JP2009059874A - Electronic component holder and manufacturing method thereof - Google Patents

Electronic component holder and manufacturing method thereof Download PDF

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JP2009059874A
JP2009059874A JP2007225629A JP2007225629A JP2009059874A JP 2009059874 A JP2009059874 A JP 2009059874A JP 2007225629 A JP2007225629 A JP 2007225629A JP 2007225629 A JP2007225629 A JP 2007225629A JP 2009059874 A JP2009059874 A JP 2009059874A
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adhesive
electronic component
adhesive layer
adhesion
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Hiroto Komatsu
博登 小松
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Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
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Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an electronic component holder which can suppress a printing defect due to adhesion of an adhesion layer and a mask and also prevent a decrease in yield of component mounting and damage to an electronic component, and a manufacturing method thereof. <P>SOLUTION: The adhesion layer 3 is stacked on a baseboard 1, and a surface of the adhesion layer 3 is sectioned into a plurality of adhesion areas 4 where a plurality of flexible printed boards 10 are detachably stuck and a non-adhesion area 5 other than the plurality of adhesion areas 4, no step being formed between the plurality of adhesion areas 4 and the non-adhesion area 5. The non-adhesion area 5 includes areas other than the external shape of the flexible printed boards 10, so when cream solder is printed on the flexible printed boards 10 using a metal mask, the metal mask is not stuck on the non-adhesion area 5 to cause no printing defect. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、フレキシブルプリント基板等からなる電子部品の固定や搬送等に使用される電子部品保持具及びその製造方法に関するものである。   The present invention relates to an electronic component holder used for fixing and transporting an electronic component made of a flexible printed circuit board and the like, and a method for manufacturing the same.

近年、エレクトロニクスや情報通信の分野においては、可撓性を有する薄いフレキシブルプリント基板(FPC基板ともいう)が多用されている。このフレキシブルプリント基板は、例えば絶縁性のポリイミドフィルム上に回路用の導体パターンがプリント技術により積層して形成され、インダクタ、LSI、コンデンサ、抵抗、フィルタ等の電子部品が実装される。この電子部品の実装は、メタルマスクを用いるクリームハンダの印刷、電子部品のマウント、リフローハンダ、及びカッティング工程を通じて行われる。   In recent years, thin flexible printed boards (also referred to as FPC boards) having flexibility are frequently used in the fields of electronics and information communication. The flexible printed circuit board is formed, for example, by laminating circuit conductor patterns on an insulating polyimide film by a printing technique, and electronic components such as inductors, LSIs, capacitors, resistors, and filters are mounted thereon. The mounting of the electronic component is performed through cream solder printing using a metal mask, mounting of the electronic component, reflow soldering, and a cutting process.

ところで、剛性に乏しいフレキシブルプリント基板は、電子部品実装の際に平坦化され、搬送される関係上、図示しない電子部品保持具に搭載して固定される(特許文献1参照)。この種の電子部品保持具は、耐熱性のベースボード上にシリコーンゴム等からなる粘着層が積層され、この粘着層の表面における所定領域に必要数のフレキシブルプリント基板を着脱自在に粘着保持する。
特開2006‐80212号公報
By the way, the flexible printed circuit board with poor rigidity is flattened and mounted on an electronic component holder (not shown) in view of being transported and mounted (see Patent Document 1). In this type of electronic component holder, an adhesive layer made of silicone rubber or the like is laminated on a heat-resistant base board, and a necessary number of flexible printed circuit boards are detachably attached to a predetermined region on the surface of the adhesive layer.
JP 2006-80212 A

従来における電子部品保持具は、以上のように構成されているので、電子部品実装のため、フレキシブルプリント基板にメタルマスクを用いてクリームハンダが印刷される際、粘着層の表面における所定領域以外の領域が露出していると、この露出領域とメタルマスクとが粘着(密着)して印刷不良を招くという問題がある。   Since the conventional electronic component holder is configured as described above, when cream solder is printed on a flexible printed circuit board using a metal mask for mounting electronic components, a region other than a predetermined region on the surface of the adhesive layer is used. If the region is exposed, there is a problem that the exposed region and the metal mask are adhered (adhered) to cause printing failure.

