JP3501786B2 - Apparatus for opening and closing lid of substrate storage container and substrate processing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique for grasping the housing state of a substrate in a substrate-housing vessel, related to a device for opening/closing a lid of the substrate-housing vessel. SOLUTION: A shutter member 5 for stopping a passage opening 12a of a diaphragm 12, comprises a protruding part 5a and a support member 5b. At opening of the passage opening 12a, the shutter member 5 is driven to recede, so that the protruding part 5a is driven to recede for the passage opening 12a which is engaged with the protruding part 5a to be opened; while at closing of the passage opening 12a, the shutter member 5 is driven to proceed, so that the protruding part 5a is driven to proceed for the passage opening 12a to be stopped and closed. Meanwhile, a reflection type sensor 10 is fitted to the shutter member 5. The reflection type sensor 10, which falls integrally with the shutter member 5 sequentially detects substrates W in the cassette 1 for grasping the condition of substrates W in the cassette 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for taking out a plurality of substrates from a substrate storage container or opening and closing a lid of a substrate storage container for storing a plurality of substrates in the substrate storage container, and more particularly to a substrate. The present invention relates to a technique for grasping the storage state of substrates in a storage container.

[0002]

2. Description of the Related Art Conventionally, as a substrate processing apparatus provided with this type of apparatus, there is one disclosed in Japanese Patent Laid-Open No. 3-297156.

In this substrate processing apparatus, what is called an open cassette is used as a cassette for storing a plurality of substrates. An opening for taking out and storing the substrate is provided on the front side of the open cassette (hereinafter, simply referred to as “cassette”), and an opening smaller than the opening is provided on the back side of the cassette. There is. Further, a groove for holding the substrate substantially horizontally is carved in multiple stages on the inner wall of the cassette. The substrates are housed one by one in this groove, and as a result, a plurality of substrates are housed in the cassette.

The substrate processing apparatus performs a predetermined process on a substrate taken out from a specific groove in the cassette, and again stores the substrate in the specific groove in advance to grasp the storage state of the substrate in the cassette. . The grasping of the stored state of the substrate is performed by the detection means provided in the mounting portion. This detecting means is a transmissive sensor composed of a light projecting element and a light receiving element which are arranged so as to face each other so as to sandwich the cassette from the front and rear. This transmissive sensor detects the presence or absence of a substrate depending on whether or not the transmission of light performed between the light projecting element and the light receiving element is interrupted. By moving this transmissive sensor in the vertical direction from the uppermost groove to the lowermost groove in the cassette, the presence or absence of substrates stored in each groove of the cassette, that is, the storage state of the substrates in the cassette can be determined. I have a grasp.

[0005]

However, with the recent increase in the size of substrates, a new standard has been established for the cassette that accommodates the substrates. Cassettes conforming to this standard are FOUP (Front Open Unified Po
d) It is called a cassette. This FOUP cassette is provided with only a single opening for taking out and accommodating a substrate, and a detachable lid is attached to this opening. When taking out and storing the board, FO
The UP cassette is used with the lid removed and the opening opened, but since it has only a single opening,
There is a problem that it is not possible to detect the presence / absence of a substrate housed in each groove of the cassette by a transmissive sensor that sandwiches the cassette from the front and rear as in the conventional case.

The present invention has been made in view of the above circumstances, and is an apparatus for opening and closing the lid of a substrate storage container capable of grasping the storage state of substrates in the substrate storage container .
And a substrate processing apparatus .

[0007]

The present invention has the following constitution in order to achieve such an object. That is, the invention according to claim 1 is a device for taking out a plurality of substrates from a substrate storage container or opening and closing a lid of the substrate storage container for storing a plurality of substrates in the substrate storage container. And an opening for picking up and storing the substrate, and a lid attached to the opening, and a mounting portion for mounting a substrate storage container that stores the substrate substantially horizontally; the mounting portion; The passing port is formed by a convex portion fitted into a passage opening provided in a partition wall that separates a processing unit that takes out from the storage container and performs a predetermined treatment on the substrate, and the supporting plate portion having the convex portion. A shutter for holding and closing the lid of the substrate storage container when opening and closing the passage opening and closing the lid, and a shutter drive mechanism for driving the shutter forward and backward and for raising and lowering the shutter.
And a detection unit that is attached to the shutter and descends together with the shutter to detect the presence or absence of the substrate stored in the substrate storage container.

According to a second aspect of the present invention, in the device for opening and closing the lid of the substrate storage container according to the first aspect, the shutter drive mechanism for driving the shutter up and down is composed of a motor, and the detection means is the above-mentioned. An encoder for detecting the rotation amount of the motor to detect the position of the shutter is provided.

According to a third aspect of the present invention, in the apparatus for opening and closing the lid of the substrate storage container according to the first or second aspect, the detecting means is provided on an end face of the substrate near the opening of the substrate storage container. It is a reflection type sensor composed of a light projecting element and a light receiving element which are arranged toward each other.

According to a fourth aspect of the invention, in the device for opening and closing the lid of the substrate storage container according to the third aspect, the device further opens the substrate storage container when detecting the presence or absence of the substrate. It is characterized in that it further comprises an advancing / retreating drive mechanism for driving the detecting means forward to a position close to, and for moving the detecting means backward when the detecting is completed.

