JP2009016847A - Methods of manufacturing a hybrid integrated circuit device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To manufacture a plurality of circuit substrates from a single metal substrate by dicing. <P>SOLUTION: The method includes: preparing a metal substrate 10A having an insulating layer 11 formed on the top surface thereof; forming a plurality of conductive patterns 12 on the top surface of insulating layer 11; forming grooves 20 in lattice form on the rear surface of metal substrate 10B; mounting hybrid integrated circuits onto conductive patterns 12; and cutting the remaining thickness of the metal substrate 10B and the insulating layer 11 by pressing a round cutter 41 having no driving force against the portions corresponding to the grooves 20 of the top surface of the metal substrate 10B and turning the cutter, thereby separating individual circuit substrates 10. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a hybrid integrated circuit device, and more particularly to a method for manufacturing a hybrid integrated circuit device in which a large number of circuit boards are manufactured by dicing from a single large metal substrate.

  With reference to FIG. 24, the configuration of a conventional hybrid integrated circuit device will be described. 24A is a perspective view of the hybrid integrated circuit device 6, and FIG. 24B is a cross-sectional view taken along the line X-X 'in FIG.

  Referring to FIGS. 24A and 24B, the conventional hybrid integrated circuit device 6 has the following configuration. The rectangular substrate 60, the conductive pattern 62 formed on the insulating layer 61 provided on the surface of the substrate 60, the circuit element 63 fixed on the conductive pattern 62, and the circuit element 63 and the conductive pattern 62 are electrically connected. The hybrid integrated circuit device 6 is composed of the fine metal wires 65 that are electrically connected and the leads 64 that are electrically connected to the conductive pattern. The hybrid integrated circuit device 6 is completed as a product by sealing the hybrid integrated circuit formed on the surface of the circuit board 60 with an insulating resin or a case material.

  Next, a method for manufacturing the hybrid integrated circuit device 6 will be described with reference to FIGS.

  With reference to FIG. 25, the process of dividing the large metal substrate 66A into strips will be described. In FIG. 25A, FIG. 25A is a plan view of a large metal substrate 66A. FIG. 25B is a cross-sectional view of a large metal substrate 66A.

  With reference to FIG. 25A, a method of dividing a large metal substrate 66A into a slender shape will be described. Here, the large metal substrate 66A is divided into thin strips by dicing lines D4. This division is performed by shearing with a shearing force. Further, the metal substrate divided into elongated portions may be divided into two or more in consideration of workability such as a subsequent bonding process. Here, the elongated metal substrate is divided into two metal substrates 66B having different lengths.

  With reference to FIG. 25B, the structure of the metal substrate 66A will be described. Here, the substrate 66A is a substrate made of aluminum, and both surfaces are anodized. An insulating layer 61 is provided on the surface where the hybrid integrated circuit is formed in order to insulate the metal substrate 66A from the conductive pattern. A copper foil 68 that becomes the conductive pattern 62 is pressure-bonded to the insulating layer 61.

  With reference to FIG. 26, the process of forming the hybrid integrated circuit 67 on the surface of the elongated metal substrate 66B will be described. In FIG. 26A, FIG. 26A is a plan view of an elongated metal substrate 66B on which a plurality of hybrid integrated circuits 67 are formed. FIG. 26B is a cross-sectional view of FIG.

  First, the conductive pattern 62 is formed by etching the copper foil 68 pressed on the insulating layer 61. Here, the conductive pattern 62 is etched so as to form a plurality of hybrid integrated circuits on the elongated metal substrate 66B. In addition, in order to protect the conductive pattern 62, a resin overcoat may be provided on the conductive pattern 62.

  Next, the circuit element 63 is fixed to a predetermined location on the conductive pattern 62 by using a brazing material such as solder. As the circuit element 63, a passive element or an active element can be generally employed. When a power element is mounted, the element is mounted on a heat sink fixed on the conductive pattern.

With reference to FIG. 27, a method of dividing the metal substrate 66B on which the plurality of hybrid integrated circuits 67 are formed into individual circuit substrates 60 will be described. The individual circuit boards 60 having the hybrid integrated circuit 67 formed on the surface are separated from the metal board 66B by punching out portions of the circuit board 60 using a press. Here, the press machine punches the metal substrate 66B from the surface where the hybrid integrated circuit 67 is formed. Therefore, a margin where the conductive pattern 62 and the circuit element 63 are not formed is formed at the peripheral end portion of the circuit board 60.
The circuit boards 60 separated individually in the above steps are completed as a product through a step of sealing the hybrid integrated circuit 67 and the like.

  However, the hybrid integrated circuit device and the manufacturing method thereof as described above have the following problems.

  First, when the circuit board 60 is separated from the metal substrate 66B by “punching” using a press, a crack is generated in the insulating layer 61 formed on the surface of the circuit board 60 due to the impact of “punching”. There was a problem.

  Second, an insulating layer 61 is formed on the surface of the metal substrate 66B, and the insulating layer 61 is very hard because it is highly filled with alumina. Therefore, there is a problem that the blade of the press machine that performs “punching” wears out early. Furthermore, the replacement of the blades of the press machine is an operation requiring a skilled worker, and there is a problem that the time required for replacement of the blades is very long and the productivity is lowered.

  Third, if the circuit board 60 is separated from the metal substrate 66B by “punching” using a press, the peripheral portion of the metal substrate 66B becomes a material loss. Therefore, there is a problem that the disposal loss of the metal substrate 66B, which is a material, increases.

  The present invention has been made in view of the above problems. Accordingly, a main object of the present invention is to provide a method for manufacturing a hybrid integrated circuit device, in which a large number of circuit boards are manufactured by dicing from a single large metal substrate.

The method of manufacturing the hybrid integrated circuit device of the present invention is as follows.
First, a metal substrate provided with a conductive pattern in each of the placement regions of a plurality of hybrid integrated circuit devices arranged on the surface via an insulating layer and arranged adjacent to each other is prepared.
Forming a V-shaped groove having a depth at which the metal substrate is not divided on the front and back surfaces of the metal substrate corresponding to the boundaries of the plurality of hybrid integrated circuit devices arranged;
Mounting circuit elements provided to be electrically connected to the conductive patterns of the plurality of hybrid integrated circuit devices;
Dividing the plurality of hybrid integrated circuit devices through the front V-shaped groove portions to form divided metal substrates corresponding to the individual hybrid integrated circuit devices;
The divided metal substrate is placed in a mold, and a thermosetting insulating resin is injected from the gate of the mold by a transfer molding method, thereby dividing the metal substrate surface and the groove. The problem is solved by sealing the inclined surface formed on the side surface of the metal substrate and the circuit element on the metal substrate.

  In the present invention, the following effects can be obtained.

  First, since a large-sized metal substrate is divided using a cutting saw 31 that rotates at a high speed, the occurrence of “burrs” is very small compared to the conventional substrate dividing method using shearing. Therefore, it is possible to prevent the hybrid integrated circuit from being short-circuited due to “burrs” and causing defective products in the middle of the manufacturing process.

  Secondly, even when the cut-and-sew 31 is worn, the replacement of the cut-and-sew 31 is a relatively simple operation and can be performed quickly. Therefore, when compared with the replacement of the conventional shearing blade, the work efficiency can be improved.

  Third, it is possible to incorporate several tens to several hundreds of hybrid integrated circuits on one metal substrate 10B. Therefore, the etching process, the die bonding process, and the wire bonding process can be performed at once. From this, productivity can be improved.

  Fourth, in the step of dividing the metal substrate 10B into the individual circuit boards 10, the circular cutter 41 having no driving force is rotated by pressing against the metal substrate 10B to divide the metal substrate 10B. Yes. Therefore, since the round cutter 41 cuts off the remaining thickness portion of the groove 20 and the insulating layer 11, no grinding dust is generated. Therefore, it is possible to prevent the hybrid integrated circuit from being short-circuited in the manufacturing process.

