JPH07131280A - Support structure for vibrator - Google Patents

Abstract

PURPOSE:To maintain the vibration of the vibrator in its initial state 83 it is. CONSTITUTION:The prismatic vibrator 20 is supported on a fixed frame body 35 with opposite support members 41 and 42 and opposite support members 33 and 34. Those respective support members 33 and 34 face each other at nodes 20a and 20b of vibration when the vibrator 20 vibrates in primary vibration mode, and also have their one-terminal sides coupled with the vibrator 20 to support it. The support members 33 and 34 are formed in the same L outward shape which is bent at one place on the X-Y plate in the figure. Then the opposite support members are arranged symmetrically about corresponding nodes 20a and 20b of the vibrator 20 and further in point symmetry about the center of the center 20c of gravity of the vibrator 20.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator support structure in which a support member supports a vibrator which has a point-symmetrical outer shape around a center of gravity and vibrates in a primary vibration mode.

[0002]

2. Description of the Related Art Conventionally, a rod-shaped vibrator is well known as a vibrator of this type. Since the rod-shaped vibrator has a simple shape, it can be easily manufactured from a plate material or can be easily manufactured as a substrate-shaped one in which the vibrator is supported by a fixed frame. It is widely used in vibration gyros that detect the yaw rate that sometimes occurs. On the other hand, the primary vibration mode is adopted as the vibration mode of the vibrator from the viewpoints of ensuring the continuous vibration of the vibrator and analyzing the vibration state of the vibrator such as detection of yaw rate.

In supporting the rod-shaped vibrator, if the vibrator is supported as follows,
It is theoretically known to vibrate efficiently in the following vibration modes. That is, as shown in FIG. 12, the rod-shaped vibrator 2
0 and supporting members 21A and 22 for supporting them
It is considered that the following formula is established between B and the binding position. L1 = L2 = 0.224L0 Here, L0 is the total length of the vibrator 20, and L1 and L2 are the distances from the free end of the vibrator 20 to the center of the joint between each supporting member and the vibrator 20.

If the above formula is satisfied, the vibrator 20 is supported by the vibration node of the first vibration mode and vibrates in the first vibration mode, and the vibration frequency is the total length L of the vibrator 20.
Determined by 0, longitudinal elastic modulus, density, etc.

The vibrator 20 is supported according to the formula
When vibrating in the first vibration mode, each support member 21
In the theoretical model in which A and 22B are in point contact with the vibrator 20, each node of vibration does not move, and the center of gravity of the vibrator 20 does not change its position due to vibration. For example, when the vibrator 20 is vibrated so as to bend vertically, as shown in FIG. 13 which is a lateral view of the vibrator 20, the support member 21A, which is each node of vibration, is used.
The centers A and B of the joint portions of 22 and 22B do not move. If the vibration node is the fixed point, the vibration energy does not leak to the outside, and the vibrator 20 continues the vibration efficiently with the applied vibration energy.

However, while the support members 21A and 22B are rigid bodies, they are not in point contact with the vibrator 20 at the joint portions centers A and B, and each support member has a joint end face including this center. Are in surface contact over the sectional area of.
Therefore, vibration energy leaks to the outside through each support member, and this vibration energy leakage appears as a so-called damping phenomenon in which each node of vibration vibrates without becoming a fixed point, or the resonance of the vibration system is sharp. The value of Q, which is a quantity that represents, is reduced, and the vibration of the vibrator 20 is hindered.

As a technique for eliminating such a problem as much as possible, there is JP-A-61-114123.
In this publication, as shown in FIG. 14, a support structure is proposed in which the vibrator 20 is supported at its nodes so as to face each other by support members 22A and 23B bent in an L shape. In this way, the support member 22 in which the vibrator 20 is bent in an L shape
By supporting with A and 23B, each supporting member can be bent around the bent portion, so that the vibrator 20 is flexibly supported with respect to the fixing member 24, and leakage of vibration energy is avoided. Therefore, the damping phenomenon can be suppressed by the internal energy loss due to the bending of the support member.
Also, each support member can be made thin, or as shown in FIG.
The oscillator 20 is supported more flexibly by increasing the distance L3 from the center of the joint between each support member and the vibrator 20 to the joint between each support member and the fixed member 24 to suppress the damping phenomenon and to reduce the Q factor.
The value of is being improved.

