JP2009011975A - Suction table and inspecting system for functional liquid droplet discharge head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a suction table having a simple structure and capable of properly sucking and setting a material to be set while adjusting to size of a material to be set and an inspecting system for a functional liquid droplet discharge head. <P>SOLUTION: The suction table is provided with: a first set stage 96 having a plurality of first suction holes 202 opened on the surface, a first suction flow path for communicating one end with the first suction holes 202 and communicating another end with an evacuating means through a first suction port 204 and for sucking and setting the material to be set; and a second set stage 97 having a plurality of second suction holes opened on the surface, a second suction flow path for communicating one end with the second suction holes and communicating another end with an evacuating means through a second suction port 218 and for sucking and holding the first set stage 96. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a suction table for sucking and setting a set object such as a work and an inspection system for a functional liquid droplet ejection head.

Conventionally, as this kind of suction table, a suction plate having a large number of suction holes, a chamber (air chamber) formed in the lower space of the suction plate, and the air in the chamber are exhausted into a number of suction holes. There is known one provided with an exhaust fan for applying a suction force.
In this case, when the closing plate faces the suction plate from the side so as to be slidable and different wide and narrow papers are introduced, the suction plate is slid to close the plurality of suction holes removed from the paper. Yes. As a result, the suction setting can be appropriately performed on sheets having different widths.
JP 2003-118902 A

  In such a conventional suction table, the structure such as the closing plate, its slide structure, and the sealing of the closing plate becomes complicated, and the newly added workpieces of different sizes should correspond to the positions of the suction holes. There was a problem that could not be.

  It is an object of the present invention to provide a suction table and a functional liquid droplet ejection head inspection system that have a simple structure and can appropriately suck and set a set object in accordance with the size of the set object. .

  The suction table of the present invention has a plurality of first suction holes opened on the surface, and a first suction that communicates one end with the plurality of first suction holes and the other end with a vacuum suction means via a first suction port. A first set stage having a flow path for sucking and setting an object to be set, a plurality of second suction holes opened on the surface, and one end communicating with the plurality of second suction holes, the other end being a second suction port A second set stage that has a second suction flow path that communicates with the vacuum suction means via the first suction stage and sucks and holds the first set stage.

  According to this configuration, when the vacuum suction unit is driven, the first set stage can be sucked onto the second set stage by the plurality of second suction holes of the second set stage, and the plurality of first set stages can be sucked. With the first suction hole, the set object can be sucked and set on the first set stage. In this case, by preparing the first set stage according to the size (planar shape) of the set object, the set object can be appropriately suction set. That is, since the first set stage is caused to function as a dedicated jig for the set object, the set object can be appropriately sucked and set.

  In this case, the first suction port is provided in the second set stage, and the second set stage has a first downstream channel that communicates the downstream end of the first suction channel and the first suction port. It is preferable that it is formed.

  According to this configuration, the first suction port is provided in the second set stage, and the suction flow path formed in the first set stage is possible by connecting the plurality of first suction holes and the first suction port to the flow path. The first set stage can be made thin and simple, and the cost of the first set stage can be reduced.

  Similarly, a base stage for mounting and fixing the second set stage is further provided, and the second suction port is provided in the base stage, and the base stage includes the downstream end of the second suction channel and the second suction port. It is preferable that a second downstream channel that communicates with the port is formed.

  According to this configuration, the second suction port is formed in the second stage as much as possible by providing the second suction port in the base stage and connecting the plurality of second suction holes and the second suction port to each other. The second set stage can be made thin and have a simple structure.

  In this case, the second suction channel is composed of a plurality of individual channels directly connected to the plurality of second suction holes, and the second downstream channel is a branch channel communicating with the plurality of individual channels, and a plurality of channels And a merging channel communicating with the downstream end of the branch channel.

  According to this configuration, the suction channel formed in the second set stage can be reduced as much as possible, and the second suction channel and the first downstream channel can be prevented from interfering with each other. Can do.

  On the other hand, the first suction channel is a communication groove that is formed on the back surface of the first set stage and communicates with the plurality of first suction holes, and between the surface of the second set stage that sucks the first set stage. It is preferable to configure the flow path.

  According to this configuration, the communication groove allows the suction force to be applied to the second set stage from the first set stage side as well, and the air chamber (chamber) communicating with the plurality of first suction holes is simply configured. can do. For this reason, the second set stage can stably suck the first set stage, and the plurality of first suction holes can suck and set the set object with a uniform suction force.

  In this case, it is preferable that the suction pressure to the first suction port and the second suction port by the vacuum suction means is the same.

  According to this configuration, suction air does not leak between the communication groove of the first set stage and the plurality of second suction holes of the second set stage, and vacuum control (negative pressure) by the vacuum suction means is performed. Control) can be simplified.