  Fifth, the metal substrate 10B is divided by pressing the round cutter 41 against the portion corresponding to the groove 20. Therefore, it is possible to prevent the resin layer 11 from being cracked and reducing the pressure resistance of the circuit board. Furthermore, the flatness of the substrate 10B can be ensured.

  Sixth, even when the round cutter 41 is worn, the replacement of the round cutter 41 is a relatively simple operation and can be performed in a short time. From this, productivity can be improved.

  Seventh, in the present invention, the individual circuit boards are separated by “cutting” the metal board using the cut saw 31 or the round cutter 41. When the circuit board is separated using a press as in the conventional example, it is necessary to prepare different blades according to the size of the circuit board to be manufactured. According to the present invention, even when a hybrid integrated circuit device having circuit boards of different sizes is manufactured, it can be dealt with only by changing the dicing line.

  Eighth, in the present invention, a large number of hybrid integrated circuits are incorporated in a matrix on one metal substrate 10B. Since the hybrid integrated circuits are very close to each other, almost the entire surface of the metal substrate 10B becomes the circuit substrate 10. Accordingly, the loss of material disposal can be reduced.

  Ninth, since the flat portion 35B is provided on the blade edge 35A of the V-cut saw 35 that forms the first groove 20A and the second groove 20B on the metal substrate 10B, wear of the blade edge 35A can be reduced. Thereby, it is possible to prevent the cutting performance of the V-cut saw 35 from being deteriorated at an early stage. Furthermore, even when the first groove 20A is formed on the surface of the metal substrate 10B provided with the resin layer 11, it is possible to prevent the resin layer 11 from being cracked.

  Tenth, since the first grooves 20A and the second grooves 20B are formed in a lattice pattern on the front and back surfaces of the metal substrate 10B, the circuit board 10 can be easily divided at the positions where the grooves are formed. There are two methods for dividing each circuit board 10: a division by bending and a division by a round cutter 41. Either of them can be easily divided.

(First Embodiment for explaining hybrid integrated circuit device 1)
A configuration of a hybrid integrated circuit device sealed with an insulating resin will be described with reference to FIG. 1A is a perspective view of the hybrid integrated circuit device 1, and FIG. 1B is a cross-sectional view taken along line XX ′ of FIG. 1A.

  The structure of the hybrid integrated circuit device 1 will be described with reference to FIGS. The hybrid integrated circuit device 1 shown in the figure is obtained by sealing the hybrid integrated circuit device 1 with a resin.

  The insulating resin 16 has a function of sealing a hybrid integrated circuit composed of the circuit elements 13 and the like provided on the surface of the circuit board 10. As a kind of the insulating resin 16, a thermoplastic resin sealed by an injection mold, a thermosetting resin sealed by a transfer mold, or the like can be used.

  Referring to FIG. 1B, the side surface of the circuit board 10 has a vertical portion 10A and an inclined portion 10B. Specifically, the angle formed by the surface of the circuit board 10 and the vertical portion 10A is a right angle. And the angle which the back surface of the circuit board 10 and the inclination part 10B form is an obtuse angle. Therefore, when the resin sealing is performed with the back surface of the circuit board 10 exposed as shown in the figure, the insulating resin 16 wraps around the inclined portion 10B, and the anchor is interposed between the inclined portion 10B and the insulating resin 16. An effect occurs.

  With reference to FIG. 2, the configuration of the hybrid integrated circuit formed on the circuit board 10 in the hybrid integrated circuit device 1 of the present invention will be described. 2A is a perspective view of the hybrid integrated circuit device 1, and FIG. 2B is a cross-sectional view taken along the line X-X 'of FIG.

  Referring to FIGS. 2A and 2B, hybrid integrated circuit device 1 has the following configuration. That is, a circuit board 10 made of metal, an insulating layer 11 formed on the surface of the circuit board 10, a conductive pattern 12 formed on the insulating layer 11, and a circuit mounted at a predetermined position on the conductive pattern 12 The hybrid integrated circuit device 1 includes the elements 13 and the like. Each of these components will be described in detail below.

  As a material of the circuit board 10, a metal such as aluminum or copper is employed. Further, an alloy may be adopted as the material of the circuit board 10. Here, a circuit board 10 made of aluminum is employed, and both surfaces thereof are anodized. The side surface of the circuit board 10 is formed of a vertical portion 10 </ b> A that extends vertically from the upper surface, and an inclined portion 10 </ b> B that extends downward from the vertical portion 10 </ b> A and inclines inside the circuit substrate 10. The reason why the inclined portion 10B is formed on the side surface of the circuit board 10 is the manufacturing method thereof. That is, the circuit board 10 is manufactured by cutting a large metal substrate. Specifically, a V-shaped groove is first formed from the back surface of the metal substrate, and then the remaining thickness portion of the portion where the groove is formed is removed from the front surface. The portion of the V-shaped groove becomes the inclined portion 10B. A specific manufacturing method for forming the circuit board 10 will be described later in an embodiment for explaining a method for manufacturing a hybrid integrated circuit device.

  The insulating layer 11 is formed on the surface of the circuit board 10 and has a function of insulating the conductive pattern 12 and the circuit board. Further, in order to positively transfer the heat generated from the circuit element 13 to the circuit board 10, the insulating layer 11 is highly filled with alumina.

  The conductive pattern 12 is provided on the surface of the insulating layer 11 and is made of a metal such as copper. Here, the conductive pattern 12 is entirely formed on the surface of the circuit board 10. Specifically, the conductive pattern 12 is also formed near the peripheral end within 2 mm from the peripheral end of the circuit board 10. Thus, the reason that the conductive pattern 12 can be formed up to the surface near the peripheral edge of the circuit board 10 is the method of dividing the circuit board 10. Although details of the method of dividing the circuit board 10 will be described later, in the present invention, each circuit board 10 is divided from a large metal board by cutting the metal board. In the conventional example, since the circuit board is divided by pressing, a margin is indispensable in the vicinity of the peripheral edge of the circuit board 10. However, in the present invention, this margin can be eliminated. The conductive pattern 12 can be formed over the entire surface.

  The circuit element 13 is mounted on a predetermined portion of the conductive pattern 12 via a brazing material such as solder. As the circuit element 13, a passive element, an active element, a circuit device, or the like can be generally employed. When a power element is mounted, the element is mounted on a heat sink fixed on the conductive pattern. In the present invention, the circuit element 13 can be arranged at an arbitrary location on the circuit board 10. That is, the circuit element 13 can also be arranged near the peripheral edge of the circuit board 10. Specifically, the circuit elements can be arranged on the surface of the circuit board 10 within 2 mm from the peripheral edge of the circuit board 10.

  The heat sink 13 </ b> A is mounted at a predetermined location of the conductive pattern 12. A power element is mounted on the upper surface, and the power element and the conductive pattern 12 are electrically connected by a thin metal wire 15. Here, the heat sink 13 </ b> A can be arranged at an arbitrary location on the circuit board 10. Specifically, the heat sink 13 </ b> A can be arranged near the peripheral end within 2 mm from the peripheral end of the circuit board 10. Thus, the reason why the heat sink 13A can be arranged up to the surface near the peripheral edge of the circuit board 10 is the method of dividing the circuit board 10.

  Although details of the method of dividing the circuit board 10 will be described later, in the present invention, each circuit board 10 is divided from a large metal board by cutting the metal board. In the conventional example, since the circuit board is divided by pressing, a margin is essential in the vicinity of the peripheral end portion of the circuit board 10. Furthermore, since the heat sink 13 on which the power element is mounted has the highest height among the circuit elements 13, the heat sink 13 cannot be disposed in the peripheral portion of the circuit board 10. In the present invention, this margin can be eliminated, and the heat sink 13A can be disposed at any location on the surface of the circuit board 10. The same applies to other circuit elements 13 such as passive elements and active elements.