According to a fifth aspect of the present invention, in the apparatus for opening and closing the lid of the substrate storage container according to the first or second aspect, the detection means is an image pickup means for capturing an image of the inside of the substrate storage container. .

According to a sixth aspect of the present invention, in the device for opening and closing the lid of the substrate storage container according to the first or second aspect, the detecting means includes an optical fiber attached to the shutter, and the light. And an image pickup means that is connected to the fiber and picks up an image of the inside of the substrate storage container through the optical fiber.

According to a seventh aspect of the present invention, a plurality of substrates are provided.
Take out the substrates in order from the stored substrate storage container for processing.
This is a substrate processing apparatus that performs and takes out and stores substrates.
And a lid attached to the opening,
Placement for placing the substrate storage container that stores the substrate almost horizontally
Section and the substrate are removed from the substrate storage container
A processing unit that performs a predetermined process on the
Projection that is fitted into the passage opening provided in the partition that separates
Part and a support plate part provided with this convex part.
Open and close the passage opening, and open and close the passage opening.
Sometimes the lid of the substrate storage container is held and the lid is opened and closed.
Shutter and forward / backward drive / elevation of the shutter
The shutter drive mechanism that moves the
Attached, descending with the shutter, the substrate
With a detection means for detecting the presence or absence of the substrate stored in the storage container
It is characterized by having.

The invention according to claim 8 is the invention according to claim 7.
In this substrate processing apparatus, the shutter is driven up and down.
The shutter drive mechanism that allows
The means detects the rotation amount of the motor to detect the shutter.
Characterized by having an encoder for detecting the position of
It is a thing.

The invention according to claim 9 is the invention according to claim 7 or
The substrate processing apparatus according to claim 8, wherein the detection means
On the end face of the substrate near the opening of the substrate container.
A counter composed of a light emitting element and a light receiving element that are arranged facing each other.
It is an emissive sensor.

The invention described in claim 10 is the same as described in claim 9.
In the mounted substrate processing apparatus, the apparatus further comprises
When detecting the presence or absence of a plate, approach the opening of the board storage container.
One for driving the detecting means forward to reach the contact position.
On the other hand, when the detection is completed, the detection means is driven backward.
It is characterized by having an advancing / retreating drive mechanism for
It

The invention described in claim 11 is the same as claim 7 or
The substrate processing apparatus according to claim 8, wherein:
The step is an image pickup means for picking up an image of the inside of the substrate storage container.

The invention according to claim 12 is the same as claim 7 or
The substrate processing apparatus according to claim 8, wherein:
The stage includes an optical fiber attached to the shutter,
Connected to the optical fiber, through this optical fiber
And an image pickup means for picking up an image of the inside of the substrate storage container.
Of.

[0019]

The operation of the invention described in claim 1 is as follows. When the substrate is taken out from the substrate storage container, the shutter is driven backward, and the convex portion forming the shutter is also driven backward together with the support plate portion to open the passage opening fitted in the convex portion. At that time, the shutter holds the lid of the substrate storage container and opens the lid. After that, the shutter is driven down to a position where it does not interfere with the removal and storage of the substrate from the substrate storage container. The detector is also moved backward and downward together with the backward movement and downward movement of the shutter. When the shutter starts to move downward, the detection means starts detecting the presence or absence of the substrate stored in the substrate storage container via the passage opening. Since the shutter is lowered to a position where it does not interfere with the removal and storage of substrates from the substrate storage container, the detection means sequentially detects the presence or absence of substrates stored from the top to the bottom of the substrate storage container. . When the substrate is stored in the substrate storage container, the shutter is driven upward and then forwardly driven, and the convex portion is forwardly driven together with the support plate portion so that the convex portion closes and closes the passage opening. At that time, the shutter holds the lid of the substrate storage container and closes the lid.

According to the second aspect of the invention, the shutter drive mechanism for driving the shutter up and down is driven by a motor. When the encoder detects the rotation amount of the motor, the detection unit including the encoder detects the position of the shutter.

According to the third aspect of the invention, the light emitted from the light emitting element of the reflection type sensor is reflected by the end face of the substrate when the substrate is inside the substrate storage container, and the light is received. The light is received by the element. On the other hand, when there is no substrate, the projected light is not received by the light receiving element. The presence / absence of a substrate in the substrate storage container is detected based on the presence / absence of light reception by the light receiving element.

According to the fourth aspect of the invention, when detecting the presence or absence of the substrate in the substrate storage container, the advancing / retreating mechanism drives the detecting means to move forward to the vicinity of the opening of the substrate storage container. In this state, the detection means detects the presence or absence of the substrate in the vicinity of the opening of the substrate storage container. When the detection of all the substrates in the substrate storage container is completed, the advancing / retreating mechanism drives the detecting means to retreat.

According to the invention described in claim 5, the image pickup means detects the presence or absence of the substrate in the substrate storage container by capturing an image of the inside of the substrate storage container as the shutter is lowered.

According to the sixth aspect of the present invention, the image pickup means picks up an image of the inside of the substrate storage container through the optical fiber attached to the shutter as the shutter descends, so that the substrate in the substrate storage container is captured. Detect the presence or absence.