  In these cases, it is preferable that the plurality of second suction holes are distributed and arranged so as to adsorb the peripheral edge portion of the first set stage.

  According to this configuration, even if the number of second suction holes is small, the second set stage can adsorb the first set stage in a stable state.

  In these cases, it is preferable that the second set stage further includes stage positioning means for positioning the first set stage on the surface.

  Similarly, it is preferable that the first set stage further includes object positioning means for positioning the set object on the surface.

  According to this configuration, the second set stage can suck the first set stage in the positioning state, and the first set stage can suck the set object in the positioning state. Thereby, the set object can be set in a positioning state with respect to the second set stage.

  In these cases, the second set stage is formed in a square shape in plan view and larger than the first set stage, and a pair of cuts reaching the edge of the adsorbed first set stage are formed on two opposite sides of the second set stage. It is preferable that a notch is formed.

  According to this configuration, when the first set stage is removed together with the set object from the second set stage by releasing the suction (releasing to the atmosphere), even if the set object is in close contact with the second set stage, a pair of The set object and the first set stage can be easily removed by the notch. That is, when removing the first set stage, it is not necessary to introduce positive pressure air into the second suction port.

  In these cases, a plurality of first set stages are prepared corresponding to a plurality of types of set objects having different sizes, and the plurality of first set stages have the same suction surface with respect to the second set stage. It is preferable that they are formed.

  According to this configuration, it is not necessary to change the structure and suction form of the second set stage for a plurality of first set stages corresponding to a plurality of types of set objects, and it is possible to suck them under the same conditions. it can.

  The functional liquid droplet ejection head inspection system of the present invention includes the above-described suction table and an ink jet type functional liquid droplet ejection head, and the functional liquid is ejected onto the set object set on the suction table by the functional liquid droplet ejection head. It is characterized by comprising: a discharge inspection device for performing droplet inspection discharge; and a volume measuring device for measuring the volume of each functional droplet from the landing result of the functional droplet discharged on the set object.

  According to this configuration, it is possible to efficiently collect a sample for volume measurement by the volume measuring device.

  Hereinafter, a functional liquid droplet ejection head ejection inspection apparatus (hereinafter referred to as a “head inspection apparatus”) equipped with a target stage which is a suction table of the present invention will be described with reference to the accompanying drawings. This head inspection apparatus performs discharge performance inspection such as discharge confirmation inspection, discharge weight inspection, flight speed inspection, and volume measurement inspection on a functional droplet discharge head (so-called inkjet head) as a single unit. Among these, in the volume measurement inspection, the landing dots ejected from the functional liquid droplet ejection head are received by the glass substrate, and the target stage is an adsorption table for adsorbing and setting the glass substrate. Here, prior to the description of the head inspection apparatus, a functional liquid droplet ejection head to be inspected will be described.

  As shown in FIG. 1, the functional liquid droplet ejection head 1 has a so-called double structure, and is connected to a functional liquid introduction part 2 having two connection needles 7 and 7 and to the side of the functional liquid introduction part 2. Two head substrates 3, a head main body 4 that is connected to the lower side of the functional liquid introduction unit 2, and in which an in-head flow path filled with the functional liquid is formed, and between the functional liquid introduction unit 2 and the head main body 4 And a substantially square flange portion 5 interposed therebetween. In the actual drawing, one color of R, G, and B functional liquids is introduced into the functional liquid droplet ejection head 1, and at this inspection stage, it is determined how many functional liquids are already introduced. It is like that.

  Each connecting needle 7 is connected to a functional liquid tank 61 that stores the functional liquid via a functional liquid supply tube 37 described later, and the functional liquid introduction unit 2 receives supply of the functional liquid from the functional liquid tank 61. ing. The head body 4 includes a double pump unit 8 composed of piezoelectric elements such as piezoelectric elements, and a nozzle plate 11 having a nozzle surface 10 on which a large number of discharge nozzles 9 are formed.

  As shown in FIG. 1B, a large number of discharge nozzles 9 formed on the nozzle surface 10 of the nozzle plate 11 are composed of two nozzle rows 12 arranged in parallel to each other. The row 12 includes 180 discharge nozzles 9 arranged at an equal pitch. In this case, of the 180 discharge nozzles 9, ten discharge nozzles 9 positioned at both outer ends are invalid discharge nozzles (dummy nozzles) and are not used for actual drawing. For this reason, when the functional liquid droplet ejection head 1 is inspected by the head inspection apparatus 20, the inspection is performed without considering the invalid ejection nozzle. Although details will be described later, when the ejection weight of the functional liquid droplets ejected from the functional liquid droplet ejection head 1 by the ejection amount measuring unit 43 is measured, it is performed in units of 12 nozzle rows.

