JP2009065212A - Substrate detecting apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate detecting apparatus to grasp containment condition of a substrate inside a substrate holding container. <P>SOLUTION: A reflecting type sensor 10 is mounted on a shutter member 5 to block a passing opening 12a of a separating wall 12. The reflecting type sensor 10 descending with the shutter member 5 detects substrates W inside a cassette 1 successively. A data processing part 11 collects detection information of the substrate W. A position detecting means detects a position of the reflecting type sensor 10 from information transmitted from an encoder 13a mounted on ascending/descending mechanism 7a. A processing part 14 grasps condition of the substrate W inside the cassette 1 from the detection information of the substrate W and the position of the reflecting type sensor 10. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a substrate detection apparatus that is used in a substrate processing apparatus and can grasp a storage state of a substrate in a substrate storage container.

  Conventionally, as this type of substrate processing apparatus, for example, there is one disclosed in JP-A-3-297156.

  In this substrate processing apparatus, what is called an open cassette is used as a cassette for storing a plurality of substrates. An opening for taking out and storing the substrate is provided on the front side of this open cassette (hereinafter simply referred to as “cassette”), and an opening smaller than the opening is provided on the back side of the cassette. Yes. In addition, grooves for holding the substrate substantially horizontally are engraved in multiple stages on the inner wall of the cassette. The substrates are stored one by one in the groove, and as a result, a plurality of substrates are stored in the cassette.

  The substrate processing apparatus performs a predetermined process on the substrate taken out from the specific groove in the cassette, and grasps in advance the storage state of the substrate in the cassette in order to store the substrate in the specific groove again. The grasping state of the substrate is performed by detection means provided on the placement unit. This detection means is a transmission type sensor composed of a light projecting element and a light receiving element that are arranged to face each other so as to sandwich the cassette from the front and rear. This transmissive sensor detects the presence or absence of a substrate based on whether or not transmission of light performed between a light projecting element and a light receiving element is interrupted. By moving this transmissive sensor in the vertical direction from the uppermost groove in the cassette to the lowermost groove, the presence / absence of a substrate stored in each groove of the cassette, that is, the storage state of the substrate in the cassette is determined. I know.

  However, with the recent increase in the size of substrates, new standards have been agreed on cassettes for storing these substrates. A cassette conforming to this standard is called a FOUP (Front Open Unified Pod) cassette. This FOUP cassette is provided with only a single opening for taking out and storing the substrate, and a detachable lid is attached to this opening. The FOUP cassette is used with the lid removed and the opening opened when the substrate is taken out and stored. However, since the FOUP cassette has only a single opening, it is a transmission type that sandwiches the cassette from the front and the rear as in the past. There is a problem that some sensors cannot detect the presence or absence of a substrate stored in each groove of the cassette.

  This invention is made | formed in view of such a situation, Comprising: It aims at providing the board | substrate detection apparatus which can grasp | ascertain the accommodation state of the board | substrate in a board | substrate storage container.

In order to achieve such an object, the present invention has the following configuration.
That is, the invention according to claim 1 is a substrate detection apparatus that detects the presence or absence of a substrate stored at each position in a substrate storage container, which is mounted on a mounting portion of a substrate processing apparatus that processes a substrate. The placement unit includes a passage opening through which the substrate is conveyed and a shutter that opens and closes the passage opening. The shutter moves backward and downward to open the passage opening and moves up and forward. The substrate detection apparatus configured to block the passage opening includes a light projecting element that is attached to the shutter and moves up and down integrally with the shutter, and the light projecting element projects light into the substrate storage container. A light receiving element that is attached to the shutter and that moves up and down integrally with the shutter, the light receiving element is configured to receive light projected from the light projecting element; The light receiving element Is in a state in which an electrical signal is generated when receiving light, and in a state in which no electrical signal is generated when no light is received. A detecting means for detecting the presence or absence of the substrate stored in the position is provided.

  According to a second aspect of the present invention, in the substrate detection apparatus according to the first aspect, the position of the substrate is detected when the detection means changes from a state where the electric signal of the light receiving element is generated to a state where the electric signal is not generated. Is detected.

