JP2009002688A - Temperature calibration method for infrared detector and specific heat capacity measuring method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a temperature calibration method for infrared detectors, and a method for measuring a specific heat capacity by using a temperature-calibrated infrared detector, without using a thermocouple. <P>SOLUTION: One surface of a standard sample is irradiated with laser pulse light, and a temperature change of the other surface is measured with a thermocouple for a predetermined period of time, and simultaneously an output change corresponding to the temperature change of the sample is measured with the infrared detector; exponential attenuation regions of these temperature and output changes are determined; and from a measured temperature with the thermocouple corresponding to a measured output with the infrared detector at a predetermined point of time in these regions, a temperature conversion coefficient for the measured output with the infrared detector is found. After the incident energy of the laser pulse light to the standard sample is found, one surface of a measuring sample is irradiated with laser pulse light; a temperature change of the other surface is measured with the temperature-calibrated infrared detector for the predetermined period of time; from the temperature change a maximum temperature rise value of the measuring sample on the occasion of the irradiation of the laser pulse light is found; and the specific heat capacity of the measuring sample is found from the incident energy and the weight of the measuring sample. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a temperature calibration method and a specific heat capacity measurement method for an infrared detector, and more particularly, to a temperature calibration method for an infrared detector and a temperature calibrated infrared detector for obtaining a temperature conversion coefficient of an output measured by the infrared detector. The present invention relates to a specific heat capacity measurement method using a laser flash method.

  In the laser flash method, a measurement object (hereinafter referred to as a measurement sample) is irradiated with laser pulse light to heat the measurement sample, and the thermal conductivity, thermal diffusivity, and specific heat capacity are obtained from the temperature rise of the measurement sample. Since it can be measured accurately in a very short time, it has been conventionally used for measuring the specific heat capacity of metals.

  Hereinafter, a conventional method for measuring the specific heat capacity by the laser flash method will be described in detail with reference to FIG.

  First, the weight of the standard sample S1 whose specific heat capacity is known is measured, and then, as shown in FIG. 1A, the silicon grease 11 is applied to the standard sample S1 and the light receiving plate 12 is adhered. And the thermocouple 13 is adhere | attached on the back surface of the surface which adhere | attached the light-receiving plate 12 of standard sample S1. Next, the standard sample S1 to which the light receiving plate 12 is bonded is disposed so that the light receiving plate 12 faces the laser light oscillator, and laser pulse light is oscillated from the laser light oscillator, and the light receiving plate 12 is irradiated with the laser pulse light. The standard sample S1 is heated. The temperature change of the standard sample S1 is measured with a thermocouple and recorded for a predetermined time (for example, 10 seconds) from the time of laser pulse light irradiation. An example of this temperature change is shown in FIG. In this case, the output of the thermocouple is actually a voltage, but is converted into a temperature based on the reference thermoelectromotive force (JIS C 1602) and recorded.

FIG.1 (b) is a graph which shows the temperature change of standard sample S1 with respect to the measurement time after irradiation. As is clear from this figure, when the laser beam is irradiated onto the standard sample, the sample temperature rapidly increases immediately after irradiation and reaches a peak, and thereafter the temperature decreases exponentially. At this time, due to the heat capacity of the sample, it takes a certain amount of time until the sample temperature reaches a peak due to heating with laser pulse light. In addition, in the case of measurement using a thermocouple, since response generally takes time, the maximum temperature rise value Tr (ΔTr) at the time of laser pulse light irradiation necessary for obtaining the specific heat capacity cannot be read. Therefore, from the point where the temperature change (temperature decrease) after a lapse of a certain time, which is considered to have responded accurately, became exponential, the equation: Tr = Tr ₀ · exp (−c · t) The maximum temperature rise value Tr is obtained by calculation. Thereafter, the obtained Tr is substituted into the following formula 1 to determine the incident energy Q of the laser pulse light to the standard sample.

