JP2009004752A5 - - Google Patents

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Publication number
JP2009004752A5
JP2009004752A5 JP2008125829A JP2008125829A JP2009004752A5 JP 2009004752 A5 JP2009004752 A5 JP 2009004752A5 JP 2008125829 A JP2008125829 A JP 2008125829A JP 2008125829 A JP2008125829 A JP 2008125829A JP 2009004752 A5 JP2009004752 A5 JP 2009004752A5
Authority
JP
Japan
Prior art keywords
ceramic dielectric
less
particle size
alumina
titanium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008125829A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009004752A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008125829A priority Critical patent/JP2009004752A/ja
Priority claimed from JP2008125829A external-priority patent/JP2009004752A/ja
Publication of JP2009004752A publication Critical patent/JP2009004752A/ja
Publication of JP2009004752A5 publication Critical patent/JP2009004752A5/ja
Pending legal-status Critical Current

Links

JP2008125829A 2007-05-18 2008-05-13 静電チャック Pending JP2009004752A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008125829A JP2009004752A (ja) 2007-05-18 2008-05-13 静電チャック

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007132821 2007-05-18
JP2008125829A JP2009004752A (ja) 2007-05-18 2008-05-13 静電チャック

Publications (2)

Publication Number Publication Date
JP2009004752A JP2009004752A (ja) 2009-01-08
JP2009004752A5 true JP2009004752A5 (cg-RX-API-DMAC7.html) 2012-03-01

Family

ID=40320755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008125829A Pending JP2009004752A (ja) 2007-05-18 2008-05-13 静電チャック

Country Status (1)

Country Link
JP (1) JP2009004752A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111868913B (zh) * 2018-03-23 2023-08-22 住友大阪水泥股份有限公司 静电卡盘装置及静电卡盘装置的制造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002203893A (ja) * 2000-10-23 2002-07-19 National Institute Of Advanced Industrial & Technology 静電チャック
JP2003188247A (ja) * 2001-12-17 2003-07-04 Ngk Spark Plug Co Ltd 静電チャック及びその製造方法
JP2006049356A (ja) * 2004-07-30 2006-02-16 Toto Ltd 静電チャック
JP4708153B2 (ja) * 2005-10-21 2011-06-22 株式会社ニッカトー 導電性アルミナ質焼結体
JP4244229B2 (ja) * 2006-02-08 2009-03-25 Ｔｏｔｏ株式会社 静電チャック

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