このような問題を解消する手法としては、粘着層の所定の領域を複数に分割配置したり、分割して島形に配置するという方法が考えられるが、この方法を採用する場合には、フレキシブルプリント基板に応じて個別に版型を設計製作せざるを得ず、コスト高を招くという大きな問題が新たに生じることとなる。また、島形配置に伴い、粘着層に段差が生じて電子部品実装の歩留まりが低下するおそれがある。   As a method for solving such a problem, a method of dividing a predetermined region of the adhesive layer into a plurality of parts or a method of dividing and arranging them in an island shape is conceivable. Depending on the printed circuit board, it is necessary to design and manufacture the plate individually, and a big problem of incurring high costs arises. Further, with the island-shaped arrangement, a step is generated in the adhesive layer, which may reduce the yield of electronic component mounting.

また、フレキシブルプリント基板の粘着保持を、フレキシブルプリント基板と粘着層との粘着面積で調整する場合、剛性に乏しいフレキシブルプリント基板に対して部分的に厚みの異なるエリアを形成することとなり、電子部品の実装時にフレキシブルプリント基板が折れたり、傷付くおそれがある。   In addition, when adjusting the adhesive holding of the flexible printed circuit board with the adhesive area between the flexible printed circuit board and the adhesive layer, an area with a partially different thickness is formed on the flexible printed circuit board having poor rigidity, and the electronic component There is a possibility that the flexible printed circuit board may be broken or damaged during mounting.

本発明は上記に鑑みなされたもので、粘着層とマスクとの粘着に伴う印刷不良を抑制し、しかも、部品実装の歩留まり低下や電子部品の損傷を防ぐことのできる電子部品保持具及びその製造方法を提供することを目的としている。   SUMMARY OF THE INVENTION The present invention has been made in view of the above, and an electronic component holder that suppresses printing defects associated with adhesion between an adhesive layer and a mask, and that can prevent a reduction in component mounting yield and damage to electronic components, and its manufacture. It aims to provide a method.

本発明においては上記課題を解決するため、ベースボードに粘着層を積層し、この粘着層の表面に電子部品を着脱自在に保持するものであって、
粘着層の表面を、電子部品を着脱自在に粘着する粘着領域と、この粘着領域以外の少なくとも一部に形成される非粘着領域とから形成したことを特徴としている。
なお、粘着層の非粘着領域の形成予定領域にプラズマ放電によるドライエッチングを施して非粘着領域を形成することが好ましい。
In the present invention, in order to solve the above problems, an adhesive layer is laminated on a base board, and an electronic component is detachably held on the surface of the adhesive layer,
The adhesive layer is characterized in that the surface of the adhesive layer is formed from an adhesive region that detachably attaches an electronic component and a non-adhesive region formed in at least a part other than the adhesive region.
In addition, it is preferable to perform dry etching by plasma discharge to the formation plan area | region of the non-adhesion area | region of an adhesion layer, and to form a non-adhesion area | region.

また、本発明においては上記課題を解決するため、請求項1又は2記載の電子部品保持具の製造方法であって、
ベースボードに粘着層を積層し、この粘着層の表面を部分的にマスキングして非粘着領域の形成予定領域を露出させ、この非粘着領域の形成予定領域にプラズマ放電によるドライエッチングを施して非粘着領域を形成することを特徴としている。
Moreover, in order to solve the said subject in this invention, it is a manufacturing method of the electronic component holder of Claim 1 or 2, Comprising:
An adhesive layer is laminated on the base board, and the surface of the adhesive layer is partially masked to expose a region where the non-adhesive region is to be formed, and dry etching by plasma discharge is applied to the region where the non-adhesive region is to be formed. It is characterized by forming an adhesive region.

ここで、特許請求の範囲におけるベースボードと粘着層とは、平面視で長方形、正方形、多角形、円形、楕円形等に適宜形成される。粘着層は、ベースボードの表面、裏面、表裏面のいずれにも設けることができる。この粘着層は、弾性の各種エラストマーを使用して形成するのが良い。   Here, the base board and the adhesive layer in the claims are appropriately formed in a rectangular shape, a square shape, a polygonal shape, a circular shape, an elliptical shape or the like in a plan view. The adhesive layer can be provided on any of the front surface, the back surface, and the front and back surfaces of the base board. This adhesive layer is preferably formed using various elastic elastomers.