[0008]

However, as shown in FIG.
In the conventional support structure for a vibrator shown in FIG. 2, if each support member is thinned to reduce its cross-sectional area or the above-mentioned distance L3 for each support member is lengthened, the following new problems occur. Has been pointed out.

Since each supporting member is formed from the plate material together with the vibrator 20 by subjecting the plate material to various processes, the thickness is naturally limited. Specifically, when the metal plate is subjected to a cutting process, an electric discharge process, or the like, or when the crystal plate is subjected to an etching process or the like, the thinness of the support member is determined depending on the process adopted. Therefore, the support member can be thinned only up to a certain value.

Further, even when the support members are made as thin as possible to be constant, the above-mentioned distance L3 for each support member must be made as long as possible. When the distance L3 is increased in this way, as shown in FIG. 15, the range in which the support member is parallel to the vibrator 20 is increased. Then, as shown in the figure, the support member 23B has a long rod-like vibrating portion similar to the vibrator 20, and the natural frequency of the support member 23B approximates the natural frequency of the vibrator 20. come. In addition, although the supporting member is supported by the connecting portion with the fixing member 24 and the connecting portion with the vibrator 20, the rod-shaped vibrating portion becomes long, which is small in combination with the thin portion. Vibration as a cantilever easily occurs. For this reason, the vibration of the vibrator 20 leaks to the support member 23B via the connecting portion between the support member 23B and the vibrator 20, and the support member 23B easily causes vibration as a cantilever. Therefore, when the support member 23B vibrates in this way, the center D of the coupling portion with the vibrator 20 eventually vibrates. The above-mentioned phenomenon is similarly observed in other supporting members.

Further, as shown in FIG. 15, a supporting member 23
Since B is bent, a direction X crossing the vibrator 20 and reaching the support member at the center D of the joint with the vibrator 20.
There is a difference between the rigidity along + and the rigidity along the opposite direction X-. That is, the support member 23B has different spring constants in the directions X + and X- described above. The longitudinal direction Y + of the vibrator 20 and the opposite direction Y- also have different spring constants. Also, Z
With respect to the rotation around the axis, the same difference occurs between the clockwise rotation and the counterclockwise rotation.

When the vibrator 20 (see FIG. 14) supported by the supporting members 22A and 23B is vibrated as shown in FIG. 13, the vibrator is provided at the joint between each supporting member and the vibrator 20. A moment around the center of gravity due to the vibration of 20 acts. Therefore, for each support member, the directions X +, X
Since the spring constants are different in the − and directions Y + and Y−, the balance of the forces at the centers of the joints is lost and the centers of the joints move, causing leakage of vibration energy of the vibrator 20 and damping vibration. . As a result, the center of gravity is moved due to damping vibration or vibration in a direction different from the vibration direction at the initial stage of vibration is observed in the vibrator 20, and the vibrator 20 cannot be vibrated stably. Further, the leakage of the vibration energy causes the Q value to decrease.

The present invention has been made to solve the above problems, and an object thereof is to maintain the vibration of a vibrator in its initial state.

[0014]

Means for Solving the Problems In order to achieve the above object, the means adopted by the present invention is to support a vibrator which has a point-symmetrical outer shape with a center of gravity as a center and which vibrates in a first-order vibration mode, facing each other. A support structure for a vibrator, which is supported by a fixed member at each node of vibration of the primary vibration mode by a member, wherein the support member includes a connecting portion with the vibrator and a connecting portion with the fixing member. The gist of the present invention is to have an outer shape having at least one bent portion between the two, and to arrange the respective support members facing each other at the node of the vibration in a point-symmetrical manner around the node.

[0015]

In the vibrator support structure having the above-described structure, the support member for supporting the vibrator on the fixing member has an outer shape having a bent portion and can be bent around the bent portion. And
The support member flexibly supports the vibrator with respect to the fixed member, and it is possible to avoid leakage of vibration energy. Moreover, since the supporting members facing each other in the vibration node of the vibrator are made point-symmetrical with respect to the node, the rigidity in each direction of one supporting member in the node is different in each direction of the other supporting member. It comes to be expressed symmetrically with rigidity.

