JP2009093107A5 - - Google Patents

Download PDF

Info

Publication number
JP2009093107A5
JP2009093107A5 JP2007266209A JP2007266209A JP2009093107A5 JP 2009093107 A5 JP2009093107 A5 JP 2009093107A5 JP 2007266209 A JP2007266209 A JP 2007266209A JP 2007266209 A JP2007266209 A JP 2007266209A JP 2009093107 A5 JP2009093107 A5 JP 2009093107A5
Authority
JP
Japan
Prior art keywords
movable plate
pair
plan
folded
shaft portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007266209A
Other languages
English (en)
Japanese (ja)
Other versions
JP5007648B2 (ja
JP2009093107A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007266209A priority Critical patent/JP5007648B2/ja
Priority claimed from JP2007266209A external-priority patent/JP5007648B2/ja
Publication of JP2009093107A publication Critical patent/JP2009093107A/ja
Publication of JP2009093107A5 publication Critical patent/JP2009093107A5/ja
Application granted granted Critical
Publication of JP5007648B2 publication Critical patent/JP5007648B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007266209A 2007-10-12 2007-10-12 アクチュエータ、光スキャナおよび画像形成装置 Expired - Fee Related JP5007648B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007266209A JP5007648B2 (ja) 2007-10-12 2007-10-12 アクチュエータ、光スキャナおよび画像形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007266209A JP5007648B2 (ja) 2007-10-12 2007-10-12 アクチュエータ、光スキャナおよび画像形成装置

Publications (3)

Publication Number Publication Date
JP2009093107A JP2009093107A (ja) 2009-04-30
JP2009093107A5 true JP2009093107A5 (enrdf_load_stackoverflow) 2010-10-28
JP5007648B2 JP5007648B2 (ja) 2012-08-22

Family

ID=40665125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007266209A Expired - Fee Related JP5007648B2 (ja) 2007-10-12 2007-10-12 アクチュエータ、光スキャナおよび画像形成装置

Country Status (1)

Country Link
JP (1) JP5007648B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5554895B2 (ja) * 2008-02-20 2014-07-23 キヤノン株式会社 揺動構造体、及び揺動構造体を用いた揺動体装置
JP5627279B2 (ja) * 2010-04-28 2014-11-19 パナソニック株式会社 振動発電デバイスおよびその製造方法
JP5846097B2 (ja) * 2012-10-29 2016-01-20 株式会社デンソー 光走査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0744848B2 (ja) * 1990-06-19 1995-05-15 松下電器産業株式会社 角度調節装置
JP2003181800A (ja) * 2001-12-19 2003-07-02 Hitachi Ltd 圧電型マイクロアクチュエータ及びこれを備えたマイクロミラー
JP3956933B2 (ja) * 2002-11-26 2007-08-08 ブラザー工業株式会社 光走査装置および画像形成装置
US7482730B2 (en) * 2004-02-09 2009-01-27 Microvision, Inc. High performance MEMS scanner

Similar Documents

Publication Publication Date Title
JP2008203497A5 (enrdf_load_stackoverflow)
CN101925845B (zh) 图像投影的振动反射镜
CN102162919B (zh) 光扫描仪以及图像形成装置
CN100395581C (zh) 致动器
JP5659672B2 (ja) 光スキャナー、ミラーチップ、光スキャナーの製造方法、および画像形成装置
JP2008304667A5 (enrdf_load_stackoverflow)
JP2008040353A (ja) 光学デバイス、光スキャナおよび画像形成装置
JP2012213271A5 (enrdf_load_stackoverflow)
JP2009118217A5 (enrdf_load_stackoverflow)
JP2009093107A5 (enrdf_load_stackoverflow)
MXPA04009942A (es) Motor electrico.
TWI290239B (en) Electromagnetic scanning micro-mirror and optical scanning device using the same
JP2013231903A5 (enrdf_load_stackoverflow)
TWI569570B (zh) 連動於第一轉動構件之壓電發電機構及轉子系統
JP2008170902A5 (enrdf_load_stackoverflow)
JP2007263680A5 (enrdf_load_stackoverflow)
JP2012042493A5 (enrdf_load_stackoverflow)
JP2009042322A5 (enrdf_load_stackoverflow)
JP2009122304A5 (enrdf_load_stackoverflow)
JP2004301865A (ja) アクチュエーター
JP4581847B2 (ja) アクチュエータ
JP5803813B2 (ja) 偏向器
JP2013101198A5 (enrdf_load_stackoverflow)
JP2012128307A (ja) 光スキャナー、光スキャナーの製造方法、および画像形成装置
JP2008046511A5 (enrdf_load_stackoverflow)