Q = Tr · (Mr · Cr + Msi · Csi + Mc · Cc) (Formula 1)
(However, Mr: weight of standard sample, Cr: specific heat capacity of standard sample, Msi: weight of silicon grease, Csi: specific heat capacity of silicon grease, Mc: weight of light receiving plate, Cc: specific heat capacity of light receiving plate)

  Next, the maximum temperature rise value Ts of the measurement sample whose specific heat capacity is unknown is obtained. Also in this case, as in the case of the standard sample S1, the weight of the measurement sample S2 is first measured, and then the silicon grease 11 is applied to the measurement sample S2 as shown in FIG. To do. And the thermocouple 13 is adhere | attached on the back surface of the surface which adhere | attached the light-receiving plate 12 of measurement sample S2. Next, the measurement sample S2 to which the light receiving plate 12 is bonded is arranged so that the light receiving plate 12 faces the laser light oscillator, the laser pulse light is emitted from the laser light oscillator, and the light receiving plate 12 is irradiated with the laser pulse light. The measurement sample S2 is heated. During a predetermined time (for example, 10 seconds) from the time of laser pulse light irradiation, the temperature change of the measurement sample S2 is measured by the thermocouple 13 and recorded. An example of this temperature change is shown in FIG.

FIG. 2B is a graph showing the temperature change of the measurement sample S2 with respect to the measurement time after irradiation. As is clear from this figure, as in the case of FIG. 1 (b), when the standard sample is irradiated with the laser pulse light, the sample temperature rapidly rises immediately after irradiation and reaches a peak, then exponentially. The temperature drops. Since the decrease in the temperature of the measurement sample S2 has become an exponential function, the maximum temperature increase value Ts (ΔTs) is calculated by the following formula: Ts = Ts ₀ · exp (−c · t) Ask for. Thereafter, the incident energy Q of the laser pulse light obtained by the above equation 1 to the sample is substituted into the following equation 2.

  Q = Ts · (Ms · Cs + Msi · Csi + Mc · Cc) (Formula 2)

(However, Ms: weight of the measurement sample, Cs: specific heat capacity of the measurement sample, the same symbols as those in Equation 1 indicate the same)
Thus, the specific heat capacity Cs of the measurement sample can be obtained from Equation 2.

An example of a method for measuring the specific heat capacity by the laser flash method as described above and an apparatus for carrying out the method are known (for example, see Non-Patent Document 1).
JIS R 1611

  However, in order to carry out the measurement method, there is a problem that a thermocouple must be bonded to a small measurement sample having a diameter of, for example, 10 mm for each measurement. In addition, when the measurement sample is ceramic or the like whose demand is increasing in recent years, there is a problem that it is more difficult to bond the thermocouple than when the measurement sample is a metal. On the other hand, in order to measure a sample without providing a thermocouple, it is conceivable to use, for example, an infrared detector as a non-contact type measuring apparatus, but it is necessary to use a complete blackbody furnace for temperature calibration. However, there is a problem that another device is necessary in addition to the measuring device, and there is a problem that an error is likely to occur. When this complete blackbody furnace is used, the temperature is usually calibrated by matching the furnace temperature with the output (voltage) of the infrared detector in the range from room temperature to several hundreds of degrees Celsius. Difficulties accompany the accuracy of conversion.

  In addition, when the light receiving plate is bonded to the sample, it is necessary to apply silicon grease so that bubbles do not enter and the amount does not vary from sample to sample, resulting in poor operability. Furthermore, when obtaining the specific heat capacity, as shown in Equations 1 and 2, the weight of the light receiving plate and silicon grease is included, so that the influence of the difference in the amount of silicon grease in each sample and the weight measurement error becomes large. There is a problem.

  Therefore, an object of the present invention is to solve the above-mentioned problems of the prior art, and a specific heat capacity is obtained by using a temperature calibrated infrared detector without using a temperature calibration method and a thermocouple of the infrared detector. It is to provide a method of measuring.

  The infrared detector temperature calibration method of the present invention is an infrared detector temperature calibration method used for measuring a specific heat capacity, irradiating one surface of a standard sample with a known specific heat capacity with laser pulse light, At the same time, the temperature change of the other surface of the standard sample is measured with a thermocouple, and at the same time, the output change corresponding to the temperature change of the standard sample is measured with an infrared detector, and from the measured temperature change and output change, A region where the output change is exponentially attenuated and a region where the temperature change is exponentially attenuated are determined, and a thermocouple corresponding to the output measured by the infrared detector at a predetermined time point is determined in this region. The temperature conversion coefficient of the output measured by the infrared detector is obtained from the temperature measured in (1). By determining the temperature conversion coefficient of the infrared detector before using the specific heat capacity without using a complete blackbody furnace, the output voltage of the infrared detector can be easily converted into temperature.