Therefore, even if each support member has a different rigidity in each direction and, in turn, a different spring constant, the support members that are point-symmetrical and face each other at each node have opposite directions. Forces of the same magnitude are exerted on each other. Therefore, even if the vibrator vibrates in the first-order vibration mode and a moment around the center of gravity caused by the vibration acts on each support member, at each node, it is based on the moment by the opposing point-symmetric support members. The forces are canceled out, and the forces in each node are balanced, so that the vibration of the portion that should originally be the node of the oscillator is suppressed.

Further, since the forces are balanced in each node as described above, it is not necessary to provide the support member with a portion parallel to the vibrator over a long range.

In the above-described vibrator support structure, if each support member point-symmetrical about the vibration node is made point-symmetrical about the center of gravity of the vibrator, it is supported by each node, so that it can be vibrated during vibration. The force acting on the center of gravity of the oscillator can be balanced at this center of gravity. Therefore, in combination with the balance of forces in each section, the balance of forces as a whole is not lost.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, preferred embodiments of a vibrator supporting structure according to the present invention will be described with reference to the drawings. FIG. 1 is a schematic perspective view showing a support structure for a vibrator according to the first embodiment.

As shown in the figure, the prism-shaped vibrator (rod-shaped vibrator) 20 is supported by a fixed frame 35 by support members 33, 34 which face support members 31, 32 which face each other. Each of these supporting members has nodes 20a and 20b of vibration when the vibrator 20 vibrates in the first vibration mode.
At, each of them is opposed to each other and one end thereof is coupled to the vibrator 20 to support it. The other end of each support member is connected to the fixed frame body 35.

Each support member has the same shape, and the vibrator 2
The X-axis is an axis orthogonal to the side surface of 0 and the Y-axis is an axis along the axis of the vibrator 20, and the external shape is an L-shape bent at one place in the XY plane. The support member 31 and the support member 32 facing each other at the node 20a of the vibrator 20 are arranged in point symmetry with the node 20a as the center, and are connected to the vibrator 20 and the fixed frame body 35. Similarly, the support member 33 and the support member 34 facing each other at the node 20b of the vibrator 20 are also arranged point-symmetrically around the node 20b and are coupled to the vibrator 20 and the fixed frame body 35.

The above-mentioned vibrator 20, each supporting member and the fixed frame 35 are made of a single plate material, for example, a light metal plate material such as duralumin, a crystal plate material such as quartz or semiconductor, or a glass plate or a ceramic plate such as alumina. Is formed by subjecting it to appropriate processing. For example, if it is formed from a light metal plate material, it is subjected to electrical discharge machining or the like if it is formed from a light metal plate material, and if it is formed from a crystalline plate material, it is subjected to etching processing, etc. The child 20 and the like are formed.

In the support structure of the first embodiment,
A crystal plate material (thickness: 0.3 mm) was subjected to etching to form the vibrator 20 and the like. Therefore, the thickness of the vibrator 20 and each supporting member is equal to the thickness of the crystal plate material (0.3 m
equal to m). In this case, the vibrator 20 (thickness: 0.3 m
m) has a width w0 of 0.25 mm and a length L0 of 10 mm. Then, from the free end of the vibrator 20, to the supporting members 31, 3
The distance L1 to the center of the joint between 2 and the vibrator 20 and the distance L2 to the center of the joint between the support members 33 and 34 and the vibrator 20 are 2.24 mm (10 mm × 0.224). The width w of each support member is 0.1 mm.

In order to vibrate the vibrator 20 in the first vibration mode, a positive electrode and a negative electrode are provided on each of two opposing surfaces of the vibrator 20 side by side along the axis of the vibrator 20. The AC voltage having the vibration frequency of the first vibration mode determined with respect to the above may be applied to the electrode.
For example, when vibrating along the Z-axis direction orthogonal to the XY plane, the electrodes may be provided on the upper and lower surfaces of the vibrator 20 and an AC voltage may be applied to excite the vibrator 20. It is also possible to independently form metal thin films on the two opposing surfaces of the vibrator 20 and excite the vibrator 20 by electrostatic force.

The fixed frame 35 is laminated and fixed on a base material (not shown), and even if the vibrator 20 vibrates as described above, it does not affect the vibration.

