JP2009019270A - Surface roughening agent - Google Patents
Surface roughening agent Download PDFInfo
- Publication number
- JP2009019270A JP2009019270A JP2008153066A JP2008153066A JP2009019270A JP 2009019270 A JP2009019270 A JP 2009019270A JP 2008153066 A JP2008153066 A JP 2008153066A JP 2008153066 A JP2008153066 A JP 2008153066A JP 2009019270 A JP2009019270 A JP 2009019270A
- Authority
- JP
- Japan
- Prior art keywords
- surface roughening
- acid
- aminotetrazole
- roughening agent
- copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000007788 roughening Methods 0.000 title claims abstract description 71
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 61
- 229910052802 copper Inorganic materials 0.000 claims abstract description 49
- -1 tetrazol compound Chemical class 0.000 claims abstract description 28
- ULRPISSMEBPJLN-UHFFFAOYSA-N 2h-tetrazol-5-amine Chemical compound NC1=NN=NN1 ULRPISSMEBPJLN-UHFFFAOYSA-N 0.000 claims abstract description 22
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical compound OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims abstract description 19
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 49
- 239000010949 copper Substances 0.000 claims description 48
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 26
- 229910045601 alloy Inorganic materials 0.000 claims description 22
- 239000000956 alloy Substances 0.000 claims description 22
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 14
- 239000002738 chelating agent Substances 0.000 claims description 14
- 239000002253 acid Substances 0.000 claims description 7
- HWHNFJYQDMSYAF-UHFFFAOYSA-N 1,5-dimethyltetrazole Chemical compound CC1=NN=NN1C HWHNFJYQDMSYAF-UHFFFAOYSA-N 0.000 claims description 3
- ULIDRMKBVYYVIQ-UHFFFAOYSA-N 1-phenyltetrazol-5-amine Chemical compound NC1=NN=NN1C1=CC=CC=C1 ULIDRMKBVYYVIQ-UHFFFAOYSA-N 0.000 claims description 3
- SZHQPBJEOCHCKM-UHFFFAOYSA-N 2-phosphonobutane-1,2,4-tricarboxylic acid Chemical compound OC(=O)CCC(P(O)(O)=O)(C(O)=O)CC(O)=O SZHQPBJEOCHCKM-UHFFFAOYSA-N 0.000 claims description 3
- ZHCLIFKUVIFYBY-UHFFFAOYSA-N 2h-tetrazol-5-ylmethanamine Chemical compound NCC1=NN=NN1 ZHCLIFKUVIFYBY-UHFFFAOYSA-N 0.000 claims description 3
- KYRMPMCAOPMOIR-UHFFFAOYSA-N 5-ethyl-2h-tetrazole Chemical compound CCC=1N=NNN=1 KYRMPMCAOPMOIR-UHFFFAOYSA-N 0.000 claims description 3
- XZGLNCKSNVGDNX-UHFFFAOYSA-N 5-methyl-2h-tetrazole Chemical compound CC=1N=NNN=1 XZGLNCKSNVGDNX-UHFFFAOYSA-N 0.000 claims description 3
- DBVJJBKOTRCVKF-UHFFFAOYSA-N Etidronic acid Chemical compound OP(=O)(O)C(O)(C)P(O)(O)=O DBVJJBKOTRCVKF-UHFFFAOYSA-N 0.000 claims description 3
- YDONNITUKPKTIG-UHFFFAOYSA-N [Nitrilotris(methylene)]trisphosphonic acid Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CP(O)(O)=O YDONNITUKPKTIG-UHFFFAOYSA-N 0.000 claims description 3
- 150000003536 tetrazoles Chemical class 0.000 claims description 3
- GTKOKCQMHAGFSM-UHFFFAOYSA-N 1-methyltetrazol-5-amine Chemical compound CN1N=NN=C1N GTKOKCQMHAGFSM-UHFFFAOYSA-N 0.000 claims description 2
- MTBUOESFHRORQT-UHFFFAOYSA-N 5-(2-methylphenyl)-2h-tetrazole Chemical compound CC1=CC=CC=C1C1=NNN=N1 MTBUOESFHRORQT-UHFFFAOYSA-N 0.000 claims description 2
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 claims description 2
- JAHCQVVOKAFXQU-UHFFFAOYSA-N 5-propyl-2h-tetrazole Chemical compound CCCC=1N=NNN=1 JAHCQVVOKAFXQU-UHFFFAOYSA-N 0.000 claims description 2
- 229940120146 EDTMP Drugs 0.000 claims description 2
- KIDJHPQACZGFTI-UHFFFAOYSA-N [6-[bis(phosphonomethyl)amino]hexyl-(phosphonomethyl)amino]methylphosphonic acid Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CCCCCCN(CP(O)(O)=O)CP(O)(O)=O KIDJHPQACZGFTI-UHFFFAOYSA-N 0.000 claims description 2
- ZYHQGITXIJDDKC-UHFFFAOYSA-N 2-[2-(2-aminophenyl)ethyl]aniline Chemical group NC1=CC=CC=C1CCC1=CC=CC=C1N ZYHQGITXIJDDKC-UHFFFAOYSA-N 0.000 claims 1
- 229920005989 resin Polymers 0.000 abstract description 18
- 239000011347 resin Substances 0.000 abstract description 18
