G02F1/13452Conductors connecting driver circuitry and terminals of panels
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
    • H05K3/323Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Liquid Crystal (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mounting apparatus capable of effecting delamination of a sheet adhered to an anisotropic conductive member without damaging a substrate when pressure-bonding a TCP to the substrate. <P>SOLUTION: The mounting apparatus comprises a pressure bonding tool 15 for mounting the TCP under heat and pressure, the TCP being attached to a side section of a substrate, the substrate being held by a backup tool (14) at its bottom surface when it is driven in a downward direction by a Z-direction table driving source (7) of conveying means 2 which drives the substrate upward and downward directions; a cassette 25 which is driven by a cassette Z-direction driving source 23 in upward and downward directions, the cassette having the sheet to be interposed between a top surface of the side of the substrate and the pressure bonding tool when mounting the TCP by the pressure bonding tool; and a controlling apparatus which, after ascending the pressure bonding tool after the TCP is mounted on the substrate by the pressure bonding tool, ascends the cassette, and at the same time, ascends the substrate at a lower rate than the cassette to effect delamination of the sheet adhered to a portion of an anisotropic conductive member of the TCP which is exposed from the TCP upon mounting of the TCP. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

この発明は基板に電子部品を加圧して圧着する実装装置及び実装方法に関する。   The present invention relates to a mounting apparatus and a mounting method for pressurizing and pressing an electronic component on a substrate.

たとえば、基板としての液晶セルには接着材料としての異方性導電部材を介して電子部品であるTCP(Tape Carrier Package)が圧着される。上記液晶セルは、2枚のガラス板をシール剤を介して所定の間隔で接着し、これらガラス板間に液晶を封入するとともに、各ガラス板の外面にそれぞれ偏光板を貼着して構成される。   For example, a TCP (Tape Carrier Package) which is an electronic component is pressure-bonded to a liquid crystal cell as a substrate through an anisotropic conductive member as an adhesive material. The liquid crystal cell is configured by adhering two glass plates at a predetermined interval via a sealing agent, enclosing liquid crystal between these glass plates, and attaching a polarizing plate to the outer surface of each glass plate. The

そして、上記構成の液晶セルの側辺部の上面にはテープ状で、両面に粘着性を有する上記異方性導電部材をその側辺部のほぼ全長にわたって貼着し、この異方性導電部材上に複数のTCPを所定間隔で仮圧着した後、本圧着するようにしている。   Then, the anisotropic conductive member having a tape shape on both sides of the liquid crystal cell having the above structure and having adhesiveness on both sides is adhered over almost the entire length of the side portion, and this anisotropic conductive member A plurality of TCPs are temporarily pressure-bonded at predetermined intervals, and then finally pressure-bonded.

液晶セルにTCPを仮圧着したり、本圧着する場合には実装装置が用いられる。実装装置は周知のように装置本体を有し、この装置本体にはバックアップツール及びこのバックアップツールの上方に上下方向に駆動される圧着ツールが設けられている。   A mounting apparatus is used when TCP is temporarily pressure-bonded to the liquid crystal cell or when the liquid crystal cell is pressure-bonded. As is well known, the mounting apparatus has an apparatus main body, and the apparatus main body is provided with a backup tool and a crimping tool driven in the vertical direction above the backup tool.

異方性導電部材を介してTCPが貼着された液晶セルの側辺部の下面を、バックアップツールの上端面に位置決め載置した後、上記圧着ツールを下降方向に駆動することで、上記TCPを上記液晶セルに仮圧着或いは本圧着するようにしている。   After positioning and mounting the lower surface of the side portion of the liquid crystal cell to which TCP is adhered via an anisotropic conductive member on the upper end surface of the backup tool, the above-mentioned TCP is driven by driving the crimping tool in the downward direction. Is temporarily or permanently bonded to the liquid crystal cell.

上記液晶セルにTCPを本圧着する場合、加熱された上記バックアップツールと圧着ツールによって異方性導電部材を加熱硬化させる。そのため、TCPが圧着ツールによって加圧加熱されると、溶融した異方性導電部材の一部が硬化する前にTCPからはみ出して圧着ツールに付着することがある。   When TCP is finally pressure-bonded to the liquid crystal cell, the anisotropic conductive member is heat-cured by the heated backup tool and pressure-bonding tool. For this reason, when the TCP is pressurized and heated by the crimping tool, the melted anisotropic conductive member may protrude from the TCP and adhere to the crimping tool before being cured.

圧着ツールに異方性導電部材が付着すると、圧着ツールによってTCPを均一に加圧することができなくなる加圧不良を招いたり、圧着ツールに付着した異方性導電部材がTCPに転移して汚れの原因になるなどのことがあり、好ましくない。   If the anisotropic conductive member adheres to the crimping tool, it may cause a press failure that prevents the TCP from being uniformly pressed by the crimping tool, or the anisotropic conductive member adhered to the crimping tool may transfer to the TCP and become dirty. It may cause a problem and is not preferable.