  The lead 14 is fixed to a pad made of the conductive pattern 12 and has a function of performing input / output with the outside. The power elements and the like are mounted face up and are electrically connected to the conductive pattern 12 by the fine metal wires 15. Furthermore, in the conductive pattern 12, portions that are not electrically connected may be overcoated with resin or the like.

  With the configuration of the hybrid integrated circuit device 10 as described above, the following effects can be achieved.

  First, since the conductive pattern 12 can be formed to the vicinity of the end portion of the circuit board 10, when the same circuit as the conventional example is formed, the size of the entire hybrid integrated circuit device can be reduced.

  Second, since the circuit element 13 can be arranged up to the vicinity of the end of the circuit board 10, the degree of freedom in designing an electric circuit can be improved. Furthermore, since the pattern density can be improved, when the same circuit as the conventional example is formed, the size of the entire hybrid integrated circuit device can be reduced.

  Fourth, since an anchor effect is generated between the circuit board 10 inclined portion 10B and the insulating resin 16, it is possible to prevent the circuit board 10 from being detached from the insulating resin 16.

  Fifth, a portion where the back surface and the side surface of the circuit board 10 are continuous is formed at an obtuse angle and does not have a rounded shape. Therefore, the insulating resin 16 is prevented from entering the gap between the mold and the circuit board 10 in the step of using the mold to expose the back surface of the circuit board and sealing with the insulating resin 16. be able to. From this, it is possible to prevent the insulating resin 16 from adhering to the back surface of the circuit board 10.

(Second Embodiment Explaining Method of Manufacturing Hybrid Integrated Circuit Device)
A method for manufacturing a hybrid integrated circuit device will be described with reference to FIGS. First, the overall process of the present embodiment will be described with reference to the flowchart of FIG. In this embodiment, a hybrid integrated circuit device is manufactured by the following process. That is, a step of dividing a large metal substrate into a middle metal substrate, a step of forming a plurality of mixed integrated circuit conductive patterns on the surface of the middle metal substrate, and an insulation of the middle metal substrate. Forming a groove in a grid pattern on a surface where no layer is provided, a die bonding step of mounting a circuit element on the conductive pattern, a wire bonding step, a remaining thickness portion of the groove of the metal substrate, and an insulating layer The hybrid integrated circuit device is manufactured, for example, in a process of separating individual circuit boards by cutting off the substrate. Further, the divided circuit board 10 is sealed with an insulating resin. Each of these steps will be described below.

First Step: See FIG. 4 This step is a step of forming a middle-sized metal substrate 10B by dividing a large metal substrate 10A.

  First, referring to FIG. 4A, a large metal substrate 10A is prepared. For example, the size of the large substrate 10A is a square of about 1 meter. Here, the metal substrate 10A is an aluminum substrate on which both surfaces are anodized. An insulating layer is provided on the surface of the metal substrate 10A. Furthermore, a copper foil serving as a conductive pattern is formed on the surface of the insulating layer.

  Next, referring to FIG. 4B, the metal substrate 10 </ b> A is divided along the dicing line D <b> 1 by the cut saw 31. Here, the plurality of metal substrates 10A are simultaneously divided by overlapping the plurality of metal substrates 10A. The cut saw 31 divides the metal substrate 10A along the dicing line D1 while rotating at high speed. Here, as a dividing method, a large-sized metal substrate 10A having a square shape is divided into eight along a dicing line D1, thereby forming a long and thin metal substrate 10B. Here, as for the shape of the metal substrate 10B of the middle plate, the length of the long side is twice as long as the length of the short.

  With reference to FIG.4 (C), the shape etc. of the blade edge | tip of the cut-and-sew 31 are demonstrated. FIG. 4C is an enlarged view of the vicinity of the cutting edge 31 </ b> A of the cut saw 31. The edge part of 31 A of blade edges is formed flat, and the diamond is embedded. The metal substrate 10A can be divided along the dicing line D1 by rotating the cutting saw having such a blade edge at a high speed.

  The intermediate metal plate 10B manufactured by this process is etched to partially remove the copper foil, whereby a conductive pattern is formed. The number of conductive patterns to be formed depends on the size of the metal substrate 10B and the size of the hybrid integrated circuit, but the conductive patterns forming tens to hundreds of hybrid integrated circuits are formed on one metal substrate 10B. Can be formed.

Second Step: See FIGS. 5 and 6 This step is a step of forming grooves 20 in a lattice shape on the surface of the intermediate metal substrate 10B where the insulating layer is not provided. FIG. 5A is a plan view of an intermediate metal substrate 10B divided in the previous step, and FIG. 5B is a perspective view showing a state in which grooves are formed in the metal substrate 10A using a V-cut saw 35. FIG. FIG. 5C is an enlarged view of the cutting edge 35A.

  Referring to FIGS. 5A and 5B, the V-cut saw 35 is rotated at a high speed to form a groove in the metal substrate along the dicing line D2. The dicing lines D2 are provided in a lattice shape. The dicing line D2 corresponds to the boundary line of each conductive pattern formed on the insulating layer 11.

  The shape of the V-cut saw 35 will be described with reference to FIG. The V-cut saw 35 is provided with a large number of cutting edges 35A having a shape as shown in FIG. Here, the shape of the cutting edge 35A corresponds to the shape of the groove provided in the metal substrate 10A. Here, a groove having a V-shaped cross section is formed on the back surface (the surface on which the insulating layer 11 is not provided) of the metal substrate. Therefore, the shape of the blade edge 35A is also V-shaped. Note that diamond is embedded in the cutting edge 35A.

  Next, with reference to FIGS. 6A and 6B, the shape of the metal substrate 10B on which the grooves 20 are formed will be described. 6A is a perspective view of the metal substrate 10B in which grooves are formed by the cut saw 31, and FIG. 6B is a cross-sectional view of the metal substrate 10B.

  Referring to FIG. 6A, grooves 20 are formed in a lattice shape on the surface of metal substrate 10B where insulating layer 11 is not provided. In the present embodiment, since the groove is formed using the V-cut saw 35 having the V-shaped cutting edge 35A, the groove 20 has a V-shaped cross section. The center line of the groove 20 corresponds to the boundary line of each conductive pattern 12 formed on the insulating layer 11.

  The shape and the like of the groove 20 will be described with reference to FIG. Here, the groove 20 is formed in a V-shaped cross section. The depth of the groove 20 is shallower than the thickness of the metal substrate 10B. Therefore, in this step, the metal substrate 10B is not divided into individual circuit boards 10. That is, the individual circuit boards 10 are connected by the remaining thickness portion of the metal substrate 10B corresponding to the groove 20 portion. Therefore, the metal substrate 10B can be handled as a single sheet until it is divided into individual circuit boards 10. In addition, when “burrs” occur in this process, high pressure cleaning is performed to remove “burrs”.

Third Step: See FIGS. 7 to 9 This step is a step in which the circuit element 13 is mounted on the conductive pattern 12 and the circuit element 13 and the conductive pattern 12 are electrically connected.

  With reference to FIG. 7, a die bonding process for mounting the circuit element 13 on the conductive pattern 12 will be described. FIG. 7 is a cross-sectional view showing a state in which the circuit element 13 is mounted on the conductive pattern 12. The circuit element 13 is mounted on a predetermined portion of the conductive pattern 12 via a brazing material such as solder. As described above, the conductive pattern 12 is also formed near the peripheral edge of the circuit board 10. Therefore, the circuit element 13 can also be mounted in the vicinity of the peripheral end portion of the circuit board 10. Further, the heat sink 13A having a power element mounted on the upper surface is a circuit element having a height as compared with other circuit elements. For this reason, in the conventional method for manufacturing a hybrid integrated circuit device using a press, the heat sink 13A cannot be disposed in the vicinity of the peripheral end of the circuit element 13. As will be described later, in the present invention, the circuit boards 10 are individually divided using a round cutter. Accordingly, the circuit element 13 having a height such as the heat sink 13 </ b> A can be disposed in the vicinity of the peripheral end of the circuit element 13.