  According to a third aspect of the present invention, in the substrate detection apparatus according to the first aspect, when the detecting means changes from a state where the electric signal of the light receiving element is not generated to a state where the electric signal is generated, the position of the substrate is detected. Is detected.

  Invention of Claim 4 is the board | substrate detection apparatus which detects the presence or absence of the board | substrate accommodated in each position in the substrate storage container mounted on the mounting part of the substrate processing apparatus which processes a board | substrate, The placement unit includes a passage opening, a substrate is conveyed through the passage opening, and a shutter that opens and closes the passage opening moves backward and downward to open the passage opening and moves upward and forward to move the passage opening. A substrate detection device configured to close, a light-projecting element that is attached to the shutter and that moves up and down integrally with the shutter to project light into the substrate storage container, and is attached to the shutter A light receiving element that moves up and down integrally with the shutter and receives light projected from the light projecting element, and the light receiving element is in a state of generating an electrical signal when receiving light, The substrate blocks light from the device When the ready electric signal is not generated, based on whether an electrical signal is generated, in which comprises a detecting means for detecting the presence of the substrates stored in each position of the substrate storage container.

  According to a fifth aspect of the present invention, in the substrate detection apparatus according to the fourth aspect, the light projecting member is attached to the shutter and moves up and down integrally with the shutter, and the light projecting member is moved into the substrate storage container. When the light projecting member does not move forward, it is in the retracted position, and when the light projecting member moves forward into the substrate storage container, the light projecting member is positioned close to the opening of the substrate storage container, and the shutter is attached to the shutter. A light receiving member that moves up and down integrally with the light receiving member. When the light receiving member does not advance into the substrate storage container, the light receiving member is in a retracted position, and when the light receiving member advances into the substrate storage container, The light receiving member at a position adjacent thereto, the light projecting element is attached to a front end portion of the light projecting member, and the light receiving element is attached to a front end portion of the light receiving member. And it is characterized in that is.

  According to a sixth aspect of the present invention, in the substrate detection apparatus according to the fifth aspect of the present invention, the substrate detecting device includes an advance / retreat drive mechanism for moving the light projecting member and the light receiving member forward and backward.

  According to a seventh aspect of the present invention, in the substrate detection apparatus according to the fourth aspect, the light projecting element and the light receiving element are attached to an upper part of the shutter.

  The invention according to claim 8 is a substrate detection device that detects the presence or absence of a substrate placed at each position in a substrate storage container, which is placed on a placement portion of a substrate processing apparatus for processing a substrate, The placement unit includes a passage opening, a substrate is conveyed through the passage opening, and a shutter that opens and closes the passage opening moves backward and downward to open the passage opening and moves upward and forward to move the passage opening. A substrate detection device configured to close, a light-projecting element that is attached to the shutter and that moves up and down integrally with the shutter to project light into the substrate storage container, and is attached to the shutter A light receiving element that moves up and down integrally with the shutter and receives light when the light projected from the light projecting element is reflected by an end surface of the substrate, and the light receiving element receives an electric signal when receiving the light. To generate light, Ready for electrical signal unless the light is not generated, based on whether an electrical signal is generated, in which comprises a detecting means for detecting the presence of the substrates stored in each position of the substrate storage container.

  Invention of Claim 9 is a board | substrate detection apparatus which detects the information regarding the said at least 1 board | substrate in the board | substrate storage container mounted on the mounting part of the substrate processing apparatus which processes at least 1 board | substrate, The mounting portion includes a passage opening, and the at least one substrate is transported through the passage opening. A shutter that opens and closes the passage opening moves backward and downward to open the passage opening and moves up and forward. A substrate detection device configured to close the passage opening, the sensor being attached to the shutter and moving up and down integrally with the shutter to detect information on the at least one substrate, and processing the information And a processing unit.

  According to the board | substrate detection apparatus which concerns on this invention, since the light projection element and the light receiving element are attached to the shutter, it can raise / lower integrally with a shutter. When the shutter moves up and down, light is projected from the light projecting element, and when the light receiving element receives light from the light projecting element, it is in an electrical signal generating state, and when it does not receive light, no electrical signal is generated. Therefore, the detection means can detect the presence / absence of the substrate stored at each position in the substrate storage container based on whether or not the electric signal is generated.

