JP2009035359A - Thin-plate material conveying device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin-plate material conveying device capable of conveying a thin-plate material such as a glass substrate, positioning the material without using any alignment roller when changing the conveying direction by 90°, and rapidly and reliably turning and conveying the material. <P>SOLUTION: The thin-plate material conveying device 10 has a direction-changing air conveyor 16 for changing the conveying direction of a glass substrate to be conveyed by 90° between first and second straight-going air conveyors 14, 18. The direction-changing air conveyor has a plurality of direction-changing roller units 30 between air table units 20. Each direction-changing roller unit sucks the glass substrate by a suction pipe and brings it into contact with a feed roller 34. The axis of rotation of the feed roller is capable of changing the posture in a predetermined range within a horizontal plane. Four corners of the glass substrate at the direction-changed position are detected by four direction-changing position sensors 3A-3D, and the feed roller is driven by a position control device to correct the deviation from the direction-changed position. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention uses alignment cylinders and rollers when transporting a thin plate-like material such as a large thin glass substrate used in a flat panel display (FPD) such as a liquid crystal display (LCD) panel or a plasma display panel (PDP). The present invention relates to a thin plate material conveying apparatus that can accurately convey along a pass line.

  The glass substrate of flat panel displays such as liquid crystal displays and plasma displays has a large effect on quality even with a small amount of dust and dirt. It is required to smoothly convey along a predetermined conveying surface while maintaining a shape close to.

  One of such conveying means is a roller conveyor. When the conveying path is bent at a right angle, a conveyor that moves in a right angle direction is arranged between two linearly moving roller conveyors, and the glass substrate is turned at a right angle. In this case, the conveyor was raised and the pass line of the glass substrate was raised by about 20 to 50 mm.

  In addition, there are a mechanism for lifting and rotating the glass substrate at the intersection of two linearly moving roller conveyors arranged orthogonally, and a method for rotating the entire linearly moving roller conveyor. As the structure becomes larger, the structure becomes larger, the driving power and the manufacturing cost increase greatly, and the tact time is difficult to shorten.

  In addition, a transfer device is known in which a glass substrate is levitated using an air table and driven by the pressure of air and transferred in a non-contact manner instead of a roller conveyor (see, for example, Patent Document 1).

  In the case of such an air table, it is difficult to control the behavior of the glass substrate on the pressure air if the direction of conveyance is changed while the glass substrate is floated or the glass substrate itself is turned. Although it is conceivable to guide the edge of the floating glass substrate with a guide roller, the glass substrate has a thickness of 0.5 to 0 compared to a size of W2200 mm × L2500 mm in the eighth generation, for example. There is a problem that when the edge of the glass substrate collides with the guide roller due to inertia, the glass substrate is very thin and is about 7 mm. Therefore, conventionally, high-speed conveyance or high-speed direction change or high-speed turning of the glass substrate has not been possible.

  In addition, when a glass substrate is transported using a straight air conditioner bear consisting of an air table, the glass substrate is aligned with the center line of the pass line by pressing both ends of the glass substrate in the width direction using, for example, alignment cylinders and rollers. However, there is a problem that it is difficult to control a very thin glass substrate by pushing both side edges so that the glass substrate is not damaged.

  Similarly, a direction-changing air conditioner bear that receives a glass substrate from a straight air conditioner bear, changes its direction and turns and then transfers it to another straight air conditioner bear, but in this case, the center of the glass substrate, In order to make the direction change and turning center on the direction change air conditioner coincide with each other, it is necessary to provide, for example, four alignment cylinders and rollers as described above around the center. However, there are problems in that alignment takes time and high-speed and precise control is difficult.

JP-A-10-139160

  This invention enables a high-speed change or a high-speed turn in the conveyance direction of a thin plate material without using an alignment cylinder, a roller or the like while supporting and conveying the thin plate material in a non-contact manner using an air table unit. It is an object to provide a thin plate material conveying apparatus.

  In addition, when transporting a thin plate material on a straight air table, the widthwise alignment does not push the both end edges in the width direction of the thin plate material, and therefore damages both end edges in the width direction of the thin plate material. It is an object of the present invention to provide a thin plate-shaped material conveyance device that can adjust the position in the width direction without any trouble.

  Furthermore, in the direction changing air conditioner for changing the direction and turning of the glass substrate using an air fobble, the center of the thin plate material and the center at the time of changing the direction and turning are adjusted without using an alignment cylinder / roller. It is an object of the present invention to provide a thin plate material conveying device that can be matched with each other.

  The above-described problems can be solved by the following embodiments.

  (1) A straight air conditioner that linearly conveys along the pass line in a state where the thin plate-like material is floated by gas, and in the vicinity of both ends in the width direction of the straight air conditioner bear, At the center, both side edges in the width direction of the thin plate material, which are arranged at a plurality of locations in the transport direction at intervals equal to the width of the thin plate material and have been transported by the straight air conditioner bear, are at least one in the transport direction. A width direction sensor group that can be detected in two places in total, and a position control device to which a detection signal from the width direction sensor group is input. A plurality of air table units having a plurality of air supply holes, a plurality of transport roller units arranged between the plurality of air table units, and a thin plate material on the air table in the transport direction The conveyance roller unit and the width direction roller unit are configured to include a suction pipe made of a cylindrical body having an opening at the upper end, and the suction pipe. A feed roller that is rotatably supported around a rotation axis in a horizontal plane and whose upper end can be slightly protruded from the opening of the upper end of the suction pipe, and applies negative pressure to the suction pipe A negative pressure source, a vertical movement device that supports the feed roller so that the upper end of the feed roller is displaceable between a transport position where the upper end reaches the pass line of the thin plate material and a standby position lower than the pass line, and A negative pressure control device for turning on and off the negative pressure applied to the suction pipe from the negative pressure source, and the position control device is configured to perform the width direction based on the input detection signal. It drives the Rayunitto, lamellar material conveying apparatus characterized in that it is adapted to control the width direction position of the thin plate material.