In the vibrator support structure according to the first embodiment described above, the support members 31 to 34 for supporting the vibrator 20 on the fixed frame 35 are bent into an L-shaped external shape having a bent portion. Allows bending around the part. Then, the vibrator 20 is flexibly supported with respect to the fixed member by the support members 31 to 34 which are bendable in this way.
Therefore, it is possible to avoid the leakage of vibration energy due to the bending of the support member.

Moreover, each node 20a of the vibration of the vibrator 20
Support members that are point-symmetrical with each other in 20b (support member 31 and support member 32, support member 33 and support member 34)
Is point-symmetrical about each of the nodes 20a and 20b. Therefore, for example, the rigidity of the support member 31 at the joint 20a along X + in the figure and the opposite direction X-
However, the rigidity of the support member 31 along X + in the figure is expressed by the same size in the direction of X- in the figure by the point-symmetrical support member 32 facing the support member 31. To do. Further, the rigidity of the support member 31 along X- in the figure is expressed by the support member 32 in the same size in the X + direction in the figure. The rigidity of the support member 31 at the node 20a along Y + in the drawing and the opposite direction Y-
With respect to the rigidity along the direction, the direction is reversed by the support member 32, and the same magnitude is exhibited. The same applies to the rigidity around the Z axis. Therefore, each node 20a, 20b
In the case where the support members are opposed to each other and have point symmetry, forces having opposite directions but the same magnitude are exerted on the vibrator 20.

Therefore, even if the vibrator 20 vibrates in the first vibration mode and the moment about the center of gravity caused by the vibration acts on each support member, the support members facing each other at each node 20a, 20b. Causes the forces based on that moment to cancel each other out, balancing the forces at each node. As a result, according to the support structure of the vibrator in the first embodiment, it is possible to avoid the leakage of the vibration energy applied to vibrate the vibrator 20 to the outside. It can be maintained stable.

Next, the support structure of the vibrator according to the second embodiment will be described. In the description, the points different from the support structure in the first embodiment will be described in detail. Further, for the same members as those in the first embodiment, if the functions are the same, the names and reference numerals used in the description of the first embodiment will be used.

As shown in FIG. 2, which is a schematic perspective view showing the support structure of the vibrator in the second embodiment, the fixed frame member 35 is used.
The vibrator 20 supported by the
2 is supported at the vibration node 20a, and is supported at the vibration node 20b by the opposing support members 33 and 34.

Each support member has the same shape, and is formed in an outer shape bent in an L shape in the XY plane in the figure as in the first embodiment. And the oscillator 20
Support member 41 and support member 4 facing each other at node 20a of
2 is arranged symmetrically about the node 20a, and
0 and the fixed frame 35. The same applies to the support member 33 and the support member 34 facing each other at the node 20b of the vibrator 20. The dimensions of the vibrator 20 and each support member, the vibration method of the vibrator 20
The same as in the embodiment of FIG.

In the above-described vibrator support structure according to the second embodiment, each support member has a bendable L-shaped outer shape, and support members (supporting members) facing each other at each vibration node of the vibrator 20 are supported. Member 41, support member 42, support member 33
And the supporting member 34) are point-symmetrical about their respective nodes, and each supporting member is point-symmetrical about the center of gravity 20c of the vibrator 20. Therefore, in the support structure of the second embodiment described above, the nodes 20a, 2 of the vibration of the vibrator 20 are
The force is balanced not only at 0b but also at its center of gravity 20c. As a result, according to the vibrator support structure of the second embodiment, the vibration of the vibrator 20 can be maintained more stably in its initial state.

The vibrator 20 supported by the support structure of the second embodiment is vibrated in the same manner as in the first embodiment,
As a result of observing the vibration state of the vibrator 20 thereafter, the vibration of the vibrator 20 could be stably maintained in its initial state even by the support structure of the second embodiment.

Next, a modified example of the vibrator support structure in the second embodiment will be described. In this modification, as shown in FIG. 3, which is a schematic perspective view showing the support structure, the vibrator 20 supported by the fixed frame body 35 is supported at the vibration node 20a by the opposing support members 51 and 52. , The node 2 of vibration by the supporting members 53 and 54 facing each other.
0b respectively supported.