そこで、TCPを本圧着する場合、TCPと圧着ツールとの間にシリコーン樹脂やフッ素樹脂などの耐熱性を有する材料によって形成されたシートを介在させる。それによって、TCPを加圧加熱する際に、溶融した異方性導電部材が圧着ツールに付着するのを防止するようにしている。   Therefore, when TCP is finally pressure-bonded, a sheet formed of a heat-resistant material such as silicone resin or fluorine resin is interposed between the TCP and the pressure-bonding tool. Thus, when the TCP is heated under pressure, the molten anisotropic conductive member is prevented from adhering to the crimping tool.

上記シートはカセットに設けられた供給リールから導出されて巻き取りリールに巻き取られるようになっていて、その中途部が上記圧着ツールとTCPとの間に介在するようになっている。このような先行技術は特許文献1に示されている。   The sheet is led out from a supply reel provided in the cassette and wound on a take-up reel, and a midway portion is interposed between the crimping tool and the TCP. Such prior art is disclosed in Patent Document 1.

液晶セルにTCPを本圧着する際、TCPと圧着ツールとの間に介在したシートは、上記圧着ツールによってTCPが仮圧着された液晶セルの側辺部にTCPとともに加圧されることになる。液晶セルの側辺部には、この側辺部の全長にわたって貼着された異方性導電部材によって複数のTCPが所定間隔で仮圧着されている。そのため、隣り合うTCPの間の部分からは上記液晶セルの側辺部の全長にわたって貼着された異方性導電部材が露出している。   When TCP is finally pressure-bonded to the liquid crystal cell, the sheet interposed between the TCP and the pressure-bonding tool is pressed together with the TCP to the side portion of the liquid crystal cell to which TCP is temporarily pressure-bonded by the pressure-bonding tool. A plurality of TCPs are temporarily pressure-bonded to the side portion of the liquid crystal cell at predetermined intervals by an anisotropic conductive member attached over the entire length of the side portion. Therefore, the anisotropic conductive member adhered over the entire length of the side portion of the liquid crystal cell is exposed from the portion between adjacent TCPs.

そのため、圧着ツールがシートを介してTCPを加圧加熱すると、シートが異方性導電部材の隣り合うTCPの間から露出した部分に貼着されてしまうということが避けられない。   Therefore, when the pressure bonding tool pressurizes and heats the TCP through the sheet, it is inevitable that the sheet is stuck to a portion exposed from between adjacent TCPs of the anisotropic conductive member.

最近では液晶セルが大型化する傾向にある。液晶セルが大型化すると、その側辺部が長くなり、側辺部に貼着されるTCPの数も増大する。それによって、隣り合うTCPの間からの異方性導電部材の露出箇所も多くなるから、シートが液晶セルの側辺部に強く貼着してしまうということがある。   Recently, liquid crystal cells tend to be larger. When the liquid crystal cell is increased in size, the side portion becomes longer, and the number of TCPs attached to the side portion also increases. As a result, the exposed portions of the anisotropic conductive member between adjacent TCPs also increase, and the sheet may be strongly adhered to the side part of the liquid crystal cell.

従来、TCPを液晶セルの側辺部に実装することで、液晶セルの側辺部に貼着されたシートは、上記基板を下降させたり、上記シートが設けられたカセットを上昇させるなどして液晶セルの側辺部から剥離するようにしている。
特開2001−28382号公報
Conventionally, by mounting TCP on the side of the liquid crystal cell, the sheet attached to the side of the liquid crystal cell can be lowered by moving the substrate or raising the cassette provided with the sheet. It is made to peel from the side part of a liquid crystal cell.
JP 2001-28382 A

ところで、シートが液晶セルの側辺部に強く貼着された状態で、単に上記シートを上昇させたり、液晶セルを下降させるなどして液晶セルの側辺部からシートを剥離するようにしても、シートは液晶セルから簡単に剥離せず、シートともに液晶セルがテーブル上から浮き上がってしまう。   By the way, with the sheet strongly adhered to the side part of the liquid crystal cell, the sheet may be peeled off from the side part of the liquid crystal cell by simply raising the sheet or lowering the liquid crystal cell. The sheet does not easily peel off from the liquid crystal cell, and the liquid crystal cell rises from the table together with the sheet.

液晶セルがシートともに浮き上がると、液晶セルの自重によってシートが剥離されることになる。しかしながら、シートが液晶セルから剥離すると、液晶セルはテーブルから浮き上がっているために落下することになる。そのため、液晶セルには落下による衝撃が加わるから、その衝撃によって液晶セルに欠けが生じるということがある。とくに、上述したように液晶セルが大型化すると、シートが液晶セルに貼着され易いためにその傾向が顕著になる。   When the liquid crystal cell is lifted together with the sheet, the sheet is peeled off by the weight of the liquid crystal cell. However, when the sheet is peeled off from the liquid crystal cell, the liquid crystal cell falls because it is lifted from the table. For this reason, the liquid crystal cell is subjected to an impact caused by dropping, and the impact may cause chipping of the liquid crystal cell. In particular, when the liquid crystal cell is enlarged as described above, the tendency becomes remarkable because the sheet is easily adhered to the liquid crystal cell.