  With reference to FIG. 8, the process of the wire bond which electrically connects the circuit element 13 and the conductive pattern 12 is demonstrated. FIG. 8 is a cross-sectional view showing a state in which the circuit element 13 and the conductive pattern 12 are electrically connected using the fine metal wire 15. Here, wire bonding is performed collectively on several tens to several hundreds of hybrid integrated circuits formed on one metal substrate 10B.

  A hybrid integrated circuit formed on the metal substrate 10B will be specifically described with reference to FIG. FIG. 9 is a plan view of a portion of the hybrid integrated circuit 17 formed on the metal substrate 10B. In actuality, a larger number of hybrid integrated circuits 17 are formed. In addition, a dicing line D3 that divides the metal substrate 10B into individual circuit boards 10 is indicated by a dotted line in FIG. As is clear from the figure, the conductive pattern 12 and the dicing line D2 forming each hybrid integrated circuit are very close to each other. From this, it can be seen that the conductive pattern 12 is formed on the entire surface of the metal substrate 10B. Furthermore, it can be seen that the circuit elements 13 such as the heat sink 13A are arranged in the peripheral portion of the hybrid integrated circuit.

  In the above description, the hybrid integrated circuit is collectively formed on the surface of the elongated substrate 10B. Here, when there is a restriction on a manufacturing apparatus that performs die bonding or wire bonding, the metal substrate 10B can be divided into a desired size in a step before this step. For example, when the metal substrate 10B is divided into two in the step before this step, the metal substrate has a square shape.

Fourth Step: See FIG. 10 This step is a step of separating the metal substrate 10B into individual circuit boards 10 by cutting away the remaining thickness portions of the grooves of the metal substrate 10B and the insulating layer 11. FIG. 10A is a perspective view showing a state in which the metal substrate 10 </ b> B is divided into individual circuit boards 10 using the round cutter 41. FIG. 10B is a cross-sectional view of FIG. Here, although not illustrated, in FIG. 10A, a large number of hybrid integrated circuits are formed over the insulating layer 11.

  Referring to FIG. 10A, the metal substrate 10B is pushed along the dicing line D3 using the round cutter 41. As a result, the metal substrate 10B is divided into individual circuit boards 10. The round cutter 41 pushes out a portion corresponding to the center line of the groove 20 on the surface of the metal substrate 10B on which the insulating layer 11 is provided. Here, the groove 20 has a V-shaped cross section. Therefore, the round cutter 41 cuts off the remaining thickness portion of the metal substrate 10B and the insulating layer 11 at the portion where the groove 20 is formed deepest.

  The details of the round cutter 41 will be described with reference to FIG. The round cutter 41 has a disk-like shape, and its peripheral end is formed at an acute angle. The center part of the round cutter 41 is fixed to the support part 42 so that the round cutter 41 can freely rotate. The above-described cut saw cuts the metal substrate 10B while rotating at high speed by the driving force. Here, the round cutter 41 does not have a driving force. That is, the circular cutter 41 is rotated by moving it along the dicing line D3 while pressing a part of the circular cutter 41 against the metal substrate 10B. In principle, it is the same as a jig for cutting pizza.

  Next, the size of the round cutter 41 will be described. In a place where the groove 20 is formed, a length obtained by adding the remaining thickness of the metal substrate 10B and the thickness of the insulating layer 11 is defined as d. The length from the top of the circuit element 13 to the surface of the insulating layer 11 is h1. In this case, the radius of the round cutter 41 is set longer than the length obtained by adding d1 and h1. By setting in this way, the circuit board 10 can be reliably divided from the metal board 10B. At the same time, the lower end of the support portion 42 that supports the round cutter 41 can be prevented from coming into contact with the circuit element 13 and damaging the circuit element 13.

  Next, with reference to FIG. 10B, details of dividing the metal substrate 10B by the round cutter 41 will be described. As described above, in the present invention, the circuit element 13 having a height such as the heat sink 13 </ b> A can be disposed in the peripheral portion of the circuit board 10. From this, the position of the heat sink 13A may approach the dicing line D3 as shown in FIG. Even in such a case, the position of the support portion 42 is set as follows so that the support portion 42 does not contact the heat sink 13A.

  That is, when the distance from the top of the circuit element 13 to the surface of the insulating layer 11 is h1, the length h2 from the lower end of the support 42 to the surface of the insulating layer 11 is h1. Is set longer than. For example, in the present embodiment, the top of the thin metal wire 15 derived from the power element mounted on the heat sink 13A is the highest portion in the hybrid integrated circuit. In this case, the lower end of the support part 42 is set at a position higher than the top part of the thin metal wire 15. Thus, by setting the position of the lower end of the support portion 42, it is possible to prevent the fine metal wire 15 from being disconnected.

Fifth Step: See FIG. 11 A step of sealing the circuit board 10 with the insulating resin 16 will be described with reference to FIG. FIG. 11 is a cross-sectional view showing a process of sealing the circuit board 10 with the insulating resin 16 using the mold 50.

  First, the circuit board 10 is placed on the lower mold 50B. Next, the insulating resin 16 is injected from the gate 53. As a method for sealing, a transfer mold using a thermosetting resin or an injection mold using a thermosetting resin can be employed. Then, the gas inside the cavity corresponding to the amount of the insulating resin 16 injected from the gate 53 is released to the outside through the air vent 54.

  As described above, the inclined portion 10 </ b> B is provided on the side surface portion of the circuit board 10. Therefore, the insulating resin 16 goes around the inclined portion 10B by sealing with the insulating resin. Accordingly, an anchor effect is generated between the insulating resin 16 and the inclined portion 10B, and the bonding between the insulating resin 16 and the circuit board 10 is strengthened. Further, the cross-sectional shape of the portion where the back surface of the circuit board 10 and the inclined portion 10B are continuous is formed at an obtuse angle, and does not have a rounded shape. Therefore, the insulating resin 16 injected from the gate 53 can be prevented from entering the lower mold 50B and the back surface of the circuit board 10.

  The circuit board 10 that has been sealed with the resin through the above-described steps is completed as a product through a lead-cutting step and the like.

  According to the present embodiment, the following effects can be obtained.

  First, since a large-sized metal substrate is divided using a cutting saw 31 that rotates at a high speed, the occurrence of “burrs” is very small compared to the conventional substrate dividing method using shearing. Therefore, it is possible to prevent the hybrid integrated circuit from being short-circuited due to “burrs” and causing defective products in the middle of the manufacturing process.

  Secondly, since a plurality of large metal substrates 10 </ b> A that are superimposed are simultaneously divided using the cut-and-sew 31, work efficiency can be improved.

  Thirdly, even when the cut-and-sew 31 is worn, the replacement of the cut-and-sew 31 is a relatively simple operation and can be performed quickly. Therefore, when compared with the replacement of the conventional shearing blade, the work efficiency can be improved.

  Fourth, grooves are formed in portions corresponding to the boundary lines of the individual circuit boards 10 of the metal board 10B. For this reason, when the metal substrate 10B is transported, even if “deflection” occurs in the entire metal substrate 10B, the groove 20 is preferentially bent. Therefore, it is possible to prevent the flatness of each circuit board 10 from being impaired.

  Fifth, it is possible to incorporate several tens to several hundreds of hybrid integrated circuits on one metal substrate 10B. Therefore, the etching process, the die bonding process, and the wire bonding process can be performed at once. From this, productivity can be improved.

  Sixth, in the process of dividing the metal substrate 10B into the individual circuit boards 10, the metal substrate 10B is divided by rotating the circular cutter 41 having no driving force against the metal substrate 10B. Yes. Therefore, since the round cutter 41 cuts off the remaining thickness portion of the groove 20 and the insulating layer 11, no grinding dust is generated. Therefore, it is possible to prevent the hybrid integrated circuit from being short-circuited in the manufacturing process.

