JP2009093107A5 - - Google Patents

Download PDF

Info

Publication number
JP2009093107A5
JP2009093107A5 JP2007266209A JP2007266209A JP2009093107A5 JP 2009093107 A5 JP2009093107 A5 JP 2009093107A5 JP 2007266209 A JP2007266209 A JP 2007266209A JP 2007266209 A JP2007266209 A JP 2007266209A JP 2009093107 A5 JP2009093107 A5 JP 2009093107A5
Authority
JP
Japan
Prior art keywords
movable plate
pair
plan
folded
shaft portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007266209A
Other languages
Japanese (ja)
Other versions
JP2009093107A (en
JP5007648B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2007266209A priority Critical patent/JP5007648B2/en
Priority claimed from JP2007266209A external-priority patent/JP5007648B2/en
Publication of JP2009093107A publication Critical patent/JP2009093107A/en
Publication of JP2009093107A5 publication Critical patent/JP2009093107A5/ja
Application granted granted Critical
Publication of JP5007648B2 publication Critical patent/JP5007648B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Claims (12)

可動板と、
前記可動板の平面視にて、前記可動板を介して互いに対向して設けられ、前記可動板を回動可能に支持する１対の支持部と、
前記各支持部と前記可動板とを連結する１対の連結部と、
前記可動板を回動させる駆動手段とを有し、
前記各連結部は、前記可動板の平面視にて、前記支持部から前記可動板と反対側へ向けて延出する軸部と、前記支持部と反対側に位置する該軸部の端部から前記可動板側へ向けて折り返して形成され、前記軸部の端部と前記可動板の回動中心軸から離間した離間部とを連結する折り返し部とを有し、
前記折り返し部は、前記可動板の平面視にて、前記軸部の端部から前記可動板の回転中心軸に対して互いに反対方向に向けて２つに分岐し、該分岐した先端のそれぞれが、前記可動板へ向けて折り返されて形成され、前記軸部の先端と前記可動板の回動中心軸から互いに反対方向へ離間した１対の前記離間部のそれぞれとを連結することを特徴とするアクチュエータ。 A movable plate,
In a plan view of the movable plate, disposed opposite to each other through the movable plate, a support portion of a pair of supporting the movable plate rotatably,
A pair of connecting portions for connecting each of the support portions and the movable plate;
Driving means for rotating the movable plate;
Each connecting portion includes a shaft portion extending from the support portion toward the opposite side of the movable plate in a plan view of the movable plate, and an end portion of the shaft portion located on the opposite side of the support portion. the formed to return folded toward the movable plate side, possess a folded portion which connects the spaced apart portion from the end portion and the movable plate rotational axis of the shaft portion from
The folded portion is bifurcated in two directions from the end portion of the shaft portion in opposite directions to the rotation center axis of the movable plate in plan view of the movable plate, and each of the branched tips is The tip of the shaft portion is formed to be folded back toward the movable plate, and each of the pair of spaced portions spaced apart from each other in the opposite direction from the rotation center axis of the movable plate is connected. Actuator to do. 前記１対の離間部は、前記可動板の平面視にて、前記回動中心軸に対して対称的に位置している請求項１に記載のアクチュエータ。 The first separating of the pair in the plan view of the movable plate, an actuator according to claim 1 which are located symmetrically with respect to the rotational axis. 前記１対の離間部は、それぞれ、前記可動板の前記回動中心軸から遠位に位置している請求項１または２に記載のアクチュエータ。 The first separating unit pair, respectively, actuator according to claim 1 or 2 is positioned distally from the central axis of rotation of the movable plate. 前記折り返し部は、前記回動中心軸を介して対向するよう設けられた１対の長尺部を有し、該１対の長尺部は、それぞれ、前記回動中心軸と略平行な方向に沿って設けられている請求項１ないし３のいずれかに記載のアクチュエータ。 The folded portion has a pair of long portions provided so as to face each other via the rotation center axis, and each of the pair of long portions is in a direction substantially parallel to the rotation center axis. The actuator according to any one of claims 1 to 3 , wherein the actuator is provided along the line. 前記折り返し部は、前記１対の長尺部の前記可動板と反対側の端部同士を連結する連結部を有し、該接続部は、前記可動板の平面視にて、前記回動中心軸と直交する方向に延在している請求項４に記載のアクチュエータ。 The folded portion has a connecting portion that connects ends of the pair of long portions opposite to the movable plate, and the connecting portion is the center of rotation in a plan view of the movable plate. The actuator according to claim 4 , which extends in a direction perpendicular to the axis. 前記各連結部の前記軸部は、互いに同軸的に設けられている請求項１ないし５のいずれかに記載のアクチュエータ。 Wherein the shaft portion of each connecting portion is an actuator according to any one of claims 1 to 5 are provided coaxially with each other. 前記駆動手段は、前記１対の折り返し部に沿って設けられたコイルと、前記可動板の平面視にて、前記回動中心軸に対して直交する向きの磁界を発生する磁界発生部とを備え、前記コイルに、周期的に変化する電圧を印加することにより、前記１対の軸部を捩り変形させつつ前記可動板を回動させるよう構成されている請求項１ないし６のいずれかに記載のアクチュエータ。 The driving means includes a coil provided along the pair of folded portions, and a magnetic field generating unit that generates a magnetic field in a direction orthogonal to the rotation center axis in a plan view of the movable plate. provided, the coil, by applying a cyclically varying voltage, to any one of claims 1 is configured to rotate the movable plate the shaft portion of the pair while the torsional deformation 6 The actuator described. 前記磁界発生部は、前記可動板の平面視にて、前記回動中心軸に直交する方向に前記可動板を介して対向配置された１対の永久磁石を有し、前記１対の永久磁石は、対向する面側同士が互いに異なる極性となっている請求項７に記載のアクチュエータ。 