  The head substrate 3 is provided with two connectors 13 and 13, and each connector 13 is connected to a control device 25 (see FIG. 4) of the head inspection device 20 via a flexible flat cable (not shown). It is like that. The drive waveform output from the control device 25 is applied to each pump unit 8 via each connector 13, whereby functional droplets are discharged from each discharge nozzle 9. In this way, the control device 25 controls the driving of the functional liquid droplet ejection head 1.

  Next, a head inspection apparatus 20 that inspects the ejection performance of the functional liquid droplet ejection head 1 will be described with reference to FIGS. The head inspection device 20 is mounted on the machine base 21 and similarly to the ejection inspection device 22 mounted on the machine base 21 and mounted on the machine base 21, and mounted on the machine base 21. A maintenance device 23 that stores and recovers the function of the droplet discharge head 1; a chamber device 24 that accommodates the discharge inspection device 22 and the maintenance device 23 in the interior thereof and covers the upper space of the machine base 21; It is equipped with. Further, the head inspection device 20 includes a control device including a pair of electrical boxes 27 and 27 provided on the back side of the device cover 26 of the chamber device 24 and a control device main body 28 provided on the front surface (front surface) of the device cover 26. 25 is incorporated (see FIGS. 4 and 5). The control device 25 performs overall control of the functional liquid droplet ejection head 1, the ejection inspection device 22, the maintenance device 23, and the chamber device 24.

  The head inspection apparatus 20 performs the maintenance and recovery of the function of the functional liquid droplet ejection head 1 by the maintenance apparatus 23 in order to inspect the functional liquid droplet ejection heads 1 mounted on the ejection inspection apparatus 22 one by one. The functional droplets are ejected by the above, and the ejection performance of the functional droplet ejection head 1 is inspected. The chamber device 24 has a so-called clean booth configuration in which the temperature inside the device cover 26 is controlled. The entire head inspection device 20 is installed in a temperature-controlled clean room, and the temperature management in the device cover 26 by the chamber device 24 is performed by a ventilation device 29 (see FIG. 5) attached to the chamber device 24. It is done by ventilating the interior and replacing the interior atmosphere with a clean room atmosphere. That is, the chamber device 24 is composed of the device cover 26 and the ventilation device 29.

  The maintenance device 23 includes a suction device 31 that performs capping and functional liquid suction on the functional liquid droplet ejection head 1 and a wiping device 32 that wipes the nozzle surface 10 of the functional liquid droplet ejection head 1 after suction. . The suction device 31 and the wiping device 32 are arranged side by side on the right side of the machine base 21 so as to face below the movement trajectory of the functional liquid droplet ejection head 1 that moves in the Y-axis direction by tables 52 and 53 described later. (See FIG. 3).

  As shown in FIG. 2 and FIG. 3, the discharge inspection apparatus 22 includes an inspected portion 22A disposed in the front and rear intermediate portion of the machine base, and an inspecting portion 22B disposed in the front portion. The test liquid drawing head 35 that carries the liquid droplet ejection head 1 and moves the liquid droplets appropriately in the XY directions and the R, G, and B color functional liquids are selectively applied to the functional liquid droplet ejection head 1. Functional liquid supply unit 36 to be supplied to the liquid, a functional liquid supply tube 37 of the functional liquid supply unit 36, a supply flow path connection device 38 (see FIG. 6) for connecting the functional liquid supply tube 37 to the functional liquid droplet ejection head 1 with one touch, And a head setting device 40 (see FIG. 8) for setting the droplet discharge head 1 on the carriage plate 39 of the inspection / drawing device 35 without a tool.

  On the other hand, the inspection unit 22B includes a flight inspection unit 42 that inspects the ejection of functional droplets ejected from the functional droplet ejection head 1 and the flight speed, and the functional droplets ejected from the functional droplet ejection head 1. A discharge amount measurement unit 43 for measuring the discharge weight, a target stage 44 for setting a glass substrate W for measuring the volume of landing dots discharged from the functional liquid droplet discharge head 1, and various components are temporarily placed. And a temporary placement stage 45. The flight inspection unit 42 and the discharge amount measurement unit 43 are arranged side by side on the machine base 21 so as to face the lower side of the movement locus of the functional liquid droplet ejection head 1 moving in the Y-axis direction.