この発明は、基板の側辺部に異方性導電部材によって貼着された電子部品をシートを介して圧着ツールで加圧して実装する際、上記シートが異方性導電部材に貼着しても、シートが基板を持ち上げて落下させることなく、そのシートを基板から剥離できるようにした電子部品の実装装置及び実装方法を提供することにある。   In the present invention, when the electronic component attached to the side portion of the substrate with the anisotropic conductive member is mounted by pressing with a crimping tool through the sheet, the sheet is attached to the anisotropic conductive member. It is another object of the present invention to provide an electronic component mounting apparatus and mounting method that enable the sheet to be peeled off the substrate without lifting the substrate and dropping it.

この発明は、基板の側辺部の上面に異方性導電部材によって貼着された電子部品を実装する電子部品の実装装置であって、
第1の上下駆動手段を有し、上記基板を水平方向及び上下方向に搬送する搬送手段と、
この搬送手段によって搬送位置決めされた上記基板の上記電子部品が貼着された側辺部の下面を支持するバックアップツールと、
上記第1の上下駆動手段によって上下方向に駆動され下降方向に駆動されたときに上記バックアップツールによって下面が支持された上記基板の側辺部に貼着された電子部品を加圧加熱して実装する圧着ツールと、
第2の上下駆動手段によって上下方向に駆動され上記圧着ツールによって上記電子部品を実装するときに上記基板の側辺部の上面と上記圧着ツールとの間に介在するシートを有するシート供給手段と、
上記圧着ツールによって上記電子部品を上記基板に実装した後、上記第1の上下駆動手段によって上記圧着ツールを上昇させてから、上記第2の上下駆動手段によって上記シート供給手段を上昇させるとともに、上記搬送手段によって上記基板を上昇させるときに、上記基板を上記シート供給手段よりも遅い速度で上昇させて上記電子部品の実装時に上記異方性導電部材の上記電子部品から露出した部分に貼着した上記シートを剥離させる制御手段と
を具備したことを特徴とする電子部品の実装装置にある。
The present invention is an electronic component mounting apparatus for mounting an electronic component attached to an upper surface of a side portion of a substrate by an anisotropic conductive member,
Conveying means for conveying the substrate in a horizontal direction and a vertical direction, the first vertical driving means;
A backup tool that supports the lower surface of the side portion to which the electronic component of the substrate that has been transported and positioned by the transport means is attached;
Mounted by pressurizing and heating the electronic component attached to the side portion of the substrate whose lower surface is supported by the backup tool when driven vertically by the first vertical drive means and driven downward. A crimping tool to
Sheet feeding means having a sheet interposed between the upper surface of the side portion of the substrate and the crimping tool when the electronic component is mounted by the crimping tool driven in the vertical direction by the second vertical driving means;
After the electronic component is mounted on the substrate by the crimping tool, the crimping tool is lifted by the first vertical driving means, and then the sheet supply means is lifted by the second vertical driving means. When the substrate is raised by the conveying means, the substrate is raised at a speed slower than that of the sheet supply means, and is adhered to a portion exposed from the electronic component of the anisotropic conductive member when the electronic component is mounted. An electronic component mounting apparatus comprising: a control means for peeling the sheet.

上記シート供給手段が着脱可能に装着される装着部が設けられ、
上記第2の上下駆動手段は上記装着部とともに上記シート供給手段を上下方向に駆動することが好ましい。
A mounting portion on which the sheet supply means is detachably mounted is provided,
The second vertical driving means preferably drives the sheet feeding means in the vertical direction together with the mounting portion.

この発明は、基板の側辺部の上面に異方性導電部材によって貼着された電子部品を実装する電子部品の実装方法であって、
上記基板の上記電子部品が貼着された側辺部の下面をバックアップツールで支持する工程と、
下面が支持された上記基板の側辺部の上面に貼着された電子部品を圧着ツールで加圧加熱して実装する工程と、
上記電子部品を上記基板の側辺部の上面に実装するときに上記基板の側辺部の上面と上記圧着ツールとの間にシートを介在させる工程と、
上記圧着ツールによって上記電子部品を上記基板に実装した後、上記圧着ツールを上昇させてから、上記シートを上昇させながら上記基板を上記シートよりも遅い速度で上昇させ、上記電子部品の実装時に上記異方性導電部材の上記電子部品から露出した部分に貼着した上記シートを剥離する工程と
を具備したことを特徴とする電子部品の実装方法にある。
This invention is an electronic component mounting method for mounting an electronic component attached to the upper surface of a side portion of a substrate by an anisotropic conductive member,
A step of supporting the lower surface of the side part to which the electronic component of the substrate is attached with a backup tool;
Mounting the electronic component attached to the upper surface of the side portion of the substrate on which the lower surface is supported by pressure heating with a crimping tool; and
Interposing a sheet between the upper surface of the side portion of the substrate and the crimping tool when mounting the electronic component on the upper surface of the side portion of the substrate;
After the electronic component is mounted on the substrate by the crimping tool, the crimping tool is raised, and then the substrate is raised at a slower speed than the sheet while raising the sheet, and when the electronic component is mounted, And a step of peeling off the sheet adhered to the portion of the anisotropic conductive member exposed from the electronic component.