- 229910000881 Cu alloy Inorganic materials 0.000 abstract description 11
- 230000003647 oxidation Effects 0.000 abstract description 6
- 238000007254 oxidation reaction Methods 0.000 abstract description 6
- 239000013522 chelant Substances 0.000 abstract 1
- 229940116254 phosphonic acid Drugs 0.000 abstract 1
- 238000005530 etching Methods 0.000 description 18
- 239000000758 substrate Substances 0.000 description 16
- 229910000679 solder Inorganic materials 0.000 description 15
- 239000002390 adhesive tape Substances 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 12
- 239000003822 epoxy resin Substances 0.000 description 9
- 229920000647 polyepoxide Polymers 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 8
- 230000003078 antioxidant effect Effects 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 6
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000003963 antioxidant agent Substances 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000002708 enhancing effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 150000007522 mineralic acids Chemical class 0.000 description 3
- 239000007800 oxidant agent Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 229940126062 Compound A Drugs 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 150000003851 azoles Chemical class 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000012756 surface treatment agent Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 150000003852 triazoles Chemical class 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
- GUCGQKSPWMDAEX-UHFFFAOYSA-N 2-(2h-tetrazol-5-yl)aniline Chemical compound NC1=CC=CC=C1C1=NNN=N1 GUCGQKSPWMDAEX-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 150000004982 aromatic amines Chemical class 0.000 description 1
- 150000008378 aryl ethers Chemical class 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229940090960 diethylenetriamine pentamethylene phosphonic acid Drugs 0.000 description 1
- DUYCTCQXNHFCSJ-UHFFFAOYSA-N dtpmp Chemical compound OP(=O)(O)CN(CP(O)(O)=O)CCN(CP(O)(=O)O)CCN(CP(O)(O)=O)CP(O)(O)=O DUYCTCQXNHFCSJ-UHFFFAOYSA-N 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000004715 keto acids Chemical class 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920001955 polyphenylene ether Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/18—Acidic compositions for etching copper or alloys thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/382—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
- H05K3/383—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by microetching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
- H05K2203/0786—Using an aqueous solution, e.g. for cleaning or during drilling of holes
- H05K2203/0789—Aqueous acid solution, e.g. for cleaning or etching
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
本発明は、表面粗化剤に関する。さらに詳しくは、銅又はその合金の表面を粗化するための表面粗化剤であって、例えば、ソルダーレジストなどとの密着性に優れた表面粗化剤に関する。 The present invention relates to a surface roughening agent. More specifically, the present invention relates to a surface roughening agent for roughening the surface of copper or an alloy thereof, for example, a surface roughening agent excellent in adhesion to a solder resist or the like.
プリント配線板を製造する場合、銅表面を有する基材に樹脂を積層するときに、銅表面とエッチングレジスト、めっきレジスト、ソルダーレジストなどのレジストとの密着性を向上させるために、従来、バフやブラシで銅表面の粗化が一般に行われている。 When manufacturing a printed wiring board, when laminating a resin on a substrate having a copper surface, in order to improve the adhesion between the copper surface and a resist such as an etching resist, a plating resist, or a solder resist, The roughening of the copper surface is generally performed with a brush.
近年、銅表面を粗化させるときに細線化が要求されており、細線化に適する方法として、粗化剤を用いた化学研磨が提案されている。このような粗化剤としては、過酸化水素及び硫酸を主成分とする粗化剤が広く用いられている。 In recent years, thinning is required when roughening the copper surface, and chemical polishing using a roughening agent has been proposed as a method suitable for thinning. As such a roughening agent, a roughening agent mainly composed of hydrogen peroxide and sulfuric acid is widely used.