電子部品には、少なくとも単数複数のフレキシブルプリント基板、セラミックグリーンシート、ガラス、半導体ウェーハ、ダイ、インダクタ、LSI、コンデンサ、抵抗、フィルタ等が含まれる。粘着領域と非粘着領域とは、単数複数を特に問うものではない。さらに、非粘着領域は、電子部品の形に応じてその外形以外の領域に対応する箇所を含むよう枠形、十字形、ドット形、リング形等に適宜形成すると良い。   The electronic component includes at least one or more flexible printed boards, ceramic green sheets, glass, semiconductor wafers, dies, inductors, LSIs, capacitors, resistors, filters, and the like. The adhesive region and the non-adhesive region are not particularly limited to a plurality. Further, the non-adhesive region may be appropriately formed in a frame shape, a cross shape, a dot shape, a ring shape or the like so as to include a portion corresponding to a region other than the outer shape according to the shape of the electronic component.

本発明によれば、ベースボードに粘着層を重ねてその非粘着領域の形成予定領域にドライエッチングや紫外線照射処理等を施して非粘着領域を形成すれば、電子部品保持具を製造することができる。粘着層の表面を粘着領域と非粘着領域とに区画し、非粘着領域に電子部品以外の領域を包含させるので、電子部品にマスクを用いてハンダ等が印刷等される際、非粘着領域にマスクが粘着して印刷不良を招くことが少ない。   According to the present invention, an electronic component holder can be manufactured by forming a non-adhesive region by overlaying an adhesive layer on a base board and subjecting the non-adhesive region to a formation planned region by dry etching or ultraviolet irradiation treatment. it can. Since the surface of the adhesive layer is divided into an adhesive region and a non-adhesive region, and the non-adhesive region includes regions other than electronic components, when solder or the like is printed on the electronic component using a mask, The mask is less likely to stick and cause poor printing.

本発明によれば、粘着層とマスクとの粘着に伴う印刷不良を抑制し、しかも、部品実装の歩留まり低下や電子部品の損傷を防ぐことができるという効果がある。
また、粘着層の非粘着領域の形成予定領域にプラズマ放電によるドライエッチングを施して非粘着領域を形成すれば、他の方法に比べ、非粘着領域を比較的短時間で形成することができる。また、非粘着領域の微細加工が可能となり、エッチング制御が容易化するとともに、エッチング速度の増大が期待でき、しかも、製造コストの削減が期待できる。
According to the present invention, there is an effect that it is possible to suppress printing defects accompanying adhesion between the adhesive layer and the mask, and to prevent a reduction in component mounting yield and damage to electronic components.
Further, if the non-adhesive region is formed by performing dry etching by plasma discharge on the region where the non-adhesive region of the adhesive layer is to be formed, the non-adhesive region can be formed in a relatively short time compared to other methods. Further, the non-adhesive region can be finely processed, the etching control can be facilitated, the etching rate can be increased, and the manufacturing cost can be reduced.

以下、図面を参照して本発明に係る電子部品保持具の好ましい実施形態を説明すると、本実施形態における電子部品保持具は、図1ないし図3に示すように、耐熱性のベースボード1に接着層2を介して弱粘着性の粘着層3を積層し、この粘着層3の上面である表面を、複数のフレキシブルプリント基板10を着脱自在に粘着保持する複数の粘着領域4と、この複数の粘着領域4以外に形成されて弱粘着性を有しない非粘着領域5とから区画形成し、これら複数の粘着領域4と非粘着領域5との間に段差がおおよそ生じないようにしている。   Hereinafter, a preferred embodiment of an electronic component holder according to the present invention will be described with reference to the drawings. The electronic component holder in the present embodiment is mounted on a heat-resistant base board 1 as shown in FIGS. A plurality of adhesive regions 4 for laminating a plurality of flexible printed circuit boards 10 in a detachable manner on the surface which is the upper surface of the adhesive layer 3, and a plurality of adhesive regions 4. A non-adhesive region 5 that is formed in a region other than the adhesive region 4 and has no weak adhesive property is formed so that a step is not generated between the plurality of adhesive regions 4 and the non-adhesive region 5.

ベースボード1は、金属、プラスチック、セラミック等の所定の材料を使用して表裏両面が平坦な平面矩形の板に形成され、作業者による固定や搬送に支障を来たさない大きさを有しており、剛性の確保や過剰な重量増大防止の観点から0.3〜5.0mmの厚さとされる。   The base board 1 is formed into a flat rectangular plate using a predetermined material such as metal, plastic, ceramic, etc., and has a size that does not hinder fixing and transport by an operator. In view of securing rigidity and preventing excessive weight increase, the thickness is set to 0.3 to 5.0 mm.