Each supporting member has the same shape and is formed in a Z-shaped outer shape bent at two points in the XY plane in the drawing. The support member 51 and the support member 52 facing each other at the node 20a of the vibrator 20 are the nodes 2
They are arranged point-symmetrically with respect to 0 a and are coupled to the vibrator 20 and the fixed frame body 35. Also, the node 20 of the oscillator 20
The same applies to the support member 53 and the support member 54 facing each other in b. The dimensions of the vibrator 20 and each supporting member, the vibration method of the vibrator 20, and the like are the same as those in the first embodiment.

In the vibrator support structure according to the above-described modification, each support member has a Z-shaped outer shape that can be bent at two points, and support members (supporting members) facing each other at each node of vibration of the vibrator 20 are supported. Member 51, support member 52, support member 5
3 and the support member 54) were made point-symmetrical about their respective nodes, and each support member was made point-symmetrical about the center of gravity 20c of the vibrator 20. Therefore, even in the support structure of this modified example, the force is balanced not only at the nodes 20a and 20b of the vibration of the vibrator 20 but also at the center of gravity 20c thereof. As a result, according to the support structure of the modification of the second embodiment, the vibration of the vibrator 20 can be more stably maintained in its initial state. Moreover, since each support member is formed into a Z shape that can be bent at two places, the vibrator 20 can be more flexibly supported by the fixed frame body 35, so that the vibration of the vibrator 20 can be maintained more stably in the initial state. can do.

Next, a second modification of the vibrator support structure in the second embodiment will be described. In this modified example, as shown in FIG. 4, which is a schematic perspective view showing the support structure, the vibrator 20 supported by the fixed frame body 35 is
It is supported at the vibration node 20a by the opposing support members 61 and 62, and is supported at the vibration node 20b by the opposing support members 63 and 64, respectively.

Each support member has the same shape and is formed in an outer shape having a U-shaped portion that is bent at four points in the XY plane in the drawing. Then, node 2 of the oscillator 20
The support member 61 and the support member 62 facing each other at 0a are arranged point-symmetrically about the node 20a and are coupled to the vibrator 20 and the fixed frame body 35. Further, the support member 6
The center of the connecting portion of the vibrators 1, 62 to the vibrator 20 and the supporting member 6
The centers of the connecting portions of 1, 62 to the fixed frame body 35 are located on a straight line along the X axis, and the node 20a is also located on the straight line. The same applies to the support members 63 and 64 facing each other at the node 20b of the vibrator 20. In addition,
The dimensions of the vibrator 20 and each support member, the vibration method of the vibrator 20, and the like are the same as those in the first embodiment.

In the vibrator support structure according to the second modification described above, each support member has an outer shape that can be bent at four points, and support members facing each other at each vibration node of the vibrator 20 (support member). 61, support member 62, support member 63
And the support member 64) are made point-symmetrical about their respective nodes, and each support member is made point-symmetrical about the center of gravity 20c of the vibrator 20. Therefore, even in the support structure of the second modified example, the nodes 20a and 20b of the vibration of the vibrator 20 are each.
Of course, the force is balanced even at the center of gravity 20c.
As a result, according to the support structure of the second modification, the vibrator 2
The zero vibration can be maintained more stably in its initial state. Moreover, since each support member is formed in a shape that can be bent at four positions and the number of bendable parts is increased, the vibrator 20 can be more flexibly supported by the fixed frame body 35.
Vibration can be maintained more stably in the initial state.

In addition, in the support structure of the second modification, the centers of the joints between the supporting members facing each other at the vibration nodes of the vibrator 20 and the vibrator 20 and the fixed frame 35 pass through the nodes. And located on a straight line along the X axis. Therefore, the second
According to the support structure of the modification example, since both ends of each support member are joined and supported along the same straight line, the support member does not easily vibrate as a cantilever, and each support member itself is used as a cantilever. Do not vibrate carelessly.

Next, a third modification of the vibrator support structure in the second embodiment will be described. In the third modified example, as shown in FIG. 5, which is a schematic perspective view showing the supporting structure, only the outer shape of each supporting member supporting the vibrator 20 is the respective supporting members in the second modified example. Different from That is, each of the support members 65 to 68 has the same shape, and is formed in an outer shape having two U-shaped portions that are bent at eight locations on the XY plane in the drawing.