  In the specific heat capacity measurement method of the present invention, after obtaining the incident energy of the laser pulse light incident on the standard sample, the laser pulse light is irradiated to one surface of the measurement sample whose unknown specific heat capacity is unknown. For this time, the output change of the other surface of the measurement sample is measured with an infrared detector, and the laser pulse light is measured using the temperature conversion coefficient obtained from the measured output change according to the temperature calibration method of the infrared detector. The maximum temperature rise value of the measurement sample at the time of irradiation is obtained, and the specific heat capacity of the measurement sample is obtained from the maximum temperature rise value, the incident energy of the laser pulse light, and the weight of the measurement sample. The desired effect can be obtained with only the infrared detector, and since it is not necessary to use a thermocouple, the operability is good.

  The measurement sample and the standard sample are preferably coated with a carbon paint on one surface irradiated with laser pulse light and the other surface on the opposite side. By applying the carbon paint, a light receiving plate is not required.

  According to the present invention, it is possible to easily perform temperature calibration of an infrared detector for measuring a specific heat capacity without contact without using a thermocouple. In addition, since a light receiving plate is not required at the time of measurement, there is an excellent effect that errors are small. Furthermore, according to the temperature calibration method of the present invention, there is an effect that a complete blackbody furnace is not required and accuracy in temperature conversion is improved.

  An embodiment of the present invention will be described with reference to FIGS. 3 (a), 3 (b) and 4. FIG.

  An outline of an apparatus used for the temperature calibration method and the specific heat capacity measurement method of the present invention is shown in FIGS. FIG. 3A shows a measuring device 3a used for temperature calibration of the infrared detector, and FIG. 3B shows a measuring device 3b used for a specific heat capacity measuring method. The devices 3 a and 3 b include a laser light oscillator 31 and an infrared detector 32. The laser light oscillator 31 is a laser pulse light oscillator, and for example, a glass laser having a maximum pulse output of 10 J can be used. As the infrared detector 32, an infrared detector provided with a sensor using an InSb element, a PbS element, or the like can be used.

  When the specific heat capacity is measured using the apparatus 3b, the measurement sample S is arranged at a predetermined position in the sample chamber 33 provided between the laser light oscillator 31 and the infrared detector 32. The one surface of the measurement sample S is irradiated with laser pulse light for a certain period of time and heated, and the temperature change of the surface opposite to the irradiation surface of the measurement sample S after irradiation is detected by the infrared detector 32. The maximum rise temperature Ts of the measurement sample at the moment when light is incident on the measurement sample is obtained, and the specific heat capacity of the measurement sample is obtained. The sample chamber 33 is provided with temperature variable means 34 such as a heating furnace or a cooling furnace so that the temperature in the sample chamber can be raised and lowered.

  An infrared detector temperature calibration method performed using the apparatus 3a shown in FIG. 3A and a sample specific heat capacity measurement method performed using the apparatus 3b shown in FIG. 3B will be described below.

  As preparation for measurement, temperature calibration of the infrared detector 32 used in the apparatus 3b is performed using the apparatus 3a. In the present invention, for the temperature calibration of the output (voltage) of the infrared detector, the temperature conversion coefficient for the temperature calibration is obtained using only the measuring device 3a without using the black body furnace.

  First, the thermocouple 35 is welded to the standard sample S for temperature calibration using, for example, a spot welder, and a carbon paint is applied to both the surface where the thermocouple is bonded and the laser pulse light incident surface on the opposite side. Next, the standard sample S is arranged at a predetermined position in the sample chamber 33 between the laser light oscillator 31 and the infrared detector 32 so that the laser pulse light incident surface faces the laser light oscillator 31. A measurement circuit 36 is connected to the infrared detector 32 and the thermocouple 35, and a personal computer (personal computer) 37 is connected to the measurement circuit 36, and outputs from the infrared detector 32 and the thermocouple 35 are output. It is configured to be able to measure and record.

  Next, laser pulse light is oscillated from the laser light oscillator 31 to heat the standard sample S. The sample temperature is measured with a thermocouple for a predetermined time from the irradiation of the laser pulse light, and the output voltage with respect to the standard sample is measured with the infrared detector 32, and the time change of the output voltage is recorded.

  FIG. 4 is a graph showing the outputs of the infrared detector 32 and the thermocouple 35 with respect to the measurement time after irradiation with the laser pulse light. Infrared detectors respond faster than thermocouples, but their outputs indicate voltage rather than temperature. On the other hand, as described above, the output of the thermocouple indicates the temperature converted based on the reference thermoelectromotive force (JIS C 1602). Therefore, it is necessary to compare the output of the thermocouple and the output of the infrared detector in the measurement time after the same irradiation, and obtain a temperature conversion coefficient for converting the output value of the infrared detector into a temperature. This will be described with reference to FIG.