この発明によれば、基板とシートを、これらをともに上昇させるとともに基板の上昇速度をシートの上昇速度よりも遅くすることで、基板の側辺部からシートを剥離するようにした。
そのため、基板とシートとの上昇速度の差によってシートが基板から徐々に剥離されるから、シートが基板を持ち上げることなく、基板から緩やかに剥離されることになる。
According to the present invention, the substrate and the sheet are lifted together, and the rising speed of the substrate is made slower than the rising speed of the sheet, whereby the sheet is peeled from the side portion of the substrate.
Therefore, since the sheet is gradually peeled from the substrate due to the difference in the rising speed between the substrate and the sheet, the sheet is gently peeled from the substrate without lifting the substrate.

以下、この発明の一実施の形態を図面を参照しながら説明する。
図1は実装装置の概略的構成を示し、この実装装置は装置本体1を備えている。この装置本体1には搬送手段2が設けられている。この搬送手段2は矢印で示すX方向に移動可能であって、上記装置本体1に設けられたX駆動源3によってX方向に駆動されるXテーブル4、このXテーブル4にX方向と直交するY方向に移動可能に設けられY駆動源5によって駆動されるYテーブル6、このYテーブル6に設けられテーブル用Z駆動源7によって上下方向であるZ方向に駆動されるZ可動体9及びこのZ可動体9に回転方向であるθ方向に駆動可能に設けられθ駆動源10によって回転方向に駆動される載置テーブル8を有する。それによって、上記載置テーブル8はX、Y、Z及びθ方向に駆動されるようになっている。なお、上記テーブル用Z駆動源7とZ可動体9によって第1の上下駆動手段を構成している。
An embodiment of the present invention will be described below with reference to the drawings.
FIG. 1 shows a schematic configuration of a mounting apparatus, and the mounting apparatus includes an apparatus main body 1. The apparatus main body 1 is provided with a conveying means 2. The conveying means 2 is movable in the X direction indicated by the arrow, and is driven in the X direction by the X drive source 3 provided in the apparatus main body 1. The X table 4 is orthogonal to the X direction. A Y table 6 movably provided in the Y direction and driven by a Y drive source 5, a Z movable body 9 provided on the Y table 6 and driven in the Z direction which is the vertical direction by a table Z drive source 7, and this The Z movable body 9 has a mounting table 8 provided so as to be drivable in the θ direction which is the rotation direction and driven in the rotation direction by a θ drive source 10. Thereby, the mounting table 8 is driven in the X, Y, Z and θ directions. The table Z drive source 7 and the Z movable body 9 constitute first vertical drive means.

上記載置テーブル8にはたとえば液晶セルなどの基板Wが周辺部を載置テーブル8の上面から外方へ突出させた状態で供給載置され、真空吸着などの保持手段によって保持されるようになっている。   For example, a substrate W such as a liquid crystal cell is supplied and mounted on the mounting table 8 with its peripheral portion protruding outward from the upper surface of the mounting table 8 and is held by holding means such as vacuum suction. It has become.

図3に示すように、上記基板Wの一側部には異方性導電部材11を介して電子部品としての複数のTCP12が所定間隔で仮圧着されている。上記異方性導電部材11は基板Wの側辺部の全長にわたって貼着されている。それによって、同図に11aで示すように隣り合うTCP12の間からは上記異方性導電部材11が露出している。   As shown in FIG. 3, a plurality of TCPs 12 as electronic components are temporarily press-bonded at predetermined intervals to one side portion of the substrate W via an anisotropic conductive member 11. The anisotropic conductive member 11 is adhered over the entire length of the side portion of the substrate W. As a result, the anisotropic conductive member 11 is exposed between adjacent TCPs 12 as indicated by 11a in FIG.

上記装置本体1には、上記載置テーブル8に保持された基板Wの一側部の下面を上端面によって支持するバックアップツール14が設けられている。基板Wの側辺部に仮圧着されたTCP12は、基板Wの側辺部の下面が上記バックアップツール14の上端面に支持された状態で、その側辺部に仮圧着されたTCP12が圧着ツール15によって本圧着されるようになっている。   The apparatus main body 1 is provided with a backup tool 14 that supports the lower surface of one side portion of the substrate W held on the mounting table 8 by the upper end surface. The TCP 12 that is temporarily press-bonded to the side portion of the substrate W has the TCP 12 that is temporarily press-bonded to the side portion of the substrate W while the lower surface of the side portion of the substrate W is supported by the upper end surface of the backup tool 14. 15 is used for final pressure bonding.

上記圧着ツール15は加圧ヘッド16の下面に設けられている。この加圧ヘッド16は、リニアガイド17によって矢印で示すZ方向に移動可能に設けられ、サーボモータやリニアモータなどの加圧用Z駆動源18によってZ方向に駆動されるようになっている。   The crimping tool 15 is provided on the lower surface of the pressure head 16. The pressure head 16 is provided so as to be movable in the Z direction indicated by an arrow by a linear guide 17 and is driven in the Z direction by a pressure Z drive source 18 such as a servo motor or a linear motor.

上記装置本体1の上記圧着ツール15の下方であって、上記バックアップツール14よりも上方にはシート供給手段としての後述するカセット25が着脱可能に装着される装着部としての一対のレール部材21(一方のみ図示)がY方向に所定間隔で離間してX方向に沿って水平に設けられている。   A pair of rail members 21 (as mounting portions) in which a later-described cassette 25 as a sheet supply means is detachably mounted below the crimping tool 15 of the apparatus main body 1 and above the backup tool 14. Are provided horizontally along the X direction with a predetermined interval in the Y direction.