  Seventh, the metal substrate 10 </ b> B is divided by pressing the round cutter 41 against the portion corresponding to the groove 20. Therefore, it is possible to prevent the resin layer 11 from being cracked and the pressure resistance of the apparatus from being lowered. Furthermore, the flatness of the substrate 10B can be ensured.

  Eighth, even when the round cutter 41 is worn, the replacement of the round cutter 41 is a relatively simple operation and can be performed in a short time. From this, productivity can be improved.

  Ninth, in the present invention, each circuit board is separated by “cutting” the metal board using the cut-and-sew 31 or the round cutter 41. When the circuit board is separated using a press as in the conventional example, it is necessary to prepare different blades according to the size of the circuit board to be manufactured. According to the present invention, even when a hybrid integrated circuit device having circuit boards of different sizes is manufactured, it can be dealt with only by changing the dicing line.

  Tenth, in the present invention, a large number of hybrid integrated circuits are incorporated in a matrix on one metal substrate 10B. Since the hybrid integrated circuits are very close to each other, almost the entire surface of the metal substrate 10B becomes the circuit substrate 10. Accordingly, the loss of material disposal can be reduced.

(Third embodiment for explaining the hybrid integrated circuit device 1)
With reference to FIG. 12, the structure of the hybrid integrated circuit device sealed with an insulating resin will be described. 12A is a perspective view of the hybrid integrated circuit device 1, and FIG. 12B is a cross-sectional view taken along the line XX ′ in FIG.

  With reference to FIGS. 12A and 12B, the structure of the hybrid integrated circuit device 1 will be described. The hybrid integrated circuit device 1 shown in the figure is obtained by sealing the hybrid integrated circuit device 1 with a resin.

  The insulating resin 16 has a function of sealing a hybrid integrated circuit composed of the circuit elements 13 and the like provided on the surface of the circuit board 10. As a kind of the insulating resin 16, a thermoplastic resin sealed by an injection mold, a thermosetting resin sealed by a transfer mold, or the like can be used.

  Referring to FIG. 12B, the side surface of the circuit board 10 has a vertical portion 10A and an inclined portion 10B. Specifically, the angle formed by the back surface of the circuit board 10 and the inclined portion 10B is an obtuse angle. Therefore, when the resin sealing is performed with the back surface of the circuit board 10 exposed as shown in the figure, the insulating resin 16 wraps around the inclined portion 10B, and the anchor is interposed between the inclined portion 10B and the insulating resin 16. An effect occurs. Here, the inclined portion 10 </ b> B is also formed on the side surface continuous from the upper surface of the circuit board 10.

  With reference to FIG. 13, the configuration of the hybrid integrated circuit formed on the circuit board 10 in the hybrid integrated circuit device 1 of the present invention will be described. FIG. 13A is a perspective view of the hybrid integrated circuit device 1, and FIG. 13B is a cross-sectional view taken along line X-X ′ in FIG.

  Referring to FIGS. 13A and 13B, hybrid integrated circuit device 1 has the following configuration. That is, a circuit board 10 made of metal, an insulating layer 11 formed on the surface of the circuit board 10, a conductive pattern 12 formed on the insulating layer 11, and a circuit mounted at a predetermined position on the conductive pattern 12 The hybrid integrated circuit device 1 includes the elements 13 and the like. Each of these components will be described in detail below.

  As a material of the circuit board 10, a metal such as aluminum or copper is employed. Further, an alloy may be adopted as the material of the circuit board 10. Here, a circuit board 10 made of aluminum is employed, and both surfaces thereof are anodized. The side surface of the circuit board 10 is formed by an inclined portion 10B extending from the upper surface and the lower surface with an inclination, and a vertical portion 10A continuous to the inclined portion 10B. The reason why the inclined portion 10B is formed on the side surface of the circuit board 10 is the manufacturing method thereof. That is, the circuit board 10 is manufactured by cutting a large metal substrate. Specifically, a V-shaped groove is first formed from the front and back surfaces of the metal substrate, and then the remaining thickness portion of the portion where the groove is formed from the front surface is removed. The portion of the V-shaped groove becomes the inclined portion 10B. A specific manufacturing method for forming the circuit board 10 will be described later in an embodiment for explaining a method for manufacturing a hybrid integrated circuit device.

  The insulating layer 11 is formed on the surface of the circuit board 10 and has a function of insulating the conductive pattern 12 and the circuit board. Further, in order to positively transfer the heat generated from the circuit element 13 to the circuit board 10, the insulating layer 11 is highly filled with alumina.

  The conductive pattern 12 is provided on the surface of the insulating layer 11 and is made of a metal such as copper. Here, the conductive pattern 12 is entirely formed on the surface of the circuit board 10. Specifically, the conductive pattern 12 is also formed near the peripheral end within 2 mm from the peripheral end of the circuit board 10. Thus, the reason that the conductive pattern 12 can be formed up to the surface near the peripheral edge of the circuit board 10 is the method of dividing the circuit board 10. Although details of the method of dividing the circuit board 10 will be described later, in the present invention, each circuit board 10 is divided from a large metal board by cutting the metal board. In the conventional example, since the circuit board is divided by pressing, a margin is indispensable in the vicinity of the peripheral edge of the circuit board 10. However, in the present invention, this margin can be eliminated. The conductive pattern 12 can be formed over the entire surface.

  The circuit element 13 is mounted on a predetermined portion of the conductive pattern 12 via a brazing material such as solder. As the circuit element 13, a passive element, an active element, a circuit device, or the like can be generally employed. When a power element is mounted, the element is mounted on a heat sink fixed on the conductive pattern. In the present invention, the circuit element 13 can be arranged at an arbitrary location on the circuit board 10. That is, the circuit element 13 can also be arranged near the peripheral edge of the circuit board 10. Specifically, the circuit elements can be arranged on the surface of the circuit board 10 within 2 mm from the peripheral edge of the circuit board 10.

  The heat sink 13 </ b> A is mounted at a predetermined location of the conductive pattern 12. A power element is mounted on the upper surface, and the power element and the conductive pattern 12 are electrically connected by a thin metal wire 15. Here, the heat sink 13 </ b> A can be arranged at an arbitrary location on the circuit board 10. Specifically, the heat sink 13 </ b> A can be arranged near the peripheral end within 2 mm from the peripheral end of the circuit board 10. Thus, the reason why the heat sink 13A can be arranged up to the surface near the peripheral edge of the circuit board 10 is the method of dividing the circuit board 10.

  Although details of the method of dividing the circuit board 10 will be described later, in the present invention, each circuit board 10 is divided from a large metal board by cutting the metal board. In the conventional example, since the circuit board is divided by pressing, a margin is essential in the vicinity of the peripheral end portion of the circuit board 10. Furthermore, since the heat sink 13 on which the power element is mounted has the highest height among the circuit elements 13, the heat sink 13 cannot be disposed in the peripheral portion of the circuit board 10. In the present invention, this margin can be eliminated, and the heat sink 13A can be disposed at any location on the surface of the circuit board 10. The same applies to other circuit elements 13 such as passive elements and active elements.

  The lead 14 is fixed to a pad made of the conductive pattern 12 and has a function of performing input / output with the outside. The power elements and the like are mounted face up and are electrically connected to the conductive pattern 12 by the fine metal wires 15. Furthermore, in the conductive pattern 12, portions that are not electrically connected may be overcoated with resin or the like.

  With the configuration of the hybrid integrated circuit device 10 as described above, the following effects can be achieved.

  First, since the conductive pattern 12 can be formed to the vicinity of the end portion of the circuit board 10, when the same circuit as the conventional example is formed, the size of the entire hybrid integrated circuit device can be reduced.