  (2) The rectilinear roller unit has at least a pair of width direction roller units that are spaced apart from each other in the transport direction, and these width direction roller units are configured to transfer the thin plate material to the width direction phase. The thin plate material conveying apparatus according to (1), wherein the thin plate material material can be driven in different directions and can be aligned around the θ axis perpendicular to the surface thereof.

  (3) The width direction sensor group includes four width direction sensors arranged in the vicinity of the corners of the four corners of the rectangular thin plate-shaped material (1) or (2) ).

  (4) The feed roller in at least one of the transport roller unit and the width direction roller unit has an angle in the range of at least 90 ° around the vertical axis passing through the apex of the feed roller in the horizontal plane. The thin plate material conveying device according to any one of (1) to (3), wherein a feeding direction changing device is provided so as to be supported so as to be displaceable.

  (5) The negative pressure source is an exhaust blower, and an intake port of the exhaust blower is connected to a lower end opening of the suction pipe, and a motor for driving the feed roller is provided in the suction pipe. A drive unit including the vertical movement device that supports the feed roller so that the upper end of the feed roller can be displaced between a transport position that reaches the pass line of the thin plate material and a standby position that is lower than the pass line; and At least a motor among the feed direction changing devices for supporting the feed roller so that its rotational axis is angularly displaceable within a range of at least 90 ° around the vertical axis passing through the apex of the feed roller in the horizontal plane. The apparatus for conveying a thin plate material according to any one of (1) to (4), wherein

  (6) A rectilinear air conditioner that linearly conveys a thin plate-like material along a pass line in a state of being floated by a gas, and the vicinity of both ends in the width direction of the rectilinear air conditioner bear, with the pass line being the center As a result, the side edges of the thin plate material, which are disposed at a plurality of locations in the transport direction at intervals equal to the width of the thin plate material and are transported by the straight air conditioner bear, are at least one place in the transport direction. A width direction sensor group that detects at two locations and a position control device to which a detection signal of the width direction sensor group is input. The straight air conditioner bear has a plurality of air supply holes on a flat upper surface. A plurality of air table units, and a transport roller unit disposed between the plurality of air table units. The transport roller unit is a cylinder having an opening at the upper end. A suction pipe made of a body, a feed supported inside the suction pipe so as to be rotatable about a rotation axis in a horizontal plane, and having an upper end slightly projecting from an opening at the upper end of the suction pipe. The roller, the negative pressure source that applies negative pressure to the suction pipe, and the feed roller are angularly displaced within a range of at least 90 ° around the vertical axis passing through the apex of the feed roller in the horizontal plane. A feed direction changing device for supporting the feed roller so as to be freely displaceable between a transport position where the upper end of the feed roller reaches the pass line of the thin plate material and a standby position lower than the pass line. A vertical movement device for supporting, and a negative pressure control device for turning on / off a negative pressure applied to the suction pipe from the negative pressure source, wherein the position control device receives the input detection signal Originally Accordingly, the sheet-shaped material conveying apparatus is characterized in that the width-direction roller unit is driven to control the position of the sheet-shaped material in the width direction.

  (7) The negative pressure source is an exhaust blower, and an intake port of the exhaust blower is connected to a lower end opening of the suction pipe, and a motor for driving the feed roller is provided in the suction pipe. A drive unit including the vertical movement device that supports the feed roller so that the upper end of the feed roller can be displaced between a transport position that reaches the pass line of the thin plate material and a standby position that is lower than the pass line; and At least a motor among the feed direction changing devices for supporting the feed roller so that its rotational axis is angularly displaceable within a range of at least 90 ° around the vertical axis passing through the apex of the feed roller in the horizontal plane. The apparatus for conveying a thin plate material according to (6), wherein

  (8) A rectilinear air conditioner that linearly conveys a thin plate-like material in a state of being levitated by a gas, and a thin plate that is disposed facing the end of the straight air conditioner bear in the conveying direction and has been conveyed by the rectilinear air conditioner bear The direction change air conditioner for receiving the sheet material and changing the traveling direction of the received sheet material in a horizontal plane, and disposed on a position corresponding to the outer peripheral line of the sheet material on the direction changing conveyor, A conversion position sensor group capable of detecting at least three locations on the outer periphery of the thin plate material conveyed by the air conditioner bear, and a conversion position control device to which a detection signal from the conversion position sensor group is input. The direction changing air conditioner bears a plurality of air table units having a plurality of air supply holes on a flat upper surface, and a plurality of air table units. And a plurality of direction changing roller units disposed around a central point that becomes a turning center at the time of turning, the direction changing roller unit comprising a cylindrical body having an opening at an upper end. A pipe, a feed roller which is supported inside the suction pipe so as to be rotatable about a rotation axis in a horizontal plane, and whose upper end is slightly protruded from the opening of the upper end of the suction pipe; A negative pressure source for applying a negative pressure to the pipe, the feed roller so that its rotational axis can be angularly displaced within a range of at least 90 ° around the vertical axis passing through the top of the feed roller in the horizontal plane. Supporting feed direction changing device, supporting the feed roller so that its upper end is displaceable between a transport position reaching the pass line of the thin plate material and a standby position lower than the pass line. And a negative pressure control device that turns on and off the negative pressure applied to the suction pipe from the negative pressure source, and the conversion position control device includes the input detection signal. Based on the above, the first-direction direction changing roller unit is driven to control the position of the first thin plate-like material in the first-pass line direction, the position perpendicular to the first pass line, and the angular position around the shape center. A thin plate material conveying apparatus characterized by being made.

  (9) The sheet-like material conveyance according to (8), wherein the conversion position sensor group is arranged at positions corresponding to the four corners of the sheet-like material in a state in which the shape center coincides with the center point. apparatus.

