JP2009063171A - 弁装置の監視システム - Google Patents

弁装置の監視システム Download PDF

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Publication number
JP2009063171A
JP2009063171A JP2008269291A JP2008269291A JP2009063171A JP 2009063171 A JP2009063171 A JP 2009063171A JP 2008269291 A JP2008269291 A JP 2008269291A JP 2008269291 A JP2008269291 A JP 2008269291A JP 2009063171 A JP2009063171 A JP 2009063171A
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JP
Japan
Prior art keywords
valve
semiconductor substrate
impurity diffusion
monitoring system
diffusion layer
Prior art date
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Pending
Application number
JP2008269291A
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English (en)
Japanese (ja)
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JP2009063171A5 (https=
Inventor
Hiroyuki Ota
裕之 太田
Hiromi Shimazu
ひろみ 島津
Yohei Tanno
洋平 丹野
Yoshihisa Kiyotoki
芳久 清時
Kenji Onodera
賢司 小野寺
Kenji Araki
憲司 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi GE Vernova Nuclear Energy Ltd
Original Assignee
Hitachi-GE Nuclear Energy Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Hitachi-GE Nuclear Energy Ltd filed Critical Hitachi-GE Nuclear Energy Ltd
Priority to JP2008269291A priority Critical patent/JP2009063171A/ja
Publication of JP2009063171A publication Critical patent/JP2009063171A/ja
Publication of JP2009063171A5 publication Critical patent/JP2009063171A5/ja
Pending legal-status Critical Current

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  • Electrically Driven Valve-Operating Means (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
JP2008269291A 2008-10-20 2008-10-20 弁装置の監視システム Pending JP2009063171A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008269291A JP2009063171A (ja) 2008-10-20 2008-10-20 弁装置の監視システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008269291A JP2009063171A (ja) 2008-10-20 2008-10-20 弁装置の監視システム

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2006216367A Division JP4248567B2 (ja) 2006-08-09 2006-08-09 弁装置の監視システム

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2011197825A Division JP5320445B2 (ja) 2011-09-12 2011-09-12 弁装置の監視システム
JP2012097256A Division JP2012197938A (ja) 2012-04-23 2012-04-23 弁装置の監視システム

Publications (2)

Publication Number Publication Date
JP2009063171A true JP2009063171A (ja) 2009-03-26
JP2009063171A5 JP2009063171A5 (https=) 2009-10-15

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ID=40557906

Family Applications (1)

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JP2008269291A Pending JP2009063171A (ja) 2008-10-20 2008-10-20 弁装置の監視システム

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JP (1) JP2009063171A (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101477619B1 (ko) * 2013-10-30 2014-12-30 (주)에너토크 세팅 장치
KR20160076947A (ko) * 2014-12-23 2016-07-01 (주)에너토크 작동 제한점 세팅 장치
JP2017219060A (ja) * 2016-06-03 2017-12-14 Ｋｙｂ株式会社 コントロールバルブの状態検出システム
JP2020118643A (ja) * 2019-01-28 2020-08-06 アズビル株式会社 電動アクチュエータおよび劣化指標計算方法
JP2023144683A (ja) * 2022-03-28 2023-10-11 日立建機株式会社 スプール弁装置

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666388A (ja) * 1992-08-19 1994-03-08 Toshiba Corp 隔離弁モニタ
JPH1061820A (ja) * 1996-08-23 1998-03-06 Tokico Ltd 弁監視装置
JP2001227675A (ja) * 2000-02-14 2001-08-24 Okano Valve Mfg Co 弁機能検出装置
JP2001271962A (ja) * 2000-03-27 2001-10-05 Kawaden:Kk バルブ用アクチュエータの制御システム
JP2003269652A (ja) * 2002-03-18 2003-09-25 Tomoe Tech Res Co バルブ用電動ポジショナ
JP2005338012A (ja) * 2004-05-31 2005-12-08 Katsura Seiki Seisakusho:Kk 常時監視型のガス微少漏洩検知装置
JP2006079442A (ja) * 2004-09-10 2006-03-23 Mitsubishi Electric Corp 無線データ収集システム
JP2006184195A (ja) * 2004-12-28 2006-07-13 Japan Atom Power Co Ltd:The 空気駆動弁の現場監視装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666388A (ja) * 1992-08-19 1994-03-08 Toshiba Corp 隔離弁モニタ
JPH1061820A (ja) * 1996-08-23 1998-03-06 Tokico Ltd 弁監視装置
JP2001227675A (ja) * 2000-02-14 2001-08-24 Okano Valve Mfg Co 弁機能検出装置
JP2001271962A (ja) * 2000-03-27 2001-10-05 Kawaden:Kk バルブ用アクチュエータの制御システム
JP2003269652A (ja) * 2002-03-18 2003-09-25 Tomoe Tech Res Co バルブ用電動ポジショナ
JP2005338012A (ja) * 2004-05-31 2005-12-08 Katsura Seiki Seisakusho:Kk 常時監視型のガス微少漏洩検知装置
JP2006079442A (ja) * 2004-09-10 2006-03-23 Mitsubishi Electric Corp 無線データ収集システム
JP2006184195A (ja) * 2004-12-28 2006-07-13 Japan Atom Power Co Ltd:The 空気駆動弁の現場監視装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101477619B1 (ko) * 2013-10-30 2014-12-30 (주)에너토크 세팅 장치
KR20160076947A (ko) * 2014-12-23 2016-07-01 (주)에너토크 작동 제한점 세팅 장치
KR101695233B1 (ko) * 2014-12-23 2017-01-11 (주)에너토크 작동 제한점 세팅 장치
JP2017219060A (ja) * 2016-06-03 2017-12-14 Ｋｙｂ株式会社 コントロールバルブの状態検出システム
JP2020118643A (ja) * 2019-01-28 2020-08-06 アズビル株式会社 電動アクチュエータおよび劣化指標計算方法
JP7197385B2 (ja) 2019-01-28 2022-12-27 アズビル株式会社 電動アクチュエータおよび劣化指標計算方法
JP2023144683A (ja) * 2022-03-28 2023-10-11 日立建機株式会社 スプール弁装置

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