  As shown in FIGS. 2 and 3, the inspection drawing apparatus 35 includes a pair of support columns 51, 51 erected on the machine base 21, a Y-axis main table 52 spanned between the pair of support columns 51, 51, The XY table 53 including the X-axis table 54 and the Y-axis sub-table 55, the carriage 56 suspended from the X-axis table 54, and the carriage 56 are mounted on the Y-axis main table 52 so as to be movable. A carriage plate 39 on which one functional liquid droplet ejection head 1 is set without a tool and a head holder 57 including the above-described headset device 40 are provided (see FIG. 8). A cable carrier (cable bear (registered trademark)) 59 is provided so as to be attached to the Y-axis main table 52, and various cables led to the XY table 53 side are provided on the cable carrier 59. A tube is housed.

  The Y-axis main table 52 mainly moves the functional liquid droplet ejection head 1 largely in the Y-axis direction, and the XY table 53 mainly moves the functional liquid droplet ejection head 1 small mainly in the X-axis direction and the Y-axis direction. Therefore, the movement of the functional liquid droplet ejection head 1 between each component device of the inspection unit 22B and each component device of the maintenance device 23 is mainly performed by the Y-axis main table 52, and accompanying the inspection discharge onto the glass substrate W. The movement of the functional liquid droplet ejection head 1 is mainly performed by the XY table 53. The functional liquid supply unit 36 is fixedly disposed in front of the Y-axis main table 52, and the supply flow path connection device 38 is mounted on the XY table 53.

  As shown in FIGS. 2 and 3, the functional liquid supply unit 36 includes three functional liquid tanks 61 for storing R, G, and B color functional liquids, and a tank box 62 for accommodating the three functional liquid tanks 61. And three functional liquid supply tubes 37 connected to the three functional liquid tanks 61. The tank box 62 is provided with a set plate 63 having an open upper portion and three “U” -shaped notches therein, and the functional liquid tanks 61 are fitted into the notches. It is set like this. Each functional liquid supply tube 37 is connected to a supply flow path connection device 38 via a flexible pipe support plate 64 disposed on the upper side of the Y-axis main table 52.

  Each functional liquid tank 61 is disposed above the functional liquid droplet ejection head 1 and is selectively used according to the color of the set functional liquid droplet ejection head 1. For this reason, the functional liquid is supplied from the functional liquid tank 61 to the functional liquid droplet ejection head 1 via the functional liquid supply tubes 37 by the natural water head. The functional liquid supply tube 37 in the immediate vicinity of the functional liquid droplet ejection head 1 is provided with a self-sealing valve (pressure reducing valve: see FIG. 2) 65 for adjusting the water head pressure. Functional fluid is supplied at an appropriate pressure.

  As shown in FIGS. 2, 6, and 7, the supply flow path connection device 38 is connected to the downstream end of each functional liquid supply tube 37 and a pair of connection ports 72 to the functional liquid droplet ejection head 1. Three connection port units 71 of R, G, and B color having 72, a unit stocker 73 that stocks the three connection port units 71, and one connection port unit 71 that is taken out of and mounted on the unit stocker 73. And a vertical movement unit 74 for connecting to and disconnecting from the functional liquid droplet ejection head 1.

  The vertical movement unit 74 causes the attached connection port unit 71 to face directly above the functional liquid droplet ejection head 1 positioned and set by the headset device 40, and lowers (lowers) the connection port unit 71 to The pair of connection ports 72, 72 are connected to the two connection needles 7, 7 of the functional liquid droplet ejection head 1 (see FIG. 7). Accordingly, the functional liquid tank 61 and the corresponding functional liquid droplet ejection head 1 are connected, and the functional liquid can be supplied to the functional liquid droplet ejection head 1. Immediately after connecting the connection port unit 71 to the functional liquid droplet ejection head 1, an initial filling operation for filling the functional liquid into the flow path in the head of the functional liquid droplet ejection head 1 is performed by the suction device 31. .

  As shown in FIGS. 2 and 8, the head set device 40 positions and sets the functional liquid droplet ejection head 1 on the carriage plate 39, and the flange portion 5 of the functional liquid droplet ejection head 1 is moved in the X-axis direction. And a positioning mechanism 81 that performs positioning by pressing simultaneously in the Y-axis direction, and a single air cylinder 82 that operates the positioning mechanism 81. The operator can position and set the functional liquid droplet ejection head 1 simply by inserting the functional liquid droplet ejection head 1 into the opening 39a formed in the carriage plate 39 and driving the air cylinder 82 (for details). , Described later).

  As shown in FIGS. 2, 3 and 9, the flight inspection unit 42 inspects ejection failure (dot missing), flight bending, and ejection failure of the functional liquid droplets ejected from the functional liquid droplet ejection head 1. Inspects the flight speed, etc., and the discharged functional liquid droplets are photographed at high speed. The flight inspection unit 42 is ejected from an illumination unit 85 having a pulse laser as a pulse light source, a microscope camera 86 arranged to face the illumination unit 85 and receiving pulsed light from the pulse laser, and the functional liquid droplet ejection head 1. And a circular functional liquid receiving portion 87 for receiving the functional liquid droplets.