  (10) The negative pressure source is an exhaust blower, and an intake port of the exhaust blower is connected to a lower end opening of the suction pipe, and a motor for driving the feed roller is provided in the suction pipe. A drive unit including the vertical movement device that supports the feed roller so that the upper end of the feed roller can be displaced between a transport position that reaches the pass line of the thin plate material and a standby position that is lower than the pass line; and At least a motor among the feed direction changing devices for supporting the feed roller so that its rotational axis is angularly displaceable within a range of at least 90 ° around the vertical axis passing through the apex of the feed roller in the horizontal plane. The thin plate material conveying apparatus according to any one of (6) to (9), wherein

  (11) A pair of the straight air conditioner bears are arranged on the direction changing air conditioner so that the conveying directions are orthogonal to each other, and an extension line at the center in the width direction of the pass line of the pair of straight air conditioner bears is the center point. The thin plate material conveying apparatus according to any one of (8) to (10), wherein the sheet material conveying apparatus is crossed.

  (12) The thin plate material conveying apparatus according to (11), wherein a plurality of the thin plate material conveying units are arranged at positions equidistant from the center point.

  According to the present invention, it is possible to accurately position and transport a thin plate material such as a glass substrate without using an alignment cylinder, a roller or the like.

  Preferred embodiments of the present invention will be described below in detail with reference to the drawings.

  As shown in FIG. 1, a thin plate material transport apparatus 10 according to this embodiment has a linear shape with a non-contact glass substrate (thin plate material) 12 for a large LCD, for example, from left to right in FIG. 1. Of the first straight air conditioner bear 14 conveyed along the horizontal pass line (indicated by the width direction center line P1), and the direction change air conditioner bearer connected to the right end in FIG. 16 and the direction change air conditioner bear 16 is connected to the upper end in FIG. 1 and linearly passes through the glass substrate 12 along the pass line P2 orthogonal to the pass line P1 of the first straight air conditioner bear 14. It is comprised from the 2nd straight advance air-conditioning bearer 18 which can be conveyed.

  In FIG. 1, reference numeral 1 is a first width direction sensor group, 2 is a second width direction sensor group, 3 is a conversion position sensor group, 5A, 5B and 5C are slow position sensors, 6A, 6B and 6C are stop positions. Each sensor is shown.

  The first width direction sensor group 1 is composed of two width direction sensors 1A and 1B. These width direction sensors 1A and 1B are composed of a reflection type or a transmission type photo sensor or the like, in the vicinity of both ends in the width direction of the first straight air conditioner bear 14 and centering on the pass line P1. The glass substrate 12 is disposed at a position equal to the width of the glass substrate 12 and at positions corresponding to both ends in the width direction in the intermediate direction of the glass substrate 12 in the conveyance direction in the conveyance direction, and has been conveyed by the first straight air conditioner bear 14. Further, both outer edges of the glass substrate 12 in the width direction can be detected at intermediate positions in the transport direction.

  Similarly to the above, the second width direction sensor group 2 is composed of two width direction sensors 2A and 2B, and these width direction sensors 2A and 2B are reflective or similar to the width direction sensors 1A and 1B. It is composed of a transmissive optical sensor or the like, is in the vicinity of the ends on both sides in the width direction of the second straight traveling air-conditioning bear 18, at an interval equal to the width of the glass substrate 12 around the pass line P3 and in the transport direction Then, it arrange | positions in the position corresponded in the width direction both ends in the conveyance direction intermediate part of the glass substrate 12 in a stop position, and conveys the width direction both ends of the glass substrate 12 conveyed by this 2nd rectilinear advance air conditioner 18 It is configured to be detectable at an intermediate position in the direction.

  The slow position sensors 5A to 5C and the stop position sensors 6A to 6C are each composed of a transmission type or a reflection type optical sensor, like the width direction sensor.

  The slow position sensor 5A and the stop position sensor 6A are arranged on the first straight traveling air conditioner 14 to detect that the leading edge of the glass substrate 12 being conveyed has reached the slow start position, and the stop position sensor 6A is The tip edge is detected when it reaches the stop position.

  Similarly, the slow speed position sensor 5B and the stop position sensor 6B are for detecting when the leading edge of the glass substrate 12 becomes the slow start position and the stop position on the direction change air conditioner bear 16. Further, the slow position sensor 5C and the stop position sensor 6C are used when the leading edge of the glass substrate 12 being conveyed becomes the slow start position and the stop position on the second straight air conditioner bear 18, respectively. It is supposed to detect.

  The change position sensor group 3 is composed of four change position sensors 3A to 3D. These change position sensors 3A to 3D are on the direction change air conditioner 16 when the glass substrate 12 is at the change start position. It is composed of a transmissive or reflective optical sensor that is arranged at positions corresponding to the tip corners of the four corners and optically detects them.

  The output signals of the width direction sensors 1A, 1B, 2A, 2B, the conversion position sensors 3A to 3D, the slowing position sensors 5A to 5C, and the stop position sensors 6A to 6C are sent to the position control device 4 as shown in FIG. It is designed to be entered.

  The first straight air conditioner bear 14 and the second straight air conditioner bear 18 are each configured by combining a plurality of air table units 20 and straight roller units 22. The direction changing air conditioner 16 is configured by combining a plurality of air table units 20 similar to the above and a direction changing roller unit 30.

  As shown in FIGS. 3 and 4, the air table unit 20 supplies air (gas) to the lower surface of the glass substrate 12 to support the glass substrate 12 in a non-contact manner, and an air table 26. A positive pressure generator 28 made of, for example, a blower for supplying positive pressure air to the table 26 is provided.

  The air table 26 is a substantially rectangular parallelepiped box-like body having a substantially flat upper surface portion 27, and a plurality of air supply holes 27 </ b> A for supplying air to the lower surface of the glass substrate 12 are formed in the upper surface portion 27. .

  The first and second straight air conditioner bears 14 and 18 are arranged in one row by arranging two to four air tables 26 in the longitudinal direction, and five rows (CV-1A to CV1E, CV-2A to CV-2E). ) Configured side by side. Further, among the five rows CV-1A, CV-1E, CV-2A, and CV-2E on the outer sides in the width direction, linearly moving roller units 22 are arranged between the air table units 20.

