JP2008545102A - 弁装置 - Google Patents
弁装置 Download PDFInfo
- Publication number
- JP2008545102A JP2008545102A JP2008519051A JP2008519051A JP2008545102A JP 2008545102 A JP2008545102 A JP 2008545102A JP 2008519051 A JP2008519051 A JP 2008519051A JP 2008519051 A JP2008519051 A JP 2008519051A JP 2008545102 A JP2008545102 A JP 2008545102A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- flow path
- membrane
- valve device
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 claims abstract description 67
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 239000012530 fluid Substances 0.000 claims description 43
- 239000002356 single layer Substances 0.000 description 4
- 238000004891 communication Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 239000013060 biological fluid Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/126—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm the seat being formed on a rib perpendicular to the fluid line
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
- F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C3/00—Circuit elements having moving parts
- F15C3/04—Circuit elements having moving parts using diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K15/00—Check valves
- F16K15/14—Check valves with flexible valve members
- F16K15/144—Check valves with flexible valve members the closure elements being fixed along all or a part of their periphery
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
Abstract
Description
Claims (12)
- 弁装置であって、
基板と、弾性膜とを有し、
前記膜は、前記基板に対して少なくとも弁範囲の周囲で接合され、
前記基板は、前記弁範囲において終わる第1の流路と第2の流路とを有し、前記第1の流路は、前記弁範囲において第1の流路端部表面を有し、前記第2の流路は、前記弁範囲において第2の流路端部表面を有し、
前記第1の流路端部表面の範囲は、前記第2の流路端部表面の範囲より実質的に大きい、
弁装置。 - 前記第1の流路及び/又は前記第2の流路の長手方向壁の少なくとも一部分は、前記膜によって形成される、
請求項1記載の弁装置。 - 前記弁装置は、受動弁装置である、
請求項1又は2記載の弁装置。 - 前記弁装置は、溢れ弁である、
請求項1又は2記載の弁装置。 - 前記弁装置は、プランジャを更に有し、
該プランジャは、前記基板に対向する側部上において前記弁範囲の少なくとも一部分において前記膜に対して押し付けられ得る、
請求項1乃至4のうちいずれか一項記載の弁装置。 - 前記弁装置は、加圧装置を有し、
該加圧装置は、前記膜に対して前記プランジャを押し付けるよう構成される、
請求項5記載の弁装置。 - 前記加圧装置が前記膜に対して前記プランジャを押し付け得るよう有する力は、調整可能である、
請求項6記載の弁装置。 - 前記加圧装置は、前記力を調整するよう作動可能である、
請求項6又は7記載の弁装置。 - 前記加圧装置は、望ましくはリーフスプリングであるスプリングを有する、
請求項6乃至8のうちいずれか一項記載の弁装置。 - 前記プランジャは、前記膜に対して押し付けられるよう構成されるリムを有し、
前記リムは、前記弁範囲を第1の部分と第2の部分とにおいて分割するよう設計され、
前記第1の流路端部表面は、前記第1の部分において位置決めされ、前記第2の流路端部表面は、前記第2の部分において位置決めされる、
請求項5乃至9のうちいずれか一項記載の弁装置。 - 前記リムは、連続的であり、前記第1及び第2の流路端部表面のうち一方を取り囲むよう設計される、
請求項10記載の弁装置。 - 膜に基づく流体システムであって、
請求項1乃至11のうちいずれか一項記載の弁装置を1つ又はそれより多く有する、
膜に基づく流体システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05105930 | 2005-06-30 | ||
EP05105930.1 | 2005-06-30 | ||
PCT/IB2006/052078 WO2007004105A1 (en) | 2005-06-30 | 2006-06-26 | Valve device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008545102A true JP2008545102A (ja) | 2008-12-11 |
JP5329952B2 JP5329952B2 (ja) | 2013-10-30 |
Family
ID=37309810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008519051A Active JP5329952B2 (ja) | 2005-06-30 | 2006-06-26 | 弁装置 |
Country Status (5)
Country | Link |
---|---|
US (2) | US9416883B2 (ja) |
EP (1) | EP1904772B1 (ja) |
JP (1) | JP5329952B2 (ja) |
CN (1) | CN101213392B (ja) |
WO (1) | WO2007004105A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007016935A (ja) * | 2005-07-08 | 2007-01-25 | Alps Electric Co Ltd | バルブ機構 |
JP2014510878A (ja) * | 2011-01-21 | 2014-05-01 | バイオカーティス ソシエテ アノニム | マイクロポンプまたはノーマルオフ型(normally−off)マイクロバルブ |