  In addition, the light projecting member with the light projecting element attached to the front end portion and the light receiving member with the light receiving element attached to the front end portion are moved forward to a position close to the opening of the substrate storage container. The substrate can be detected at a position closer to the substrate storage container, and the substrate in the substrate storage container can be detected more accurately.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a plan view showing a schematic configuration of a main part of a substrate processing apparatus according to an embodiment of the present invention. FIG. 2 is a side view thereof. The substrate processing apparatus of this embodiment is a substrate processing apparatus corresponding to a cassette called a FOUP (Front Open Unified Pod) cassette in which a lid is attached to an opening for taking out and storing a substrate. .

  As shown in FIG. 1, the substrate processing apparatus includes a partition wall 12 that includes a processing unit 20 that takes out a substrate W from a cassette 1 and performs a predetermined process on the substrate W, and a mounting unit 3 on which the cassette 1 is mounted. It is separated by. The mounting section 3 is provided with a plurality (four in this embodiment) of cassette stages 2 on which the cassette 1 is mounted.

  As shown in FIG. 3, the FOUP cassette 1 (hereinafter referred to as “cassette 1”) includes a container 1a for storing the substrate W and a lid 1b that is detachably fitted into an opening 1c provided in the container 1a. It is configured. A multistage groove 1d is provided on the inner wall of the container 1a so as to face each other. In each groove 1d, the substrate W is stored in a state of being held almost horizontally. The lid 1b is embedded with a fixing mechanism 1e that fixes the lid 1b to the container 1a when fitted into the opening 1c of the container 1a. The fixing mechanism 1e includes two locking members 1f each having a rack carved at a base end portion, and a rotatable pinion 1g that meshes with the rack. A lock mechanism 6 provided in a shutter member 5 described later rotates a pinion 1g near the center of the lid 1b to raise the lock member 1f and fix the lid 1b to the opening 1c of the container 1a. .

  The cassette stage 2 is provided with cassette detection means (not shown) such as a reflection sensor on the placement surface of the cassette 1 in order to detect that the cassette 1 is placed. The cassette stage 2 is configured to be movable back and forth in the direction of the partition wall 12 (Y direction) by a cassette driving mechanism 4 provided below the cassette stage 2.

  The cassette driving mechanism 4 is configured by a so-called screw feeding mechanism in which a screw shaft 4b screwed with a convex portion 2a provided on the lower surface of the cassette stage 2 is driven by an electric motor 4a. When the cassette 1 is placed on the cassette stage 2, the electric motor 4 a rotates the screw shaft 4 b in the forward direction to advance the cassette stage 2 toward the partition wall 12. When the processing of all the substrates W in the cassette 1 is completed, the electric motor 4a rotates the screw shaft 4b in the reverse direction to move the cassette stage 2 backward.

  The partition wall 12 is provided with a passage opening 12 a having the same size as the cassette 1 at a position facing the cassette 1. The passage port 12a is used to take out and store the substrate W from the cassette 1, and when the cassette 1 is not placed, it shields the atmosphere between the processing unit 20 and the placement unit 3. The shutter member 5 is closed.

  As shown in FIG. 4, the shutter member 5 includes a convex portion 5a that is fitted into the passage port 12a of the partition wall 12, and a support plate portion 5b on which the convex portion 5a is provided. An electric motor (not shown) and a connecting member 6a connected to the output shaft of the electric motor are embedded in the convex portion 5a.

  By the forward drive of the cassette stage 2 described above, the lid 1b of the cassette 1 is moved to a position close to the convex portion 5a of the shutter member 5, so that the pinion 1g of the lock mechanism 1e provided on the lid 1b is connected. It is connected to the member 6a. In this state, the lock mechanism 6 provided in the shutter member 5 rotates the electric motor to release the lock between the lid 1b and the container 1a, so that the lid 1b can be detached from the container 1a.