In order to obtain this temperature conversion coefficient, first, a region where the temperature measurement data by the thermocouple attenuates exponentially (a region that coincides with exp (−c · t), a steady temperature region) is determined. Next, the region where the infrared detector data is exponentially attenuated is set to overlap the region where the thermocouple is exponentially attenuated. Let X1 be the starting point of the overlapping region. Further, an arbitrary point about 15 to 20 seconds after X1 is set as an end point X2. And the conversion formula of the output voltage of the infrared detector with respect to the temperature displacement in this attenuation region (for example, the region from X1 to X2 in FIG. 4) is obtained. That is, since the radiant energy with respect to temperature is approximately proportional to the fourth power coefficient, the relationship between the temperature displacement due to the thermocouple in the attenuation region and the corresponding output voltage displacement of the infrared detector is a fourth-order regression equation: aX By applying ⁴ + bX ³ + cX ² + dX + e (X is a temperature displacement range) and obtaining a, b, c, d, and e in the formula, the temperature conversion coefficient of the infrared detector can be obtained.

  Hereinafter, a method for measuring the specific heat capacity of a measurement sample whose specific heat capacity is unknown using the obtained temperature conversion coefficient will be described with reference to FIG. Since the measuring device 3b shown in FIG. 3B has the same configuration as the device 3a shown in FIG. 3A except that it does not include a thermocouple, description of the detailed configuration is omitted.

  First, the weights of a standard sample whose specific heat capacity is known and a measurement sample whose specific heat capacity is unknown are measured. The shape of these samples is not particularly limited and is preferably a disc shape, and the light receiving area of the laser pulse light of each sample is the same. Thereafter, a carbon paint is applied to the front and back surfaces of a standard sample with a known specific heat capacity and a measurement sample with an unknown specific heat capacity (for example, a disk shape). Next, the standard sample is placed at a predetermined position in the sample chamber 33 provided between the laser light oscillator 31 and the infrared detector 32 calibrated as described above, and the laser pulse light is used as the standard sample. Irradiate and heat. The temperature change of the standard sample is measured and recorded by the infrared detector 32 for several seconds to several tens of seconds after the laser pulse light irradiation. Then, from the temperature value data, as described above, the region where the temperature decays exponentially is determined, and the slope is examined to obtain the maximum temperature rise value Tr of the standard sample.

  This maximum temperature rise value Tr, the weight Mr of the standard sample, and the specific heat capacity Cr are substituted into Equation 3 below.

Q = Tr · Mr · Cr (Formula 3)
Thereby, the incident energy Q of the laser pulse light incident on the standard sample can be obtained.

  Next, the measurement sample is irradiated with laser pulse light under the same conditions as in the case of the standard sample described above and heated. The temperature change of the measurement sample is measured and recorded with the temperature-calibrated infrared detector 32 for several seconds to several tens of seconds after the laser pulse light irradiation. Then, an area where the temperature decays exponentially is determined by the same procedure as in the case of the standard sample, and the inclination is examined to obtain the maximum temperature rise value Ts of the measurement sample.

  This Ts, the incident energy Q of the incident laser pulse light, and the weight Ms of the measurement sample are substituted into the following equation 4.

Q = Ts · Ms · Cs (Formula 4)
Thus, the specific heat capacity Cs of the measurement sample can be obtained.

  As described above, in the specific heat capacity measurement method of the present invention, the thermocouple is used only during temperature calibration of the infrared detector, and in actual measurement, the temperature calibrated infrared detector is used. High operability. Also, by applying the carbon paint to the front and back surfaces of the sample, the light receiving plate and the silicon grease for bonding the light receiving plate become unnecessary, so that the operability is high and the error factor due to these is eliminated. For this reason, according to the conventional thermocouple specific heat capacity measurement method, the measurement accuracy is about plus or minus 7%, but according to the specific heat capacity measurement method of the present invention, the measurement accuracy is Although depending on the heat capacity, it is about plus or minus 5% or less. For example, when tantalum is used as a measurement sample, it is about plus or minus 2% or less as shown in the following examples.

  Hereinafter, the measurement method of the present invention will be specifically described by way of examples.

  In this example, tantalum having a known specific heat capacity was used as a standard sample, and the temperature conversion coefficient of the output voltage from the infrared detector was obtained.