上記レール部材21に上記カセット25を装着すると、図1に示す所定の位置で上記カセット25に設けられたストッパ(図示せず)が上記装置本体1に設けられた当接部(図示せず)に当接する。それによって、上記カセット25が位置決めされるようになっている。   When the cassette 25 is mounted on the rail member 21, a stopper (not shown) provided on the cassette 25 at a predetermined position shown in FIG. Abut. Thereby, the cassette 25 is positioned.

一対のレール部材21の少なくとも長手方向の両端部は連結部材22によって一体的に連結されている。連結部分の両端部、つまり一対のレール部材21の両端部に対応する部分にはそれぞれパルスモータやリニアモータなどからなる第2の上下駆動手段としてのカセット用Z駆動源23が設けられている。それによって一対のレール部材21は4つのカセット用Z駆動源23(2つのみ図示)によって上下方向である、Z方向に駆動されるようになっている。   At least both ends in the longitudinal direction of the pair of rail members 21 are integrally connected by a connecting member 22. At both ends of the connecting portion, that is, at portions corresponding to both ends of the pair of rail members 21, cassette Z drive sources 23 as second vertical drive means, each of which includes a pulse motor or a linear motor, are provided. Accordingly, the pair of rail members 21 are driven in the Z direction, which is the vertical direction, by four cassette Z drive sources 23 (only two are shown).

なお、4つのカセット用Z駆動源23は後述する制御装置35によって同期して駆動される。それによって、一対のレール部材21は水平な状態でZ方向に駆動されるようになっている。   The four cassette Z drive sources 23 are driven in synchronization by a control device 35 described later. Thereby, the pair of rail members 21 is driven in the Z direction in a horizontal state.

上記カセット25は、図1に示すように四隅部が連結軸26によって所定の間隔で連結された矩形状の一対の側板27(一方のみ図示)を有する。一対の側板27は上記基板WのTCP12が仮圧着された側辺部の長さよりも大きな間隔で連結されている。   As shown in FIG. 1, the cassette 25 has a pair of rectangular side plates 27 (only one is shown) whose four corners are connected by a connecting shaft 26 at a predetermined interval. The pair of side plates 27 are connected at a larger interval than the length of the side portion to which the TCP 12 of the substrate W is temporarily bonded.

一対の側板27の長手方向一端部にはシリコーン樹脂製やフッ素樹脂製の耐熱性を有するシート28が巻装された繰り出し軸29が上記側板27に対して回転可能かつ着脱可能に設けられている。   A feeding shaft 29 around which a heat-resistant sheet 28 made of silicone resin or fluororesin is wound is provided at one end in the longitudinal direction of the pair of side plates 27 so as to be rotatable and detachable with respect to the side plates 27. .

上記側板27の長手方向他端部には上記繰り出し軸29に巻装されたシート28を、複数の中継ローラ31を介して巻き取る巻き取り軸32が設けられている。この巻き取り軸32は図2に示す巻き取りモータ33によって回転駆動され、上記シート28を上記巻き取り軸32に所定長さずつ巻き取るようになっている。   A winding shaft 32 for winding the sheet 28 wound around the feeding shaft 29 through a plurality of relay rollers 31 is provided at the other longitudinal end of the side plate 27. The take-up shaft 32 is rotationally driven by a take-up motor 33 shown in FIG. 2, and takes up the sheet 28 around the take-up shaft 32 by a predetermined length.

図1に示すようにカセット25が装置本体1の所定の位置に装着されると、このカセット25に装着されたシート28の繰り出し軸29と巻き取り軸32との間に位置する部分が基板WのTCP12が仮圧着された側辺部の上方に対向位置するようになっている。
なお、上記X駆動源3、Y駆動源5、テーブル用Z駆動源7、θ駆動源10、加圧用Z駆動源18、カセット用Z駆動源23及び上記巻き取りモータ33は図2に示す制御装置35によって駆動が制御されるようになっている。
As shown in FIG. 1, when the cassette 25 is mounted at a predetermined position of the apparatus main body 1, a portion located between the feeding shaft 29 and the winding shaft 32 of the sheet 28 mounted on the cassette 25 is the substrate W. The TCP 12 is positioned so as to be opposed to the upper side of the side part to which the provisional pressure bonding is performed.
The X drive source 3, the Y drive source 5, the table Z drive source 7, the θ drive source 10, the pressurizing Z drive source 18, the cassette Z drive source 23, and the take-up motor 33 are controlled as shown in FIG. The drive is controlled by the device 35.

つぎに、上記構成の実装装置によって基板Wの側辺部に仮圧着されたTCP12を本圧着する場合について説明する。まず、図1に示すように装置本体1のレール部材21にカセット25が装着された状態で載置テーブル8が駆動され、TCP12が仮圧着された基板Wの側辺部がバックアップツール14の上端面の上方に位置決めされる。ついで、載置テーブル8がZ方向下方に駆動されて上記基板Wの側辺部の下面が上記バックアップツール14の上端面に支持される。   Next, a description will be given of a case where the TCP 12 temporarily press-bonded to the side portion of the substrate W by the mounting apparatus having the above configuration is subjected to main pressure bonding. First, as shown in FIG. 1, the mounting table 8 is driven in a state where the cassette 25 is mounted on the rail member 21 of the apparatus main body 1, and the side portion of the substrate W to which the TCP 12 is temporarily bonded is located above the backup tool 14. Positioned above the end face. Next, the mounting table 8 is driven downward in the Z direction, and the lower surface of the side portion of the substrate W is supported by the upper end surface of the backup tool 14.