  Second, since the circuit element 13 can be arranged up to the vicinity of the end of the circuit board 10, the degree of freedom in designing an electric circuit can be improved. Furthermore, since the pattern density can be improved, when the same circuit as the conventional example is formed, the size of the entire hybrid integrated circuit device can be reduced.

  Fourth, since an anchor effect is generated between the circuit board 10 inclined portion 10B and the insulating resin 16, it is possible to prevent the circuit board 10 from being detached from the insulating resin 16.

  Fifth, a portion where the back surface and the side surface of the circuit board 10 are continuous is formed at an obtuse angle and does not have a rounded shape. Therefore, the insulating resin 16 is prevented from entering the gap between the mold and the circuit board 10 in the step of using the mold to expose the back surface of the circuit board and sealing with the insulating resin 16. be able to. From this, it is possible to prevent the insulating resin 16 from adhering to the back surface of the circuit board 10.

(Fourth embodiment for explaining a method of manufacturing a hybrid integrated circuit device)
A method for manufacturing the hybrid integrated circuit device described in the third embodiment will be described with reference to FIGS. The method of manufacturing a hybrid integrated circuit device of the present invention includes a step of preparing a metal substrate 10A having an insulating layer 11 formed on the surface, a step of forming a plurality of conductive patterns 12 on the surface of the insulating layer 11, and a metal substrate. The step of forming grooves 20 in the form of a lattice on the front and back surfaces of 10B, the step of incorporating a hybrid integrated circuit on the conductive pattern 20, and the individual circuit boards by separating the metal substrate 10B at the locations where the grooves 20 are formed And a step of separating 10.

  The overall process of the present embodiment will be described with reference to the flowchart of FIG. In this embodiment, a hybrid integrated circuit device is manufactured by the following process. That is, a step of dividing the large metal substrate 10A into a middle metal substrate 10B, a step of forming a plurality of hybrid integrated circuit conductive patterns 12 on the surface of the middle metal substrate 10B, Forming a first groove 20A and a second groove 20B in a lattice pattern on the front and back surfaces of the metal substrate 10B, a die-bonding process for mounting the circuit element 13 on the conductive pattern 12, and a wire-bonding process. The hybrid integrated circuit device is manufactured by, for example, separating the individual circuit boards 10 by dividing the metal substrate 10B at the locations where the grooves 20 are formed. Further, the divided circuit board 10 is sealed with an insulating resin. Each of these steps will be described below.

First Step: See FIG. 15 This step is a step of forming the middle-sized metal substrate 10B by dividing the large-sized metal substrate 10A.

  First, referring to FIG. 15A, a large metal substrate 10A is prepared. For example, the size of the large substrate 10A is a square of about 1 meter. Here, the metal substrate 10A is an aluminum substrate on which both surfaces are anodized. An insulating layer is provided on the surface of the metal substrate 10A. Furthermore, a copper foil serving as a conductive pattern is formed on the surface of the insulating layer.

  Next, referring to FIG. 15B, the metal substrate 10 </ b> A is divided along the dicing line D <b> 1 by the cut saw 31. Here, the plurality of metal substrates 10A are simultaneously divided by overlapping the plurality of metal substrates 10A. The cut saw 31 divides the metal substrate 10A along the dicing line D1 while rotating at high speed. Here, as a dividing method, a large-sized metal substrate 10A having a square shape is divided into eight along a dicing line D1, thereby forming a long and thin metal substrate 10B. Here, as for the shape of the metal substrate 10B of the middle plate, the length of the long side is twice as long as the length of the short.

  With reference to FIG. 15C, the shape of the cutting edge of the cut-and-sew 31 will be described. FIG. 15C is an enlarged view of the vicinity of the cutting edge 31 </ b> A of the cut saw 31. The edge part of 31 A of blade edges is formed flat, and the diamond is embedded. The metal substrate 10A can be divided along the dicing line D1 by rotating the cutting saw having such a blade edge at a high speed.

  The intermediate metal plate 10B manufactured by this process is etched to partially remove the copper foil, whereby a conductive pattern is formed. The number of conductive patterns to be formed depends on the size of the metal substrate 10B and the size of the hybrid integrated circuit, but the conductive patterns forming tens to hundreds of hybrid integrated circuits are formed on one metal substrate 10B. Can be formed.

Second Step: See FIG. 16 and FIG. 17 This step is a step of forming the first groove 20A and the second groove 20B in a lattice shape on the front surface and the back surface of the intermediate metal substrate 10B. FIG. 16A is a plan view of an intermediate metal substrate 10B divided in the previous step, and FIG. 16B is a perspective view showing a state in which grooves are formed in the metal substrate 10A using a V-cut saw 35. FIG. FIG. 16C is an enlarged view of the cutting edge 35A.

  Referring to FIGS. 16A and 16B, V-cut saw 35 is rotated at a high speed, and first groove 20A and second groove 20B are formed on the front and back surfaces of the metal substrate along dicing line D2. Form. The dicing lines D2 are provided in a lattice shape. The dicing line D2 corresponds to the boundary line of the conductive pattern constituting each circuit formed on the insulating layer 11.

  With reference to FIG. 16C, the shape of the V-cut saw 35 will be described. The V-cut saw 35 is provided with a large number of cutting edges 35A having a shape as shown in FIG. Here, the shape of the cutting edge 35A corresponds to the shape of the groove provided in the metal substrate 10A. Here, grooves having a V-shaped cross section are formed on both surfaces of the metal substrate. Therefore, the shape of the blade edge 35A is also V-shaped. Note that diamond is embedded in the cutting edge 35A.

  Further, a flat portion 35B is formed at the tip of the cutting edge 35A of the V-cut saw 35. That is, the cutting edge 35A is not sharply formed and its tip is formed flat. Therefore, the first groove 20A and the second groove 20B formed by the V-cut saw 35 rotating at a high speed are also formed in a shape corresponding to the flat portion 35B.

  The merit of providing the flat portion 35B at the tip of the blade edge 35A as described above will be described. By forming the cutting edge 35A flat, it is possible to reduce the wear of the V-cut saw 35, and therefore, the groove 20 can be formed more efficiently. Specifically, particularly when the first groove 20A is formed on the surface on which the resin layer 11 is formed, the resin layer 11 is very hard. Therefore, when the tip of the blade edge 35A is formed sharply, A large stress acts on the leading end, and the leading end is worn out early. From this, by forming the flat portion 35B on the cutting edge 35A, the tip of the cutting edge 35A is gradually and uniformly worn, so that early wear of the cutting edge 35A can be prevented. This can prevent the cutting performance of the V-cut saw 35 from being deteriorated, so that when the first groove 20A is formed on the surface on which the resin layer 11 is formed, the resin layer 11 is not cracked. Can be prevented.

  Next, with reference to FIGS. 17A and 17B, the shape of the metal substrate 10B on which the grooves 20 are formed will be described. FIG. 17A is a perspective view of the metal substrate 10B in which grooves are formed by the cut saw 31, and FIG. 17B is a cross-sectional view of the metal substrate 10B.

  Referring to FIG. 17A, first grooves 20A and second grooves 20B are formed in a lattice pattern on the front and back surfaces of metal substrate 10B. Here, the planar positions of the first groove 20A and the second groove 20B correspond exactly. In the present embodiment, since the groove is formed using the V-cut saw 35 having the V-shaped cutting edge 35A, the groove 20 has a V-shaped cross section. Further, the center line of the groove 20 corresponds to the boundary line of the conductive pattern 12 constituting each circuit formed on the insulating layer 11. Here, the 1st groove | channel 20A is formed in the surface in which the resin layer 11 was formed, and the 2nd groove | channel 20B is formed in the opposite surface.

  The shape and the like of the groove 20 will be described with reference to FIG. Here, the groove 20 has a substantially V-shaped cross section. The depths of the first groove 20A and the second groove 20B are shallower than half the thickness of the metal substrate 10B. Therefore, in this step, the metal substrate 10B is not divided into individual circuit boards 10. That is, the individual circuit boards 10 are connected by the remaining thickness portion of the metal substrate 10B corresponding to the groove 20 portion. Therefore, the metal substrate 10B can be handled as a single sheet until it is divided into individual circuit boards 10. In addition, when “burrs” occur in this process, high pressure cleaning is performed to remove “burrs”.