  The functional liquid droplets ejected from the functional liquid droplet ejection head 1 are configured to block the pulsed light between the illumination unit 85 and the microscope camera 86 and land on the functional liquid receiving unit 87. The functional liquid droplets photographed at high speed by the flight inspection unit 42 are measured for the flight speed from the functional liquid droplet ejection head 1 on the basis of the photographing result, and whether there is ejection failure, flight bending, and defective ejection. Inspect. Although not shown in the drawings, the functional liquid receiving portion 87 also serves as a flushing portion that receives discarded discharge from the functional liquid droplet ejection head 1, and the functional liquid stored in the functional liquid receiving portion 87 is a waste liquid tube. By being sucked by the ejector connected to the functional liquid receiving portion 87 through the waste water, it is collected in the waste liquid tank 88 (see FIG. 2).

  As shown in FIGS. 2 and 3, the discharge amount measuring unit 43 measures the weight of the functional liquid droplets ejected from the functional liquid droplet ejection head 1, and the functions ejected from the functional liquid droplet ejection head 1. A container 91 for receiving droplets and an electronic balance 92 for measuring the weight of the functional liquid in the container 91 are provided. When measuring the discharge amount of functional droplets by the discharge amount measuring unit 43, after the functional droplet discharge head 1 faces the container 91, tens of thousands of functional droplets are discharged in units of 12 nozzle rows, The discharge weight of the functional liquid is measured with the electronic balance 92. When the discharge weight of the functional liquid is measured, the discharge amount per discharge nozzle 9 is calculated by dividing the discharge amount per discharge nozzle 9 by the number of discharge nozzles 9 from the measured discharge weight. Based on the measured discharge weight of the functional liquid droplets, a drive voltage (nozzle row 12 unit) to be applied to the functional liquid droplet discharge head 1 is determined.

  As shown in FIGS. 2, 3, and 10, the target stage 44 is a so-called suction table on which a target to be inspected and discharged, such as a glass substrate W, is placed. Functional droplets are ejected from the facing functional droplet ejection head 1 based on a predetermined inspection pattern. In this case, the target stage 44 includes a base stage 95 on which an auxiliary stage 98 for inspection sheets is mounted on the left half, and a first set stage 96 that is mounted on the right part of the base stage 95 and directly sucks and sets the glass substrate W. The second set stage 97 is formed to be slightly larger than the first set stage 96 and sucks the first set stage 96.

  That is, the first set stage 96 and the second set stage 97 are individually connected to a vacuum suction equipment (not shown), and suck the first set stage 96 disposed so that the second set stage 97 overlaps the first set stage 96. In addition, the first set stage 96 sucks the glass substrate W. The glass substrate W on which the functional droplet has landed is taken out of the apparatus, and the landed functional droplet is naturally dried (or dried on a hot plate). The glass substrate W after drying is further transferred to a separate volume measuring device (not shown), and the individual ejection amount (volume) of the landed functional droplets is measured.

  The auxiliary stage 98 is for setting a sheet that receives inspection discharge from the functional liquid droplet discharge head 1 and is also constituted by a so-called suction table. Three manual air valves 99 for turning on and off the suction operations of the first set stage 96, the second set stage 97, and the auxiliary stage 98 are attached to the end of the temporary placement stage 45. .

  As shown in FIGS. 2, 3, and 11, the wiping device 32 includes a wiping sheet 101 that comes into contact with the nozzle surface 10 and a spray head 102 that sprays the cleaning liquid onto the wiping sheet 101. Is taken out from the state wound on the supply reel 103 and taken up on the take-up reel 105 via the pressing roller 104. In the wiping operation, the cleaning liquid is sprayed from the spray head 102 to the fed wiping sheet 101, and the wiping sheet 101 impregnated with the cleaning liquid is pressed against the nozzle surface 10 of the functional liquid droplet ejection nozzle 1 by the pressing roller 104. . Next, in this state, the functional liquid droplet ejection nozzle 1 is moved in the Y-axis direction by the Y-axis sub-table 55, whereby the nozzle surface 10 of the functional liquid droplet ejection head 1 is wiped (wiped).