  Between the width direction sensors 1A and 1B in the middle of the rows CV-1B and CV-1D of the air table unit 20, and between the width direction sensors 2A and 2B in the middle of the rows CV-2B and CV-2D, Two of these width direction roller units 24 are arranged at the same position in the transport direction. These width direction roller units 24 are arranged so as to send the glass substrate 12 in a direction orthogonal to the pass lines P1 and P2, that is, in a width direction with respect to the transport direction.

  The direction change air conditioner bear 16 is connected to the rows CV-1A and CV-1E of the air table units 20 on both sides in the width direction in the conveying direction of the first straight air conditioner bear 14 and connected to two rows (CV-3A and CV-3E). ), And the rows CV-3A and CV-3E each include two air table units 20 and direction change roller units 30 provided between the air table units 20, respectively. Have.

  Further, between these two rows CV-3A and CV-3E, six rows of air table units 20A to 20F are arranged in parallel with the row of air table units 20 in the second straight traveling air conditioner bear 18, and in FIG. Direction between the first row and second row air table units 20A and 20B on the left side (first straight air conditioner 14 side) and between the fifth row and sixth row air table units 20E and 20F A conversion roller unit 30 is disposed. In addition, the air table unit 20 is also arranged outside the row CV-3E of the air table unit 20 (lower side in FIG. 1) so that it can float when the glass substrate 12 turns.

  The four direction changing roller units 30 in the direction change air conditioner bear 16 have the center point CR as an intersection point of the extension lines of the pass lines P1 and P2 of the first and second straight air conditioner bears 14 and 18. It is arrange | positioned so that it may be equidistant from, ie, the same circumference.

  Next, the detailed structure of the direction change unit 30 is demonstrated.

  As shown in FIGS. 5 and 6, the direction changing roller unit 30 includes a vertical suction pipe 32 having an opening 33A at the upper end, and a rotary shaft 34A in the horizontal plane inside the suction pipe 32. A feed roller 34 that is rotatably supported and whose upper end can slightly protrude from the opening 33A at the upper end of the suction pipe 32, and a blower 36 that is a negative pressure source that applies a negative pressure to the suction pipe 32. And is configured.

  The suction pipe 32 includes a small-diameter portion 32A that surrounds the vicinity of the feed roller 34, and a large-diameter portion 32B that is connected to the lower end of the small-diameter portion 32A and reaches the upper end surface of the blower 36 from here. Further, four brackets 32C are integrally formed on the upper portion of the large-diameter portion 32B of the suction pipe 32, and the transport surface including the pass lines P1 and P2 of the glass substrate 12 at the tip of the bracket 32C. It is fixed at a lower position (not shown).

  The direction changing roller unit 30 includes a feed roller vertical movement device 38. The feed roller vertical movement device 38 has a feed position where the top end of the feed roller 34 slightly protrudes from the top end surface 33B of the suction pipe 32 and reaches the pass lines P1 and P2 (see FIGS. 6 and 7). Further, the upper end is drawn below the upper end surface 33B and supported so as to be displaceable between the glass substrate 12 on the pass lines P1 and P2 and the non-contact standby position (see FIGS. 5 and 8). Yes.

  The feed roller vertical movement device 38 is arranged in the large diameter portion 32 </ b> B of the suction pipe 32, and is composed of a solenoid device provided on the substrate 40 fixed to the upper surface of the blower 36.

  The movable portion 38A of the feed roller vertical movement device 38, which is a solenoid device, can be moved up and down within a certain range with respect to the substrate 40. A support plate 39 is supported on the upper end of the movable portion 38A. A feed roller attitude control device 42 is supported on the lower side of the support plate 39 adjacent to the roller vertical movement device 38.

  The feed roller posture control device 42 has a posture control shaft 43 on a vertical center axis 32CL passing through the apex of the feed roller 34, and has a built-in device composed of, for example, a cam mechanism (not shown). 6, the vertical attitude control shaft 43 can be swung around the central axis 32CL within a range of at least 90 ° in the vertical state.

  The attitude control shaft 43 protrudes upward through the center of the support plate 39, and supports a roller support 44 and a drive motor 46 at its upper end.

  The roller support 44 includes a disk-shaped support base 45 provided at a position higher than the drive motor 46, and the rotation shaft 34 </ b> A of the feed roller 34 is horizontally supported on the support base 45.

  The feed roller 34 is a magnet roller, and is driven in a non-contact state by a drive magnet roller 35 rotatably supported by a support base 45 at the front surface position of the feed roller 34.

  The rotating shaft 35 </ b> A of the magnet roller 35 is directly connected to the driving shaft 46 </ b> A of the driving motor 46 and is rotationally driven by the driving motor 46.

  Further, the feed roller attitude control device 42 rotates in a plane parallel to the pass line P1 as shown in FIG. 8, and in a plane parallel to the pass line P2 as shown in FIG. The position can be adjusted in an angular range of at least 90 ° around the central axis 32CL so as to have a rotating posture.

  As shown in FIG. 10, the rectilinear roller unit 22 used in the first and second rectilinear air conditioners 14 and 18 is a rectilinear feed that can rotate in a vertical plane parallel to the respective pass lines P1 and P2. A roller 22A, a suction pipe 22B in the vertical direction whose upper end surface is arranged slightly lower than the upper end of the straight feed roller 22A, and a blower 22C which is arranged with an air supply hole connected to the lower end of the suction pipe 22B. A magnet drive roller 22D for driving the linear feed roller 22A as a magnet roller in a non-contact manner and a motor 22E for driving the magnet drive roller 22D are provided.

  The width-direction roller unit 24 is different only in that the feed direction of the width-direction feed roller 24A is set to a direction orthogonal to the straight-feed roller 22A in the straight-travel roller unit 22; Are the same.

