JP2009025007A5 - - Google Patents

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Publication number
JP2009025007A5
JP2009025007A5 JP2007185304A JP2007185304A JP2009025007A5 JP 2009025007 A5 JP2009025007 A5 JP 2009025007A5 JP 2007185304 A JP2007185304 A JP 2007185304A JP 2007185304 A JP2007185304 A JP 2007185304A JP 2009025007 A5 JP2009025007 A5 JP 2009025007A5
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JP
Japan
Prior art keywords
electronic component
guide hole
guide pin
air outlet
inlet passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007185304A
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English (en)
Japanese (ja)
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JP4826818B2 (ja
JP2009025007A (ja
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Priority to JP2007185304A priority Critical patent/JP4826818B2/ja
Priority claimed from JP2007185304A external-priority patent/JP4826818B2/ja
Publication of JP2009025007A publication Critical patent/JP2009025007A/ja
Publication of JP2009025007A5 publication Critical patent/JP2009025007A5/ja
Application granted granted Critical
Publication of JP4826818B2 publication Critical patent/JP4826818B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007185304A 2007-07-17 2007-07-17 位置決め装置のメンテナンス方法、位置決め装置及びｉｃハンドラ。 Expired - Fee Related JP4826818B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007185304A JP4826818B2 (ja) 2007-07-17 2007-07-17 位置決め装置のメンテナンス方法、位置決め装置及びｉｃハンドラ。

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007185304A JP4826818B2 (ja) 2007-07-17 2007-07-17 位置決め装置のメンテナンス方法、位置決め装置及びｉｃハンドラ。

Publications (3)

Publication Number Publication Date
JP2009025007A JP2009025007A (ja) 2009-02-05
JP2009025007A5 true JP2009025007A5 (https=) 2010-07-08
JP4826818B2 JP4826818B2 (ja) 2011-11-30

Family

ID=40396966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007185304A Expired - Fee Related JP4826818B2 (ja) 2007-07-17 2007-07-17 位置決め装置のメンテナンス方法、位置決め装置及びｉｃハンドラ。

Country Status (1)

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JP (1) JP4826818B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103454568B (zh) * 2013-09-03 2015-09-09 南京华鼎电子有限公司 一种通过温度测量监测led照明用灯运行状态的方法
KR102332339B1 (ko) 2015-07-08 2021-12-01 삼성전자주식회사 진공 소켓 및 이를 포함하는 반도체 검사 장비
KR101970805B1 (ko) * 2017-06-13 2019-04-19 프라임텍 주식회사 정밀성을 향상시킨 핀블럭

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55154459A (en) * 1979-05-19 1980-12-02 Koyo Seiko Co Ltd Flaw detecting method of steel product
JP2000221235A (ja) * 1999-02-01 2000-08-11 Nec Eng Ltd 半導体検査装置
JP2001108428A (ja) * 1999-10-05 2001-04-20 Tokyo Seimitsu Co Ltd 空気マイクロメータ
JP3823848B2 (ja) * 2002-02-28 2006-09-20 セイコーエプソン株式会社 Ｉｃ吸着ハンドおよびｉｃテストハンドラ

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