The operation of the invention described in claim 7 is as follows.
Is. When removing the board from the board storage container,
Is driven backwards and constitutes a shutter.
The convex part is driven backwards together with the support plate to fit into the convex part.
The enclosed passageway can be opened. At that time, the shutter is
Hold the lid of the plate container and open the lid. Then sh
Is an obstacle to the removal and storage of substrates from the substrate storage container.
It is driven down to a position where it does not become. This shutter
The reversing and descending driving of the
And descend. When the shutter starts to move downward,
The output means is stored in the substrate storage container through the passage opening.
Start detecting the presence or absence of the board. Shutter is board storage
A position that does not interfere with the removal and storage of substrates from the container
Since it descends to, the detection means is
The presence or absence of the boards stored in all the parts from the bottom to the bottom
To do. Shutter when storing the substrate in the substrate storage container
Is driven upward and then forward, and the convex
Driven forward together with the support plate, the protrusion blocks the passage opening.
Close with. At that time, the shutter keeps the lid of the substrate container.
Hold and close the lid.

According to the invention of claim 8, the shutter is
The shutter drive mechanism that raises and lowers the
Drive. Encoder detects the amount of rotation of the motor
Therefore, the detection means equipped with the encoder is
Position of the target.

According to the invention described in claim 9, the reflection type cell
The light emitted from the light emitting element of the sensor
If there is a substrate, it is reflected by the end face of the substrate and receives
The light is received by the element. On the other hand, when there is no substrate, the light is emitted.
The received light is not received by the light receiving element. Light received by this light receiving element
Presence / absence of the substrate in the substrate storage container
It

According to the tenth aspect of the invention, the substrate storage is
When detecting the presence or absence of the substrate in the storage container, the advance / retreat mechanism detects
Drive the output means forward to near the opening of the substrate container.
It In this state, the detection means is located near the opening of the substrate container.
It detect the presence or absence of a substrate at. Everything in the substrate storage container
When the board detection is completed,
Drive the step backwards.

According to the eleventh aspect of the present invention, the imaging hand
The steps are inside the substrate storage container as the shutter is lowered.
The presence or absence of the substrate in the substrate storage container is detected by imaging
To do.

According to the twelfth aspect of the invention, the imaging hand
The steps are taken in this shutter as the shutter descends.
The inside of the substrate storage container is photographed through the attached optical fiber.
By detecting the image, the presence or absence of the substrate in the substrate storage container can be detected.
It

[0031]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing a schematic configuration of a main part of a substrate processing apparatus according to an embodiment of the present invention. FIG. 2 is a side view thereof. The substrate processing apparatus of this embodiment is
This is a substrate processing apparatus corresponding to a cassette called an OUP (Front Open Unified Pod) cassette, which has a lid attached to an opening for taking out and storing a substrate.

This substrate processing apparatus, as shown in FIG.
The substrate W is taken out of the cassette 1 and a processing unit 20 that performs a predetermined process on the substrate W and a mounting unit 3 on which the cassette 1 is mounted are separated by a partition wall 12. A plurality of cassettes 1 (4 in this embodiment) on which the cassette 1 is placed are placed on the placing portion 3.
Individual cassette stages 2 are provided.

As shown in FIG. 3, the FOUP cassette 1
(Hereinafter, referred to as "cassette 1") is composed of a container 1a for accommodating the substrate W and a lid 1b detachably fitted into an opening 1c provided in the container 1a. On the inner wall of the container 1a, multistage grooves 1d are provided so as to face each other. The substrate W is accommodated in each groove 1d while being held substantially horizontally. The lid 1b is embedded with a fixing mechanism 1e for fixing the lid 1b to the container 1a when the lid 1b is fitted into the opening 1c of the container 1a. The fixing mechanism 1e is composed of two lock members 1f having a rack formed on the base end thereof and a rotatable pinion 1g meshing with the rack. By rotating a pinion 1g near the center of the lid 1b by a lock mechanism 6 provided in a shutter member 5 described later, the lock member 1f is raised to fix the lid 1b to the opening 1c of the container 1a. .

On the cassette stage 2, cassette detection means (not shown) such as a reflection sensor is provided on the mounting surface of the cassette 1 in order to detect that the cassette 1 is mounted. Further, the cassette stage 2 is configured to be movable back and forth in the partition wall 12 direction (Y direction) by a cassette drive mechanism 4 provided below the cassette stage 2.

The cassette drive mechanism 4 is constituted by a so-called screw feed mechanism in which a screw shaft 4b screwed into a convex portion 2a provided on the lower surface of the cassette stage 2 is driven by an electric motor 4a. When the cassette 1 is placed on the cassette stage 2, the electric motor 4a rotates the screw shaft 4b in the forward direction to move the cassette stage 2 forward toward the partition wall 12. When all the substrates W in the cassette 1 are processed, the electric motor 4a reversely rotates the screw shaft 4b to retract the cassette stage 2.

The partition 12 is provided with a passage opening 12a having a size substantially the same as that of the cassette 1 at a position facing the cassette 1. The passage port 12a is for taking out and storing the substrate W from the cassette 1. When the cassette 1 is not placed, the processing section 20 and the placing section 3 are provided.
It is closed by a shutter member 5 in order to shield the atmosphere.