  Further, the above-described support plate portion 5b is provided with an “L” -shaped arm 5c extending downward (see FIG. 2). The shutter member 5 is driven back and forth and up and down by a shutter drive mechanism 7 attached to the base end portion of the arm 5c.

  The shutter drive mechanism 7 includes an elevating mechanism 7a that elevates and lowers the shutter member 5 in the Z direction and an advance / retreat mechanism 7b that advances and retracts in the Y direction. The elevating mechanism 7a is configured by a so-called screw feed mechanism in which a screw shaft that is screwed to the base end portion of the arm 5c is driven by an electric motor. Further, an encoder 13a is provided above the lifting mechanism 7a, and detects the position of the shutter member 5 in the Z direction by detecting the amount of rotation of the electric motor. The advance / retreat mechanism 7b is constituted by a screw feed mechanism that advances and retracts the elevating mechanism 7a in the Y direction. By the elevating mechanism 7a and the advance / retreat mechanism 7b, the shutter member 5 can advance / retreat and elevate / lower. Hereinafter, the operation of the shutter member 5 will be described in detail with reference to FIGS. 5 (a) and 5 (b).

  As shown in FIG. 5A, the cassette 1 placed on the cassette stage 2 (see FIG. 2) is driven forward by a cassette driving mechanism 4 (see FIG. 2). At this time, the shutter member 5 closes the passage opening 12a. As shown in FIG. 5B, when the cassette 1 moves to a position close to the shutter member 5, the shutter member 5 is locked by the lock mechanism 6 (see FIG. 4) to the lid 1b of the cassette 1. Is released and the lid 1b is held. Next, after the shutter member 5 is driven backward by the shutter drive mechanism 7, it is driven downward to a retracted position that does not obstruct the removal and storage of the substrate W from the cassette 1. The process waits at the retreat position until the processing of all the substrates W in the cassette 1 is completed. When the processing of all the substrates W in the cassette 1 is completed, the shutter member 5 is driven to rise and then is driven forward to close the passage port 12a and attach the lid 1b to the cassette 1.

  Further, as shown in FIG. 4, the above-described shutter member 5 is provided with a reflection type sensor 10 including a light projecting element portion 10a and a light receiving element portion 10b on an upper portion of a support member 5b. The light projecting element unit 10a and the light receiving element unit 10b are attached to face the point P on the end surface of the substrate W stored in the groove 1d of the cassette 1 when the shutter member 5 is lowered. Therefore, the light projected from the light projecting element portion 10a is reflected at the point P on the end surface of the substrate W accommodated in the groove 1d of the cassette 1, and the reflected light is received by the light receiving element portion 10b. Converted to a signal. That is, the presence or absence of the substrate W accommodated in the groove 1d can be known by detecting whether or not an electric signal is generated in the light receiving element portion 10b.

  As shown in FIG. 6, the reflective sensor 10 is connected to the data collection unit 11. The data collection unit 11 collects electrical signals that have been photoelectrically converted based on the reflected light received by the light receiving element unit 10 b of the reflective sensor 10. The data collection unit 11 collects electrical signals while the shutter member 5 is driven downward. The position detection unit 13 detects the position of the reflective sensor 10 attached to the shutter member 5 based on the rotation amount signal of the electric motor sent from the encoder 13 a attached to the lifting mechanism 7 a of the shutter drive mechanism 7. The processing unit 14 obtains the presence / absence of the substrate W in each groove in the cassette 1 from the position of the reflective sensor 10 detected by the position detection unit 13 and the electrical signal collected by the data collection unit 11, and also stores the memory 15. The presence / absence of the substrate W at each groove position of the cassette 1 is stored.