係るベースボード1の金属材料としては、例えば平坦なSUS、アルミニウム、鉄、銅等があげられ、プラスチック材料としては、耐熱性のガラスエポキシ、ポリエーテルスルホン、ポリエーテルケトン、ポリエーテルイミド、ポリエーテルスルフィド、ポリアリレート、ポリイミド等があげられる。また、ベースボード1のセラミック材料としては、例えばアルミナ、サイアロン、ジルコニア、窒化アルミニウム、窒化ケイ素、炭化ケイ素、窒化チタン等があげられる。   Examples of the metal material of the base board 1 include flat SUS, aluminum, iron, copper, and the like, and examples of the plastic material include heat-resistant glass epoxy, polyether sulfone, polyether ketone, polyether imide, and polyether. Examples thereof include sulfide, polyarylate, and polyimide. Examples of the ceramic material for the base board 1 include alumina, sialon, zirconia, aluminum nitride, silicon nitride, silicon carbide, and titanium nitride.

粘着層3は、所定の弾性エラストマーを使用して表裏両面が平坦な断面略板形に成形され、5〜60Hs(JIS A)のゴム硬度を有している。この弾性の粘着層3の材料としては、例えばシリコーンゴム、フッ素系ゴム、ウレタン系エラストマー、天然ゴム、シクロペンタジエン系ゴム等があげられる。粘着層3は、電子部品実装時のハンダリフロー温度に耐え得ることが要求されるので、材料がシリコーンゴムの場合にはポリイミドシリコーンゴムが良く、又硬化性官能基を有するフッ素化ポリエーテル骨格のフッ素系エラストマーでも良い。   The pressure-sensitive adhesive layer 3 is molded into a substantially cross-sectional shape with a flat cross section using a predetermined elastic elastomer, and has a rubber hardness of 5 to 60 Hs (JIS A). Examples of the material of the elastic adhesive layer 3 include silicone rubber, fluorine rubber, urethane elastomer, natural rubber, and cyclopentadiene rubber. Since the adhesive layer 3 is required to be able to withstand the solder reflow temperature at the time of mounting an electronic component, when the material is a silicone rubber, a polyimide silicone rubber is preferable, and a fluorinated polyether skeleton having a curable functional group is used. A fluorine-based elastomer may be used.

粘着層3のゴム硬度は5〜60Hsの範囲とされるが、これは、ゴム硬度が5Hs未満の場合には粘着層3の機械的強度が不足して耐久性が悪化するからである。逆に、ゴム硬度が60Hsを超える場合には、粘着層3の粘着力が低下してフレキシブルプリント基板10を十分に粘着保持することができないからである。   The rubber hardness of the pressure-sensitive adhesive layer 3 is in the range of 5 to 60 Hs because the mechanical strength of the pressure-sensitive adhesive layer 3 is insufficient and the durability is deteriorated when the rubber hardness is less than 5 Hs. Conversely, when the rubber hardness exceeds 60 Hs, the adhesive strength of the adhesive layer 3 is reduced and the flexible printed circuit board 10 cannot be sufficiently adhered and held.

粘着層3は、ベースボード1の表面上に積層されるが、この積層方法としては、例えばベースボード1上に硬化性組成物をスクリーン印刷法、ディップ法、ドクターブレード法、ナイフコート法、バーコート法、スピンコート法等により塗布し、硬化させる方法が採用される。   The pressure-sensitive adhesive layer 3 is laminated on the surface of the base board 1. As this lamination method, for example, a curable composition is applied to the base board 1 by a screen printing method, a dip method, a doctor blade method, a knife coating method, a bar coating method. A method of applying and curing by a coating method, a spin coating method or the like is employed.

複数の粘着領域4は、図1に示すように、粘着層3の周縁部を除く表面に並べて配列形成され、粘着領域4と粘着領域4とが所定の間隔をおいて離隔しており、各粘着領域4がフレキシブルプリント基板10の大きさや形に対応する。各粘着領域4の粘着力(粘着層3の粘着力でもある)は、粘着領域4の表面状態に大きく左右されるので、留意する必要がある。すなわち、粘着領域4の粘着力は、粘着領域4の表面が平滑で光沢の鏡面であれば大きくなり、粗面であれば小さくなる。したがって、粘着力の均一性を確保する場合には、粘着領域4の表面状態を均一に保つことが重要となる。   As shown in FIG. 1, the plurality of adhesive regions 4 are arranged side by side on the surface excluding the peripheral portion of the adhesive layer 3, and the adhesive regions 4 and the adhesive regions 4 are separated from each other at a predetermined interval. The adhesive region 4 corresponds to the size and shape of the flexible printed circuit board 10. It should be noted that the adhesive strength of each adhesive region 4 (which is also the adhesive strength of the adhesive layer 3) depends greatly on the surface state of the adhesive region 4. That is, the adhesive strength of the adhesive region 4 increases when the surface of the adhesive region 4 is smooth and glossy, and decreases when the surface is rough. Therefore, in order to ensure the uniformity of the adhesive force, it is important to keep the surface state of the adhesive region 4 uniform.