JP2019516079A (ja) * | 2016-03-23 | 2019-06-13 | エコール・ポリテクニーク・フェデラル・ドゥ・ローザンヌ(ウペエフエル)Ecole Polytechnique Federale de Lausanne (EPFL) | マイクロ流体ネットワーク装置 |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7832429B2 (en) * | 2004-10-13 | 2010-11-16 | Rheonix, Inc. | Microfluidic pump and valve structures and fabrication methods |
DE102007035721B4 (de) | 2007-07-30 | 2019-02-07 | Robert Bosch Gmbh | Mikroventil, Verfahren zum Herstellen eines Mikroventils sowie Mikropumpe |
EP2359886A1 (en) | 2010-02-12 | 2011-08-24 | Debiotech S.A. | Micromechanic passive flow regulator |
US8740177B2 (en) | 2011-07-05 | 2014-06-03 | Rain Bird Corporation | Eccentric diaphragm valve |
WO2014094879A1 (en) * | 2012-12-21 | 2014-06-26 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Pump arrangement comprising a safety valve arrangement |
EP2754935A1 (en) | 2013-01-10 | 2014-07-16 | Debiotech S.A. | Adjustable passive flow regulator |
US10871242B2 (en) | 2016-06-23 | 2020-12-22 | Rain Bird Corporation | Solenoid and method of manufacture |
US10502327B1 (en) * | 2016-09-23 | 2019-12-10 | Facebook Technologies, Llc | Co-casted fluidic devices |
US10514111B2 (en) | 2017-01-23 | 2019-12-24 | Facebook Technologies, Llc | Fluidic switching devices |
US10980120B2 (en) | 2017-06-15 | 2021-04-13 | Rain Bird Corporation | Compact printed circuit board |
US10648573B2 (en) | 2017-08-23 | 2020-05-12 | Facebook Technologies, Llc | Fluidic switching devices |
US10422362B2 (en) | 2017-09-05 | 2019-09-24 | Facebook Technologies, Llc | Fluidic pump and latch gate |
US10591933B1 (en) * | 2017-11-10 | 2020-03-17 | Facebook Technologies, Llc | Composable PFET fluidic device |
US11503782B2 (en) | 2018-04-11 | 2022-11-22 | Rain Bird Corporation | Smart drip irrigation emitter |
US11441702B1 (en) * | 2019-05-09 | 2022-09-13 | Facebook Technologies, Llc | Fluidic valve |
US11231055B1 (en) | 2019-06-05 | 2022-01-25 | Facebook Technologies, Llc | Apparatus and methods for fluidic amplification |
US11098737B1 (en) | 2019-06-27 | 2021-08-24 | Facebook Technologies, Llc | Analog fluidic devices and systems |
US11371619B2 (en) | 2019-07-19 | 2022-06-28 | Facebook Technologies, Llc | Membraneless fluid-controlled valve |
EP3845790B1 (en) * | 2019-12-30 | 2024-04-17 | Imec VZW | Microfluidic device for controlling pneumatic microvalves |
US11721465B2 (en) | 2020-04-24 | 2023-08-08 | Rain Bird Corporation | Solenoid apparatus and methods of assembly |
WO2023141284A1 (en) * | 2022-01-23 | 2023-07-27 | Emerging Viral Diagnostics (Hk) Limited | Microfluidic valve |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US963045A (en) * | 1907-06-24 | 1910-07-05 | Safety Car Heatin & Lighting Company | Safety-vent for expansion-drums. |
US3582037A (en) * | 1969-10-29 | 1971-06-01 | Brown & Sharpe Mfg | Pneumatic logic element construction |
US6056269A (en) * | 1999-01-15 | 2000-05-02 | Hewlett-Packard Company | Microminiature valve having silicon diaphragm |
WO2002070932A2 (en) * | 2001-03-07 | 2002-09-12 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Microvalve |
EP1413775A2 (en) * | 2002-10-21 | 2004-04-28 | Lockheed Martin Corporation | Microelectromechanical high pressure gas microvalve |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2186833A (en) * | 1939-03-11 | 1940-01-09 | George A Iler | Valve |