  Next, the process of transporting the glass substrate 12 from the first straight air conditioner bear 14 to the second straight air conditioner 18 without turning here by the thin plate material conveying device 10 through the direction changing air conditioner 16. Will be described.

  First, the direction changing roller unit 30 in the direction changing air conditioner 16 is previously set so that the rotation surface of the feed roller 34 is parallel to the pass line P1 of the first straight air conditioner 14 as shown in FIGS. Keep it.

  Further, the width direction roller unit 24 is configured so that the glass substrate 12 is not sucked by making the blower 22C non-driven, that is, the glass substrate 12 is not in contact with the width direction feed roller 24A.

  When the glass substrate 12 on the first straight air conditioner bear 14 is floated by the positive pressure air ejected from the air table 26 and the blower 22C in the straight roller unit 22 is driven at this time, the suction pipe 22B Negative pressure acts on the lower surface of the glass substrate 12, and the glass substrate 12 is sucked so as to come into contact with the upper end of the linear feed roller 22A at the transport position.

  When the tip of the glass substrate 12 transported on the first straight air conditioner bear 14 reaches the position of the slowing position sensor 5A, the slowing position sensor 5A outputs a tip detection signal to the position control device 4 to control the position. The device 4 reduces the rotational speed of the motor 22E of the linear roller unit 22 to a slow conveyance state.

  When the tip of the glass substrate 12 in the slow-down state reaches the position of the stop position sensor 6A, the detection signal is output from the stop position sensor 6A to the position control device 4, and the position control device 4 moves straight ahead of the linear roller unit 22. The feed roller 22A is stopped. At this time, the blower 22C remains in the driving state, and the glass substrate 12 is fixed at that position.

  At this time, the width direction sensors 1A and 1B detect both ends of the glass substrate 12 in the width direction. If the glass substrate 12 is displaced in the width direction with respect to the pass line P1, the width direction sensor 1A. 1B cannot detect the edge of the glass substrate 12 in the width direction.

  Therefore, the position control device 4 can detect the displacement of the glass substrate 12 with respect to the pass line P1 depending on whether one of the width direction sensors 1A and 1B detects the glass substrate 12 and not one of them. .

  The position control device 4 drives the width-direction feed roller 24A in the width-direction roller unit 24 in a direction to correct the deviation until both the width-direction sensors 1A and 1B detect the glass substrate 12, and the position of the glass substrate 12 is increased. The center in the width direction is matched with the pass line P1. At this time, the width-direction roller unit 24 drives the blower 22C to place the glass substrate 12 in a suction state so as to come into contact with the width-direction feed roller 24A. When the width-direction feed roller 24A is driven, the glass substrate 12 is driven in the width direction. When the glass substrate 12 is driven by the width direction feed roller 24A, the drive of the blower 22C of the linear roller unit 22 is stopped so that the glass substrate 12 and the linear feed roller 22A are not in contact with each other.

  After correcting the position in the width direction of the glass substrate 12, suction by the blower in the width direction roller unit 24 is stopped so that the width direction feed roller 24A and the glass substrate 12 are not in contact with each other.

  If positive pressure air is supplied in advance from the air table 26 in the direction change air conditioner 16, the glass substrate 12 moves smoothly onto the direction change air conditioner 16. At this time, when a negative pressure is applied from the blower 36 to the suction pipe 32 in the direction changing roller unit 30, the glass substrate 12 is sucked toward the feed roller 34 rotated by the drive magnet roller 35, and the contact pressure reliably It is conveyed to.

In the direction changing roller unit 30, the feed roller 34 is set in advance by the feed roller vertical movement device 38 so that the upper end of the feed roller 34 is at the transport position slightly protruding from the upper end surface 33 </ b> B of the suction pipe 32.

  When the glass substrate 12 moves on the direction changing air conditioner 16 and the tip of the glass substrate 12 reaches the slowing position sensor 5B, the feed roller 34 becomes slowing speed, and when the glass substrate 12 moves to the position of the stop position sensor 6B, The conveyance by the roller 34 is stopped, and then the application of the negative pressure is stopped, and the feed roller 34 is lowered to the standby position by the feed roller vertical movement device 38.

  In this standby position state, in two of the four direction change roller units 30 on the pass line P1, the feed roller attitude control device 42 is operated, and the feed roller 34 is controlled via the attitude control shaft 43. The rotating shaft 34A is rotated by 90 ° around the central axis 32CL, and as shown in FIG. 11, the rotating surface of the feed roller 34 is the same as the rotating surface of the rectilinear feed roller 22A in the second rectilinear air conditioner 18 and the pass line P2. Try to be parallel.

  At this time or before and after, the change position sensors 3 </ b> A to 3 </ b> D detect the coincidence between the center of the glass substrate 12 and the center point CR or the deviation thereof, and the position control device 4 detects the four direction change roller units 30. Is driven to rotate the glass substrate 12 or two of the four substrates are driven to drive the glass substrate in the direction of the pass line P1 and / or P2, and the center of the glass substrate 12 and the first The center of the second straight traveling air conditioner bears 14 and 18 (pass lines P1 and P2) and the center point CR of the direction changing air conditioner bear 16 are aligned.

  Next, after the feed roller 34 of the direction changing roller unit 30 whose rotation surface of the feed roller 34 is parallel to the pass line P1 is lowered to the standby position, the rotation surface thereof becomes parallel to the pass line P2. To.

  Furthermore, the feed roller 34 is moved up to the transport position by the feed roller vertical movement device 38, and at the same time, the blower 36 is activated to apply a negative pressure to the glass substrate 12, and the glass substrate 12 is moved to the upper end of the feed roller 34. Contact. In this state, the feed roller 34 is driven so that the glass substrate 12 moves in the direction of the second straight air conditioner bear 18 (see FIG. 12).

  The second rectilinear air conditioner 18 is driven in advance in the feed direction with the rectilinear feed roller 22A as the transport position, and negative pressure is applied to the suction pipe 22B by the blower 22C in advance.