粗化剤として、オキソ酸、過酸化物、アゾール及びハロゲン化物を含むエッチング液(例えば、特許文献1参照)、硫酸;過酸化水素;トリアゾール、テトラゾール及び/又はイミダゾール;並びに界面活性剤を含む接着促進組成物(例えば、特許文献2参照)、過酸化水素からなる酸化剤、無機酸、トリアゾール、テトラゾール、イミダゾールなどの腐食防止剤、ハライドイオン源及び水溶性重合体を含有する水溶液(例えば、特許文献3参照)、過酸化水素、鉱酸、アゾール類及び銀イオンを含有する表面処理剤(例えば、特許文献4参照)、過酸化水素、鉱酸、アゾール類及び芳香族アミン化合物を含有する表面処理剤(例えば、特許文献5参照)、銅の酸化剤、無機酸、アゾール類化合物及びアリールエーテル化合物を含有する水溶液からなる銅含有材料粗面化剤(例えば、特許文献6参照)、過酸化水素、硫酸、5−アミノ−1H−テトラゾール及びシクロヘキシルアミンを含有する水溶液からなるマイクロエッチング用表面処理剤(例えば、特許文献7参照)、無機酸及び銅の酸化剤からなる主剤とアゾール類及びエッチング抑制剤からなる助剤とを含む水溶液からなるマイクロエッチング剤(例えば、特許文献8参照)などが知られている。 Etching solution containing oxo acid, peroxide, azole and halide as roughening agent (see, for example, Patent Document 1), sulfuric acid; hydrogen peroxide; triazole, tetrazole and / or imidazole; and adhesion containing surfactant Accelerating composition (for example, see Patent Document 2), oxidizing agent comprising hydrogen peroxide, corrosion inhibitor such as inorganic acid, triazole, tetrazole, imidazole, halide ion source and aqueous solution containing water-soluble polymer (for example, patent Reference 3), surface treatment agent containing hydrogen peroxide, mineral acid, azoles and silver ions (for example, see Patent Document 4), surface containing hydrogen peroxide, mineral acid, azoles and aromatic amine compound A water solution containing a treating agent (for example, see Patent Document 5), an oxidizing agent for copper, an inorganic acid, an azole compound, and an aryl ether compound A surface treatment agent for microetching comprising a copper-containing material roughening agent (for example, see Patent Document 6), an aqueous solution containing hydrogen peroxide, sulfuric acid, 5-amino-1H-tetrazole and cyclohexylamine (for example, a patent) Document 7), a microetching agent (for example, see Patent Document 8) made of an aqueous solution containing a main agent composed of an inorganic acid and an oxidizing agent of copper and an auxiliary composed of an azole and an etching inhibitor are known.
しかし、近年、配線パターンが細線化しつつあるため、ソルダーレジストと配線パターン表面とが接触する面積が小さくなるとともに、高い密着性が要求されるようになってきているが、従来の粗化剤では、密着性が十分ではない。 However, in recent years, since the wiring pattern is becoming thinner, the area where the solder resist and the surface of the wiring pattern are in contact with each other is reduced, and high adhesion is required. Adhesion is not enough.
さらに、粗化した後の銅表面は非常に酸化しやすく、銅表面が酸化したとき、さらにソルダーレジストとの密着性が低下するため、粗化後の銅表面の酸化を防止することが要求される。 Furthermore, the roughened copper surface is very easy to oxidize, and when the copper surface is oxidized, the adhesion to the solder resist is further reduced, so it is required to prevent oxidation of the roughened copper surface. The
本発明は、前記従来に鑑みてなされたものであり、銅又は銅合金表面と樹脂との密着性に優れ、銅又はその合金の表面を粗化するための表面粗化剤を提供することを課題とする。本発明は、さらに粗化後の銅表面の酸化を防止することができる表面粗化剤を提供することを課題とする。 This invention is made | formed in view of the said conventional, It is excellent in the adhesiveness of a copper or copper alloy surface and resin, and provides the surface roughening agent for roughening the surface of copper or its alloy. Let it be an issue. Another object of the present invention is to provide a surface roughening agent capable of preventing oxidation of the copper surface after roughening.
本発明は、銅又はその合金からなる表面を粗化するための表面粗化剤であって、硫酸、過酸化水素、5−アミノテトラゾール、5−アミノテトラゾール以外のテトラゾール化合物、及びホスホン酸系キレート剤を含有することを特徴とする表面粗化剤に関する。 The present invention is a surface roughening agent for roughening a surface made of copper or an alloy thereof, sulfuric acid, hydrogen peroxide, 5-aminotetrazole, tetrazole compounds other than 5-aminotetrazole, and phosphonic acid-based chelates The present invention relates to a surface roughening agent comprising an agent.
本発明の表面粗化剤は、銅又は銅合金表面と樹脂との密着性に優れるという効果を奏する。また、本発明の表面粗化剤は、粗化後の銅表面の酸化を防止することができるという効果を奏する。 The surface roughening agent of the present invention has an effect that the adhesion between the surface of the copper or copper alloy and the resin is excellent. Moreover, the surface roughening agent of this invention has an effect that the oxidation of the copper surface after roughening can be prevented.
本発明の表面粗化剤における硫酸の濃度は、銅のエッチング速度を実用的な範囲内とし、硫酸銅の結晶が表面粗化剤中で析出するのを抑制する観点から、3〜20重量%であることが好ましい。 The concentration of sulfuric acid in the surface roughening agent of the present invention is 3 to 20% by weight from the viewpoint of keeping the copper etching rate within a practical range and suppressing the precipitation of copper sulfate crystals in the surface roughening agent. It is preferable that
本発明の表面粗化剤における過酸化水素の濃度は、銅のエッチング速度が実用的な範囲内とし、表面粗化剤の保存安定性を高め、使用時の突沸を抑制する観点から、2〜10重量%であることが好ましい。 The concentration of hydrogen peroxide in the surface roughening agent of the present invention is such that the etching rate of copper is within a practical range, the storage stability of the surface roughening agent is enhanced, and from the viewpoint of suppressing bumping during use, 2 to 2 It is preferably 10% by weight.