  Specifically, when the shutter member 5 descends, that is, when the reflective sensor 10 begins to descend, the data collection unit 11 projects light from the light projecting element unit 10a of the reflective sensor 10 and the light receiving element unit 10b. Start collecting electrical signals generated in First, when the reflective sensor 10 comes to the front position of the uppermost groove 1d of the cassette 1 due to the lowering of the reflective sensor 10, if the substrate W is stored in the uppermost groove 1d, the substrate W The light projected from the light projecting element unit 10a is reflected on the end surface of the light. In the light receiving element portion 10b, the received reflected light is photoelectrically converted to generate an electrical signal. Further, since the reflective sensor 10 is lowered, next, when the reflective sensor 10 comes to the front position of the second-stage groove 1d in the cassette 1, the substrate W is stored in the second-stage groove 1d. If not, the light receiving element portion 10b does not receive the reflected light and no electrical signal is generated. The data collection unit 11 continues collecting these electric signals until the descent of the reflective sensor is completed. FIG. 7A is a schematic diagram showing the relationship between the electrical signal collected by the data collection unit 11 and the passage of time. In the figure, reference numeral 70 indicates each signal when the substrate W is detected.

  On the other hand, the position detection unit 13 determines the position of the reflective sensor 10 from the initial position and the descending amount of the reflective sensor 10 based on the rotation amount of the electric motor sent from the encoder 13a provided in the lifting mechanism 7a. I can grasp it. The position detector 13 detects the time during which the reflective sensor 10 passes through the position facing each groove 1 d of the cassette 1. FIG. 7B is a schematic diagram showing the time for passing through the position facing the groove 1d. In the figure, reference numeral 71 indicates the time during the passage through the position facing the groove 1 d of the cassette 1. Reference numeral 72 indicates the number of the groove 1d. In this groove 1d, the first groove 1d passing through is “1”, and the subsequent grooves are “2”, “3”,. Here, since the cassette 1 can store 25 substrates W, the last number of the groove 1d is “25”.

  Based on the time detected by the position detection unit 13 and passing through the position facing each groove 1d and the information on the presence or absence of the substrate W collected over time collected by the data collection unit 11, the processing unit 14 The presence / absence of the substrate W in each groove 1d is obtained by logical operation for each time of the groove 1d. The processing unit 14 stores the result in the memory 15. In this way, the storage state of the substrates W in the cassette 1 can be grasped.

  Information on the presence or absence of the substrate W for each groove 1d stored in the memory 15 is used by a controller that controls a substrate processing apparatus (not shown). For example, the controller operates a substrate transport mechanism 9 to be described later based on the information in the memory 15, and after the processing of the substrate W taken out from the specific groove of the cassette 1 is completed, the controller It is used when returning and storing in the groove.

  After grasping the storage state of the substrate W in the cassette 1, the substrate processing apparatus starts taking out and storing the substrate W from the cassette 1 by the substrate transport mechanism 9.

  The substrate transport mechanism 9 includes an arm 9 a that holds the substrate W. The holding arm 9a has a “I” shape as shown in FIG. 1, but may have a “U” shape, for example. The arm 9a includes a plurality of support pins (not shown) that support the lower surface of the substrate W by point contact, and is a member that makes point contact with the periphery of the substrate W in order to prevent the substrate W from being dropped or displaced. Is provided.

  The substrate transport mechanism 9 is configured as follows. As shown in FIGS. 1 and 2, the arm 9a is configured to be movable back and forth in a horizontal plane by a screw feed mechanism provided on the arm support base 9b. Next, the arm support base 9b is connected and supported by the output shaft of the electric motor built in the arm rotary base 9c. The arm 9a can be rotated in a horizontal plane by the rotation of the electric motor. Further, the arm turntable 9c is configured to be movable up and down by an elevating mechanism 9d configured by a screw feeding mechanism. The elevating mechanism 9d is mounted on a slide drive mechanism 9e that is slidable in the X direction in a horizontal plane.

  With the above-described configuration, the arm 9a operates as follows. The slide moving mechanism 9 e slides the arm 9 a to a position facing the predetermined cassette 1 placed on the placement unit 3. In order to take out the uppermost substrate W in the cassette 1, the arm 9a is raised, the arm 9a is further moved forward to the lower surface of the substrate W, the substrate W is held on the arm 9a, and then the arm 9a is retracted. Then, the substrate W is taken out from the cassette 1. The slide moving mechanism 9e moves the arm 9a to almost the center of the apparatus and delivers the substrate W to a substrate transport robot (not shown) of the processing unit 20. When the processing of the substrate W in the processing unit 20 is completed, the substrate transport mechanism 9 receives the substrate W from the substrate transport robot of the processing unit 20 and stores the substrate W in the cassette 1 that has taken out the substrate W again. This process is performed on all the substrates W in the cassette 1.