  By driving the feed roller 34, the glass substrate 12 moves from the direction changing air conditioner bear 16 to the second straight air conditioner bear 18 and is further moved upward in FIGS. 1 and 12 by the second straight advance air conditioner bear 18. When the tip of the glass substrate 12 is moved along the pass line P2 and reaches the position of the slow position sensor 5C, the transport speed of the glass substrate 12 becomes the slow speed as described above, and the glass substrate 12 moves further. Then, it stops at the position of the stop position sensor 6C.

  Here, as on the first straight air conditioner bear 14, the width direction side edges of the glass substrate 12 are detected by the width direction sensors 2 </ b> A and 2 </ b> B, and according to the detection signal, the position control device 4 The position of the glass substrate 12 in the width direction is adjusted by the width-direction roller unit 24 in which the width-direction feed roller 24A is raised, and the glass substrate 12 is then lowered and further conveyed, and the conveyance ends.

  In the process of transporting the glass substrate 12, the transport direction is changed by 90 ° without rotating the glass substrate 12. Next, the glass substrate 12 is transported by rotating 90 ° on the direction change air conditioner bear 16. The process will be described.

  This glass substrate transfer process is the same as that described above from the state shown in FIG. 1 to the state shown in FIG.

  When the glass substrate 12 is swung on the direction change air conditioner bear 16, the direction change roller unit is changed from the state in which the glass substrate 12 is transferred onto the feed roller 34 in the direction change air conditioner bear 16 in the state shown in FIG. In this state, the application of the negative pressure to 30 and the feed roller 34 as the transport position, the four feed rollers 34 in the direction-changing air conditioner 16 are made to react with the glass substrate 12 as shown in FIG. Drive in the same direction to rotate clockwise. Then, the glass substrate 12 is rotated around the center point CR of the direction-changing air conditioner bear 16, and when the glass substrate 12 is rotated 90 ° counterclockwise, the glass substrate 12 stops turning.

  The conversion position sensors 3 </ b> A to 3 </ b> D detect coincidence between the center of the glass substrate 12 and the center point CR or a deviation thereof, and the position controller 4 corrects the deviation.

  Next, the pair of feed rollers 34 on the pass line P2 in the direction change air conditioner 16 are rotated by the feed roller attitude control devices 42 so that the rotation surface becomes a vertical plane parallel to the pass line P2 ( (See FIG. 12). At this time, the feeding roller 34 is set to the standby position and the application of the negative pressure is stopped as described above.

  After turning 90 °, application of negative pressure is started, and when the feed roller 34 is rotated in this state with the feed roller 34 as the transport position, the glass substrate 12 is moved from the direction change air conditioner bear 16 to the second straight air conditioner. It is transferred onto the bear 18 and conveyed as it is. The correction of the position in the width direction of the glass substrate 12 by the width direction sensors 2A and 2B in the middle is the same as described above.

  In the above-described embodiment, the linear roller unit 22 has the rotation surface of the linear feed roller 22A in the pass line direction, and the width roller unit 24 has the rotation surface of the width direction feed roller 24A orthogonal to the pass line. However, one or both of the linearly moving roller unit 22 and the width direction roller unit 24 are configured in the same manner as the direction changing roller unit 30, and the same feed roller has a pass line direction or a pass line. You may make it have a rotating surface in the orthogonal direction.

  Further, the linear air conditioner bearer may be provided with a linear roller unit having the same configuration as the direction changing roller unit 30 without providing the width direction roller unit.

  In this case, as shown in FIG. 14, a direction changing roller unit 50 is provided in place of the linearly moving roller unit, and the feed roller 52 has a rotation surface that is a pass line when the glass substrate 12 is conveyed along the pass line. When the position in the width direction of the glass substrate 12 is adjusted in parallel and based on a signal detected by the position sensor, the rotation surface of the feed roller 52 is set to a direction orthogonal to the pass line.

  Furthermore, in the said embodiment, although the 1st, 2nd width direction sensor groups 1 and 2 are both comprised from two width direction sensors, this invention is not limited to this, For example, In addition, the both side ends of the glass substrate in the width direction may be constituted by four width direction sensors that detect two places in the transport direction, for a total of four places. In addition, the detection position by the width direction sensor is set at an intermediate position in the conveyance direction of the glass substrate 12, which is the both ends in the width direction at the front edge of the glass substrate 12 or both ends in the width direction at the rear edge. Also good.

  FIG. 15 shows another embodiment of the straight air conditioner bear, the width direction sensor group, and the width direction roller unit in the thin plate material conveying apparatus.

  In this embodiment, the width direction sensor group includes four width direction sensors 1C, 1D, 1E, and 1F, and these detect corners of the four corners of the glass substrate 12 at the stop position. Has been placed. Further, the width direction roller unit 25 is provided at two positions separated in the transport direction along the pass line P1, and the width direction feed roller 25A of the width direction roller unit 25 is indicated by an arrow in FIG. In addition, they can be rotated in different directions. Other configurations including the width-direction feed roller 25A in the width-direction roller unit 25 are the same as those of the width-direction roller unit 24, and thus description thereof is omitted.

  In this embodiment, the four width direction sensors 1C to 1F can detect the shift of the corners of the four corners of the glass substrate 12 at the stop position. In addition to the deviation in the orthogonal direction, a deviation (θ) around the central axis (θ axis) of the glass substrate 12 as shown in FIG. 15 can also be detected indirectly.

  In the case of FIG. 14, the glass substrate 12 is in a state shifted by an angle θ counterclockwise around the center point.

  In the case of the illustrated embodiment, when the pass line P1 is viewed from the left side in FIG. 14, the front width direction feed roller 25A is rotated clockwise, and the rear width direction feed roller 25A is rotated counterclockwise. By doing so, the shift angle θ around the central axis of the glass substrate 12 can be corrected.