As shown in FIG. 4, the shutter member 5 is
It is composed of a convex portion 5a fitted into the passage opening 12a of the partition wall 12 and a support plate portion 5b provided with the convex portion 5a. An electric motor (not shown) and a connecting member 6a connected to the output shaft of the electric motor are embedded in the convex portion 5a.

By the forward drive of the cassette stage 2 described above, the lid 1b of the cassette 1 is moved to a position close to the convex portion 5a of the shutter member 5, so the pinion 1g of the lock mechanism 1e provided on the lid 1b. Are connected and connected to the connecting member 6a. In this state, the shutter member 5
The lock mechanism 6 included in the container 1a allows the lid 1b to be detached from the container 1a by rotating the electric motor to unlock the lid 1b and the container 1a.

Further, the above-mentioned support plate portion 5b is provided with an "L" -shaped arm 5c extending downward (FIG. 2).
reference). The shutter member 5 is driven to move back and forth and is moved up and down by a shutter drive mechanism 7 attached to the base end of the arm 5c.

The shutter drive mechanism 7 is composed of an elevating mechanism 7a for elevating the shutter member 5 in the Z direction and an advancing / retreating mechanism 7b for advancing / retreating in the Y direction. Lifting mechanism 7a
Is configured by a so-called screw feeding mechanism in which a screw shaft screwed to the base end of the arm 5c is driven by an electric motor. An encoder 13a is provided above the lifting mechanism 7a, and the position of the shutter member 5 in the Z direction is detected by detecting the rotation amount of the electric motor. The advancing / retreating mechanism 7b is a lifting mechanism 7
It is composed of a screw feeding mechanism for moving a in the Y direction. The elevating mechanism 7a and the advancing / retreating mechanism 7b enable the shutter member 5 to advance / retreat and elevate / lower. Below, FIG.
The operation of the shutter member 5 will be specifically described with reference to (a) and (b).

As shown in FIG. 5A, the cassette 1 mounted on the cassette stage 2 (see FIG. 2) is driven forward by the cassette drive mechanism 4 (see FIG. 2). At this time, the shutter member 5 closes the passage opening 12a. As shown in FIG. 5B, when the cassette 1 moves to a position close to the shutter member 5, the shutter member 5 is locked by the lock mechanism 6 (see FIG. 4) on the lid 1b of the cassette 1. And release this lid 1
Hold b. Next, the shutter member 5 is driven backward by the shutter drive mechanism 7 and then is lowered to a retracted position that does not interfere with the taking out and storage of the substrate W from the cassette 1. It waits at the retracted position until the processing of all the substrates W in the cassette 1 is completed. When all the substrates W in the cassette 1 are processed, the shutter member 5
Is driven upward, and then forwardly driven to pass through the passage opening 12a.
And the lid 1b is attached to the cassette 1.

In the shutter member 5 described above, as shown in FIG. 4, the light projecting element portion 1 is provided above the support member 5b.
0a and the light receiving element section 10b
0 is attached. The light projecting element section 10a and the light receiving element section 10b are provided when the shutter member 5 descends.
A point P on the end surface of the substrate W stored in the groove 1d of the cassette 1.
It is attached to face. Therefore, the light projected from the light projecting element portion 10 a is not reflected in the groove 1 of the cassette 1.
It is reflected at a point P on the end face of the substrate W housed in d, and the reflected light is received by the light receiving element portion 10b and converted into an electric signal. That is, the substrate W accommodated in the groove 1d is detected by detecting whether or not an electric signal is generated in the light receiving element portion 10b.
You can know whether or not.

As shown in FIG. 6, the reflection type sensor 10 has
It is connected to the data collection unit 11. Data collection unit 11
Collects electric signals photoelectrically converted based on the reflected light received by the light receiving element portion 10b of the reflective sensor 10.
The data collection unit 11 collects electric signals while the shutter member 5 is being driven downward. The position detector 13
The position of the reflective sensor 10 attached to the shutter member 5 is detected based on the rotation amount signal of the electric motor sent from the encoder 13a attached to the elevating mechanism 7a of the shutter drive mechanism 7. The processing unit 14 includes the position of the reflective sensor 10 detected by the position detection unit 13,
The presence / absence of the substrate W in each groove in the cassette 1 is determined from the electric signals collected in the data collecting unit 11, and the presence / absence of the substrate W in each groove position of the cassette 1 is stored in the memory 15.

More specifically, when the shutter member 5 starts to descend, that is, the reflective sensor 10 begins to descend, the data collecting section 11 projects light from the light projecting element section 10a of the reflective sensor 10 and receives light. Collection of the electric signal generated in the element portion 10b is started. First, when the reflective sensor 10 comes to the front position of the uppermost groove 1d of the cassette 1 due to the lowering of the reflective sensor 10, when the substrate W is stored in the uppermost groove 1d, the substrate W On the end face of
The light projected from the light projecting element unit 10a is reflected. In the light receiving element portion 10b, the received reflected light is photoelectrically converted to generate an electric signal. Further, since the reflective sensor 10 descends, when the reflective sensor 10 comes to the front position of the second groove 1d in the cassette 1 next time, the second groove 1d is inserted.
When the substrate W is not stored in the light receiving element portion 10b, the reflected light is not received by the light receiving element portion 10b, and no electric signal is generated. The data collection unit 11 continues to collect these electric signals until the descent of the reflective sensor is completed. This data collection unit 11
FIG. 7 (a) is a schematic diagram showing the relationship between the electric signal collected in 1. and the passage of time. In the figure, reference numeral 70 indicates each signal when the substrate W is detected.