  As a measuring device, the device 3a shown in FIG. As the laser oscillator 31, a glass laser having a maximum pulse output of 30 J and an oscillation wavelength of 1054 nm was prepared, and an infrared detector 32 equipped with a sensor using an InSb element was prepared.

  First, a thermocouple 35 is spot-welded to a disc-shaped tantalum standard sample S (weight: 1473 mg, specific heat capacity: 0.137 (J / g.k)) with a known specific heat capacity for temperature calibration. Carbon paint was applied to both sides. Next, a standard sample S was placed in a sample chamber 33 provided between the laser light oscillator 31 and the infrared detector 32.

  Thereafter, laser pulse light was oscillated at 10 J from the laser light oscillator 31, and the sample S was irradiated and heated. For a predetermined time (about 22 seconds) after irradiation, the temperature change of the output of the thermocouple 35 and the voltage change of the output of the infrared detector 32 were measured through the measurement circuit 36 and the personal computer 37 and recorded. The obtained data is shown in FIG.

  FIG. 5 is a graph showing measurement results of respective outputs from the infrared detector 32 and the thermocouple 35 with respect to the measurement time (milliseconds) after irradiation with the laser pulse light, and the output on the vertical axis is the infrared detector on the right side. The voltage (V), which is the output measured with, is shown, and the left side shows the temperature (° C.), which is the output measured with a thermocouple. First, regions in which the temperature data from the thermocouple (curve a in FIG. 5) and the voltage data from the infrared detector (curve b in FIG. 5) decay exponentially (exp (−c · t ) And a steady temperature range). In this case, the temperature change attenuates almost exponentially after 1 second from the irradiation of the laser pulse light (X1 in FIG. 5), so that the steady temperature region is estimated after 1 second and the attenuation region ends. The point was about 20 seconds (X2 in FIG. 5) after laser pulse light irradiation. With respect to the temperature change measured by the thermocouple in this attenuation region, the output voltage change measured by the infrared detector is expressed by a coefficient:

-5.08E-1X ⁴ + 1.08X ³ + -1.692E-2X ² + 2.25E-5X + 4.68E-6
Got as. This coefficient corresponds to a temperature conversion coefficient obtained by calibrating the output voltage measured by the infrared detector 32 with the temperature detected by the thermocouple 35.

  In this example, tantalum was used as the standard sample, but any metal or ceramic having a known specific heat capacity can be used without particular limitation.

Using the temperature conversion coefficient obtained in Example 1: -5.08E-1X ⁴ + 1.08X ³ + -1.692E-2X ² + 2.25E-5X + 4.68E-6, the apparatus shown in FIG. 3 (b) The specific heat capacity of the measurement sample whose specific heat capacity was unknown was measured by 3b.

In this example, a disk-shaped sapphire sample (specific heat capacity: 0.766 (J / g · k)) is used as a standard sample with a known specific heat capacity, and a disk-shaped tantalum is used as a measurement sample with an unknown specific heat capacity. A sample was used. The weight of each sample was 318 mg for the standard sample and 1382 mg for the measurement sample. Carbon paint was applied to the front and back surfaces of each of these standard samples and measurement samples. Next, the standard sample is placed at a predetermined position in the sample chamber 33 provided between the laser light oscillator 31 and the infrared detector 32, the laser pulse light is oscillated at 10J, irradiated to the standard sample, and heated. did. With the temperature-calibrated infrared detector 32, the temperature change of the sample was measured for 9 seconds after the laser pulse light irradiation. The measurement results are shown in FIG. The y-axis in FIG. 6 corresponds to the temperature. When the temperature displacement data obtained by converting the output voltage of the temperature-calibrated infrared detector into the temperature by the temperature conversion coefficient obtained in Example 1 is shown in the graph, The peak of the temperature displacement data is plotted as 1.0 on the y axis. From FIG. 6, the point in time at which the sample temperature begins to decay exponentially (P1 in FIG. 6) is 1 second after irradiation, and the data from P1 onward in FIG. 6 is expressed by the formula: Tr = Tr ₀ · exp (− c.t), 11.00 ° C. was obtained as the maximum temperature rise value Tr of the standard sample. When this value is substituted into Equation 3, the incident energy Q of the laser pulse light incident on the standard sample is 2.68 J.