  As shown in FIGS. 2, 3, and 12, the suction device 31 is in close contact with the nozzle surface 10 of the functional liquid droplet ejection head 1 and has three cap portions of R, G, and B colors arranged in the X-axis direction. A cap unit 111 having 112, an elevating mechanism 113 for raising and lowering the cap unit 111, and an ejector (not shown) connected to the three cap portions 112 via suction tubes. The suction device 31 includes a manual X-axis table 114 for manually moving in the X-axis direction. The manual X-axis table 114 corresponds to the functional droplet discharge head 1 for each color, and is a cap unit. 111 is moved in the X-axis direction, and the corresponding cap portion 112 is positioned immediately below the functional liquid droplet ejection head 1. With the lifting mechanism 113, the positioned one cap portion 112 is brought into close contact with the nozzle surface 10 of the functional liquid droplet ejection head 1, and in this state, the functional liquid is sucked by the ejector, thereby clogging the ejection nozzle 9 and the like. Eliminate (functional recovery). The sucked functional liquid is collected in the waste liquid tank 88 described above.

  As shown in FIGS. 4 and 5, the control device 25 controls the discharge inspection device 22, the maintenance device 23, and the chamber device 24, and includes a control device body 28 and a pair of electrical boxes 27 and 27. Yes. The control device main body 28 is provided with a keyboard 116 and a mouse 117 for inputting data, and a display 118 for displaying input results and the like. The control device main body 28 stores various programs for controlling the head inspection device 20, device drivers for driving each unit, and the like, and various detection signals, various commands, various data, and the like are received from the keyboard 116 and each unit. When input, the control device 25 processes various data according to various programs and device drivers, and controls the entire head inspection device 20.

  Here, with reference to FIG. 2 and FIG. 10, the target stage 44 which makes the main body of this invention is demonstrated in detail. As described above, the target stage 44 includes the base stage 95 on which the auxiliary stage 98 is mounted on the left half, the first set stage 96 that is mounted on the right side of the base stage 95 and directly sucks and sets the glass substrate W, and A second set stage 97 that is formed to be slightly larger than the one set stage 96 and sucks the first set stage 96. The base stage 95 is supported on the gantry 201, and the second set stage 97 is screwed onto the base stage 95.

  As shown in FIGS. 10, 13, and 14, the first set stage 96 has a function as a suction jig for the glass substrate W and is formed in a square that is substantially the same shape as the glass substrate W. A plurality of first suction holes 202 are formed in a matrix on the surface (upper surface) of the first set stage 96, and communicated with the plurality of first suction holes 202 on the back surface (lower surface) of the first set stage 96. A communication groove (first suction flow path) 203 is formed. The communication groove 203 includes a plurality of narrow vertical communication grooves 203a that communicate with the columns of the plurality of first suction holes 202, and a wide single horizontal communication that communicates the plurality of vertical communication grooves 203a at an intermediate portion thereof. And a groove 203b (see FIG. 14). Although details will be described later, in a state where the first set stage 96 is attracted to the second set stage 97, the communication groove 203 forms a flow path with the surface of the second set stage 97. The first suction port 204 provided in the second set stage 97 communicates with the first suction port 204.

  In addition, an X-axis positioning plate 206 for positioning the glass substrate W in the X-axis direction by attaching the rear side of the glass substrate W to the rear end surface of the first set stage 96 is attached. Similarly, a Y-axis positioning plate 207 for positioning the glass substrate W in the Y-axis direction by attaching the left side of the glass substrate W to the left end surface of the first set stage 96 is attached. The X-axis positioning plate 206 and the Y-axis positioning plate 207 slightly protrude from the surface of the first set stage 96, and the operator hits the glass substrate W against the X-axis positioning plate 206 and the Y-axis positioning plate 207. In this manner, this is positioned on the first set stage 96. In this state, the glass substrate W is positioned and set on the first set stage 96 by starting suction of the first set stage 96.

  The second set stage 97 has “U” -shaped notches 211 and 211 on both the left and right sides, and is formed in a substantially square shape that is slightly larger than the first set stage 96. The left and right cutouts 211 and 211 face the edge of the first set stage 96 set on the second set stage 97 so that the edge of the first set stage 96 is overhanged. Can be easily removed together with the glass substrate W. Thereby, handling of the glass substrate W becomes easy.

  As shown in FIG. 15, a first suction port 204 that communicates with the communication groove 203 of the first set stage 96 is attached to the rear end surface of the second set stage 97. In the center of the surface of the second set stage 97, a first suction port 212 communicating with an intermediate position of the lateral communication groove 203b of the communication groove 203 is opened, and the first suction port 212 is formed within the thickness of the second set stage 97. The first suction port 204 communicates with the first downstream channel 213. Although not shown, the first suction port 204 is connected to the vacuum suction facility via the manual air valve 99 and the vacuum tube.