On the other hand, the position detection unit 13 detects the reflection type sensor 10 from the initial position and the descending amount of the reflection type sensor 10 based on the rotation amount of the electric motor sent from the encoder 13a provided in the lifting mechanism 7a. The position of can be grasped. The position detector 13 detects the time during which the reflective sensor 10 passes through the position facing each groove 1d of the cassette 1. FIG. 7B is a schematic diagram showing the time taken to pass through the position facing the groove 1d. Reference numeral 7 in the figure
1 indicates the time while passing through the position of the cassette 1 facing the groove 1d. Reference numeral 72 indicates the number of the groove 1d.
As for this groove 1d, the groove 1d passing first is set to "1",
Subsequent grooves are "2", "3", ..., "25" in order
Has become. Here, the cassette 1 has 25 substrates W
, The last number of the groove 1d is "25".

The processing unit 14 is based on the time, which is detected by the position detecting unit 13, to pass through the position facing each groove 1d and the information on the presence / absence of the substrate W collected by the data collecting unit 11 over time. Then, the presence or absence of the substrate W in each groove 1d is obtained by a logical operation for each time of each groove 1d. The processing unit 14 stores this result in the memory 15. In this way, the storage state of the substrates W in the cassette 1 can be grasped.

The information on the presence / absence of the substrate W for each groove 1d stored in the memory 15 is used by a controller (not shown) for controlling the substrate processing apparatus. For example, the controller operates the substrate transfer mechanism 9 described later based on the information in the memory 15 to finish the processing of the substrate W taken out of the specific groove of the cassette 1 and then take out the substrate W specified. It is used when it is returned and stored in the groove.

After grasping the storage state of the substrates W in the cassette 1, the substrate processing apparatus starts the taking-out and storage of the substrates W from the cassette 1 by the substrate transfer mechanism 9.

The substrate transfer mechanism 9 has an arm 9a for holding the substrate W. The holding arm 9a has an "I" shape as shown in FIG. 1, but may have, for example, a "U" shape. This arm 9a
Is provided with a plurality of support pins (not shown) that support the lower surface of the substrate W by point contact, and a member that makes point contact with the periphery of the substrate W is provided to prevent the substrate W from falling off or being displaced during transportation. ing.

The substrate transfer mechanism 9 is constructed as follows. As shown in FIGS. 1 and 2, the arm 9a is configured to be movable back and forth in a horizontal plane by a screw feeding mechanism provided on the arm support 9b. Next, the arm support 9b is connected and supported by the output shaft of the electric motor built in the arm turntable 9c. The rotation of the electric motor allows the arm 9a to rotate in a horizontal plane. Further, the arm turntable 9c is configured to be able to move up and down by an elevating mechanism 9d including a screw feeding mechanism. The elevating mechanism 9d is mounted on a slide drive mechanism 9e that is slidable in the X direction in the horizontal plane.

With the above structure, the arm 9a operates as follows. The slide moving mechanism 9e includes the mounting portion 3
The arm 9a is slid to a position facing the predetermined cassette 1 placed on the. In order to take out the uppermost substrate W in the cassette 1, the arm 9a is raised, the arm 9a is further moved to the lower surface of the substrate W, the substrate W is held on the arm 9a, and then the arm 9a is retracted. Then, the substrate W is taken out from the cassette 1. The slide moving mechanism 9e moves the arm 9a to almost the center of the apparatus and transfers the substrate W to a substrate transfer robot (not shown) of the processing unit 20. When the processing of the substrate W in the processing unit 20 is completed, the substrate transfer mechanism 9 receives the substrate W from the substrate transfer robot of the processing unit 20 and stores the substrate W in the cassette 1 that has been taken out again. This process is performed on all the substrates W in the cassette 1.

When the processing of all the substrates W in the cassette 1 is completed and all the substrates W are stored in the cassette 1, the shutter member 5 is driven to move up and then to move forward to close the passage opening 12a. The lock mechanism 6 is operated to fix the lid 1b to the container 1a of the cassette 1. Container 1a with lid 1b
When is fixed, the cassette stage 2 is moved backward by the cassette drive mechanism 4 to the cassette pick-up position.

In the above-mentioned substrate processing apparatus, the reflection type sensor 10 as the detecting means is attached to the upper part of the shutter member 5 to detect the presence / absence of the substrate held in each groove 1d of the cassette 1 as the shutter member 5 descends. Therefore, a drive mechanism for raising and lowering only the detecting means is not required. Therefore, it is possible to minimize the increase in the manufacturing cost of the device due to the attachment of the detection means. Also,
The detection means can be easily attached using the configuration provided in the device.

The present invention can be modified as follows.

(1) In the above embodiment, in order to grasp the storage state of the substrates W in the cassette 1, each groove 1 of the cassette 1 is checked.
Although the reflection type sensor is used as the detection means for detecting the presence or absence of the substrate W housed in d, the present invention is not limited to this. For example, instead of this reflection type sensor 10,
A transmissive sensor having a forward / backward drive mechanism can also be attached. FIG. 8 shows the configuration when this transmission sensor is attached.