US2563665A (en) * | 1948-04-30 | 1951-08-07 | Comptoir Textiles Artificiels | Valve |
US3620244A (en) * | 1970-08-06 | 1971-11-16 | Robertshaw Controls Co | Vacuum regulator and pneumatically operated fuel control system utilizing the same |
GB2102890B (en) | 1981-06-26 | 1984-09-12 | Lucas Ind Plc | Fuel pumping apparatus |
US4828545A (en) | 1984-02-08 | 1989-05-09 | Omni-Flow, Inc. | Pressure responsive multiple input infusion system |
US4756508A (en) * | 1985-02-21 | 1988-07-12 | Ford Motor Company | Silicon valve |
US4657062A (en) * | 1985-03-08 | 1987-04-14 | Tuerk Robert P | Roll tarp locking assembly |
US5178182A (en) | 1986-03-04 | 1993-01-12 | Deka Products Limited Partnership | Valve system with removable fluid interface |
US5857486A (en) * | 1996-09-24 | 1999-01-12 | 1219737 Ontario Inc. | Pressure relief or back pressure valve |
GB9715742D0 (en) * | 1997-07-26 | 1997-10-01 | Knorr Bremse Systeme | Gas compressors |
EP1144890A2 (en) * | 1998-11-16 | 2001-10-17 | California Institute of Technology | Parylene micro check valve and fabrication method thereof |
US6416293B1 (en) | 1999-07-20 | 2002-07-09 | Deka Products Limited Partnership | Pumping cartridge including a bypass valve and method for directing flow in a pumping cartridge |
US6382923B1 (en) | 1999-07-20 | 2002-05-07 | Deka Products Ltd. Partnership | Pump chamber having at least one spacer for inhibiting the pumping of a gas |
AU2002212904B2 (en) | 2000-11-02 | 2006-01-12 | Ge Healthcare Bio-Sciences Ab | Valve integrally associated with microfluidic liquid transport assembly |
US20020155010A1 (en) | 2001-04-24 | 2002-10-24 | Karp Christoph D. | Microfluidic valve with partially restrained element |
WO2002097422A1 (en) | 2001-05-31 | 2002-12-05 | Electron-Bio, Inc. | A micro valve apparatus using micro bead and method for controlling the same |
US6715733B2 (en) * | 2001-08-08 | 2004-04-06 | Agilent Technologies, Inc. | High temperature micro-machined valve |
CA2512071A1 (en) | 2002-12-30 | 2004-07-22 | The Regents Of The University Of California | Methods and apparatus for pathogen detection and analysis |
DE102004022275A1 (de) * | 2004-05-06 | 2005-12-01 | Robert Bosch Gmbh | Druckregelventil |
US7314208B1 (en) * | 2004-09-30 | 2008-01-01 | Sandia Corporation | Apparatus and method for selectively channeling a fluid |
-
2006
- 2006-06-26 JP JP2008519051A patent/JP5329952B2/ja active Active
- 2006-06-26 CN CN2006800238117A patent/CN101213392B/zh active Active
- 2006-06-26 US US11/993,503 patent/US9416883B2/en active Active
- 2006-06-26 EP EP06765860.9A patent/EP1904772B1/en active Active
- 2006-06-26 WO PCT/IB2006/052078 patent/WO2007004105A1/en not_active Application Discontinuation
-
2016
- 2016-05-18 US US15/157,468 patent/US9551427B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US963045A (en) * | 1907-06-24 | 1910-07-05 | Safety Car Heatin & Lighting Company | Safety-vent for expansion-drums. |
US3582037A (en) * | 1969-10-29 | 1971-06-01 | Brown & Sharpe Mfg | Pneumatic logic element construction |
US6056269A (en) * | 1999-01-15 | 2000-05-02 | Hewlett-Packard Company | Microminiature valve having silicon diaphragm |
WO2002070932A2 (en) * | 2001-03-07 | 2002-09-12 | INSTITUT FüR MIKROTECHNIK MAINZ GMBH | Microvalve |
US20020124897A1 (en) * | 2001-03-07 | 2002-09-12 | Symyx Technologies, Inc. | Injection valve array |
