JP2009031536A5 - - Google Patents
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- Publication number
- JP2009031536A5 JP2009031536A5 JP2007195513A JP2007195513A JP2009031536A5 JP 2009031536 A5 JP2009031536 A5 JP 2009031536A5 JP 2007195513 A JP2007195513 A JP 2007195513A JP 2007195513 A JP2007195513 A JP 2007195513A JP 2009031536 A5 JP2009031536 A5 JP 2009031536A5
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- JP
- Japan
- Prior art keywords
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000463 material Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910021417 amorphous silicon Inorganic materials 0.000 claims 1
- 239000002041 carbon nanotube Substances 0.000 claims 1
- 229910021393 carbon nanotube Inorganic materials 0.000 claims 1
- 239000000470 constituent Substances 0.000 claims 1
- 239000011159 matrix material Substances 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 229920005591 polysilicon Polymers 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007195513A JP2009031536A (ja) | 2007-07-27 | 2007-07-27 | スキャナ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007195513A JP2009031536A (ja) | 2007-07-27 | 2007-07-27 | スキャナ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009031536A JP2009031536A (ja) | 2009-02-12 |
| JP2009031536A5 true JP2009031536A5 (https=) | 2010-07-01 |
Family
ID=40402106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007195513A Withdrawn JP2009031536A (ja) | 2007-07-27 | 2007-07-27 | スキャナ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009031536A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20110044860A (ko) * | 2008-08-07 | 2011-05-02 | 세키스이가가쿠 고교가부시키가이샤 | 절연 시트 및 적층 구조체 |
| JP7247553B2 (ja) * | 2018-11-29 | 2023-03-29 | 株式会社リコー | 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び車両 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4366778B2 (ja) * | 1999-09-02 | 2009-11-18 | ソニー株式会社 | マイクロミラーの製造方法 |
| JP2003057566A (ja) * | 2001-08-16 | 2003-02-26 | Furukawa Electric Co Ltd:The | 可変群遅延補償器 |
| JP3970066B2 (ja) * | 2002-03-18 | 2007-09-05 | オリンパス株式会社 | 光偏向器及び電磁型アクチュエータ |
| JP2005208608A (ja) * | 2003-12-26 | 2005-08-04 | Sumitomo Precision Prod Co Ltd | マイクロミラースキャナーとその制御方法 |
| JP2005308820A (ja) * | 2004-04-16 | 2005-11-04 | Sumitomo Precision Prod Co Ltd | 静電駆動型ｍｅｍｓミラースキャナ |
| JP2006058682A (ja) * | 2004-08-20 | 2006-03-02 | Yokogawa Electric Corp | 光反射素子およびこれを用いた光学装置 |
| JP4789456B2 (ja) * | 2004-12-07 | 2011-10-12 | 日本信号株式会社 | プレーナ型アクチュエータ |
| US7855825B2 (en) * | 2005-04-15 | 2010-12-21 | Panasonic Corporation | Micromachine structure system and method for manufacturing same |
| JP4582043B2 (ja) * | 2006-03-31 | 2010-11-17 | 日本ビクター株式会社 | 光偏向子、光偏向器、及び表示装置 |
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2007
- 2007-07-27 JP JP2007195513A patent/JP2009031536A/ja not_active Withdrawn