As shown in FIG. 8, an advancing / retreating drive mechanism 81 and a transmissive sensor 80 attached to the advancing / retreating drive mechanism 81 so as to be capable of advancing / retreating are provided above the support plate portion 5b of the shutter member 5. ing. The advancing / retreating drive mechanism 81 includes a screw shaft 81b screwed into the connecting member 81c and an electric motor 81a.
It is configured by a so-called screw feeding mechanism that is driven by.

The transmissive sensor 80 has a light projecting element 8 at its tip.
3a and a light receiving element 83 at the tip.
and a light receiving member 80b including b, and the base end portions of both members 80a and 80b are supported and fixed to the connecting member 81c. Further, the light projecting member 80a and the light receiving member 80b are slidably guided and supported by penetrating the fixing member 82a and the fixing member 82b, respectively, and are arranged so as to be vertically opposed to each other with their heights shifted. There is.

The operation when the transmissive sensor 80 and the forward / backward drive mechanism 81 are attached to the shutter member 5 will be described below. When the transmission type sensor 80 comes to the front position of the upper end portion of the cassette 1 due to the lowering of the shutter member 5, the advancing / retreating drive mechanism 81 drives the electric motor 81a to advance the connecting member 81c. The light projecting member 80a and the light receiving member 80 are integrated with the connecting member 81c.
b advances between the inner surface of the side wall of the cassette 1 and the substrate W. The advancing / retreating drive mechanism 81 stops driving the electric motor 81a when the tip ends of the light projecting member 80a and the light receiving member 80b reach a predetermined position. This position is a position where the optical axis of the transmissive sensor 80 is blocked by the substrate W when the substrate W is present in the groove 1d of the cassette 1. The transmissive sensor 80 is held in this position, and the grooves 1d of the cassette 1 are sequentially moved as the shutter member 5 descends.
The presence or absence of the substrate W inside is detected. The timing of detecting the substrate W is the same as in the above-described embodiment using the reflection type sensor.

When the transmissive sensor 80 comes to the front of the bottom of the cassette 1, the advancing / retreating drive mechanism 81 causes the electric motor 81 to move.
By driving a in the reverse direction, the connecting member 81c is retracted.
When the tip portions of the light projecting member 80a and the light receiving member 80b retract to the fixing members 82a and 82b, the advancing / retreating drive mechanism 81.
Stops driving the electric motor 81a. Light projecting member 80a
The shutter member 5 is to retract the light receiving member 80b.
This is for preventing the light projecting member 80a and the light receiving member 80b from being caught by the mounting portion 3 or the like when the is lowered.

The transmissive sensor 80, which is a detecting means, is brought closer to the substrate W by the advancing / retreating drive mechanism 81 described above.
Since it is possible to detect the presence or absence of, it is possible to improve the detection accuracy. The reflective sensor described in the above embodiment may be moved forward and backward by the advancing / retreating drive mechanism 81, and the reflective sensor may be brought close to the substrate to detect the presence or absence of the substrate.

(2) The detecting means for detecting the presence / absence of the substrate W housed in each groove 1d of the cassette 1 is not limited to the reflection type sensor or the transmission type sensor. For example, a CCD for imaging the inside of the cassette 1 It can be a camera.

For example, as shown in FIG. 9, the CCD camera 90 is mounted on the support plate portion 5b of the shutter member 5. The CCD camera 90 continuously images the inside of the cassette 1 while the shutter member 5 descends. The image data of the cassette 1 obtained by this imaging is collected by the data collecting unit 11. The processing unit 14 performs a binarization process on this image data to grasp the storage state of the substrate W in the cassette 1. The CCD camera 90 corresponds to the image pickup means in the present invention.

With the above-described structure, the inside of the cassette 1 can be captured as an image, so that the state of the substrate can be grasped in more detail.

(3) In the modified example (2), the cassette 1 is used.
Although the CCD camera 90 is used to grasp the storage state of the substrate W inside, for example, as shown in FIG. 10, an optical fiber 95 is installed above the support plate portion 5b of the shutter member 5, The inside of the cassette 1 may be imaged by a CCD camera (not shown) connected to the end of the optical fiber 95.

With the above arrangement, the CCD camera can be installed in a vacant place in the apparatus, so that the apparatus can be prevented from being enlarged due to the provision of the detection means. Further, since the optical fiber is light, it does not affect the operation of the shutter member 5. The above-mentioned CCD
The camera 90 and the optical fiber 95 are moved forward and backward by the advancing / retreating drive mechanism 81 as shown in FIG.
You may make it image the inside of a cassette.

[0066]

As is apparent from the above description, according to the first aspect of the invention, the detecting means is attached to the shutter for opening and closing the passage opening provided in the partition wall that separates the mounting portion and the processing portion. Therefore, the housing state of the substrate in the substrate storage container can be grasped by lowering the shutter. Further, since the same drive system as that of the shutter is used, it is possible to perform the processing efficiently and to reduce the manufacturing cost of the device. Furthermore, it is possible to prevent the installation area of the device from being enlarged due to the installation of the detection means. Also, when opening the passage opening, the convex part is driven backward by the backward drive of the shutter to open the passage opening fitted in the convex part, and the lid of the substrate storage container is held by the shutter and opened, and the passage opening is opened. When closing the shutter, the shutter is configured to move forward so that the convex portion is driven forward to close the passage opening and the lid is held by the shutter to close the lid. The passage opening and the lid can be opened, and the passage opening and the lid can be closed together with the forward drive of the shutter.