  In this case, the back surface of the first set stage 96 and the front surface of the second set stage 97 are both mirror-finished, and the above-described communication is performed with the first set stage 96 adsorbed to the second set stage 97. The groove 203 forms a flow path in which no air leakage occurs between the groove 203 and the surface of the second set stage 97 without using any special sealing material. When the manual air valve 99 is turned on and suction is started by the vacuum suction equipment, the air flows from the plurality of first suction holes 202 to the communication groove 203, the first suction port 212, the first downstream channel 213, and the first The suction flows in the order of one suction port 204, and an adsorption force is applied to the glass substrate W on the first set stage 96.

  As shown in FIGS. 16 and 17, four second suction holes 215 for sucking the four corners of the first set stage 96 are formed on the surface of the second set stage 97. In this case, the four second suction holes 215 are arranged so as to be away from the communication groove 203 of the first set stage 96. Further, the four second suction holes 215 communicate with the four second suction ports 217 formed on the surface of the base stage 95 via the four individual flow paths 216 directly connected thereto. Although details will be described later, the downstream ends of the four individual flow paths 216 communicate with the second suction port 218 provided in the base stage 95 via the four second suction ports 217.

  As shown in FIGS. 13 and 16, four through holes 222 for fixing screws 221 are formed at the four corners on the surface of the second set stage 97, and in the vicinity of the four through holes 222, A positioning member 223 is provided upright for positioning the one set stage 96 in the X-axis direction and the Y-axis direction. The positioning member 223 includes four X-axis positioning pins 224 for positioning the first set stage 96 in the X-axis direction, and four Y-axis positioning pins for positioning the first set stage 96 in the Y-axis direction. 225. That is, a total of eight positioning pins 224 and 225 are erected on the surface of the second set stage 97, two for each corner of the first set stage 96. The operator places the first set stage 96 in a region surrounded by the four X-axis positioning pins 224 and the four Y-axis positioning pins 225, and positions the first set stage 96 on the second set stage 97 in a stationary manner. . Then, by starting suction from this state, the first set stage 96 is positioned and set on the second set stage 97.

  As shown in FIG. 10, the base stage 95 has a plate shape and is formed in a horizontally-oriented rectangular shape with chamfered corners. A small second set stage 97 is disposed on the right side of the base stage 95, and the second set stage 97 is fixed to the base stage 95 by four fixing screws 221 provided at four corners thereof. .

  As shown in FIG. 17, a second suction port 218 communicating with the four individual flow paths 216 of the second set stage 97 is attached to the rear end surface of the base stage 95. In addition, four second suction ports 217 communicating with each individual flow channel 216 are opened on the surface of the base stage 95, and the second suction ports 217 are second downstream flow channels formed within the thickness of the base stage 95. 231 communicates with the second suction port 218. In this case, the second downstream channel 231 communicates the upstream four branch channels 232 connected to the four second suction ports 217, the downstream ends of the four branch channels 232, and the second suction port 218. And one merging channel 233. Although not shown, the second suction port 218 is connected to the vacuum suction facility via the manual air valve 99 and the vacuum tube.

  Also in this case, the back surface of the second set stage 97 and the surface of the base stage 95 are both mirror-finished, and the individual flow paths described above are in a state where the second set stage 97 is fixed to the base stage 95. 216 and each second suction port 217 communicate with each other without causing air leakage. When the manual air valve 99 is turned on and suction is started by the vacuum suction equipment, the air flows from the four second suction holes 215 to the individual flow paths 216, the second suction ports 217, and the second downstream flow paths 231. And in the order of the second suction port 218, the suction force is applied to the first set stage 96 on the second set stage 97. In this case, the same suction pressure is introduced into the first suction port 204 and the second suction port 218 by a vacuum suction facility. For this reason, air leakage does not occur between the communication groove 203 of the first set stage 96 and the four second suction holes 215 of the second set stage 97.

  When the first set stage 96 is positioned on the second set stage 97 and the glass substrate W is positioned on the first set stage 96 and then suction is started, the first set stage 96 is moved by the four second suction holes 215. The glass substrate W is sucked and set on the first set stage 96 by the plurality of first suction holes 202. In a state where the first set stage 96 is attracted to the second set stage 97, the communication groove 203 of the first set stage 96 is closed by the surface of the second set stage 97 and functions as a chamber (air chamber). For this reason, the plurality of first suction holes 202 suck the glass substrate W with a uniform suction force.

  By the way, although not particularly illustrated, there are a plurality of types of glass substrates (targets) W having different sizes, and a plurality of types of first set stages 96 having different sizes are prepared correspondingly. ing. The plurality of first set stages 96 are formed such that the back surface portions attracted to the second set stage 97 have the same planar shape, and the positions of the communication grooves 203 are the same. Thus, the second set stage 97 can suck and set a plurality of first set stages 96 under the same conditions.