ついで、テーブル用Z駆動源7が作動して圧着ツール15がZ方向下方へ駆動される。それによって、圧着ツール15はシート28を介して基板Wの側辺部に所定間隔で設けられた複数のTCP12を同時に加熱しながら加圧するから、異方性導電部材11が溶融されて複数のTCP12が基板Wの側辺部に本圧着されることになる。   Next, the table Z drive source 7 is activated to drive the crimping tool 15 downward in the Z direction. As a result, the crimping tool 15 pressurizes while simultaneously heating the plurality of TCPs 12 provided at predetermined intervals on the side of the substrate W via the sheet 28, so that the anisotropic conductive member 11 is melted and the plurality of TCPs 12 are melted. Will be pressure bonded to the side of the substrate W.

TCP12を基板Wの側辺部に本圧着すると、圧着ツール15と基板Wの側辺部との間に介在したシート28の隣り合うTCP12間に位置する部分は、図4(a)に鎖線で示すように圧着ツール15によって異方性導電部材11の隣り合うTCP12間から露出した部分11aに加圧されて貼着される。つまり、シート28は、隣り合うTCP12間に形成された隙間の数に対応する複数箇所が異方性導電部材11の隣り合うTCP12間から露出した部分11aに貼着されることになる。   When the TCP 12 is finally crimped to the side of the substrate W, the portion located between the adjacent TCPs 12 of the sheet 28 interposed between the crimping tool 15 and the side of the substrate W is indicated by a chain line in FIG. As shown, the pressure bonding tool 15 pressurizes and affixes the portion 11 a exposed from between adjacent TCPs 12 of the anisotropic conductive member 11. That is, the sheet 28 is stuck to the portion 11 a exposed from between the adjacent TCPs 12 of the anisotropic conductive member 11 at a plurality of locations corresponding to the number of gaps formed between the adjacent TCPs 12.

異方性導電部材11の隣り合うTCP12間から露出した部分11aに貼着したシート28は以下のようにして剥離される。すなわち、本圧着が終了したならば、制御装置35によって加圧用Z駆動源18が駆動されて圧着ツール15が上昇方向に駆動される。このとき、シート28の隣り合うTCP12間に位置する部分は図4(a)に示すように基板Wの側辺部の異方性導電部材11の隣り合うTCP12間から露出した部分に貼着している。   The sheet 28 attached to the portion 11a exposed from between the adjacent TCPs 12 of the anisotropic conductive member 11 is peeled as follows. That is, when the main crimping is completed, the pressurizing Z drive source 18 is driven by the control device 35 and the crimping tool 15 is driven in the upward direction. At this time, the part located between the adjacent TCPs 12 of the sheet 28 is adhered to the part exposed from the adjacent TCPs 12 of the anisotropic conductive member 11 on the side part of the substrate W as shown in FIG. ing.

圧着ツール15がカセット25に干渉しない位置まで上昇したならば、カセット用Z駆動源23によってカセット25を上昇方向に駆動すると同時に、テーブル用Z駆動源7が作動して載置テーブル8によって基板Wを上昇方向に駆動する。このとき、基板Wの上昇速度をV1、カセット25の上昇速度をV2とすると、V1<V2となるよう、これらの上昇速度が上記制御装置35によって制御される。
なお、カセット25の上昇駆動と、基板W上昇駆動は同期して行なわれるが、カセット25をわずかに上昇させてから、基板Wの上昇を開始させるようにしてもよい。
If the crimping tool 15 is raised to a position where it does not interfere with the cassette 25, the cassette Z drive source 23 drives the cassette 25 in the upward direction, and at the same time, the table Z drive source 7 is activated and the substrate W is moved by the mounting table 8. Is driven in the upward direction. At this time, if the rising speed of the substrate W is V1, and the rising speed of the cassette 25 is V2, these rising speeds are controlled by the control device 35 so that V1 <V2.
Although the raising drive of the cassette 25 and the raising drive of the substrate W are performed in synchronization, the raising of the substrate W may be started after raising the cassette 25 slightly.

このように、カセット25とともに基板Wを上昇させ、しかも基板Wの上昇速度V1をカセット25、つまりシート28の上昇速度よりも遅くすると、シート28の異方性導電部材11に貼着された部分には張力が緩やかに加えられるから、図4(b)に示すようにシート28は異方性導電部材11の露出した部分11aの幅方向両端部から徐々に剥離される。   As described above, when the substrate W is raised together with the cassette 25 and the rising speed V1 of the substrate W is slower than the rising speed of the cassette 25, that is, the sheet 28, the portion of the sheet 28 adhered to the anisotropic conductive member 11 Since the tension is gently applied to the sheet 28, the sheet 28 is gradually peeled off from both ends in the width direction of the exposed portion 11a of the anisotropic conductive member 11 as shown in FIG.