本発明の表面粗化剤における5−アミノテトラゾールの濃度は、過酸化水素の安定性及び表面粗化剤への溶解性を高め、銅又はその合金表面の粗化を良好に行なう観点から、好ましくは0.01〜1.0重量%、より好ましくは0.02〜0.5重量%、さらに好ましくは0.03〜0.1重量%である。 The concentration of 5-aminotetrazole in the surface roughening agent of the present invention is preferably from the viewpoint of improving the stability of hydrogen peroxide and the solubility in the surface roughening agent, and favorably roughening the surface of copper or its alloy. Is 0.01 to 1.0% by weight, more preferably 0.02 to 0.5% by weight, still more preferably 0.03 to 0.1% by weight.
5−アミノテトラゾール以外のテトラゾール化合物(以下、他のテトラゾール化合物という)は、銅又はその合金表面と樹脂との密着性を高めるために、その表面を粗化させる性質を有する。 Tetrazole compounds other than 5-aminotetrazole (hereinafter referred to as other tetrazole compounds) have the property of roughening the surface in order to increase the adhesion between the surface of copper or its alloy and the resin.
本発明では、5−アミノテトラゾールと他のテトラゾール化合物とが併用されているので、両者併用による相乗効果により、銅又はその合金表面と樹脂との密着性が向上する。 In the present invention, since 5-aminotetrazole and another tetrazole compound are used in combination, the adhesiveness between the copper or its alloy surface and the resin is improved by the synergistic effect of the combined use of both.
他のテトラゾール化合物の分子量は、本発明の表面粗化剤中で安定して存在し、好ましい粗化形状を形成させる観点から、好ましくは180以下、より好ましくは100以下である。 The molecular weight of the other tetrazole compounds is preferably 180 or less, more preferably 100 or less, from the viewpoint of stably existing in the surface roughening agent of the present invention and forming a preferred roughened shape.
好適な他のテトラゾール化合物としては、本発明の表面粗化剤中で安定して存在し、好ましい粗化形状を形成させる観点から、5−メチルテトラゾール(分子量:84)、5−エチルテトラゾール(分子量:98)、5−n−プロピルテトラゾール(分子量:112)、5−フェニルテトラゾール(分子量:146)、5−トルイルテトラゾール(分子量:155)、5−アミノメチルテトラゾール(分子量:87)、5−(2−アミノフェニル)テトラゾール(分子量:161)、5−アミノ−1−メチルテトラゾール(分子量:98)、1−フェニル−5−アミノテトラゾール(分子量:161)、1,5−ジメチルテトラゾール(分子量:86)及びビステトラゾールジアンモニウム(分子量:169)からなる群より選ばれた少なくとも1種のテトラゾール化合物が挙げられる。これらのなかでは、5−メチルテトラゾール、5−エチルテトラゾール、5−アミノメチルテトラゾール、1−フェニル−5−アミノテトラゾール及び1,5−ジメチルテトラゾール)からなる群より選ばれた少なくとも1種のテトラゾール化合物がより好ましい。 As other suitable tetrazole compounds, 5-methyltetrazole (molecular weight: 84), 5-ethyltetrazole (molecular weight) is present from the viewpoint of stably present in the surface roughening agent of the present invention and forming a preferred roughened shape. : 98), 5-n-propyltetrazole (molecular weight: 112), 5-phenyltetrazole (molecular weight: 146), 5-toluyltetrazole (molecular weight: 155), 5-aminomethyltetrazole (molecular weight: 87), 5- ( 2-aminophenyl) tetrazole (molecular weight: 161), 5-amino-1-methyltetrazole (molecular weight: 98), 1-phenyl-5-aminotetrazole (molecular weight: 161), 1,5-dimethyltetrazole (molecular weight: 86) And at least one tetrazole compound selected from the group consisting of bistetrazole diammonium (molecular weight: 169) Things. Among these, at least one tetrazole compound selected from the group consisting of 5-methyltetrazole, 5-ethyltetrazole, 5-aminomethyltetrazole, 1-phenyl-5-aminotetrazole and 1,5-dimethyltetrazole) Is more preferable.
本発明の表面粗化剤における他のテトラゾール化合物の濃度は、表面粗化剤における溶解性及び銅又はその合金表面と樹脂との密着性を高める観点から、好ましくは0.003〜0.3重量%、より好ましくは0.01〜0.05重量%である。 The concentration of the other tetrazole compound in the surface roughening agent of the present invention is preferably 0.003 to 0.3 weight from the viewpoint of increasing the solubility in the surface roughening agent and the adhesion between the copper or its alloy surface and the resin. %, More preferably 0.01 to 0.05% by weight.
5−アミノテトラゾールと他のテトラゾール化合物との濃度の比(5−アミノテトラゾール:5−アミノテトラゾール以外のテトラゾール化合物)は、重量比で、銅又はその合金表面と樹脂との密着性を高める観点から、好ましくは1:1〜5:1、より好ましくは1.5:1〜4:1である。なお、他のテトラゾール化合物を2種類以上使用する場合には、他のテトラゾール化合物の合計量を0.003〜0.3重量%とするのが好ましい。 The ratio of the concentration of 5-aminotetrazole and other tetrazole compounds (5-aminotetrazole: tetrazole compounds other than 5-aminotetrazole) is a weight ratio from the viewpoint of enhancing the adhesion between copper or its alloy surface and the resin. , Preferably 1: 1 to 5: 1, more preferably 1.5: 1 to 4: 1. In addition, when using 2 or more types of another tetrazole compound, it is preferable that the total amount of another tetrazole compound shall be 0.003-0.3 weight%.