  When the processing of all the substrates W in the cassette 1 is completed and all the substrates W are stored in the cassette 1, the shutter member 5 is driven to move upward after being lifted to close the passage port 12a, and the lock mechanism 6 Is operated to fix the lid 1 b to the container 1 a of the cassette 1. When the lid 1b is fixed to the container 1a, the cassette stage 2 is moved backward by the cassette driving mechanism 4 and moved to the cassette picking position.

  The above-described substrate processing apparatus attaches the reflective sensor 10 as the detection means to the upper part of the shutter member 5 and detects the presence or absence of the substrate held in each groove 1d of the cassette 1 as the shutter member 5 is lowered. A drive mechanism that raises and lowers only the detection means is not required. Therefore, an increase in the manufacturing cost of the apparatus due to the attachment of the detection means can be minimized. Further, the detection means can be easily attached using the configuration provided in the apparatus.

  The present invention can be modified as follows.

  (1) In the above embodiment, in order to grasp the storage state of the substrate W in the cassette 1, the reflective sensor is used as a detection means for detecting the presence or absence of the substrate W stored in each groove 1 d of the cassette 1. The present invention is not limited to this. For example, instead of the reflective sensor 10, a transmissive sensor having an advance / retreat drive mechanism can be attached. FIG. 8 shows the configuration when this transmission sensor is attached.

  As shown in FIG. 8, an advance / retreat drive mechanism 81 and a transmissive sensor 80 attached to the advance / retreat drive mechanism 81 so as to be capable of advancing / retreating are disposed on the support plate portion 5 b of the shutter member 5. The advancing / retracting drive mechanism 81 is configured by a so-called screw feed mechanism in which a screw shaft 81b screwed to the connecting member 81c is driven by an electric motor 81a.

  The transmissive sensor 80 includes a light projecting member 80a having a light projecting element 83a at a distal end portion and a light receiving member 80b having a light receiving element 83b at a distal end portion, and the base end portions of both the members 80a and 80b are The support member 81c is supported and fixed. Further, the light projecting member 80a and the light receiving member 80b are slidably guided and supported by penetrating the fixing member 82a and the fixing member 82b, respectively, and are disposed so as to face each other with a height shifted vertically. Yes.

  Hereinafter, an operation when the transmission type sensor 80 and the advance / retreat driving mechanism 81 are attached to the shutter member 5 will be described. When the transmissive sensor 80 comes to the front position of the upper end of the cassette 1 due to the lowering of the shutter member 5, the advance / retreat drive mechanism 81 drives the electric motor 81a to advance the connecting member 81c. Together with the connecting member 81c, the light projecting member 80a and the light receiving member 80b move forward between the inner surface of the side wall of the cassette 1 and the substrate W. The advance / retreat drive mechanism 81 stops the driving of the electric motor 81a when the leading ends of the light projecting member 80a and the light receiving member 80b reach a predetermined position. This position is a position where the optical axis of the transmissive sensor 80 is blocked by the substrate W when the substrate W is in the groove 1 d of the cassette 1. The transmission type sensor 80 sequentially detects the presence / absence of the substrate W in each groove 1d of the cassette 1 as the shutter member 5 is lowered while the position is held. The timing for detecting the substrate W is the same as that in the above-described embodiment using the reflective sensor.

  When the transmissive sensor 80 comes to the lowermost front surface of the cassette 1, the advance / retreat drive mechanism 81 drives the electric motor 81a in the reverse direction to retract the connecting member 81c. When the tip portions of the light projecting member 80a and the light receiving member 80b are retracted to the fixing members 82a and 82b, the advance / retreat drive mechanism 81 stops driving the electric motor 81a. The reason why the light projecting member 80a and the light receiving member 80b are retracted is to prevent the light projecting member 80a and the light receiving member 80b from being caught by the mounting portion 3 or the like when the shutter member 5 is lowered.