非粘着領域5は、図1に示すように、粘着層3の非粘着領域5の形成予定領域に所定の処理が施されることにより形成され、フレキシブルプリント基板10の形状に応じ、各フレキシブルプリント基板10を包囲するとともに、このフレキシブルプリント基板10の外形以外の領域を包含する。この非粘着領域5は、具体的には、粘着層3の表面周縁部と複数の粘着領域4の間にプラズマ放電によるドライエッチング等が施されることにより形成される。非粘着領域5は、プラズマ放電によりドライエッチングされる場合、0.05〜1μmの範囲の深さで形成される。   As shown in FIG. 1, the non-adhesive region 5 is formed by applying a predetermined treatment to the region where the non-adhesive region 5 of the adhesive layer 3 is to be formed, and each flexible print is formed according to the shape of the flexible printed circuit board 10. While surrounding the board | substrate 10, the area | regions other than the external shape of this flexible printed circuit board 10 are included. Specifically, the non-adhesive region 5 is formed by performing dry etching or the like by plasma discharge between the peripheral edge portion of the adhesive layer 3 and the plurality of adhesive regions 4. The non-adhesive region 5 is formed with a depth in the range of 0.05 to 1 μm when dry etching is performed by plasma discharge.

上記において、電子部品保持具を製造する場合には、先ず、シリコーンゴムコンパウンドをカレンダーロールにより所定の厚さに分出しし、このシリコーンゴムコンパウンドを加熱硬化して粘着層3を形成する。
また、粘着層3の形成作業とは別に、所定の厚さを有するベースボード1の表面に液状のシリコーンゴムをスクリーン印刷して未硬化の接着層2を積層形成し、この未硬化の接着層2上に既に形成しておいた粘着層3を貼着(図2参照)して加熱加圧プレスし、ベースボード1と粘着層3とを一体化する。
In the above, when manufacturing an electronic component holder, first, a silicone rubber compound is dispensed to a predetermined thickness by a calender roll, and the silicone rubber compound is heated and cured to form the adhesive layer 3.
In addition to the operation of forming the pressure-sensitive adhesive layer 3, a liquid silicone rubber is screen-printed on the surface of the base board 1 having a predetermined thickness to form an uncured adhesive layer 2, and this uncured adhesive layer The adhesive layer 3 that has already been formed on the substrate 2 is attached (see FIG. 2) and heated and pressed to integrate the base board 1 and the adhesive layer 3 together.

こうしてベースボード1と粘着層3とを一体化したら、粘着層3の粘着領域4にパターンマスク11を重ねて粘着層3の非粘着領域5の形成予定領域を露出させ(図3参照)、その後、非粘着領域5の形成予定領域にプラズマ放電によるドライエッチング処理を施して弱粘着性を有しない非粘着領域5を形成すれば、電子部品保持具を製造することができる。プラズマ放電によるドライエッチング処理に際しては、例えば制御が容易で微細加工が可能なプラズマ洗浄装置やプラズマエッチング装置等を使用することができる。   When the base board 1 and the adhesive layer 3 are thus integrated, the pattern mask 11 is overlaid on the adhesive region 4 of the adhesive layer 3 to expose the region where the non-adhesive region 5 of the adhesive layer 3 is to be formed (see FIG. 3). If the non-adhesive region 5 that does not have weak adhesiveness is formed by subjecting the region where the non-adhesive region 5 is to be formed to a dry etching process by plasma discharge, an electronic component holder can be manufactured. In the dry etching process by plasma discharge, for example, a plasma cleaning apparatus or a plasma etching apparatus that can be easily controlled and can be finely processed can be used.