ホスホン酸系キレート剤は、キレート作用により、銅又はその合金表面に配位する。このとき、配位する相手が銅又はその合金表面であるため、ホスホン酸系キレート剤の中には、配位しないホスホン酸基が配位座として残る。この残ったホスホン酸基は、エポキシ系樹脂との親和性に優れているので、銅又はその合金表面と樹脂との密着性が高められると考えられる。本発明の表面粗化剤は、前記ホスホン酸系キレート剤を含有しているので、エポキシ系樹脂のソルダーレジストと銅又はその合金表面との密着性を向上させるのに適している。 The phosphonic acid chelating agent is coordinated to the surface of copper or an alloy thereof by chelating action. At this time, since the coordinating partner is the surface of copper or an alloy thereof, a non-coordinating phosphonic acid group remains as a coordination site in the phosphonic acid chelating agent. Since the remaining phosphonic acid groups are excellent in affinity with the epoxy resin, it is considered that the adhesion between the copper or its alloy surface and the resin is enhanced. Since the surface roughening agent of the present invention contains the phosphonic acid chelating agent, it is suitable for improving the adhesion between the solder resist of epoxy resin and the surface of copper or its alloy.
ホスホン酸系キレート剤としては、銅又はその合金に対してキレート効果を発現するものであれば、特に限定なく使用することができる。 Any phosphonic acid chelating agent can be used without particular limitation as long as it exhibits a chelating effect on copper or its alloy.
ホスホン酸系キレート剤の分子量は、本発明の表面粗化剤中で安定して存在し、銅又はその合金表面に対して優れたキレート効果を発現させる観点から、好ましくは1500以下、より好ましくは700以下、さらに好ましくは400以下、特に好ましくは300以下である。 The molecular weight of the phosphonic acid chelating agent is preferably 1500 or less, more preferably from the viewpoint of stably present in the surface roughening agent of the present invention and exhibiting an excellent chelating effect on the copper or its alloy surface. 700 or less, more preferably 400 or less, particularly preferably 300 or less.
好適なホスホン酸系キレート剤としては、アミノトリメチレンホスホン酸(分子量:299)、1−ヒドロキシエタン−1,1−ジホスホン酸(分子量:206)、ホスホノブタントリカルボン酸(分子量:270)、エチレンジアミンテトラメチレンホスホン酸ナトリウム塩(分子量:436)、ヘキサメチレンジアミンテトラメチレンホスホン酸(分子量:270)、ジエチレントリアミンペンタメチレンホスホン酸(分子量:573)、ポリアミノメチレンホスホン酸(分子量:10000以上)及びビスヘキサメチレントリアミンペンタメチレンホスホン酸(分子量:685)からなる群より選ばれた少なくとも1種のホスホン酸系キレート剤が挙げられる。これらの中では、アミノトリメチレンホスホン酸(分子量:299)、1−ヒドロキシエタン−1,1−ジホスホン酸(分子量:206)、ホスホノブタントリカルボン酸(分子量:270)及びヘキサメチレンジアミンテトラメチレンホスホン酸(分子量:270)からなる群より選ばれた少なくとも1種のホスホン酸系キレート剤がより好ましい。 Suitable phosphonic acid-based chelating agents include aminotrimethylenephosphonic acid (molecular weight: 299), 1-hydroxyethane-1,1-diphosphonic acid (molecular weight: 206), phosphonobutanetricarboxylic acid (molecular weight: 270), ethylenediamine Tetramethylenephosphonic acid sodium salt (molecular weight: 436), hexamethylenediaminetetramethylenephosphonic acid (molecular weight: 270), diethylenetriaminepentamethylenephosphonic acid (molecular weight: 573), polyaminomethylenephosphonic acid (molecular weight: 10,000 or more) and bishexamethylene And at least one phosphonic acid chelating agent selected from the group consisting of triaminepentamethylenephosphonic acid (molecular weight: 685). Among these, aminotrimethylenephosphonic acid (molecular weight: 299), 1-hydroxyethane-1,1-diphosphonic acid (molecular weight: 206), phosphonobutanetricarboxylic acid (molecular weight: 270), and hexamethylenediaminetetramethylenephosphone. More preferred is at least one phosphonic acid chelating agent selected from the group consisting of acids (molecular weight: 270).
本発明の表面粗化剤におけるホスホン酸系キレート剤の濃度は、過酸化水素の安定性を高め、銅又はその合金表面と樹脂との密着性を高める観点から、好ましくは0.05〜2.0重量%、より好ましくは0.1〜1.0重量%である。 The concentration of the phosphonic acid chelating agent in the surface roughening agent of the present invention is preferably 0.05 to 2.1, from the viewpoint of enhancing the stability of hydrogen peroxide and enhancing the adhesion between the copper or its alloy surface and the resin. It is 0% by weight, more preferably 0.1 to 1.0% by weight.