  The above-described advance / retreat driving mechanism 81 can detect the presence or absence of the substrate W by bringing the transmissive sensor 80 serving as the detection means close to the substrate W, and thus the detection accuracy can be improved. Note that the reflection type sensor described in the above-described embodiment may be moved forward and backward by the above-described advance / retreat driving mechanism 81, and the presence or absence of the substrate may be detected by bringing the reflection type sensor close to the substrate.

  (2) The detecting means for detecting the presence / absence of the substrate W accommodated in each groove 1d of the cassette 1 is not limited to the reflection type sensor or the transmission type sensor, and may be a CCD camera for imaging the inside of the cassette 1, for example. .

  For example, as shown in FIG. 9, the CCD camera 90 is placed on the support plate portion 5 b of the shutter member 5. The CCD camera 90 continuously images inside the cassette 1 while the shutter member 5 is lowered. The image data of the cassette 1 obtained by this imaging is collected by the data collection unit 11. The processing unit 14 performs a binarization process on the image data to grasp the storage state of the substrates W in the cassette 1. The CCD camera 90 corresponds to the image pickup means in the present invention.

  With the configuration described above, the inside of the cassette 1 can be captured as an image, so that the state of the substrate can be grasped in more detail.

  (3) In the above modification (2), the CCD camera 90 is used to grasp the storage state of the substrate W in the cassette 1, but for example, as shown in FIG. An optical fiber 95 may be installed on the top of 5b, and the inside of the cassette 1 may be imaged by a CCD camera (not shown) connected to the end of the optical fiber 95.

  With the above-described configuration, the CCD camera can be installed in a vacant place in the apparatus, so that the expansion of the apparatus due to the provision of the detection means can be prevented. Further, since the optical fiber is light, the operation of the shutter member 5 is not affected. Note that the above-described CCD camera 90 and optical fiber 95 may be moved forward and backward by an advancing / retracting drive mechanism 81 as shown in FIG. 8, and the inside of the cassette may be imaged in a state of being close to the substrate.

It is a top view which shows schematic structure of the substrate processing apparatus which concerns on the Example of this invention. It is a side view which shows schematic structure of the apparatus which concerns on an Example. It is a perspective view which shows the FOUP cassette of an Example. It is a perspective view which shows the reflection type sensor attached to the shutter member and shutter member of an Example. It is a schematic side view showing operation | movement of the shutter member of an Example. It is a block diagram which shows the principal part of an Example. It is a schematic diagram which shows the detection of the board | substrate of an Example, and the groove position of a cassette. It is a perspective view showing the state where the transmission type sensor concerning modification (1) was attached to the shutter member. It is a perspective view which shows the state with which the CCD camera concerning a modification (2) was attached to the shutter member. It is a perspective view which shows the state in which the optical fiber concerning a modification (3) was attached to the shutter member.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Cassette 2 ... Cassette stage 3 ... Mounting part 4 ... Cassette drive mechanism 5 ... Shutter member 6 ... Locking mechanism 7 ... Shutter drive mechanism 9 ... Substrate conveyance mechanism 10 ... Reflective sensor 11 ... Data collection part 12 ... Partition 12a ... Opening part 13 ... Position detection part 14 ... Processing part 15 ... Memory 80 ... Transmission type sensor 81 ... Advance / retreat drive mechanism 90 ... CCD camera 95 ... Optical fiber W ... Substrate

Claims (9)