  The change position sensors 3A to 3D do not have to detect the corners of the four corners of the glass substrate 12, and may detect the side edges of the four sides, or a change position sensor group. 3 should just be comprised from at least 3 conversion position sensors.

  Further, in the above embodiment, the direction changing roller unit 30 is configured such that the feed roller 34 moves up and down with respect to the upper end surface 32B of the suction pipe 32, but the present invention is limited to this. Instead of this, the feed roller 34 may be moved up and down together with the suction pipe 32.

  Similarly, the rotation surface of the feed roller 34 is rotated around the central axis 32CL by the feed roller attitude control device 42. However, the present invention is not limited to this, and if necessary, the feed roller 34. As long as the rotating shaft 34A can be rotated in a horizontal plane so that its feeding direction is changed by 90 °, the feeding roller 34 and its rotating shaft 34A are rotated together with the suction pipe 32. Also good.

  Further, the configurations of the feed roller vertical movement device and the feed roller posture control device in the feed roller posture control device 42 are not limited to the example of the embodiment, and may be other configurations. For example, a cam mechanism, a rotary solenoid, a pneumatic actuator, or the like may be used.

Schematic plan view showing a thin plate material conveying apparatus according to an embodiment of the present invention Block diagram showing the control system of the thin plate material conveying device Schematic sectional view showing an air table unit in a straight air conditioner bearer in the thin plate material conveying apparatus Sectional drawing which expands and shows the air table unit The perspective view made into the partial cross section which shows the direction change roller unit used for the direction change air-conditioning bear of the same thin plate-shaped material conveyance apparatus. The perspective view which shows the same direction change roller unit in the state which removed the pipe for suction Sectional drawing which shows typically the state of the conveyance position where a feed roller contacts a glass substrate in the same direction change roller unit Sectional view similar to FIG. 6 showing the state of the standby position of the feed roller Sectional view similar to FIG. 6 schematically showing a state in which the feed roller of the same direction changing roller unit is changed by 90 °. Sectional drawing which shows typically the rectilinear roller unit used for the rectilinear air conditioner bear in the embodiment The top view which shows typically the 1st process which changes the conveyance direction of a glass substrate 90 degrees with the same thin plate-shaped material conveyance apparatus. Plan view schematically showing the second process The top view which shows typically the 1st process of turning and conveying a glass substrate 90 degrees in the middle by the same thin plate material conveying apparatus. The perspective view which shows other embodiment of the direction change air-conditioning bear in the same thin plate-shaped material conveyance apparatus. The top view which shows typically other embodiment of a straight advance air conditioner bear

Explanation of symbols

P1, P2 ... pass line 1 ... first width direction sensor group 2 ... second width direction sensor group 1A-1F, 2A, 2B ... width direction sensor 3 ... conversion position sensor group 3A-3D ... conversion position sensor 4 ... Position control device 5A to 5C ... Grazing position sensor 6A to 6C ... Stop position sensor CR ... Center point 10 ... Thin plate material conveying device 12 ... Glass substrate (thin plate material)
DESCRIPTION OF SYMBOLS 14 ... 1st straight advance air conditioner bear 16 ... Direction change air conditioner bear 18 ... 2nd straight advance air conditioner bear 20 ... Air table unit 22 ... Straight advance roller unit 22A ... Straight feed roller 24, 25 ... Width direction roller unit 24A, 25A ... Width Direction feed roller 26 ... Air table 27 ... Upper surface portion 27A ... Air supply hole 28 ... Positive pressure generator 30, 50 ... Direction changing roller unit 32 ... Suction pipe 32CL ... Center axis 33A ... Opening 33B ... Upper end surface 34, 52 ... Feed Roller 34A ... Rotating shaft 35 ... Drive magnet roller 36 ... Blower 38 ... Feed roller vertical motion device 42 ... Feed roller attitude control device 46 ... Drive motor

Claims (12)