Therefore, in the vibrator support structure according to the third modification, the bendable portions of each support member are doubled as compared with the second modification. Therefore, also by the support structure of the vibrator in the third modified example, the vibrator 20 is more flexibly fixed to the fixed frame body 35, and the vibration of the vibrator 20 is more stably maintained in the initial state. be able to. In addition,
It goes without saying that both ends of each support member are joined and supported along the same straight line, so that each support member itself is a cantilever so as not to inadvertently vibrate.

Next, a fourth modification of the vibrator support structure according to the second embodiment will be described. In the fourth modification, as shown in FIG. 6 which is a schematic perspective view showing the support structure, only the outer shape of each support member supporting the vibrator 20 is the same as in the second and third modifications. Different from each support member. That is, each of the support members 71 to 74 has the same shape, is bent at six points in the XY plane in the drawing, and is formed in an outer shape having two U-shaped portions alternately joined.

Therefore, in the vibrator support structure of the fourth modified example, the number of bendable portions of each support member is increased, and the support members are formed such that the U-shaped portions are joined alternately. Therefore, also by the support structure of the vibrator in the fourth modified example, the vibrator 20 is more flexibly fixed to the fixed frame body 35, and the vibration of the vibrator 20 is more stably maintained in the initial state. be able to. It is needless to say that both ends of each support member are coupled and supported along the same straight line, so that each support member itself can not be inadvertently vibrated as a cantilever.

When the vibration of the vibrator 20 supported by the support structure in the fourth modification is analyzed by the finite element method, as shown in FIG. 7B, the nodes 20a, 20
It was found that the center of gravity 20c and the center of gravity 20c are also fixed points, and it was confirmed that the vibrator 20 can be continuously vibrated at the vibration frequency of the primary vibration mode. Note that FIG.
FIG. 6A shows a schematic plane of the vibrator 20 and each supporting member of FIG.

On the other hand, the shapes of the vibrator and each supporting member are the same as those of the above-mentioned fourth modified example, but as shown in FIG. 8A, the supporting members are not arranged point-symmetrically about each node. The vibration mode of the vibrator 20 supported by members at each node was analyzed by the finite element method. In this oscillator 20, as shown in FIG. 8B, it has been found that not only the nodes 20a and 20b but also the center of gravity 20c is a moving point that moves in accordance with the vibration of the oscillator 20. It was confirmed that it was not possible to vibrate continuously.

Next, the vibrator support structure in the third embodiment will be described. In the third embodiment, as shown in FIG. 9 which is a schematic perspective view showing the support structure, the bending paths of the respective support members supporting the vibrator 20 are different from those of the above-mentioned embodiment and its modification. That is, the supporting members (the supporting member 81 and the supporting member 82, the supporting member 83 and the supporting member 84) facing each other in the vibration node of the vibrator 20 and supporting the vibrator 20 are arranged at four positions in the XZ plane in the drawing. It is different from the above-described first and second embodiments in that it is bent and has an outer shape having a U-shaped portion. And
Each of these supporting members has point symmetry with respect to each of the nodes 20a and 20b, and the vibrator 2 of the supporting members facing each other is provided.
The fact that 0 and the center of the connecting portion to the fixed frame 35 and the corresponding nodes are located on the same straight line is the same as in the first or second embodiment described above.

Even in the support structure of the third embodiment,
The vibrator 20 can be flexibly supported by the fixed frame 35, and the forces are balanced at the nodes 20a and 20b of the vibration of the vibrator 20. As a result, even with the support structure of the modification of the third embodiment, the vibration of the vibrator 20 can be stably maintained in its initial state.

Also in the support structure of the third embodiment, since both ends of each support member are joined and supported along the same straight line,
Vibration as a cantilever is less likely to occur in the support member,
Each support member itself cannot be inadvertently vibrated as a cantilever.