The magnetic field generation unit includes a pair of permanent magnets arranged to face each other via the movable plate in a direction orthogonal to the rotation center axis in a plan view of the movable plate, and the pair of permanent magnets The actuator according to claim 7 , wherein the opposing surface sides have different polarities. 前記駆動手段は、前記可動板および前記折り返し部に対して対向配置された電極を有し、該電極への通電により前記電極と前記可動板との間に発生する静電引力を利用して、前記可動板を回動させるよう構成されている請求項１ないし６のいずれかに記載のアクチュエータ。 The driving means has an electrode disposed opposite to the movable plate and the folded portion, and utilizes electrostatic attraction generated between the electrode and the movable plate by energizing the electrode, the actuator according to any one of claims 1 to 6 is configured to rotate the movable plate. 前記可動板の一方の板面には、光反射性を有する光反射部が設けられている請求項１ないし１０のいずれかに記載のアクチュエータ。 The actuator according to any one of claims 1 to 10 , wherein a light reflecting portion having light reflectivity is provided on one plate surface of the movable plate. 光反射性を有する光反射部を備える可動板と、
前記可動板の平面視にて、前記可動板を介して互いに対向して設けられ、前記可動板を回動可能に支持する１対の支持部と、
前記各支持部と前記可動板とを連結する１対の連結部と、
前記可動板を回動させる駆動手段とを有し、
前記各連結部は、前記可動板の平面視にて、前記支持部から前記可動板と反対側へ向けて延出する軸部と、前記支持部と反対側に位置する該軸部の端部から前記可動板へ向けて折り返して形成され、前記軸部の端部と前記可動板の回動中心軸から離間した離間部とを連結する折り返し部とを有し、
前記折り返し部は、前記可動板の平面視にて、前記軸部の端部から前記可動板の回転中心軸に対して互いに反対方向に向けて２つに分岐し、該分岐した先端のそれぞれが、前記可動板へ向けて折り返されて形成され、前記軸部の先端と前記可動板の回動中心軸から互いに反対方向へ離間した１対の前記離間部のそれぞれとを連結することを特徴とする光スキャナ。 A movable plate including a light reflecting portion having light reflectivity;
In a plan view of the movable plate, disposed opposite to each other through the movable plate, a support portion of a pair of supporting the movable plate rotatably,
A pair of connecting portions for connecting each of the support portions and the movable plate;
Driving means for rotating the movable plate;
Each connecting portion includes a shaft portion extending from the support portion toward the opposite side of the movable plate in a plan view of the movable plate, and an end portion of the shaft portion located on the opposite side of the support portion. the formed to return folded toward the movable plate, possess a folded portion which connects the spaced apart portion from the pivoting central axis of the end portion and the movable plate of the shaft portion from
The folded portion is bifurcated in two directions from the end portion of the shaft portion in opposite directions to the rotation center axis of the movable plate in plan view of the movable plate, and each of the branched tips is The tip of the shaft portion is formed to be folded back toward the movable plate, and each of the pair of spaced portions spaced apart from each other in the opposite direction from the rotation center axis of the movable plate is connected. Optical scanner. 光反射性を有する光反射部を備える可動板と、
前記可動板の平面視にて、前記可動板を介して互いに対向して設けられ、前記可動板を回動可能に支持する１対の支持部と、
前記各支持部と前記可動板とを連結する１対の連結部と、
前記可動板を回動させる駆動手段とを有し、
前記各連結部は、前記可動板の平面視にて、前記支持部から前記可動板と反対側へ向けて延出する軸部と、前記支持部と反対側に位置する該軸部の端部から前記可動板へ向けて折り返して形成され、前記軸部の端部と前記可動板の回動中心軸から離間した離間部とを連結する折り返し部とを有し、
前記折り返し部は、前記可動板の平面視にて、前記軸部の端部から前記可動板の回転中心軸に対して互いに反対方向に向けて２つに分岐し、該分岐した先端のそれぞれが、前記可動板へ向けて折り返されて形成され、前記軸部の先端と前記可動板の回動中心軸から互いに反対方向へ離間した１対の前記離間部のそれぞれとを連結する光スキャナを備えることを特徴とする画像形成装置。 A movable plate including a light reflecting portion having light reflectivity;
In a plan view of the movable plate, disposed opposite to each other through the movable plate, a support portion of a pair of supporting the movable plate rotatably,
A pair of connecting portions for connecting each of the support portions and the movable plate;
Driving means for rotating the movable plate;
Each connecting portion includes a shaft portion extending from the support portion toward the opposite side of the movable plate in a plan view of the movable plate, and an end portion of the shaft portion located on the opposite side of the support portion. the formed to return folded toward the movable plate, possess a folded portion which connects the spaced apart portion from the pivoting central axis of the end portion and the movable plate of the shaft portion from
The folded portion is bifurcated in two directions from the end portion of the shaft portion in opposite directions to the rotation center axis of the movable plate in plan view of the movable plate, and each of the branched tips is And an optical scanner which is formed to be folded back toward the movable plate and connects the tip of the shaft portion and each of the pair of the spaced portions spaced apart from each other in the opposite directions from the rotation center axis of the movable plate. An image forming apparatus.
JP2007266209A 2007-10-12 2007-10-12 Actuator, optical scanner and image forming apparatus Expired - Fee Related JP5007648B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007266209A JP5007648B2 (en) 2007-10-12 2007-10-12 Actuator, optical scanner and image forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007266209A JP5007648B2 (en) 2007-10-12 2007-10-12 Actuator, optical scanner and image forming apparatus

