JP2009038274A5 - - Google Patents

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Publication number
JP2009038274A5
JP2009038274A5 JP2007202680A JP2007202680A JP2009038274A5 JP 2009038274 A5 JP2009038274 A5 JP 2009038274A5 JP 2007202680 A JP2007202680 A JP 2007202680A JP 2007202680 A JP2007202680 A JP 2007202680A JP 2009038274 A5 JP2009038274 A5 JP 2009038274A5
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JP
Japan
Prior art keywords
layer
titanium layer
substrate
piezoelectric
piezoelectric layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007202680A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009038274A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007202680A priority Critical patent/JP2009038274A/ja
Priority claimed from JP2007202680A external-priority patent/JP2009038274A/ja
Publication of JP2009038274A publication Critical patent/JP2009038274A/ja
Publication of JP2009038274A5 publication Critical patent/JP2009038274A5/ja
Withdrawn legal-status Critical Current

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JP2007202680A 2007-08-03 2007-08-03 圧電素子およびその製造方法、アクチュエータ、並びに、液体噴射ヘッド Withdrawn JP2009038274A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007202680A JP2009038274A (ja) 2007-08-03 2007-08-03 圧電素子およびその製造方法、アクチュエータ、並びに、液体噴射ヘッド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007202680A JP2009038274A (ja) 2007-08-03 2007-08-03 圧電素子およびその製造方法、アクチュエータ、並びに、液体噴射ヘッド

Publications (2)

Publication Number Publication Date
JP2009038274A JP2009038274A (ja) 2009-02-19
JP2009038274A5 true JP2009038274A5 (https=) 2010-08-12

Family

ID=40439908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007202680A Withdrawn JP2009038274A (ja) 2007-08-03 2007-08-03 圧電素子およびその製造方法、アクチュエータ、並びに、液体噴射ヘッド

Country Status (1)

Country Link
JP (1) JP2009038274A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5812243B2 (ja) * 2010-12-09 2015-11-11 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電素子、超音波デバイス及びｉｒセンサー
WO2025071476A1 (en) * 2023-09-26 2025-04-03 Agency For Science, Technology And Research Stacked arrangement, micro-electromechanical device and methods of forming the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4088817B2 (ja) * 2001-02-09 2008-05-21 セイコーエプソン株式会社 圧電体薄膜素子の製造方法、これを用いたインクジェットヘッド
JP2003298736A (ja) * 2002-03-29 2003-10-17 Tamura Electric Works Ltd 電話装置管理システム、サーバ装置、電話装置及びプログラム
JP4737375B2 (ja) * 2004-03-11 2011-07-27 セイコーエプソン株式会社 アクチュエータ装置の製造方法及び液体噴射ヘッドの製造方法並びに液体噴射装置の製造方法
JP2006245248A (ja) * 2005-03-02 2006-09-14 Seiko Epson Corp 圧電素子及びその製造方法、液体噴射ヘッド及びその製造方法並びに液体噴射装置
JP2007173605A (ja) * 2005-12-22 2007-07-05 Seiko Epson Corp 圧電素子の製造方法及び液体噴射ヘッドの製造方法

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