Next, the support structure of the vibrator according to the fourth embodiment will be described. In the fourth embodiment, as shown in FIG. 10 which is a schematic perspective view showing the support structure, the support members (support members 85 and Although the supporting member 86, the supporting member 83, and the supporting member 84) are the same in their respective shapes as those of the above-described third embodiment (see FIG. 9),
The difference is that the supporting members facing each other in each node of the vibration of the vibrator 20 are point-symmetric with respect to the center of gravity 20c of the vibrator 20. Therefore, in the support structure of the fourth embodiment, the vibration nodes 20a and 20b of the vibrator 20 are, of course,
The force balances even at the center of gravity 20c. As a result, according to the vibrator support structure of the second embodiment, the vibration of the vibrator 20 can be maintained more stably in its initial state. Further, in the fourth embodiment, the center of the connecting portion between the supporting members facing each other to the vibrator 20 and the fixed frame 35 and the corresponding nodes are located on the same straight line, as described in the third embodiment. It is similar to the embodiment of. Therefore,
Also in the support structure of the fourth embodiment, each support member itself does not inadvertently vibrate as a cantilever.

Next, a vibrator supporting structure in the fifth embodiment will be described. In the fifth embodiment, as shown in FIG. 11 which is a schematic perspective view showing the support structure, the shape of the vibrator is different from those of the above-described embodiments and their modifications. That is, the vibrator 90 in the fifth support structure
Has an outer shape that is point-symmetric with respect to the center of gravity 90c, but is the vibrator 2 in each of the above-described embodiments and its modifications.
Unlike 0, the rod-shaped body is formed into an S-shaped outer shape. However, the vibrator 90 can vibrate in the first-order vibration mode, and in that case, the portions distant from the free end by a predetermined distance are vibration nodes 90a and 90b. By forming the vibrator 90 in such a shape, a strong resonance can be obtained in a space-saving manner.

Supporting members 91 to 91 for supporting the vibrator 90
The reference numeral 94 is the same as the support member in the second modification (see FIG. 4) of the second embodiment described above in its individual shape, and the other points are also the same as in the second embodiment.
That is, in the vibration node of the vibrator 90, the vibrator 9 faces each other.
Support members supporting 0 (support member 91 and support member 9
2. The support member 93 and the support member 94) are point-symmetrical about the corresponding vibration nodes 90a and 90b, and also point-symmetrical about the center of gravity 90c of the vibrator 90. And
The vibrator 90 is flexibly supported by the fixed frame 95 by this support member. Also, in the fifth embodiment, the fact that the centers of the connecting portions of the supporting members facing each other to the vibrator 90 and the fixed frame 95 and the corresponding nodes are located on the same straight line is also the same as in the second embodiment. This is similar to the second modified example of the embodiment of FIG.

Therefore, even in the support structure of the fifth embodiment, the force is balanced not only at the nodes 90a and 90b of the vibration of the vibrator 90 but also at the center of gravity 90c thereof.
The vibration of the vibrator 90 can be more stably maintained in its initial state. Also, in the fifth embodiment, each support member itself does not inadvertently vibrate as a cantilever.

Although one embodiment of the present invention has been described above, the present invention is not limited to such an embodiment, and can be implemented in various modes without departing from the scope of the present invention. Of course. For example, the support member may be bent in a V shape in the middle of the path. Further, when the vibrator 20, each support member, etc. are formed from a metal plate or the like, a piezoelectric element such as a piezoelectric element may be provided on the vibrator 20 to vibrate the vibrator.

As described above, in the support structure in each of the above-described embodiments, the vibration of the vibrator can be maintained more stably in its initial state, so that the vibrator vibrates stably. Become. Therefore, if the vibrator supported by the support structure in each embodiment is used in the vibration gyro that detects the yaw rate generated when the vehicle turns, the yaw rate detection sensitivity can be improved due to the stable vibration. If the oscillator supported by the support structure in each of the embodiments is used as the clock signal generator, it is possible to generate an accurate clock signal.

In the support structure in which the vibrator is supported by the support member having the U-shaped portion (FIGS. 4, 5, 5, and 11), the vibrator is supported by one support member in each section. Can be supported in a cantilever manner, and the support member of each node can be made point-symmetric with respect to the center of gravity of the vibrator, the same effect (securing the vibration state of the vibrator) as each support structure can be obtained.

[0057]

As described in detail above, in the vibrator support structure according to the first aspect, the vibrator is flexibly supported by the bendable support member with respect to the fixed member, and each support is opposed at the vibration node. The member was made point-symmetrical about the node. Therefore, even if the moment around the center of gravity caused by the vibration of the vibrator acts on each support member, the force based on the moment is canceled by the point-symmetrical support members facing each other at each node, and the force at each node is canceled. Balance. As a result,
According to the vibrator support structure of the first aspect, it is possible to avoid leakage of vibration energy applied to vibrate the vibrator to the outside, so that the vibration of the vibrator is stably maintained in its initial state. can do.