Publications (3)

Publication Number Publication Date
JP2009093107A JP2009093107A (en) 2009-04-30
JP2009093107A5 true JP2009093107A5 (en) 2010-10-28
JP5007648B2 JP5007648B2 (en) 2012-08-22

Family

ID=40665125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007266209A Expired - Fee Related JP5007648B2 (en) 2007-10-12 2007-10-12 Actuator, optical scanner and image forming apparatus

Country Status (1)

Country Link
JP (1) JP5007648B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5554895B2 (en) * 2008-02-20 2014-07-23 キヤノン株式会社 Oscillator structure and oscillator device using the oscillator structure
JP5627279B2 (en) * 2010-04-28 2014-11-19 パナソニック株式会社 Vibration power generation device and manufacturing method thereof
JP5846097B2 (en) * 2012-10-29 2016-01-20 株式会社デンソー Optical scanning device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0744848B2 (en) * 1990-06-19 1995-05-15 松下電器産業株式会社 Angle adjustment device
JP2003181800A (en) * 2001-12-19 2003-07-02 Hitachi Ltd Piezoelectric micro-actuator and micro-mirror equipped with the same
JP3956933B2 (en) * 2002-11-26 2007-08-08 ブラザー工業株式会社 Optical scanning apparatus and image forming apparatus
US7482730B2 (en) * 2004-02-09 2009-01-27 Microvision, Inc. High performance MEMS scanner

Similar Documents

Publication Publication Date Title
JP2008203497A5 (en)
CN101925845B (en) Oscillating mirror for image projection
JP2008304667A5 (en)
JP2012213271A5 (en)
CN103033931A (en) Optical scanning device
JP2009118217A5 (en)
JP2009093107A5 (en)
JP2012078738A (en) Optical scanner, mirror chip, method for manufacturing optical scanner, and image formation apparatus
TWI569570B (en) Piezoelectric electrically generator activated by a first rotating member and rotor system therewith
JP2013231903A5 (en)
JP2012123140A5 (en)
TWI290239B (en) Electromagnetic scanning micro-mirror and optical scanning device using the same
JP2009077595A5 (en)
CN108351509A (en) Micro-mechanical component and method for adjusting adjustable component
JP2008170902A5 (en)
JP2006330399A (en) Actuator
JP2007263680A5 (en)
JP2012042493A5 (en)
JP2009042322A5 (en)
JP2009122304A5 (en)
JP4581847B2 (en) Actuator
JP2006167860A (en) Actuator
JP2013101199A5 (en)
JP2012128307A (en) Optical scanner, manufacturing method of optical scanner and image forming device
JP2009093107A (en) Actuator, optical scanner, and image forming device