A substrate detection device for detecting the presence or absence of a substrate stored at each position in a substrate storage container mounted on a mounting portion of a substrate processing apparatus for processing a substrate, wherein the mounting portion includes: It has a passing port to be conveyed and a shutter that opens and closes the passing port, and the shutter is configured to move backward and downward to open the passing port and to move up and forward to close the passing port. In the substrate detection device,
A light projecting element attached to the shutter and moving up and down integrally with the shutter;
The light projecting element is configured to project light into the substrate storage container,
A light receiving element attached to the shutter and moving up and down integrally with the shutter;
The light receiving element is adapted to receive light projected from the light projecting element,
The light receiving element is in a state where an electric signal is generated when receiving light, and is in a state where an electric signal is not generated when not receiving light,
A substrate detection apparatus comprising detection means for detecting the presence or absence of a substrate stored at each position in a substrate storage container based on whether or not an electrical signal is generated. In the board | substrate detection apparatus of Claim 1,
The substrate detecting apparatus, wherein the detecting means detects the position of the substrate when the light receiving element changes from a state where the electric signal is generated to a state where the electric signal is not generated. In the board | substrate detection apparatus of Claim 1,
The substrate detecting apparatus, wherein the detecting means detects a position of the substrate when the light receiving element changes from a state where the electric signal is not generated to a state where the electric signal is generated. A substrate detection device for detecting the presence or absence of a substrate stored at each position in a substrate storage container placed on a placement portion of a substrate processing apparatus for processing a substrate, wherein the placement portion includes a passage opening. The substrate detection apparatus is configured such that a substrate is transported through the passage opening, and a shutter that opens and closes the passage opening moves backward and downward to open the passage opening, and moves upward and forward to close the passage opening. Because
A light projecting element that is attached to the shutter and moves up and down integrally with the shutter to project light into the substrate storage container;
A light receiving element that is attached to the shutter and moves up and down integrally with the shutter to receive light projected from the light projecting element;
The light receiving element is in a state where an electrical signal is generated when receiving light, and is in a state where no electrical signal is generated when the substrate blocks light to the light receiving element,
A substrate detection apparatus comprising detection means for detecting the presence or absence of a substrate stored at each position in a substrate storage container based on whether or not an electrical signal is generated. The board | substrate detection apparatus of Claim 4 WHEREIN:
A light projecting member that is attached to the shutter and moves up and down integrally with the shutter; when the light projecting member does not advance into the substrate storage container, the light projecting member is in a retracted position; and the light projecting member enters the substrate storage container In the case of advancing, the light projecting member in a position close to the opening of the substrate storage container,
A light receiving member that is attached to the shutter and moves up and down integrally with the shutter, and is in a retracted position when the light receiving member does not advance into the substrate storage container, and the light reception member advances into the substrate storage container Further comprising the light receiving member at a position close to the opening of the substrate storage container,
The substrate detecting device, wherein the light projecting element is attached to a front end portion of the light projecting member, and the light receiving element is attached to a front end portion of the light receiving member. In the board | substrate detection apparatus of Claim 5,
A substrate detection apparatus comprising an advance / retreat drive mechanism for moving the light projecting member and the light receiving member forward and backward. The board | substrate detection apparatus of Claim 4 WHEREIN:
The substrate detecting device, wherein the light projecting element and the light receiving element are attached to an upper part of the shutter. A substrate detection device for detecting the presence or absence of a substrate stored at each position in a substrate storage container placed on a placement portion of a substrate processing apparatus for processing a substrate, wherein the placement portion includes a passage opening. The substrate detection apparatus is configured such that a substrate is transported through the passage opening, and a shutter that opens and closes the passage opening moves backward and downward to open the passage opening, and moves upward and forward to close the passage opening. Because
A light projecting element that is attached to the shutter and moves up and down integrally with the shutter to project light into the substrate storage container;
A light receiving element that is attached to the shutter and moves up and down integrally with the shutter, and receives light when the light projected from the light projecting element is reflected by the end face of the substrate;
The light receiving element is in a state where an electric signal is generated when receiving light, and an electric signal is not generated unless receiving light.
A substrate detection apparatus comprising detection means for detecting the presence or absence of a substrate stored at each position in a substrate storage container based on whether or not an electrical signal is generated. A substrate detection device for detecting information related to the at least one substrate in a substrate storage container placed on a placement portion of a substrate processing apparatus for processing at least one substrate, wherein the placement portion includes a passage opening. The at least one substrate is transported through the passage opening, and a shutter that opens and closes the passage opening is configured to move backward and downward to open the passage opening and to move upward and forward to close the passage opening. A substrate detection device,
A sensor attached to the shutter and integrally moving up and down with the shutter to detect information on the at least one substrate;
A substrate detection apparatus comprising: a processing unit that processes the information.

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