本発明の表面粗化剤には、必要により、過酸化水素安定剤、消泡剤、界面活性剤などを適宜添加することができる。 If necessary, a hydrogen peroxide stabilizer, an antifoaming agent, a surfactant and the like can be appropriately added to the surface roughening agent of the present invention.
また、本発明の表面粗化剤には、粗化形状及びエッチング速度を調整するために、塩素イオンなどのハロゲンイオンを添加してもよい。本発明の表面粗化剤におけるハロゲンイオンの濃度は、銅表面を充分に粗化し、エッチング速度を高める観点から、好ましくは1〜60ppm、より好ましくは5〜40ppmである。 In addition, halogen ions such as chlorine ions may be added to the surface roughening agent of the present invention in order to adjust the roughening shape and the etching rate. The concentration of halogen ions in the surface roughening agent of the present invention is preferably 1 to 60 ppm, more preferably 5 to 40 ppm from the viewpoint of sufficiently roughening the copper surface and increasing the etching rate.
本発明の表面粗化剤の使用方法としては、例えば、銅又はその合金からなる表面に本発明の表面粗化剤を噴霧する方法、本発明の表面粗化剤中に銅又は銅合金からなる表面を有する基材を浸漬する方法などが挙げられる。 As a method of using the surface roughening agent of the present invention, for example, a method of spraying the surface roughening agent of the present invention on the surface made of copper or an alloy thereof, or the surface roughening agent of the present invention is made of copper or a copper alloy. The method etc. which immerse the base material which has a surface are mentioned.
本発明の表面粗化剤によって銅又はその合金からなる表面がエッチングされる量(以下、エッチング量という)は、本発明の表面粗化剤の組成及びその温度、エッチング時間などによって調整することができる。本発明の表面粗化剤を使用する際の温度は、通常、20〜35℃程度であり、本発明の表面粗化剤を用いてエッチングするときの時間は、エッチング量によって異なるため一概には決定することができないが、通常、10〜60秒間程度であればよい。 The amount by which the surface made of copper or an alloy thereof is etched by the surface roughening agent of the present invention (hereinafter referred to as etching amount) can be adjusted by the composition of the surface roughening agent of the present invention, its temperature, etching time, etc. it can. The temperature when using the surface roughening agent of the present invention is usually about 20 to 35 ° C., and the time when etching using the surface roughening agent of the present invention varies depending on the amount of etching, so it is generally Although it cannot be determined, it may be about 10 to 60 seconds.
エッチング量は、エッチング処理が施される被処理材の表面に接触させる樹脂の種類などに応じて適宜設定すればよいが、銅又は銅合金表面を良好に粗化し、銅又はその合金表面と樹脂との密着性を向上させる観点から、通常、0.1〜2.0μm程度であることが好ましく、0.2〜1.0μm程度であることがより好ましい。 The etching amount may be set as appropriate according to the type of resin to be brought into contact with the surface of the material to be etched, etc., but the copper or copper alloy surface is roughened well, and the copper or its alloy surface and resin From the viewpoint of improving the adhesiveness, it is usually preferably about 0.1 to 2.0 μm, more preferably about 0.2 to 1.0 μm.
なお、本明細書にいうエッチング量とは、エッチング処理が施される被処理材のエッチング前後の重量変化と銅又は銅合金表面の表面積、及び銅又は銅合金の密度から算出されたエッチング深さをいう。 In addition, the etching amount as used in this specification is the etching depth calculated from the weight change before and after etching of the material to be etched, the surface area of the copper or copper alloy surface, and the density of copper or copper alloy. Say.
本発明の表面粗化剤は、種々の用途に使用することができる。その用途の例として、プリプレグ、ソルダーレジスト、ドライフィルムレジスト、電着レジスト、接着剤などが挙げられる。また、本発明の表面粗化剤は、銅又はその合金表面とビルドアッププリント配線板の層間絶縁樹脂との密着性を向上させるのに有用であり、またリードフレームの表面処理に使用し、銅又はその合金表面と密着性封止樹脂との密着性を向上させるのにも有用である。 The surface roughening agent of the present invention can be used for various applications. Examples of the application include prepreg, solder resist, dry film resist, electrodeposition resist, adhesive and the like. The surface roughening agent of the present invention is useful for improving the adhesion between the surface of copper or an alloy thereof and the interlayer insulating resin of the build-up printed wiring board, and is used for the surface treatment of the lead frame. Or it is useful also in improving the adhesiveness of the alloy surface and adhesive sealing resin.
銅の合金としては、例えば、銅を50重量%以上含み、他の金属として錫、金、銀、アルミニウムなどの銅以外の金属を50質量%以下含むものなどが挙げられる。 Examples of the copper alloy include one containing 50 wt% or more of copper and 50 wt% or less of a metal other than copper such as tin, gold, silver, and aluminum as the other metal.