According to the second aspect of the present invention, the shutter drive mechanism for driving the shutter up and down is composed of the motor, and the detection means is provided with the encoder. Therefore, the shutter is detected by the encoder detecting the rotation amount of the motor. It is possible to detect the position of. Therefore, the substrate in the substrate storage container can be accurately detected based on the detection position of the shutter.

According to the third aspect of the invention, since the reflection type sensor is used as the detecting means, the manufacturing cost of the device can be reduced. Further, since the reflective sensor is small, it can be easily attached to the shutter.

According to the fourth aspect of the invention, since the advancing / retreating drive mechanism moves the detecting means to the vicinity of the opening of the substrate storage container, the detecting means detects the substrate at a position closer to the substrate storage container. It becomes possible to do. Therefore,
The substrate in the substrate storage container can be detected more accurately.

According to the fifth aspect of the present invention, since the image pickup means is used as the detection means, it is possible to capture the storage state of the substrate in the substrate storage container as an image. Therefore, it is possible to more accurately grasp the storage state of the substrate in the substrate storage container.

According to the sixth aspect of the invention, since the optical fiber connected to the image pickup means is attached to the shutter, the installation place of the image pickup means can be freely determined. Therefore, by installing the imaging means in a vacant place in the device, it is possible to save space in the device.

According to the invention described in claim 7,
A system that opens and closes the passage port provided in the partition that separates the processing unit.
Since the detector is attached to the shutter,
By descending, grasp the storage status of the substrate in the substrate storage container
You can Also, use the same drive system as the shutter.
Since it is used, processing can be performed efficiently, and
It is also possible to reduce the manufacturing cost of the device. In addition,
Prevents the enlargement of the installation area of the device due to the installation of the output means
You can Also, when opening the passage opening, the shutter
The convex drive is driven backward by the backward drive of the and is fitted into the convex.
The opened passage opening is opened and the lid of the substrate storage container is opened.
It is held by the shutter and opened to close the passage opening.
The projection is driven forward by the forward drive of the shutter.
The lid is held by the shutter as well as closing and closing the opening.
Since the shutter is configured to close the lid,
Open the passage opening and lid as the shutter moves backward.
It is possible to move the shutter forward and drive
The lid can be closed.

According to the invention of claim 8, the shutter is
The shutter drive mechanism that drives the elevator up and down does not consist of a motor.
Since the detection means is equipped with an encoder,
Sensor detects the amount of rotation of the motor,
The position can be detected. Therefore, the shutter
The substrate inside the substrate container accurately based on the detection position of the
Can be detected.

According to the invention of claim 9, the detecting means
Since a reflection type sensor is used as
The strike can be reduced. In addition, the reflective sensor
Its small size allows it to be easily attached to the shutter.
It

According to the tenth aspect of the invention,
The moving mechanism moves the detection means to the vicinity of the opening of the substrate container.
Since it is moved, the detection means is closer to the substrate storage container.
It is possible to detect the substrate at a certain position. According to
The board inside the board container can be detected more accurately.
it can.

According to the invention described in claim 11,
Since the image pickup means is used as the step,
The stored state of the substrate can be captured as an image. did
Therefore, the stored state of the substrate in the substrate storage container can be more accurately
You can figure it out.

According to the twelfth aspect of the invention, the imaging hand
The optical fiber connected to the step is attached to the shutter.
Since the installation location of the image pickup means can be freely decided
It Therefore, install the imaging means in a vacant place in the device.
By doing so, it is possible to save space in the device.

[Brief description of drawings]

FIG. 1 is a plan view showing a schematic configuration of a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is a side view showing a schematic configuration of an apparatus according to an embodiment.

FIG. 3 is a perspective view showing a FOUP cassette of the embodiment.

FIG. 4 is a perspective view showing a shutter member and a reflective sensor attached to the shutter member according to the embodiment.

FIG. 5 is a schematic side view showing the operation of the shutter member of the embodiment.

FIG. 6 is a block diagram showing a main part of the embodiment.

FIG. 7 is a schematic view showing the detection of the substrate and the groove position of the cassette according to the embodiment.

FIG. 8 is a perspective view showing a state in which a transmissive sensor according to a modified example (1) is attached to a shutter member.

FIG. 9 is a perspective view showing a state in which a CCD camera according to a modified example (2) is attached to a shutter member.

FIG. 10 is a perspective view showing a state in which an optical fiber according to a modified example (3) is attached to a shutter member.

