JP2009092430A5 - - Google Patents
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- JP2009092430A5 JP2009092430A5 JP2007261220A JP2007261220A JP2009092430A5 JP 2009092430 A5 JP2009092430 A5 JP 2009092430A5 JP 2007261220 A JP2007261220 A JP 2007261220A JP 2007261220 A JP2007261220 A JP 2007261220A JP 2009092430 A5 JP2009092430 A5 JP 2009092430A5
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- JP
- Japan
- Prior art keywords
- axis direction
- pair
- vibrator
- weights
- extending
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Claims (4)
前記振動子本体の上に形成されて前記振動子本体の角速度を検出する圧電素子と、
前記振動子本体のＸ軸方向の両端に配置されて、前記Ｘ軸方向と前記Ｙ軸方向とに広がる一対の板状の重錘と、
前記振動子本体が３次元方向に動くように、前記一対の重錘のそれぞれの前記Ｙ軸方向の両端部をベース部材に支持する４つのバネ性を有するバネ状部材とを有する角速度センサ。 An elongated vibrator body extending in the X-axis direction of the X-axis direction, the Y-axis direction and the Z-axis direction orthogonal to each other;
A piezoelectric element for detecting the angular velocity of the vibrator body is formed on the vibrator body,
Are arranged in the X-axis direction of both ends of the vibrator body, a pair of plate-shaped weight spread and the Y-axis direction and the X-axis direction,
An angular velocity sensor having four spring-like members having spring properties that support both ends of the pair of weights in the Y-axis direction on a base member so that the vibrator main body moves in a three-dimensional direction.
前記バネ状部材の前記Ｘ軸方向の両端の延伸部が前記ベース部材に接続されており、
前記支持延伸部の他端が前記重錘に接続されている請求項１に記載の角速度センサ。 The spring-like member includes four or more extending portions extending in the Y-axis direction, a connection portion extending in the X-axis direction and connecting an end portion of the extending portion, and the X-axis so as to form a meandering pattern. One end is connected to the connection part located in the center of the direction and has a support extension part extending in parallel with the extension part,
Extending portions at both ends in the X-axis direction of the spring-like member are connected to the base member,
The angular velocity sensor according to claim 1, wherein the other end of the support extending portion is connected to the weight.
前記ベース部材は、前記振動子本体及び前記一対の重錘が必要以上に前記Ｘ軸方向及び前記Ｙ軸方向に動いたときに、前記振動子本体及び前記一対の重錘と当接して、前記振動子本体及び前記一対の重錘の運動を停止する寸法及び形状を有している請求項３に記載の角速度センサ。 The base member has a frame shape surrounding the vibrator main body, the pair of weights, and the four spring-like members,
The base member contacts the vibrator body and the pair of weights when the vibrator body and the pair of weights move more than necessary in the X-axis direction and the Y-axis direction, The angular velocity sensor according to claim 3, wherein the angular velocity sensor has a size and a shape for stopping movement of the vibrator body and the pair of weights.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007261220A JP5022164B2 (en) | 2007-10-04 | 2007-10-04 | Angular velocity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007261220A JP5022164B2 (en) | 2007-10-04 | 2007-10-04 | Angular velocity sensor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009092430A JP2009092430A (en) | 2009-04-30 |
| JP2009092430A5 true JP2009092430A5 (en) | 2010-06-03 |
| JP5022164B2 JP5022164B2 (en) | 2012-09-12 |
Family
ID=40664566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007261220A Expired - Fee Related JP5022164B2 (en) | 2007-10-04 | 2007-10-04 | Angular velocity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5022164B2 (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05240874A (en) * | 1991-12-06 | 1993-09-21 | Canon Inc | Angular-velocity sensor |
| JPH07131280A (en) * | 1993-10-28 | 1995-05-19 | Toyota Motor Corp | Support structure for vibrator |
| JPH0823258A (en) * | 1994-07-06 | 1996-01-23 | Murata Mfg Co Ltd | Vibrator and vibration gyro |
| JPH10213440A (en) * | 1997-01-29 | 1998-08-11 | Japan Aviation Electron Ind Ltd | Method for manufacturing vibration gyro and vibration gyro manufactured by the method |
| JP3579015B2 (en) * | 2000-10-10 | 2004-10-20 | 日本電信電話株式会社 | Micro mirror device and manufacturing method thereof |
| US6935759B1 (en) * | 2002-02-19 | 2005-08-30 | Glimmerglass Networks, Inc. | Folded longitudinal torsional hinge for gimbaled MEMS mirror |
-
2007
- 2007-10-04 JP JP2007261220A patent/JP5022164B2/en not_active Expired - Fee Related
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