さらに、基板Wを図4(c)に示すように本圧着時の最初の位置から高さHまで上昇させれば、シート28に張力が引き続き緩やかに加わることで、そのシート28は異方性導電部材11の露出した部分11aの幅方向中央部を除くほとんどの部分が剥離されることになる。そして、カセット25を基板Wに対してさらに上昇させれば、シート28が基板Wの側辺部から確実に剥離されることになる。   Further, as shown in FIG. 4C, if the substrate W is raised from the initial position at the time of the main press-bonding to the height H, tension is continuously applied to the sheet 28 so that the sheet 28 becomes anisotropic. Most portions excluding the central portion in the width direction of the exposed portion 11a of the conductive member 11 are peeled off. When the cassette 25 is further raised with respect to the substrate W, the sheet 28 is reliably peeled from the side portion of the substrate W.

このように、基板Wの側辺部の異方性導電部材11のTCP12から露出した部分に貼着したシート28を剥離する際、単にカセット25を上昇させるだけでなく、カセット25の上昇速度V2よりも遅い速度V1で基板Wを上昇させるようにした。   As described above, when the sheet 28 attached to the portion exposed from the TCP 12 of the anisotropic conductive member 11 on the side portion of the substrate W is peeled off, not only the cassette 25 is lifted but also the rising speed V2 of the cassette 25. The substrate W was raised at a slower speed V1.

そのため、シート28は異方性導電部材11の基板Wの側辺部に露出した部分11aから、カセット25と基板Wとの上昇速度の差によって徐々に剥離されるため、異方性導電部材11に貼着されたシート28が基板Wを強く引っ張ってその基板Wを載置テーブル8から上昇させるということがない。   Therefore, the sheet 28 is gradually peeled off from the portion 11a exposed to the side portion of the substrate W of the anisotropic conductive member 11 due to the difference in the rising speed between the cassette 25 and the substrate W. The sheet 28 adhered to the substrate does not pull the substrate W strongly to raise the substrate W from the mounting table 8.

それによって、シート28を異方性導電部材11から剥離する際、基板Wを載置テーブル8から浮き上がらせて落下させるということがないから、基板Wに衝撃を与えて損傷させるのを防止することができる。   Accordingly, when the sheet 28 is peeled off from the anisotropic conductive member 11, the substrate W is not lifted off from the mounting table 8 and dropped, thereby preventing the substrate W from being damaged by being shocked. Can do.

なお、基板Wの上昇速度V1とカセット25の上昇速度V2の差(V2−V1)は、異方性導電部材11の基板Wの側辺部に対する貼着力と、載置テーブル8に対する基板Wの吸着保持力とに応じて基板Wが載置テーブル8から浮き上がらないよう、制御装置35によって設定可能である。   In addition, the difference (V2−V1) between the rising speed V1 of the substrate W and the rising speed V2 of the cassette 25 is the adhesion force of the anisotropic conductive member 11 to the side portion of the substrate W and the substrate W with respect to the mounting table 8. It can be set by the control device 35 so that the substrate W does not float from the mounting table 8 according to the suction holding force.

この発明の一実施の形態を示す実装装置の概略的構成図。BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram of the mounting apparatus which shows one embodiment of this invention. 制御系統のブロック図。The block diagram of a control system. 一側部にTCPが設けられた液晶パネルの平面図。The top view of the liquid crystal panel in which TCP was provided in the one side part. (a)〜(c)は異方性導電部材に貼着されたシートが剥離される状態を順次示す説明図。(A)-(c) is explanatory drawing which shows the state from which the sheet | seat stuck on the anisotropic conductive member was peeled one by one.

符号の説明Explanation of symbols

2…搬送手段、W…基板、7…テーブル用Z駆動源(第1の上下駆動手段)、9…Z可動体(第1の上下駆動手段)、12…TCP(電子部品)、14…バックアップツール、15…圧着ツール、23…カセット用Z駆動源(第2の上下駆動手段)、25…カセット(シート供給手段)、28…シート、35…制御装置。   DESCRIPTION OF SYMBOLS 2 ... Conveyance means, W ... Board | substrate, 7 ... Table Z drive source (1st vertical drive means), 9 ... Z movable body (1st vertical drive means), 12 ... TCP (electronic component), 14 ... Backup Tool: 15 ... Crimping tool, 23 ... Z drive source for cassette (second vertical drive means), 25 ... Cassette (sheet supply means), 28 ... Sheet, 35 ... Control device.

