JP2009090437A - Surface polishing device having upper lapping plate fall prevention device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a planetary gear polishing device in which the safety of the operator is secured by functioning a device for preventing an upper lapping plate from falling at not only an upper limit position but also at all positions where the upper lapping plate is stopped to prevent the upper lapping plate from falling as a measure for preventing the fall of the upper lapping plate when the upper lapping plate is lifted for attaching and detaching a work carrier or a workpiece. <P>SOLUTION: A plurality of guide bars 23 (rotation stop shafts) for the upper lapping plate used when the upper lapping plate is lifted are so installed as to be stepped. When the upper lapping plate is stopped at the intermediate position, a second safety lock claw part for fall prevention is applied to the step for locking to prevent falling. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

The present invention relates to an upper lap plate fall prevention device for a planetary gear type polishing device that simultaneously polishes both surfaces of quartz, silicon, glass, metal and other various materials.

Conventionally, according to a polishing apparatus for polishing a crystal, a silicon wafer or the like, an upper and lower lap plate called a surface plate made of a material such as cast iron, a sun gear and an internal gear are provided and placed on the lower lap plate. The workpiece carrier, which is called a work carrier meshed with the two gears, is held by the upper lap plate, and the upper and lower surfaces of the workpiece are simultaneously polished by causing the planetary motion to revolve while rotating. Do.

At the beginning of the machining operation, in order to attach the workpiece, which is a workpiece, to the work carrier, the upper lap plate is moved upward by an upper lap plate lifting device installed above the upper lap plate, and a work gap is formed between the upper lap plate and the lower lap plate. Make a distance and set the work. When the setting is completed, the upper lap plate is lowered, loaded onto the work held by the work carrier placed on the lower lap plate, pressed against the work, and the entire upper and lower lap plates are covered while supplying the abrasive. The internal gear, the sun gear, the upper lap plate, and the lower lap plate are rotated by a program set in advance so that the workpiece moves relatively, and the machining is started.

When the processing is completed, in order to take out the work attached to the work carrier, the work is taken out by being moved upward by the upper lap plate lifting device installed above the upper lap plate. This lapping is a processing technology that transfers the flatness of the upper and lower lapping plates, which is called a surface plate, to the machining surface of the work piece. The workpiece comes into close contact with the upper lap plate.

Since the upper lap plate elevating device is equipped with a safety device that prevents the fall by projecting a plurality of lap plate receiving parts so that the upper lap plate approaches the lap surface immediately below the upper lap plate when reaching the ascent limit,
Be sure to stop the upper lap plate at the upper limit, and the operator removes the adhered workpiece manually from the upper lap plate. (Patent Document 1)
JP-A-8-174212

However, in order to shorten the work time for removing the work adhered to the upper lap plate, the upper lap plate is lifted and stopped to a position where the operator can easily work, and the work is removed. However, this operation is prohibited because the upper lap plate suspended in the air involves the risk of dropping.

As a conventional safety measure, there is a method of fixing the lifting shaft that lifts and lowers the upper lap plate, but since the brake is always applied to the cylinder shaft for safety, the load on the upper wrap plate is controlled during processing. It was unsuitable for finely controlling the lap pressure.

In the conventional polishing apparatus described above, a fall prevention device is attached only to the upper limit of the upper lap plate as a safety measure. For this reason, the work that is in close contact with the upper lap plate is lowered from the upper lap plate that is stopped only at the ascent limit to a position where it is easy to perform different work depending on the operator,
A means for protecting the operator's safety and increasing the work efficiency is to allow a safety device to prevent the upper lap plate to fall at all work positions so that the work can be easily removed. Become.

Therefore, the present invention has been made in view of the conventional circumstances, and the upper lap plate elevating device even if the elevating shaft or connecting portion of the upper lap plate elevating device breaks and the upper lap plate falls. In order to prevent the fall by a plurality of fall prevention shafts that also serve to prevent rotation of the lifting shaft, an upper lap plate fall prevention method and apparatus with excellent safety are provided.

The technical means for solving the above-mentioned problem is that the upper lap plate elevating device used in the prior art is provided with an upper lap by continuously providing an inclined step to the guide shaft installed to prevent rotation of the elevating shaft. When the plate is raised, the fall prevention claw is always locked to prevent the upper lap plate from falling.