前記樹脂としては、例えば、フェノール樹脂、エポキシ樹脂、耐熱エポキシ樹脂、ポリイミド、ビスマレイミド・トリアジン樹脂、ポリフェニレンエーテル、アクリル樹脂、紫外線硬化型エポキシ樹脂、紫外線硬化型アクリル樹脂などが挙げられるが、本発明は、かかる例示のみに限定されるものではない。これらのなかでは、銅又はその合金表面との密着性に優れていることから、エポキシ樹脂、耐熱エポキシ樹脂、紫外線硬化型エポキシ樹脂などのエポキシ系樹脂が好ましい。 Examples of the resin include phenol resin, epoxy resin, heat-resistant epoxy resin, polyimide, bismaleimide / triazine resin, polyphenylene ether, acrylic resin, ultraviolet curable epoxy resin, and ultraviolet curable acrylic resin. Is not limited to such examples. In these, since it is excellent in adhesiveness with the surface of copper or its alloy, epoxy resins, such as an epoxy resin, a heat-resistant epoxy resin, and an ultraviolet curable epoxy resin, are preferable.
次に、本発明を実施例に基づいてさらに詳細に説明するが、本発明は、かかる実施例のみに限定されるものではない。 Next, the present invention will be described in more detail based on examples. However, the present invention is not limited to such examples.
実施例1〜10及び比較例1〜7
ガラスエポキシ基材〔日立化成工業(株)製、品番:GEA−67N、厚さ:1.6mm〕の両面に、厚さ18μmの銅箔が貼付された両面銅張積層板を用意し、この両面にさらにめっき層の厚さが20μmとなるように電解銅めっきを施し、縦8.5cm、横11.0cmに切断したものを試験基板とした。
Examples 1-10 and Comparative Examples 1-7
A double-sided copper-clad laminate in which a 18 μm thick copper foil is pasted on both sides of a glass epoxy substrate (manufactured by Hitachi Chemical Co., Ltd., product number: GEA-67N, thickness: 1.6 mm) is prepared. Electrolytic copper plating was further performed on both surfaces so that the thickness of the plating layer was 20 μm, and the test substrate was cut into a length of 8.5 cm and a width of 11.0 cm.
この試験基板を表1に示す組成からなる表面粗化剤を用いてエッチング量0.5μmでガラスエポキシ基材をエッチングした後、ソルダーレジスト〔太陽インキ製造(株)製、品番:PSR4000Z26〕を厚さが15〜30μmとなるように印刷した後、通常の条件で露光し、現像した。 After this glass substrate was etched with a surface roughening agent having the composition shown in Table 1 at an etching amount of 0.5 μm, a solder resist (manufactured by Taiyo Ink Manufacturing Co., Ltd., product number: PSR4000Z26) was thickened. After printing to a thickness of 15 to 30 μm, the film was exposed and developed under normal conditions.
次に、各試験基板の物性として、密着性及び酸化防止性を以下の方法にしたがって調べた。その結果を表1に示す。 Next, as physical properties of each test substrate, adhesion and antioxidant properties were examined according to the following methods. The results are shown in Table 1.
(1)密着性
各試験基板をJIS K5600−5−6に従って、1mm×1mmの碁盤目にクロスカットし、10重量%塩酸水溶液に室温で10分間浸漬し、水洗し、乾燥し、JIS K5600−5−6に従って、テープピールテストを行ない、以下の評価基準に基づいて、密着性を評価した。その結果を表1に示す。
(1) Adhesiveness Each test substrate was cross-cut in a 1 mm × 1 mm grid according to JIS K5600-5-6, immersed in a 10% by weight hydrochloric acid aqueous solution at room temperature for 10 minutes, washed with water, dried, and JIS K5600- A tape peel test was performed according to 5-6, and the adhesion was evaluated based on the following evaluation criteria. The results are shown in Table 1.
〔密着性の評価基準〕
A:粘着テープにソルダーレジスト膜がまったく付着しなかったもの
B:粘着テープにソルダーレジスト膜がわずかに付着したもの
C:粘着テープにソルダーレジスト膜が多量に付着したもの
[Evaluation criteria for adhesion]
A: Solder resist film does not adhere to the adhesive tape at all B: Solder resist film slightly adheres to the adhesive tape C: Solder resist film adheres to the adhesive tape in large quantities
なお、前記テープピールテストは、粘着テープをソルダーレジスト膜に貼り付け、引き剥がして粘着テープ側にソルダーレジスト膜の剥離片が付くかどうかで密着性を測定する試験であり、粘着テープにソルダーレジスト膜が付着しないほうが良好である。 The tape peel test is a test in which the adhesive tape is attached to the solder resist film, peeled off, and the adhesion is measured by checking whether the peeled piece of the solder resist film is attached to the adhesive tape side. It is better that no film adheres.
(2)酸化防止性
表1に示す組成からなる表面粗化剤を用いてエッチング量0.5μmでガラスエポキシ基材をエッチングした後の各試験基板を40℃、相対湿度95%の恒温槽に入れ、30分間経過した後の表面を金属顕微鏡で観察し、以下の評価基準に基づいて評価した。
(2) Antioxidant Each test substrate after etching a glass epoxy base material with an etching amount of 0.5 μm using a surface roughening agent having the composition shown in Table 1 is placed in a thermostatic bath at 40 ° C. and a relative humidity of 95%. The surface after 30 minutes had passed was observed with a metallographic microscope and evaluated based on the following evaluation criteria.