Next, laser pulse light was irradiated to the measurement sample under the same conditions as in the case of the standard sample, and the temperature change of the sample was measured for 9 seconds after the laser pulse light irradiation with the temperature-calibrated infrared detector 32. The measurement results are shown in FIG. The y axis in FIG. 7 also corresponds to the temperature, and the data converted into the temperature is plotted in the same manner as in FIG. From Figure 7, and 1 second after the time when the attenuation of the exponential sample temperature began (P1 in FIG. 7) from the irradiation, wherein the P1 subsequent data in Figure _{7: Tr = Tr 0 · exp} (- c · t), 13.9272 ° C. was obtained as the maximum rise temperature Ts of the measurement sample.

  Using the Ts obtained as described above, the weight Ms of the measurement sample, and the incident energy Q of the laser pulse light applied to the sample, the specific heat capacity Cs of the measurement sample is obtained from Equation 4, and 0.1392 (J / G · k). This value is almost the same as the TPRC literature value 0.137 (J / g · k) for the specific heat capacity of tantalum (about 1.6% higher than the literature value), and the accuracy of the measurement method of the present invention Was shown to be high.

  From the results of this example, as the standard sample, in addition to sapphire, a metal or ceramic having a known specific heat capacity can be used, and the measurement sample is not particularly limited, and a metal or ceramic other than tantalum should be used. You can see that

  According to the present invention, it is possible to measure the specific heat capacity easily and with higher accuracy using a temperature-calibrated infrared detector. Therefore, the present invention can be used in the field of manufacturing metals and ceramics.

It is a figure for demonstrating the outline of the measuring method of the conventional specific heat capacity, (a) is a typical side view of the standard sample which is a measuring object, (b) is the laser pulse light of the standard sample measured with the thermocouple It is a graph which shows the relationship between the measurement time after irradiation, and a temperature change. It is a figure for demonstrating the outline of the measuring method of the conventional specific heat capacity, (a) is a typical side view of the measurement sample which is a measuring object, (b) is the laser pulse light of the measurement sample measured with the thermocouple It is a graph which shows the relationship between the measurement time after irradiation, and a temperature change. It is a typical block diagram of the apparatus for implementing the method of this invention, (a) is a schematic block diagram of the apparatus for implementing the temperature calibration method of an infrared detector, (b) is a specific heat capacity. It is a typical block diagram of the apparatus for enforcing a measuring method. It is a graph for demonstrating the temperature calibration of an infrared detector. 6 is a graph for explaining temperature calibration of the infrared detector in the first embodiment. 4 is a graph showing a change in output of an infrared detector of a standard sample in Example 1. 4 is a graph showing a change in output of an infrared detector of a measurement sample in Example 1.

Explanation of symbols

3 Measuring device 11 Silicon grease 12 Light receiving plate 13 Thermocouple 31 Laser light oscillator
32 Infrared detector 33 Sample chamber
34 Temperature variable means 35 Thermocouple
36 Measuring circuit 37 Personal computer
S1 Standard sample S2 Measurement sample

Claims (4)

A method for calibrating a temperature of an infrared detector used for measuring a specific heat capacity, wherein one surface of a standard sample with a known specific heat capacity is irradiated with laser pulse light, and the other surface of the standard sample is irradiated for a predetermined time from the time of irradiation. At the same time as measuring the temperature change with a thermocouple, the output change corresponding to the temperature change of the standard sample is measured with an infrared detector, and the output change attenuates exponentially from the measured temperature change and output change Determining an area and an area where the temperature change exponentially decays, and within this area, from the temperature measured by the thermocouple corresponding to the output measured by the infrared detector at a given time, the infrared detector A method for calibrating the temperature of an infrared detector, characterized in that a temperature conversion coefficient of the output measured in step 1 is obtained. 2. The temperature calibration method according to claim 1, wherein the standard sample is one in which a carbon paint is applied to one surface to which the laser pulse light is irradiated and the other surface. After obtaining the incident energy of the laser pulse light incident on the standard sample, the laser pulse light is irradiated to one surface of the measurement sample whose specific heat capacity is unknown, and the other surface of the measurement sample is irradiated for a predetermined time from the time of irradiation. The temperature change is measured with an infrared detector calibrated according to the temperature calibration method of the infrared detector according to claim 1, and the maximum temperature rise value of the measurement sample at the time of laser pulse light irradiation is calculated from the measured temperature change. A specific heat capacity measurement method, characterized in that the specific heat capacity of the measurement sample is obtained from the maximum temperature rise value, the incident energy of the laser pulse light, and the weight of the measurement sample. 4. The method for measuring specific heat capacity according to claim 3, wherein the measurement sample is one in which a carbon paint is applied to one surface to which the laser pulse light is irradiated and the other surface.

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