A straight air conditioner that linearly conveys along the pass line in a state where the thin plate material is levitated by gas,
Near the ends of both sides of the straight air conditioner in the width direction, with the pass line as the center, at intervals equal to the width of the thin plate-like material and at a plurality of locations in the transport direction, A width direction sensor group capable of detecting at least one edge in the width direction of the sheet-shaped material that has been conveyed at least one position in the width direction;
A position control device to which a detection signal from the width direction sensor group is input,
The straight air conditioner bears a plurality of air table units having a plurality of air supply holes on a flat upper surface, a plurality of transport roller units arranged between the plurality of air table units, and a thin plate shape on the air table A width direction roller unit configured to be movable in a width direction orthogonal to the conveying direction,
The transport roller unit and the width direction roller unit are supported by a suction pipe made of a cylindrical body having an opening at the upper end, and are rotatably supported around a rotation axis in a horizontal plane inside the suction pipe, and A feed roller whose upper end can be slightly protruded from an opening at the upper end of the suction pipe, a negative pressure source for applying a negative pressure to the suction pipe, and the feed roller, the upper end of which is made of the thin plate material. A vertical movement device that is displaceably supported between a transport position that reaches the pass line and a standby position that is lower than the pass line, and a negative pressure applied to the suction pipe from the negative pressure source. A negative pressure control device that turns off,
The position control device drives the width direction roller unit on the basis of the input detection signal to control the position in the width direction of the sheet material. . In claim 1,
The rectilinear roller unit has at least a pair of width direction roller units spaced apart in the transport direction,
These width-direction roller units are characterized in that the thin plate material is driven in different directions in the width direction so that the thin plate material can be aligned around the θ axis perpendicular to the surface thereof. A thin plate material conveying device. In claim 1 or 2,
The width-direction sensor group includes four width-direction sensors arranged in the vicinity of the corners of the four corners of the rectangular thin-plate material. In any one of Claims 1 thru | or 3,
The feed roller in at least one of the transport roller unit and the width direction roller unit can be angularly displaceable within a range of at least 90 ° around the vertical axis passing through the apex of the feed roller in the horizontal plane. A thin plate material conveying device characterized in that a feeding direction changing device is provided to support it. In any one of Claims 1 thru | or 4,
The negative pressure source is an exhaust blower, and an intake port of the exhaust blower is connected to a lower end opening of the suction pipe,
In the suction pipe, a driving device including a motor for driving the feed roller, the feed roller, the upper end of the feed roller is lower than the transport position and the pass line reaching the pass line of the thin plate material. A vertical movement device that supports the movable roller so as to be displaceable with respect to the standby position, and the feed roller in a range of at least 90 ° around the vertical axis passing through the apex of the feed roller in the horizontal plane. An apparatus for conveying a thin plate material, characterized in that at least a motor is arranged among the feed direction changing devices that are supported so as to be freely angularly displaceable. A straight air conditioner that linearly conveys a thin plate-like material along a pass line in a state of being levitated by gas;
Near the ends of both sides of the straight air conditioner in the width direction, with the pass line as the center, at intervals equal to the width of the thin plate-like material and at a plurality of locations in the transport direction, A width direction sensor group that detects both side edges of the thin plate material that has been conveyed at least at one location in the conveyance direction, a total of two locations;
A position control device to which a detection signal of the width direction sensor group is input,
The straight air conditioner bearer is configured to include a plurality of air table units having a plurality of air supply holes on a flat upper surface, and a transfer roller unit disposed between the plurality of air table units,
The transport roller unit is
A suction pipe made of a cylindrical body having an opening at the upper end, supported inside the suction pipe so as to be rotatable around a rotation axis in a horizontal plane, and the upper end is more than the opening at the upper end of the suction pipe. A feed roller that can be slightly protruded, a negative pressure source that applies a negative pressure to the suction pipe, and the feed roller having a rotation axis around the vertical axis passing through the top of the feed roller in the horizontal plane. A feed direction changing device that supports angular displacement within a range of at least 90 °, and a standby position where the upper end of the feed roller reaches the pass line of the thin plate material and the pass line. An up-and-down movement device that is displaceably supported between positions, and
A negative pressure control device for turning on and off the negative pressure applied to the suction pipe from the negative pressure source,
The position control device drives the width direction roller unit on the basis of the input detection signal to control the position in the width direction of the sheet material. . In claim 6,
The negative pressure source is an exhaust blower, and an intake port of the exhaust blower is connected to a lower end opening of the suction pipe,
In the suction pipe, a driving device including a motor for driving the feed roller, the feed roller, the upper end of the feed roller is lower than the transport position and the pass line reaching the pass line of the thin plate material. A vertical movement device that supports the movable roller so as to be displaceable with respect to the standby position, and the feed roller in a range of at least 90 ° around the vertical axis passing through the apex of the feed roller in the horizontal plane. An apparatus for conveying a thin plate material, characterized in that at least a motor is arranged among the feed direction changing devices that are supported so as to be freely angularly displaceable. A straight air conditioner that straightly conveys the thin plate material in a state of being levitated by gas,
A direction-changing air conditioner arranged facing the end in the conveying direction of the straight air conditioner bearer, receiving the thin plate material conveyed by the straight air conditioner bearer and changing the traveling direction of the received thin plate material in a horizontal plane With the bear,
A change position sensor group that is disposed at a position corresponding to the outer circumferential line of the thin plate material on the direction change conveyor and that can detect at least three locations on the outer circumference of the thin plate material that has been conveyed by the straight air conditioner bear,
A change position control device to which a detection signal from the change position sensor group is input,
The direction change air conditioner bears a plurality of air table units having a plurality of air supply holes on a flat upper surface, and is disposed between the plurality of air table units so as to surround a center point that becomes a change center at the time of the direction change. A plurality of direction changing roller units,
The direction changing roller unit is a suction pipe made of a cylindrical body having an opening at the upper end, and is supported inside the suction pipe so as to be rotatable about a rotation axis in a horizontal plane, and the upper end is the suction pipe. A feed roller that can project slightly from the opening at the upper end of the pipe, a negative pressure source that applies a negative pressure to the suction pipe, and the feed roller. A feed direction changing device that supports the feed roller so as to be angularly displaceable within a range of at least 90 ° around the vertical axis passing through the apex, the feed position of the feed roller reaching the pass line of the thin plate material, and the feed roller An up-and-down movement device that is supported so as to be displaceable between a standby position lower than the pass line, and
A negative pressure control device for turning on and off the negative pressure applied to the suction pipe from the negative pressure source,
The change position control device drives the direction change roller unit based on the input detection signal, and the position of the thin plate material in the pass line direction, the position in the direction orthogonal to the pass line, and An apparatus for conveying a thin plate material, characterized in that the angular position around the center of the shape is controlled. In claim 8,
The thin plate-shaped material conveyance device, wherein the conversion position sensor group is disposed at positions corresponding to the four corners of the thin-plate material in a state where the shape center coincides with the center point. In claim 8 or 9,
The negative pressure source is an exhaust blower, and an intake port of the exhaust blower is connected to a lower end opening of the suction pipe,
In the suction pipe, a driving device including a motor for driving the feed roller, the feed roller, the upper end of the feed roller is lower than the transport position and the pass line reaching the pass line of the thin plate material. A vertical movement device that supports the movable roller so as to be displaceable with respect to the standby position, and the feed roller in a range of at least 90 ° around the vertical axis passing through the apex of the feed roller in the horizontal plane. Of the feed direction changing devices that are supported so as to be freely angularly displaceable, at least a motor is disposed. In any one of Claims 8 thru | or 10.
A pair of the straight air conditioner bears are arranged on the direction changing air conditioner so that the conveying directions are orthogonal to each other, and an extension line at the center of the pair of straight air conditioner bears in the width direction intersects at the center point. A thin plate-shaped material conveying device characterized by being made. In claim 11,
A thin plate-shaped material conveyance device, wherein a plurality of the thin-plate material conveyance units are arranged at positions equidistant from the center point.

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