EP1413775A2 (en) * | 2002-10-21 | 2004-04-28 | Lockheed Martin Corporation | Microelectromechanical high pressure gas microvalve |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007016935A (ja) * | 2005-07-08 | 2007-01-25 | Alps Electric Co Ltd | バルブ機構 |
JP2014510878A (ja) * | 2011-01-21 | 2014-05-01 | バイオカーティス ソシエテ アノニム | マイクロポンプまたはノーマルオフ型(normally−off)マイクロバルブ |
US9291284B2 (en) | 2011-01-21 | 2016-03-22 | Biocartis Nv | Micro-pump or normally-off micro-valve |
JP2019516079A (ja) * | 2016-03-23 | 2019-06-13 | エコール・ポリテクニーク・フェデラル・ドゥ・ローザンヌ(ウペエフエル)Ecole Polytechnique Federale de Lausanne (EPFL) | マイクロ流体ネットワーク装置 |
US11642672B2 (en) | 2016-03-23 | 2023-05-09 | Ecole Polytechnique Federale De Lausanne (Epfl) | Microfluidic network device |
Also Published As
Publication number | Publication date |
---|---|
WO2007004105A1 (en) | 2007-01-11 |
JP5329952B2 (ja) | 2013-10-30 |
US9551427B2 (en) | 2017-01-24 |
CN101213392B (zh) | 2012-06-27 |
US20160258543A1 (en) | 2016-09-08 |
EP1904772A1 (en) | 2008-04-02 |
US9416883B2 (en) | 2016-08-16 |
CN101213392A (zh) | 2008-07-02 |
US20100078584A1 (en) | 2010-04-01 |
EP1904772B1 (en) | 2015-06-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5329952B2 (ja) | 弁装置 | |
US6581899B2 (en) | Valve for use in microfluidic structures | |
ES2533901T3 (es) | Válvulas microfluídicas con elemento flotante y procedimiento de fabricación | |
DK1065378T3 (da) | Elastomere mikropumpe- og mikroventilsystemer | |
WO2002070932A3 (en) | Microvalve | |
ATE516058T1 (de) | Elliptische membran für ventile | |
EP0949418B1 (en) | Micro-pump and micro-pump manufacturing method | |
US20080006336A1 (en) | Miniature Valve | |
WO2005072138A3 (en) | Valve element | |
WO2008094672A3 (en) | Membrane-based fluid control in microfluidic devices | |
WO2004084274A3 (en) | Piezoelectric actuator and pump using same | |
EP1030989B1 (en) | Diaphragm valve for a fluid circuit | |
JP2006283965A5 (ja) | ||
JP2020532722A5 (ja) | ||
JP2011504560A (ja) | 安全弁を含むポンプ装置 | |
WO2020041342A3 (en) | Cartridge systems, capacitive pumps and multi-throw valves and pump-valve systems and applications of same | |
CN101608610A (zh) | 一种微型泵 | |
US20100122733A1 (en) | Pressure biased micro-fluidic valve | |
KR20150118781A (ko) | 에너지 저장장치용 안전변 | |
CA2528762A1 (en) | Valve | |
DE60014094D1 (de) | Homogenisierungsventil | |
KR102337975B1 (ko) | 밸브 장치 | |
DE602004009858D1 (de) | Betätigungsmembran insbesondere für pneumatische Ventile | |
ATE320570T1 (de) | Hysteresis flüssigkeitsventil | |
WO2007143992A1 (en) | A pump |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090624 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110906 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20111201 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20111208 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120302 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120717 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20121015 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20121022 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121217 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130702 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130725 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5329952 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |