JP2008539486A - 位置決め装置および位置決め方法 - Google Patents

位置決め装置および位置決め方法 Download PDF

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Publication number
JP2008539486A
JP2008539486A JP2008508303A JP2008508303A JP2008539486A JP 2008539486 A JP2008539486 A JP 2008539486A JP 2008508303 A JP2008508303 A JP 2008508303A JP 2008508303 A JP2008508303 A JP 2008508303A JP 2008539486 A JP2008539486 A JP 2008539486A
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Japan
Prior art keywords
face
tube
positioning device
piezoelectric
electrodes
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JP2008508303A
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English (en)
Japanese (ja)
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JP2008539486A5 (enExample
Inventor
ヴォルコフ アンドリー
Original Assignee
ユニバーシティ オブ ノーザンブリア アット ニューカッスル
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Application filed by ユニバーシティ オブ ノーザンブリア アット ニューカッスル filed Critical ユニバーシティ オブ ノーザンブリア アット ニューカッスル
Publication of JP2008539486A publication Critical patent/JP2008539486A/ja
Publication of JP2008539486A5 publication Critical patent/JP2008539486A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/02—Coarse scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Microscoopes, Condenser (AREA)
  • Control Of Position Or Direction (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Auxiliary Devices For And Details Of Packaging Control (AREA)
  • Die Bonding (AREA)
JP2008508303A 2005-04-29 2006-04-27 位置決め装置および位置決め方法 Withdrawn JP2008539486A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0508911A GB2425882A (en) 2005-04-29 2005-04-29 Positioning apparatus
PCT/GB2006/001564 WO2006117525A2 (en) 2005-04-29 2006-04-27 Positioning apparatus and method

Publications (2)

Publication Number Publication Date
JP2008539486A true JP2008539486A (ja) 2008-11-13
JP2008539486A5 JP2008539486A5 (enExample) 2009-06-18

Family

ID=34674186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008508303A Withdrawn JP2008539486A (ja) 2005-04-29 2006-04-27 位置決め装置および位置決め方法

Country Status (6)

Country Link
US (1) US8179019B2 (enExample)
EP (1) EP1880467B1 (enExample)
JP (1) JP2008539486A (enExample)
AT (1) ATE549790T1 (enExample)
GB (1) GB2425882A (enExample)
WO (1) WO2006117525A2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5458300B2 (ja) * 2009-02-09 2014-04-02 公立大学法人横浜市立大学 微細構造物の蒸着装置及び方法
CN115411968B (zh) * 2022-07-25 2025-08-29 中国科学院合肥物质科学研究院 双压电管并排惯性驱动的旋转马达及旋转扫描探针显微镜

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4893047A (en) * 1988-09-20 1990-01-09 Honda Electronic Co., Ltd. Ultrasonic driving device
US5051646A (en) * 1989-04-28 1991-09-24 Digital Instruments, Inc. Method of driving a piezoelectric scanner linearly with time
EP0789937B1 (de) * 1994-10-31 2000-05-17 Pi Ceramic GmbH Piezoelektrischer motor
GB9617076D0 (en) 1996-08-14 1996-09-25 Intelligent Manufacturing Syst Bearings and supports
US6252333B1 (en) * 1998-02-20 2001-06-26 Seiko Instruments Inc. Stage utilizing ultrasonic motor and electronic equipment and printer utilizing the stage
US6778509B1 (en) 1999-11-19 2004-08-17 Hughes Electronics Corporation MAC layer protocol for a satellite based packet switched services
DE10154526B4 (de) * 2001-06-12 2007-02-08 Physik Instrumente (Pi) Gmbh & Co Piezoelektrisches Stellelement
JP2004140946A (ja) 2002-10-18 2004-05-13 Canon Inc アクチュエータ
DE10314810A1 (de) * 2003-01-08 2004-08-05 Physik Instrumente (Pi) Gmbh & Co. Kg Verfahren zum Betreiben eines piezoelektrischen Motors sowie piezoelektrischer Motor mit einem Stator in Form eines hohlzylindrischen Oszillators
US6993342B2 (en) 2003-05-07 2006-01-31 Motorola, Inc. Buffer occupancy used in uplink scheduling for a communication device
US20050053035A1 (en) 2003-08-16 2005-03-10 Samsung Electronics Co., Ltd. Method and apparatus for providing uplink packet data service on uplink dedicated channels in an asynchronous wideband code division multiple access communication system

Also Published As

Publication number Publication date
ATE549790T1 (de) 2012-03-15
GB2425882A (en) 2006-11-08
EP1880467B1 (en) 2012-03-14
GB0508911D0 (en) 2005-06-08
US8179019B2 (en) 2012-05-15
WO2006117525A3 (en) 2007-03-29
WO2006117525A2 (en) 2006-11-09
EP1880467A2 (en) 2008-01-23
US20100117486A1 (en) 2010-05-13

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