Third Step: See FIGS. 18 to 20 This step is a step in which the circuit element 13 is mounted on the conductive pattern 12 and the circuit element 13 and the conductive pattern 12 are electrically connected.

  With reference to FIG. 18, a die bonding process for mounting the circuit element 13 on the conductive pattern 12 will be described. FIG. 18 is a cross-sectional view showing a state in which the circuit element 13 is mounted on the conductive pattern 12. The circuit element 13 is mounted on a predetermined portion of the conductive pattern 12 via a brazing material such as solder. As described above, the conductive pattern 12 is also formed near the peripheral edge of the circuit board 10. Therefore, the circuit element 13 can also be mounted in the vicinity of the peripheral end portion of the circuit board 10. Further, the heat sink 13A having a power element mounted on the upper surface is a circuit element having a height as compared with other circuit elements. For this reason, in the conventional method for manufacturing a hybrid integrated circuit device using a press, the heat sink 13A cannot be disposed in the vicinity of the peripheral end of the circuit element 13. As will be described later, in the present invention, the circuit boards 10 are individually divided using a round cutter. Accordingly, the circuit element 13 having a height such as the heat sink 13 </ b> A can be disposed in the vicinity of the peripheral end of the circuit element 13.

  With reference to FIG. 19, the process of the wire bond which performs the electrical connection of the circuit element 13 and the conductive pattern 12 is demonstrated. FIG. 19 is a cross-sectional view showing a state in which the circuit element 13 and the conductive pattern 12 are electrically connected using the fine metal wire 15. Here, wire bonding is performed collectively on several tens to several hundreds of hybrid integrated circuits formed on one metal substrate 10B.

  A hybrid integrated circuit formed on the metal substrate 10B will be specifically described with reference to FIG. FIG. 20 is a plan view of a portion of the hybrid integrated circuit 17 formed on the metal substrate 10B. In actuality, a larger number of hybrid integrated circuits 17 are formed. In addition, a dicing line D3 that divides the metal substrate 10B into individual circuit boards 10 is indicated by a dotted line in FIG. As is clear from the figure, the conductive pattern 12 and the dicing line D2 forming each hybrid integrated circuit are very close to each other. From this, it can be seen that the conductive pattern 12 is formed on the entire surface of the metal substrate 10B. Furthermore, it can be seen that the circuit elements 13 such as the heat sink 13A are arranged in the peripheral portion of the hybrid integrated circuit.

  In the above description, the hybrid integrated circuit is collectively formed on the surface of the elongated substrate 10B. Here, when there is a restriction on a manufacturing apparatus that performs die bonding or wire bonding, the metal substrate 10B can be divided into a desired size in a step before this step. For example, when the metal substrate 10B is divided into two in the step before this step, the metal substrate has a square shape.

Fourth Step: See FIGS. 21 and 22 This step is a step of separating the individual circuit boards 10 by dividing the metal substrate 10B at locations where the grooves 20 are formed. FIG. 21 is a cross-sectional view illustrating a method of dividing the metal substrate 10B into the circuit substrate 10 by bending. FIG. 22A is a perspective view showing a state in which the metal substrate 10B is divided into individual circuit boards 10 using the round cutter 41. FIG. FIG. 22B is a cross-sectional view of FIG. Here, although not illustrated, in FIG. 22A, a large number of hybrid integrated circuits are formed over the insulating layer 11.

  With reference to FIG. 21, a method of dividing the metal substrate 10B into individual circuit substrates 10 by bending will be described. In this method, the metal substrate 10B is partially bent so that the portion where the first groove 20A and the second groove 20B are formed is bent. Since the place where the first groove 20A and the second groove 20B are formed is connected only by the thickness part where the groove 20 is not formed, it is easily separated from this connection part by bending at this part. be able to. Further, the metal substrate 10B is partially bent from the back surface so that the electric circuit formed on the surface of the metal substrate 10B is not destroyed.

  Next, a method for dividing the metal substrate 10B with the round cutter 41 will be described with reference to FIG. Referring to FIG. 22A, the metal substrate 10B is pushed along the dicing line D3 using the round cutter 41. As a result, the metal substrate 10B is divided into individual circuit boards 10. The round cutter 41 pushes out a portion corresponding to the center line of the groove 20 in the thickness portion where the groove 20 of the metal substrate 10B is not formed.

  Details of the round cutter 41 will be described with reference to FIG. The round cutter 41 has a disk-like shape, and its peripheral end is formed at an acute angle. The center part of the round cutter 41 is fixed to the support part 42 so that the round cutter 41 can freely rotate. The above-described cut saw cuts the metal substrate 10B while rotating at high speed by the driving force. Here, the round cutter 41 does not have a driving force. That is, the circular cutter 41 is rotated by moving it along the dicing line D3 while pressing a part of the circular cutter 41 against the metal substrate 10B. In principle, it is the same as a jig for cutting pizza.

  Next, with reference to FIG. 22B, details of dividing the metal substrate 10B by the round cutter 41 will be described. As described above, in the present invention, the circuit element 13 having a height such as the heat sink 13 </ b> A can be disposed in the peripheral portion of the circuit board 10. From this, the position of the heat sink 13A may approach the dicing line D3 as shown in FIG. Even in such a case, the position of the support portion 42 is set as follows so that the support portion 42 does not contact the heat sink 13A.

Fifth Step: See FIG. 23 A step of sealing the circuit board 10 with the insulating resin 16 will be described with reference to FIG. FIG. 23 is a cross-sectional view showing a process of sealing the circuit board 10 with the insulating resin 16 using the mold 50.

  First, the circuit board 10 is placed on the lower mold 50B. Next, the insulating resin 16 is injected from the gate 53. As a method for sealing, a transfer mold using a thermosetting resin or an injection mold using a thermosetting resin can be employed. Then, the gas inside the cavity corresponding to the amount of the insulating resin 16 injected from the gate 53 is released to the outside through the air vent 54.

  As described above, the inclined portion 10 </ b> B is provided on the side surface portion of the circuit board 10. Therefore, the insulating resin 16 goes around the inclined portion 10B by sealing with the insulating resin. Accordingly, an anchor effect is generated between the insulating resin 16 and the inclined portion 10B, and the bonding between the insulating resin 16 and the circuit board 10 is strengthened. Further, the cross-sectional shape of the portion where the back surface of the circuit board 10 and the inclined portion 10B are continuous is formed at an obtuse angle, and does not have a rounded shape. Therefore, the insulating resin 16 injected from the gate 53 can be prevented from entering the lower mold 50B and the back surface of the circuit board 10.

  The circuit board 10 that has been sealed with the resin through the above-described steps is completed as a product through a lead-cutting step and the like. In the above description, a large number of electric circuits are formed on the surface of the large-sized metal substrate 10B and then divided into individual circuit boards 10. However, this process can be changed. Specifically, first, before incorporating an electric circuit on the surface of the metal substrate, an elongated metal substrate on which 2 to 8 parallel circuit substrates are formed is formed. Then, after forming a plurality of electric circuits on the elongated metal substrate, the individual circuit substrates are divided. Here, as a method of dividing the circuit board, a method by bending as described above or a method by the round cutter 41 can be employed.

  According to the present embodiment, the following effects can be obtained.

  First, since the flat portion 35B is provided on the blade edge 35A of the V-cut saw 35 that forms the first groove 20A and the second groove 20B on the metal substrate 10B, wear of the blade edge 35A can be reduced. Thereby, it is possible to prevent the cutting performance of the V-cut saw 35 from being deteriorated at an early stage. Furthermore, even when the first groove 20A is formed on the surface of the metal substrate 10B provided with the resin layer 11, it is possible to prevent the resin layer 11 from being cracked.