Claims (3)

基板の側辺部の上面に異方性導電部材によって貼着された電子部品を実装する電子部品の実装装置であって、
第1の上下駆動手段を有し、上記基板を水平方向及び上下方向に搬送する搬送手段と、
この搬送手段によって搬送位置決めされた上記基板の上記電子部品が貼着された側辺部の下面を支持するバックアップツールと、
上記第1の上下駆動手段によって上下方向に駆動され下降方向に駆動されたときに上記バックアップツールによって下面が支持された上記基板の側辺部に貼着された電子部品を加圧加熱して実装する圧着ツールと、
第2の上下駆動手段によって上下方向に駆動され上記圧着ツールによって上記電子部品を実装するときに上記基板の側辺部の上面と上記圧着ツールとの間に介在するシートを有するシート供給手段と、
上記圧着ツールによって上記電子部品を上記基板に実装した後、上記第1の上下駆動手段によって上記圧着ツールを上昇させてから、上記第2の上下駆動手段によって上記シート供給手段を上昇させるとともに、上記搬送手段によって上記基板を上昇させるときに、上記基板を上記シート供給手段よりも遅い速度で上昇させて上記電子部品の実装時に上記異方性導電部材の上記電子部品から露出した部分に貼着した上記シートを剥離させる制御手段と
を具備したことを特徴とする電子部品の実装装置。
An electronic component mounting apparatus for mounting an electronic component attached to an upper surface of a side portion of a substrate by an anisotropic conductive member,
Conveying means for conveying the substrate in a horizontal direction and a vertical direction, the first vertical driving means;
A backup tool that supports the lower surface of the side portion to which the electronic component of the substrate that has been transported and positioned by the transport means is attached;
Mounted by pressurizing and heating the electronic component attached to the side portion of the substrate whose lower surface is supported by the backup tool when driven vertically by the first vertical drive means and driven downward. A crimping tool to
Sheet feeding means having a sheet interposed between the upper surface of the side portion of the substrate and the crimping tool when the electronic component is mounted by the crimping tool driven in the vertical direction by the second vertical driving means;
After the electronic component is mounted on the substrate by the crimping tool, the crimping tool is lifted by the first vertical driving means, and then the sheet supply means is lifted by the second vertical driving means. When the substrate is raised by the conveying means, the substrate is raised at a speed slower than that of the sheet supply means, and is adhered to a portion exposed from the electronic component of the anisotropic conductive member when the electronic component is mounted. An electronic component mounting apparatus comprising: control means for peeling the sheet.
上記シート供給手段が着脱可能に装着される装着部が設けられ、
上記第2の上下駆動手段は上記装着部とともに上記シート供給手段を上下方向に駆動することを特徴とする請求項1記載の電子部品の実装装置。
A mounting portion on which the sheet supply means is detachably mounted is provided,
2. The electronic component mounting apparatus according to claim 1, wherein the second vertical driving means drives the sheet supply means in the vertical direction together with the mounting portion.
基板の側辺部の上面に異方性導電部材によって貼着された電子部品を実装する電子部品の実装方法であって、
上記基板の上記電子部品が貼着された側辺部の下面をバックアップツールで支持する工程と、
下面が支持された上記基板の側辺部の上面に貼着された電子部品を圧着ツールで加圧加熱して実装する工程と、
上記電子部品を上記基板の側辺部の上面に実装するときに上記基板の側辺部の上面と上記圧着ツールとの間にシートを介在させる工程と、
上記圧着ツールによって上記電子部品を上記基板に実装した後、上記圧着ツールを上昇させてから、上記シートを上昇させながら上記基板を上記シートよりも遅い速度で上昇させ、上記電子部品の実装時に上記異方性導電部材の上記電子部品から露出した部分に貼着した上記シートを剥離する工程と
を具備したことを特徴とする電子部品の実装方法。
An electronic component mounting method for mounting an electronic component attached to an upper surface of a side portion of a substrate by an anisotropic conductive member,
A step of supporting the lower surface of the side part to which the electronic component of the substrate is attached with a backup tool;
Mounting the electronic component attached to the upper surface of the side portion of the substrate on which the lower surface is supported by pressure heating with a crimping tool; and
Interposing a sheet between the upper surface of the side portion of the substrate and the crimping tool when mounting the electronic component on the upper surface of the side portion of the substrate;
After the electronic component is mounted on the substrate by the crimping tool, the crimping tool is raised, and then the substrate is raised at a slower speed than the sheet while raising the sheet, and when the electronic component is mounted, And a step of peeling off the sheet adhered to the portion of the anisotropic conductive member exposed from the electronic component.
JP2007272990A 2007-10-19 2007-10-19 Electronic component mounting apparatus and mounting method Active JP5324769B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007272990A JP5324769B2 (en) 2007-10-19 2007-10-19 Electronic component mounting apparatus and mounting method
KR1020107010530A KR101056100B1 (en) 2007-10-19 2008-09-30 Electronic component mounting device and mounting method
PCT/JP2008/067755 WO2009051004A1 (en) 2007-10-19 2008-09-30 Electronic component mounting apparatus and mounting method
CN2008801121275A CN101828256B (en) 2007-10-19 2008-09-30 Electronic component mounting apparatus and mounting method

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JP2003234373A (en) * 2002-02-06 2003-08-22 Shibaura Mechatronics Corp Apparatus and method for mounting electronic component, and apparatus and method for adhering adhesive material
JP2007165571A (en) * 2005-12-14 2007-06-28 Matsushita Electric Ind Co Ltd Electronic part mounting device

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JP3757868B2 (en) * 2002-01-17 2006-03-22 松下電器産業株式会社 Electronic component thermocompression bonding apparatus and thermocompression bonding method

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JP2007165571A (en) * 2005-12-14 2007-06-28 Matsushita Electric Ind Co Ltd Electronic part mounting device

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JP5324769B2 (en) 2013-10-23
CN101828256A (en) 2010-09-08

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