〔酸化防止性の評価基準〕
A:色の変化がほとんどないもの(酸化していない)
B:部分的に薄い茶色に変化していたもの(部分的に酸化している)
C:全面的に茶色に変化しているもの(全面的に酸化が進んでいる)
[Evaluation criteria for antioxidant properties]
A: No change in color (not oxidized)
B: What was partially changed to light brown (partially oxidized)
C: The color is completely brown (oxidation is progressing entirely)
表1に示された結果から、本発明の各実施例で得られた表面粗化剤は、5−アミノテトラゾール、他の5−アミノテトラゾール化合物及びホスホン酸系キレート剤を含有しているので、銅又は銅合金表面と樹脂と密着性に優れていることがわかる。 From the results shown in Table 1, since the surface roughening agent obtained in each example of the present invention contains 5-aminotetrazole, other 5-aminotetrazole compounds and a phosphonic acid chelating agent, It can be seen that the adhesion between the surface of the copper or copper alloy and the resin is excellent.
次に、密着性について、評価がAであった例として、実施例1における粘着テープの光学写真(倍率:5倍)を図1に、評価がBであった例として、実施例4における粘着テープの光学写真(倍率:5倍)を図2に、評価がCであった例として、比較例1における粘着テープの光学写真(倍率:5倍)を図3に示す。 Next, as an example in which the evaluation was A, the optical photograph (magnification: 5 times) of the pressure-sensitive adhesive tape in Example 1 is shown in FIG. An optical photograph (magnification: 5 times) of the tape is shown in FIG. 2, and as an example where the evaluation was C, an optical photograph (magnification: 5 times) of the adhesive tape in Comparative Example 1 is shown in FIG.
図1〜3に示されるように、比較例1では、粘着テープにソルダーレジスト膜が多量に付着しているが、実施例4では、粘着テープにソルダーレジスト膜がわずかに付着しているだけであり、実施例1では、粘着テープにソルダーレジスト膜がまったく付着していないことがわかる。 As shown in FIGS. 1 to 3, in Comparative Example 1, a large amount of solder resist film is adhered to the adhesive tape, but in Example 4, the solder resist film is only slightly adhered to the adhesive tape. In Example 1, it can be seen that the solder resist film does not adhere to the adhesive tape at all.
また、酸化防止性について、評価がAであった例として、実施例1における処理後の試験基板表面の光学写真(倍率:1倍)を図4に、評価がBであった例として、実施例4における処理後の試験基板表面の光学写真(倍率:1倍)を図5に、評価がCであった例として、比較例1における処理後の試験基板表面の光学写真(倍率:1倍)を図6に示す。 In addition, as an example in which the evaluation was A for the antioxidant property, an optical photograph (magnification: 1 time) of the test substrate surface after the processing in Example 1 is shown in FIG. An optical photograph of the test substrate surface after treatment in Example 4 (magnification: 1 ×) is shown in FIG. 5, and as an example in which the evaluation was C, an optical photograph of the surface of the test substrate after treatment in Comparative Example 1 (magnification: 1 ×) ) Is shown in FIG.
図4〜6に示されるように、比較例1では、その表面にムラが見られるように処理後の試験基板が全面的に茶色に変化しているが、実施例4では、処理後の試験基板の表面に部分的に薄い茶色に変化しているだけであり、実施例1では、処理後の試験基板の表面に色の変化がほとんどないことがわかる。 As shown in FIGS. 4 to 6, in Comparative Example 1, the test substrate after the treatment was entirely changed to brown so that unevenness was observed on the surface, but in Example 4, the test after the treatment was performed. The surface of the substrate is only partially changed to light brown, and in Example 1, it can be seen that there is almost no color change on the surface of the test substrate after processing.
以上説明したように、本発明の表面粗化剤は、銅又は銅合金表面と樹脂とのあいだに高い密着性を付与することができることがわかる。また、本発明の表面粗化剤は、粗化後の銅表面の酸化を防止することができることがわかる。
As described above, it can be seen that the surface roughening agent of the present invention can impart high adhesion between the copper or copper alloy surface and the resin. Moreover, it turns out that the surface roughening agent of this invention can prevent the oxidation of the copper surface after roughening.
Claims (9)
The surface roughening agent according to any one of claims 1 to 8, wherein the concentration of the phosphonic acid chelating agent is 0.05 to 2.0% by weight.
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Cited By (13)
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JP2012062572A (en) * | 2010-08-16 | 2012-03-29 | Advanced Technology Materials Inc | Etching solution for copper or copper alloy |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000282265A (en) * | 1999-03-31 | 2000-10-10 | Mec Kk | Microetching agent for copper or copper alloy and surface treating method using the same |
JP2005187945A (en) * | 2000-12-27 | 2005-07-14 | Ebara Udylite Kk | Micro-etching agent for copper and copper alloy |
-
2008
- 2008-06-11 JP JP2008153066A patent/JP4881916B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000282265A (en) * | 1999-03-31 | 2000-10-10 | Mec Kk | Microetching agent for copper or copper alloy and surface treating method using the same |
JP2005187945A (en) * | 2000-12-27 | 2005-07-14 | Ebara Udylite Kk | Micro-etching agent for copper and copper alloy |
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