[Explanation of symbols]

1 ... cassette 2 ... Cassette stage 3 ... Placement section 4 ... Cassette drive mechanism 5 ... Shutter member 6 ... Lock mechanism 7 ... Shutter drive mechanism 9 ... Board transfer mechanism 10 ... Reflective sensor 11 ... Data collection section 12 ... Partition 12a ... opening 13 ... Position detector 14 ... Processing unit 15 ... Memory 80 ... Transmissive sensor 81 ... Forward / backward drive mechanism 90 ... CCD camera 95 ... Optical fiber W ... substrate

─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Jun Shibukawa 322 Hazushishi Furukawacho, Fushimi-ku, Kyoto-shi, Kyoto Dainippon Screen Mfg. Co., Ltd., Rakusai Business Office (56) Reference JP-A-11-145244 (JP, A) ) JP-A-3-297156 (JP, A) JP-A-59-175740 (JP, A) JP-A-8-279546 (JP, A) JP-A-7-288274 (JP, A) JP-A-7- 153818 (JP, A) JP-A-2-305449 (JP, A) JP-A-5-178416 (JP, A) JP-A-9-283603 (JP, A) JP-A-3-163847 (JP, A) JP-A-6-32449 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01L 21/68 B65G 49/00

Claims (12)

(57) [Claims] 1. A device for opening and closing a lid of a substrate storage container for taking out a plurality of substrates from the substrate storage container or for storing a plurality of substrates in the substrate storage container, for removing and storing a substrate. Of the substrate and a lid attached to the opening, and a mounting unit for mounting a substrate storage container that stores the substrate substantially horizontally, the mounting unit, and the substrate by removing the substrate from the substrate storage container. The convex portion to be fitted into the passage opening provided in the partition wall for partitioning the processing portion for performing a predetermined treatment, and the support plate portion provided with this convex portion, opening and closing the passage opening, and A shutter for holding and closing the lid of the substrate storage container when opening and closing the passage opening; a shutter drive mechanism for driving the shutter forward and backward and for raising and lowering the shutter; and a shutter attached to the shutter, An apparatus for opening and closing a lid of a substrate storage container, comprising: a detection unit that descends together with a shutter to detect the presence or absence of a substrate stored in the substrate storage container. 2. The device for opening and closing the lid of the substrate storage container according to claim 1, wherein a shutter drive mechanism for driving the shutter up and down comprises a motor, and the detection means detects a rotation amount of the motor. An apparatus for opening and closing a lid of a substrate storage container, comprising an encoder for detecting the position of the shutter. 3. The device for opening and closing the lid of the substrate storage container according to claim 1, wherein the detection means is a light projecting device that is arranged toward an end surface of the substrate near an opening of the substrate storage container. A device for opening and closing the lid of a substrate storage container, which is a reflective sensor composed of an element and a light receiving element. 4. The device for opening and closing the lid of the substrate storage container according to claim 3, wherein the device further detects a presence or absence of the substrate up to a position close to an opening of the substrate storage container. An apparatus for opening and closing a lid of a substrate storage container, which comprises an advancing / retreating drive mechanism for driving the detecting means forward while driving the detecting means backward when the detecting is completed. 5. The device for opening and closing the lid of the substrate storage container according to claim 1 or 2, wherein the detection means is an imaging means for capturing an image of the inside of the substrate storage container. A device that opens and closes. 6. An apparatus for opening and closing a lid of a substrate storage container according to claim 1 or 2, wherein the detection means is connected to the optical fiber attached to the shutter and the optical fiber. An image pickup means for picking up an image of the inside of the substrate container through a fiber,
A device that opens and closes the lid of the substrate storage container. 7. A substrate storage container for storing a plurality of substrates
It is a substrate processing device that takes out substrates in order and processes them.
Te, an opening for taking out, accommodating the substrate, taken on the opening
With a lid that can be attached,
A mounting portion for mounting the plate storage container, and the substrate is taken out from the substrate storage container and predetermined on the substrate.
Is provided on a partition wall that separates the processing unit that performs the processing of 1., the placement unit, and the processing unit from each other.
The convex part that fits into the passage opening and this convex part are provided.
And a support plate part that opens and closes the passage opening.
Holds the lid of the substrate storage container when opening and closing the passage opening
To open and close the lid, and a shutter to drive the shutter forward and backward and up and down.
Drive mechanism and the shutter attached to the shutter.
Whether there is a substrate stored in the substrate storage container
And a detection means for detecting
Processing equipment. 8. The substrate processing apparatus according to claim 7.
Te, a shutter driving mechanism for vertically driving the shutter
Is a motor, and the detection means detects the rotation amount of the motor and
It is equipped with an encoder that detects the position of the
Substrate processing equipment to collect. 9. The substrate processing according to claim 7 or claim 8.
In the processing device, the detection means is provided near the opening of the substrate storage container.
With the light emitting element and the light receiving element that are arranged toward the end face of the substrate
A substrate processing apparatus which is a reflection type sensor. 10. The substrate processing apparatus according to claim 9.
In addition, the apparatus further opens the substrate storage container when detecting the presence or absence of the substrate.
Drive the detector forward to a position close to the mouth.
On the other hand, when the detection is completed, the detection means is driven backward.
Substrate processing characterized by having an advancing / retreating drive mechanism for moving
Processing equipment. 11. The substrate according to claim 7 or 8.
In the processing apparatus, the detection means is an imaging device that captures an image of the inside of the substrate storage container.
Substrate processing apparatus. 12. The substrate according to claim 7 or 8.
In the processing device, the detecting means is an optical fiber attached to the shutter.
Fiber and the optical fiber connected through this optical fiber
And a substrate configured to capture an image of the inside of the substrate storage container.
Plate processing equipment.