上記構成によれば、粘着層3の表面を複数の粘着領域4と非粘着領域5とに区画形成し、非粘着領域5にフレキシブルプリント基板10の外形以外の領域を包含させるので、フレキシブルプリント基板10にメタルマスクを用いてクリームハンダが印刷される際、非粘着領域5にメタルマスクが粘着して印刷不良を招くことがない。また、粘着層3の所定の領域を複数に分割配置したり、分割して島形に配置する必要がないので、フレキシブルプリント基板10に応じて個別に版型を設計製作する必要がなく、コスト高を招くこともなく、しかも、リードタイムの短縮を図ることができる。   According to the above configuration, the surface of the adhesive layer 3 is partitioned into a plurality of adhesive regions 4 and non-adhesive regions 5, and the non-adhesive regions 5 include regions other than the outer shape of the flexible printed circuit board 10. When the cream solder is printed on the metal mask 10 using the metal mask, the metal mask does not adhere to the non-adhesive region 5 to cause printing failure. In addition, since it is not necessary to divide the predetermined region of the adhesive layer 3 into a plurality of parts or to divide and arrange them in an island shape, it is not necessary to design and produce a plate individually according to the flexible printed circuit board 10. The lead time can be shortened without incurring high.

また、粘着層3の粘着領域4と非粘着領域5とが略連続し、これらの間に殆ど段差が生じないので、電子部品実装の歩留まり低下を抑制防止することができる。また、剛性に乏しいフレキシブルプリント基板10に対して部分的に厚みの異なるエリアが殆ど存在しないので、電子部品の実装時にフレキシブルプリント基板10が折れたり、傷付くおそれもない。さらに、プラズマ放電によるドライエッチング処理で非粘着領域5を形成するので、他の処理方法による場合に比べ、非粘着領域5を短時間で安価に形成することが可能となり、しかも、粘着層3表面の劣化防止も大いに期待できる。   Moreover, since the adhesion area | region 4 and the non-adhesion area | region 5 of the adhesion layer 3 are substantially continuous, and there is almost no level | step difference between these, the yield fall of electronic component mounting can be suppressed and prevented. In addition, since there are almost no areas with partially different thicknesses relative to the flexible printed circuit board 10 having poor rigidity, there is no possibility that the flexible printed circuit board 10 will be broken or damaged when electronic components are mounted. Furthermore, since the non-adhesive region 5 is formed by dry etching treatment using plasma discharge, the non-adhesive region 5 can be formed in a short time and at a lower cost than in the case of using other processing methods. The prevention of deterioration is greatly expected.

次に、図4は本発明の第2の実施形態を示すもので、この場合には、ベースボード1と粘着層3とを一体化したら、粘着層3の粘着領域4にパターンマスク11を重ねて非粘着領域5の形成予定領域を露出させ、その後、非粘着領域5の形成予定領域に紫外線照射装置12によりUV光13を照射して表面改質し、弱粘着性を有しない非粘着領域5を形成することにより、電子部品保持具を製造するようにしている。その他の部分については、上記実施形態と同様であるので説明を省略する。   Next, FIG. 4 shows a second embodiment of the present invention. In this case, when the base board 1 and the adhesive layer 3 are integrated, the pattern mask 11 is overlaid on the adhesive region 4 of the adhesive layer 3. Then, the non-adhesive region 5 formation exposure region is exposed, and then the non-adhesion region 5 formation target region is irradiated with UV light 13 by the ultraviolet irradiation device 12 to be surface-modified, and the non-adhesion region having no weak adhesion By forming 5, an electronic component holder is manufactured. The other parts are the same as those in the above embodiment, and the description thereof is omitted.

本実施形態においても上記実施形態と同様の作用効果が期待でき、しかも、非粘着領域5の形成予定領域にUV光13を照射して表面改質することにより、非粘着領域5を形成するので、様々な形状の非粘着領域5をきわめて容易に形成することができるのは明らかである。   In this embodiment, the same effect as that of the above embodiment can be expected, and the non-adhesive region 5 is formed by irradiating the UV light 13 to the region where the non-adhesive region 5 is to be formed to modify the surface. Obviously, the non-adhesive regions 5 having various shapes can be formed very easily.