Further, since the forces are balanced at each node of vibration in this way, it is not necessary to provide each support member with a portion parallel to the vibrator over a long range. For this reason, according to the vibrator support structure of the first aspect, it is possible to prevent each support member itself from vibrating as a cantilever, and from this point as well, the vibration of the vibrator is in its initial state. It can be maintained stable.

On the other hand, in the vibrator support structure according to the second aspect, in addition to the point-symmetrical support members facing each other at each node being point-symmetrical about the node, the support members facing each other are vibrators. It was also made point-symmetric about the center of gravity of. For this reason,
According to the vibrator support structure of the second aspect, the force is balanced not only at each node but also at the center of gravity of the vibrator, so that the balance of the force as a whole is not lost and the vibration of the vibrator is reduced. The initial state can be maintained more stably.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing a support structure for a vibrator according to a first embodiment.

FIG. 2 is a schematic perspective view showing a support structure for a vibrator according to a second embodiment.

FIG. 3 is a schematic perspective view showing a modified example of the support structure for the vibrator according to the second embodiment.

FIG. 4 is a schematic perspective view showing a second modification thereof.

FIG. 5 is a schematic perspective view showing a third modification thereof.

FIG. 6 is a schematic perspective view showing a fourth modification thereof.

FIG. 7 is an explanatory diagram for explaining a vibration state of a vibrator in a support structure of a fourth modified example.

FIG. 8 is an explanatory diagram for explaining a vibration state of a vibrator in a conventional support structure.

FIG. 9 is a schematic perspective view showing a support structure for a vibrator according to a third embodiment.

FIG. 10 is a schematic perspective view showing a support structure for a vibrator according to a fourth embodiment.

FIG. 11 is a schematic perspective view showing a support structure for a vibrator according to a fifth embodiment.

FIG. 12 is a schematic perspective view showing a supporting structure of a vibrator of a conventional example.

FIG. 13 is an explanatory diagram for explaining a problem of the support structure of the conventional example of FIG.

FIG. 14 is a schematic perspective view showing a supporting structure of a vibrator of a conventional example.

FIG. 15 is an explanatory diagram for explaining a problem of the support structure of the conventional example of FIG.

[Explanation of symbols]

 20 ... Oscillator 20a, 20b ... Node 20c ... Center of gravity 31, 32 ... Support member 33, 34 ... Support member 35 ... Fixed frame body 41, 42 ... Support member 51, 52 ... Support member 53, 54 ... Support member 61, 62 ... Support member 63, 64 ... Support member 65, 66, 67, 68 ... Support member 71, 72, 73, 74 ... Support member 81, 82 ... Support member 83, 84 ... Support member 85, 86 ... Support member 90 ... Vibration Child 90a, 90b ... Node 90c ... Center of gravity 91, 92, 93, 94 ... Support member 95 ... Fixed frame body

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kenji Morikawa, Nagakute-cho, Aichi-gun, Aichi Prefecture 1-41, Yokoshiro, Yokosuka Central Research Institute Co., Ltd. 1 at 41 Yokoyado Central Research Institute Co., Ltd. (72) Inventor Dai ▲ Muwa ▼ Masayuki Nagakute Town, Aichi-gun, Aichi Prefecture

Claims (2)

[Claims] 1. An outer shape which is point-symmetrical about a center of gravity 1
A supporting structure for a vibrator, which supports a vibrator vibrating in a next vibration mode to a fixed member at each node of vibration in the primary vibration mode by a supporting member facing each other, wherein the support member is the vibration member. An outer shape having at least one bent portion between a joint portion with a child and a joint portion with the fixing member is formed, and each of the support members facing each other at the node of the vibration is point-symmetrical about the node. A support structure for a vibrator, which is characterized in that 2. The vibrator support structure according to claim 1, wherein each of the support members, which has the outer shape and is point-symmetrical about a node of the vibration, is point-symmetrical about a center of gravity of the vibrator. The support structure for the oscillator placed in.