  As described above, according to the target stage 44 of the present embodiment, the first set stage 96 is prepared according to the size (planar shape) of the glass substrate W, whereby the channels of the suction system are systematically divided. The glass substrate W can be appropriately sucked and set without blocking some suction holes.

1 is an overall perspective view of a single functional liquid droplet ejection head according to an embodiment. It is an external appearance perspective view of the state which removed the device cover of the head inspection device concerning an embodiment. It is a top view showing typically the head inspection device concerning an embodiment. It is the external appearance perspective view seen from diagonally forward of the head test | inspection apparatus which concerns on embodiment. It is the external appearance perspective view seen from diagonally backward of the head test | inspection apparatus which concerns on embodiment. It is a perspective view of the principal part in a supply flow path connection apparatus. It is a perspective view which shows the connection state of the connection port holder in a supply flow path connection apparatus. It is the perspective view seen from the slanting front around the headset device. It is a perspective view of a flight inspection unit. It is a perspective view of a target table. It is a perspective view of a wiping device. It is a perspective view of a suction device. It is a perspective view showing the 1st set stage and the 2nd set stage. It is the partial cutting perspective view which looked at the 1st set stage from the back side. It is the partial cutting perspective view which looked at the 1st set stage and the 2nd set stage from the back side. It is a perspective view of a 2nd set stage. It is the partial cutting perspective view which looked at the target table from the back side.

Explanation of symbols

  20 head inspection device, 44 target stage, 95 base stage, 96 first set stage, 97 second set stage, 99 manual air valve, 201 first suction hole, 203 communication groove, 204 first suction port, 206 X-axis positioning Plate, 207 Y-axis positioning plate, 211 notch, 213 first downstream channel, 215 second suction hole, 216 individual channel, 218 second suction port, 224 X-axis positioning pin, 225 Y-axis positioning pin, 231 Second downstream flow path, 232 branch flow path, 233 merge flow path, W glass substrate

Claims (12)

A plurality of first suction holes opened on the surface; and a first suction flow path having one end communicating with the plurality of first suction holes and the other end communicating with the vacuum suction means via the first suction port; A first set stage for sucking and setting a set object;
A plurality of second suction holes opened on the surface, and a second suction flow path having one end communicating with the plurality of second suction holes and the other end communicating with the vacuum suction means via a second suction port. A suction table comprising: a second set stage for sucking and holding the first set stage. The first suction port is provided in the second set stage;
2. The adsorption according to claim 1, wherein the second set stage is formed with a first downstream channel that communicates the downstream end of the first suction channel and the first suction port. table. A base stage for mounting and fixing the second set stage; and the second suction port is provided in the base stage;
3. The adsorption according to claim 1, wherein the base stage is formed with a second downstream channel that communicates the downstream end of the second suction channel and the second suction port. 4. table. The second suction channel is composed of a plurality of individual channels directly connected to the plurality of second suction holes,
The said 2nd downstream part flow path consists of a branched flow path connected to these several separate flow paths, and a confluence | merging flow path connected to the downstream end of these multiple branched flow paths. Adsorption table as described in The first suction channel is a communication groove formed on the back surface of the first set stage and communicating with a plurality of first suction holes.
5. The suction table according to claim 1, wherein a flow path is formed between the second set stage and the surface of the second set stage that sucks the first set stage.   The suction table according to claim 5, wherein suction pressures to the first suction port and the second suction port by the vacuum suction means are the same.   The suction table according to any one of claims 1 to 6, wherein the plurality of second suction holes are distributed and arranged so as to suck a peripheral edge portion of the first set stage.   The suction table according to claim 1, wherein the second set stage further includes stage positioning means for positioning the first set stage on the surface.   The suction table according to any one of claims 1 to 8, wherein the first set stage further includes object positioning means for positioning a set object on the surface. The second set stage is formed in a square shape in plan view and larger than the first set stage,
10. A pair of notches that reach the edge of the adsorbed first set stage are formed on two opposing sides of the second set stage. Adsorption table. A plurality of the first set stages are prepared corresponding to a plurality of types of set objects having different sizes,
The suction table according to any one of claims 1 to 10, wherein the plurality of first set stages have the same suction surface with respect to the second set stage. 12. A suction table according to any one of claims 1 to 11 and an ink jet type functional liquid droplet ejection head, wherein functional droplets are ejected onto the set object set on the suction table by the functional liquid droplet ejection head. A discharge inspection device for performing inspection discharge; and
An inspection system for a functional liquid droplet ejection head, comprising: a volume measuring device that measures a volume of each functional liquid droplet from a landing result of the functional liquid droplet ejected on the set object.

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