なお、上記実施形態では平板のベースボード1を単に示したが、何らこれに限定されるものではなく、例えばベースボード1上に、粘着層3を貫通するフレキシブルプリント基板10用の複数のアライメントピンを立設したり、フレキシブルプリント基板10用の回避穴を設けるようにしても良い。また、ベースボード1上に粘着層3を積層する方法として、カレンダー装置、押出装置、プレス装置により硬化性組成物をフィルム化し、これをベースボード1の表面上に貼着する方法を採用しても良い。さらに、非粘着領域5は、非粘着領域5の形成予定領域に直線的に形成しても良いが、ドット形状等に形成することもできる。   In the above-described embodiment, the flat base board 1 is simply shown. However, the present invention is not limited to this. For example, a plurality of alignment pins for the flexible printed circuit board 10 penetrating the adhesive layer 3 on the base board 1. Or an avoidance hole for the flexible printed circuit board 10 may be provided. In addition, as a method of laminating the adhesive layer 3 on the base board 1, a method is adopted in which a curable composition is formed into a film by a calendar device, an extrusion device, and a press device, and this is adhered to the surface of the base board 1. Also good. Furthermore, although the non-adhesion area | region 5 may be formed linearly in the formation plan area | region of the non-adhesion area | region 5, it can also be formed in a dot shape etc.

以下、本発明に係る電子部品保持具の製造方法の実施例を説明するが、本発明に係る電子部品保持具の製造方法は以下の実施例に何ら限定されるものではない。
先ず、シリコーンゴムコンパウンド〔信越化学工業社製:商品名KE−1510U〕をカレンダーロールにより0.2mmの厚さに分出しし、このシリコーンゴムコンパウンドを加熱硬化して0.2mmの厚さの粘着層を形成した。
Hereinafter, although the Example of the manufacturing method of the electronic component holder which concerns on this invention is described, the manufacturing method of the electronic component holder which concerns on this invention is not limited to a following example at all.
First, a silicone rubber compound [manufactured by Shin-Etsu Chemical Co., Ltd .: trade name KE-1510U] is dispensed to a thickness of 0.2 mm by a calender roll, and the silicone rubber compound is heated and cured to have a thickness of 0.2 mm. A layer was formed.

また上記作業とは別に、ベースボードの表面に液状のシリコーンゴム〔信越化学工業社製:商品名KE−1800〕を0.02mmの厚さにスクリーン印刷して未硬化の接着層を形成し、この未硬化の接着層上に粘着層を貼着して加熱加圧プレスし、ベースボードと粘着層とを一体化した。ベースボードとしては、0.8mmの厚さを有するアルミ板を使用した。   Separately from the above work, a liquid silicone rubber (manufactured by Shin-Etsu Chemical Co., Ltd .: trade name KE-1800) is screen-printed to a thickness of 0.02 mm on the surface of the base board to form an uncured adhesive layer, The pressure-sensitive adhesive layer was adhered onto the uncured adhesive layer and heated and pressed to integrate the base board and the pressure-sensitive adhesive layer. As the base board, an aluminum plate having a thickness of 0.8 mm was used.

次いで、粘着層の表面にパターンマスクを部分的に重ねて粘着層の非粘着領域の形成予定領域を露出させ、非粘着領域の形成予定領域にプラズマ放電によるドライエッチング処理を施して非粘着領域を形成することにより、電子部品保持具を短時間で製造することができた。ドライエッチング処理に際しては、減圧下で反応性ガスプラズマを利用するプラズマ洗浄装置〔日立ハイテク社製:商品名SPC−100〕を使用し、RIE=Reactive lon Etching方式(イオン)を採用した。   Next, a pattern mask is partially overlapped on the surface of the adhesive layer to expose a region where the non-adhesive region of the adhesive layer is to be formed, and a dry etching process using plasma discharge is applied to the region where the non-adhesive region is to be formed to form the non-adhesive region. By forming, an electronic component holder could be manufactured in a short time. In the dry etching process, a plasma cleaning apparatus using a reactive gas plasma under reduced pressure (manufactured by Hitachi High-Tech Co., Ltd .: trade name SPC-100) was used, and the RIE = Reactive long Etching method (ion) was adopted.

ドライエッチングは、真空度20Pa、Ar量5cc/min、放電出力RF600Wの条件で実施した。また、エッチンググレードは0.25μm/minであり、2分間の放電で約0.5μmエッチングすることにより、非粘着領域を形成した。   Dry etching was performed under the conditions of a degree of vacuum of 20 Pa, an Ar amount of 5 cc / min, and a discharge output of RF 600 W. The etching grade was 0.25 μm / min, and a non-adhesive region was formed by etching about 0.5 μm by discharge for 2 minutes.