  Second, since the first grooves 20A and the second grooves 20B are formed in a lattice pattern on the front and back surfaces of the metal substrate 10B, the circuit board 10 can be easily divided at the positions where the grooves are formed. There are two methods for dividing each circuit board 10: a division by bending and a division by a round cutter 41. Either of them can be easily divided.

  In the present invention, the following effects can be obtained.

  First, since a large-sized metal substrate is divided using a cutting saw 31 that rotates at a high speed, the occurrence of “burrs” is very small compared to the conventional substrate dividing method using shearing. Therefore, it is possible to prevent the hybrid integrated circuit from being short-circuited due to “burrs” and causing defective products in the middle of the manufacturing process.

  Secondly, even when the cut-and-sew 31 is worn, the replacement of the cut-and-sew 31 is a relatively simple operation and can be performed quickly. Therefore, when compared with the replacement of the conventional shearing blade, the work efficiency can be improved.

  Third, it is possible to incorporate several tens to several hundreds of hybrid integrated circuits on one metal substrate 10B. Therefore, the etching process, the die bonding process, and the wire bonding process can be performed at once. From this, productivity can be improved.

  Fourth, in the step of dividing the metal substrate 10B into the individual circuit boards 10, the circular cutter 41 having no driving force is rotated by pressing against the metal substrate 10B to divide the metal substrate 10B. Yes. Therefore, since the round cutter 41 cuts off the remaining thickness portion of the groove 20 and the insulating layer 11, no grinding dust is generated. Therefore, it is possible to prevent the hybrid integrated circuit from being short-circuited in the manufacturing process.

  Fifth, the metal substrate 10B is divided by pressing the round cutter 41 against the portion corresponding to the groove 20. Therefore, it is possible to prevent the resin layer 11 from being cracked and reducing the pressure resistance of the circuit board. Furthermore, the flatness of the substrate 10B can be ensured.

  Sixth, even when the round cutter 41 is worn, the replacement of the round cutter 41 is a relatively simple operation and can be performed in a short time. From this, productivity can be improved.

  Seventh, in the present invention, the individual circuit boards are separated by “cutting” the metal board using the cut saw 31 or the round cutter 41. When the circuit board is separated using a press as in the conventional example, it is necessary to prepare different blades according to the size of the circuit board to be manufactured. According to the present invention, even when a hybrid integrated circuit device having circuit boards of different sizes is manufactured, it can be dealt with only by changing the dicing line.

  Eighth, in the present invention, a large number of hybrid integrated circuits are incorporated in a matrix on one metal substrate 10B. Since the hybrid integrated circuits are very close to each other, almost the entire surface of the metal substrate 10B becomes the circuit substrate 10. Accordingly, the loss of material disposal can be reduced.

  Ninth, since the flat portion 35B is provided on the blade edge 35A of the V-cut saw 35 that forms the first groove 20A and the second groove 20B on the metal substrate 10B, wear of the blade edge 35A can be reduced. Thereby, it is possible to prevent the cutting performance of the V-cut saw 35 from being deteriorated at an early stage. Furthermore, even when the first groove 20A is formed on the surface of the metal substrate 10B provided with the resin layer 11, it is possible to prevent the resin layer 11 from being cracked.

  Tenth, since the first grooves 20A and the second grooves 20B are formed in a lattice pattern on the front and back surfaces of the metal substrate 10B, the circuit board 10 can be easily divided at the positions where the grooves are formed. There are two methods for dividing each circuit board 10: a division by bending and a division by a round cutter 41. Either of them can be easily divided.

1A and 1B are a perspective view and a cross-sectional view of a hybrid integrated circuit device of the present invention. 1A and 1B are a perspective view and a cross-sectional view of a hybrid integrated circuit device of the present invention. 3 is a flowchart illustrating a method for manufacturing a hybrid integrated circuit device according to the present invention. It is a top view (A), a perspective view (B), and an enlarged view (C) for explaining the method for manufacturing a hybrid integrated circuit device of the present invention. It is a top view (A), a perspective view (B), and an enlarged view (C) for explaining the method for manufacturing a hybrid integrated circuit device of the present invention. 1A and 1B are a perspective view and a cross-sectional view illustrating a method for manufacturing a hybrid integrated circuit device of the present invention. It is sectional drawing explaining the manufacturing method of the hybrid integrated circuit device of this invention. It is sectional drawing explaining the manufacturing method of the hybrid integrated circuit device of this invention. It is a top view explaining the manufacturing method of the hybrid integrated circuit device of this invention. 1A and 1B are a perspective view and a cross-sectional view illustrating a method for manufacturing a hybrid integrated circuit device of the present invention. It is sectional drawing explaining the manufacturing method of the hybrid integrated circuit device of this invention. 1A and 1B are a perspective view and a cross-sectional view of a hybrid integrated circuit device of the present invention. 1A and 1B are a perspective view and a cross-sectional view of a hybrid integrated circuit device of the present invention. 3 is a flowchart illustrating a method for manufacturing a hybrid integrated circuit device according to the present invention. It is a top view (A), a perspective view (B), and an enlarged view (C) for explaining the method for manufacturing a hybrid integrated circuit device of the present invention. It is a top view (A), a perspective view (B), and an enlarged view (C) for explaining the method for manufacturing a hybrid integrated circuit device of the present invention. 1A and 1B are a perspective view and a cross-sectional view illustrating a method for manufacturing a hybrid integrated circuit device of the present invention. It is sectional drawing explaining the manufacturing method of the hybrid integrated circuit device of this invention. It is sectional drawing explaining the manufacturing method of the hybrid integrated circuit device of this invention. It is a top view explaining the manufacturing method of the hybrid integrated circuit device of this invention. It is sectional drawing explaining the manufacturing method of the hybrid integrated circuit device of this invention. 1A and 1B are a perspective view and a cross-sectional view illustrating a method for manufacturing a hybrid integrated circuit device of the present invention. It is sectional drawing explaining the manufacturing method of the hybrid integrated circuit device of this invention. It is the perspective view (A) and sectional drawing (B) of the conventional hybrid integrated circuit device. It is the top view (A) and sectional drawing (B) explaining the manufacturing method of the conventional hybrid integrated circuit device. It is the top view (A) and sectional drawing (B) explaining the manufacturing method of the conventional hybrid integrated circuit device. It is a top view explaining the manufacturing method of the conventional hybrid integrated circuit device.

Claims (4)

A metal substrate provided with a conductive pattern in each of the arrangement regions of a plurality of hybrid integrated circuit devices provided on the surface via an insulating layer and arranged adjacent to each other,
Forming a V-shaped groove having a depth at which the metal substrate is not divided on the front and back surfaces of the metal substrate corresponding to the boundaries of the plurality of hybrid integrated circuit devices arranged;
Mounting circuit elements provided to be electrically connected to the conductive patterns of the plurality of hybrid integrated circuit devices;
Dividing the plurality of hybrid integrated circuit devices through the front V-shaped groove portions to form divided metal substrates corresponding to the individual hybrid integrated circuit devices;
The divided metal substrate is placed in a mold, and a thermosetting insulating resin is injected from the gate of the mold by a transfer molding method, thereby dividing the metal substrate surface and the groove. A method of manufacturing a hybrid integrated circuit device comprising: sealing an inclined surface formed on a side surface of the metal substrate and the circuit element on the metal substrate. 2. The method of manufacturing a hybrid integrated circuit device according to claim 1, wherein the metal substrate is made of a material mainly composed of aluminum or copper. 3. The method of manufacturing a hybrid integrated circuit device according to claim 2, wherein the metal substrate is an aluminum substrate on which both sides are anodized. 2. The method of manufacturing a hybrid integrated circuit device according to claim 1, wherein the divided metal substrate is formed by bending the metal substrate at a location where the groove is formed.

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