In the polishing apparatus of the present invention, the following actions were obtained by the above-described configuration.
It is possible to stop the workpiece removal and cleaning of the processing surface of the upper lap plate at the position close to the lower lap plate while maintaining the safety of the operator, and adjust the gap into which the cleaning nozzle enters, so that the grains are mixed In addition to preventing the waste liquid from splashing and contaminating the surroundings, it is possible to perform manual cleaning and cleaning by the operator.

  Hereinafter, a planar polishing apparatus according to the present invention will be described with reference to the drawings.

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram of a main part of the apparatus for illustrating an embodiment of the present invention. FIG. 2 is a second view of preventing the upper wrap plate shown in FIG. 1 from falling.
FIG. 3 is a cross-sectional view of a main part of the safety device, and FIG. 3 is a cross-sectional view of a main part of the first safety device for preventing the upper wrap plate shown in FIG. 1 from dropping.

In FIG. 1, 11 is an upper lap plate which is a polishing plate, and 12 is a lower lap plate. 12
The 13 work carrier placed on the upper surface of the lower lap plate is a jig for holding 16 works,
It meshes with 14 sun gears and 15 internal gears.

The thickness of the 16 workpieces after machining and the conditions for polishing are prepared as a machining program and are 2
9 Input to the control panel, 12 upper lap plate lifting mechanism to raise the 11 upper lap plate,
After meshing 3 work carriers with 14 sun gears and 15 internal gears, 16 work is held, 12 upper lap plate is lowered again and loaded on 16 work processing surface, proper amount of abrasive is passed through 11 upper lap plate and 16 work is processed Supply to the part and start processing. The amount of abrasive supplied is 27.
It is continuously or intermittently supplied to the processing surface of 16 workpieces from the abrasive stirring pad through 11 upper lapping plates.

Abrasives were given to 16 workpieces at the start of processing, 11 upper lap plate, 12 lower lap plate,
The 14 sun gear 15 internal gear starts to rotate in accordance with a preset program. 12
The processing surfaces of the lower lap plate and the 11 upper lap plate hold grains when the abrasive is supplied, and 14
Polish the workpiece.

When the thickness or machining time of 16 workpieces set in advance is reached, machining is terminated by a command from the 29 control panel. The operator raises the 11 upper lap plate by the 17 upper lap plate lifting mechanism. 11 When the upper lapping plate reaches the upper limit, the first safety lock driving cylinder 22
The first safety lock pawl portion slides the 20 first safety lock guide and locks the 19 upper lap plate elevating connecting shaft to prevent the fall.

11 When removing 16 workpieces in close contact with the upper lap plate, 1
1 When the upper lap plate is lowered and stopped, the second safety lock claw is slid by the second safety lock claw 24 by the 22 safety lock driving cylinder in the 23 guide bar notch and the 23 guide bar is locked to lock the 11 upper lap. Prevent the board from falling.

It is a principal part apparatus block diagram of the plane polishing apparatus concerning this invention. It is principal part sectional drawing of the 2nd safety device which prevents the fall of an upper lap | wrap board in the intermediate | middle stop of one Example of this invention. It is principal part sectional drawing of the 1st safety device which prevents the fall of an upper lap | wrap board in the raise limit of this invention.

Explanation of symbols

11 Upper wrap board
12 Lower wrap board
13 Work carrier
14 Sun gear
15 Internal gear
16 work
17 Upper lap plate elevating mechanism 18 Upper lap plate elevating shaft 19 Upper lap plate elevating connecting shaft 20 First safety lock guide
21 First safety lock claw
22 Cylinder for first safety lock drive
23 Guide bar
24 Second safety lock guide
25 Second safety lock claw
26 Cylinder for Second Safety Lock Drive 27 Abrasive Mixing Tank
28 Upper lap plate lifting plate
29 Control panel

Claims (3)

After inserting the workpiece, which is the workpiece, into a plurality of carriers that hold the workpiece, between the sun gear and the internal gear incorporated in the horizontal plane, the upper lap plate is lowered and sandwiched between the lower lap plate In a polishing apparatus that simultaneously performs planetary motion for rotating and revolving the work carrier while supplying abrasive in a state of being in a slanted state and relative rotational movement of the upper and lower lap plates, the stop position of the upper lap plate that moves up and down when the work carrier and the workpiece are attached and detached A flat polishing apparatus comprising a fall prevention device at the ascending limit. The flat polishing apparatus according to claim 1, wherein the upper wrap plate fall prevention device is capable of exceptional fall prevention in which the stop position of the upper lap plate can be freely selected from the rise limit to the fall limit. 3. The planar polishing apparatus according to claim 2, wherein the upper lap plate can be prevented from falling even during workpiece processing.

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