本発明に係る電子部品保持具の実施形態を模式的に示す斜視説明図である。It is a perspective explanatory view showing typically an embodiment of an electronic component holder concerning the present invention. 本発明に係る電子部品保持具の製造方法の実施形態における接着層に粘着層を貼着する状態を模式的に示す説明図である。It is explanatory drawing which shows typically the state which adheres an adhesion layer to the contact bonding layer in embodiment of the manufacturing method of the electronic component holder which concerns on this invention. 本発明に係る電子部品保持具の製造方法の実施形態における粘着層の粘着領域にパターンマスクを重ねた状態を模式的に示す説明図である。It is explanatory drawing which shows typically the state which accumulated the pattern mask on the adhesion area | region of the adhesion layer in embodiment of the manufacturing method of the electronic component holder which concerns on this invention. 本発明に係る電子部品保持具の第2の実施形態を模式的に示す説明図である。It is explanatory drawing which shows typically 2nd Embodiment of the electronic component holder which concerns on this invention.

符号の説明Explanation of symbols

1 ベースボード
2 接着層
3 粘着層
4 粘着領域
5 非粘着領域
10 フレキシブルプリント基板(電子部品)
11 パターンマスク
12 紫外線照射装置
13 UV光
DESCRIPTION OF SYMBOLS 1 Base board 2 Adhesive layer 3 Adhesive layer 4 Adhesive area 5 Non-adhesive area 10 Flexible printed circuit board (electronic component)
11 Pattern mask 12 UV irradiation device 13 UV light

Claims (3)

ベースボードに粘着層を積層し、この粘着層の表面に電子部品を着脱自在に保持する電子部品保持具であって、
粘着層の表面を、電子部品を着脱自在に粘着する粘着領域と、この粘着領域以外の少なくとも一部に形成される非粘着領域とから形成したことを特徴とする電子部品保持具。
An electronic component holder for laminating an adhesive layer on a base board and detachably holding an electronic component on the surface of the adhesive layer,
An electronic component holder characterized in that the surface of the adhesive layer is formed from an adhesive region to which an electronic component is detachably adhered and a non-adhesive region formed in at least a part other than the adhesive region.
粘着層の非粘着領域の形成予定領域にプラズマ放電によるドライエッチングを施して非粘着領域を形成した請求項1記載の電子部品保持具。   The electronic component holder according to claim 1, wherein the non-adhesive region is formed by performing dry etching by plasma discharge on a region where the non-adhesive region of the adhesive layer is to be formed. 請求項1又は2記載の電子部品保持具の製造方法であって、ベースボードに粘着層を積層し、この粘着層の表面を部分的にマスキングして非粘着領域の形成予定領域を露出させ、この非粘着領域の形成予定領域にプラズマ放電によるドライエッチングを施して非粘着領域を形成することを特徴とする電子部品保持具の製造方法。   The method for manufacturing an electronic component holder according to claim 1 or 2, wherein an adhesive layer is laminated on the base board, and a surface of the adhesive layer is partially masked to expose a region where a non-adhesive region is to be formed, A method for manufacturing an electronic component holder, wherein the non-adhesive region is formed by performing dry etching by plasma discharge on a region where the non-adhesive region is to be formed.
JP2007225629A 2007-08-31 2007-08-31 Electronic component holder and manufacturing method thereof Pending JP2009059874A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011009655A (en) * 2009-06-29 2011-01-13 Fujitsu Ltd Mounting apparatus and mounting method
JP7453183B2 (en) 2021-06-23 2024-03-19 東レエンジニアリング株式会社 Chip repair method and chip repair system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073029A (en) * 1998-08-26 2000-03-07 Nitto Denko Corp Adhesive member and its production
JP2006080212A (en) * 2004-09-08 2006-03-23 Shin Etsu Polymer Co Ltd Electronic component holder and its manufacturing method
JP2006140323A (en) * 2004-11-12 2006-06-01 Taiyo Yuden Co Ltd Thin substrate carrier and its manufacturing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000073029A (en) * 1998-08-26 2000-03-07 Nitto Denko Corp Adhesive member and its production
JP2006080212A (en) * 2004-09-08 2006-03-23 Shin Etsu Polymer Co Ltd Electronic component holder and its manufacturing method
JP2006140323A (en) * 2004-11-12 2006-06-01 Taiyo Yuden Co Ltd Thin substrate carrier and its manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011009655A (en) * 2009-06-29 2011-01-13 Fujitsu Ltd Mounting apparatus and mounting method
JP7453183B2 (en) 2021-06-23 2024-03-19 東レエンジニアリング株式会社 Chip repair method and chip repair system

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