ATE549790T1 - Positionierungsvorrichtung und -verfahren - Google Patents

Positionierungsvorrichtung und -verfahren

Info

Publication number
ATE549790T1
ATE549790T1 AT06726944T AT06726944T ATE549790T1 AT E549790 T1 ATE549790 T1 AT E549790T1 AT 06726944 T AT06726944 T AT 06726944T AT 06726944 T AT06726944 T AT 06726944T AT E549790 T1 ATE549790 T1 AT E549790T1
Authority
AT
Austria
Prior art keywords
travelling
wave
end surface
tubular body
positioning apparatus
Prior art date
Application number
AT06726944T
Other languages
German (de)
English (en)
Inventor
Andrii Volkov
Original Assignee
Nanomobile Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanomobile Ltd filed Critical Nanomobile Ltd
Application granted granted Critical
Publication of ATE549790T1 publication Critical patent/ATE549790T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/02—Coarse scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/08—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using travelling waves, i.e. Rayleigh surface waves
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Microscoopes, Condenser (AREA)
  • Control Of Position Or Direction (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Auxiliary Devices For And Details Of Packaging Control (AREA)
  • Die Bonding (AREA)
AT06726944T 2005-04-29 2006-04-27 Positionierungsvorrichtung und -verfahren ATE549790T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0508911A GB2425882A (en) 2005-04-29 2005-04-29 Positioning apparatus
PCT/GB2006/001564 WO2006117525A2 (en) 2005-04-29 2006-04-27 Positioning apparatus and method

Publications (1)

Publication Number Publication Date
ATE549790T1 true ATE549790T1 (de) 2012-03-15

Family

ID=34674186

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06726944T ATE549790T1 (de) 2005-04-29 2006-04-27 Positionierungsvorrichtung und -verfahren

Country Status (6)

Country Link
US (1) US8179019B2 (enExample)
EP (1) EP1880467B1 (enExample)
JP (1) JP2008539486A (enExample)
AT (1) ATE549790T1 (enExample)
GB (1) GB2425882A (enExample)
WO (1) WO2006117525A2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5458300B2 (ja) * 2009-02-09 2014-04-02 公立大学法人横浜市立大学 微細構造物の蒸着装置及び方法
CN115411968B (zh) * 2022-07-25 2025-08-29 中国科学院合肥物质科学研究院 双压电管并排惯性驱动的旋转马达及旋转扫描探针显微镜

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4893047A (en) * 1988-09-20 1990-01-09 Honda Electronic Co., Ltd. Ultrasonic driving device
US5051646A (en) * 1989-04-28 1991-09-24 Digital Instruments, Inc. Method of driving a piezoelectric scanner linearly with time
EP0789937B1 (de) * 1994-10-31 2000-05-17 Pi Ceramic GmbH Piezoelektrischer motor
GB9617076D0 (en) 1996-08-14 1996-09-25 Intelligent Manufacturing Syst Bearings and supports
US6252333B1 (en) * 1998-02-20 2001-06-26 Seiko Instruments Inc. Stage utilizing ultrasonic motor and electronic equipment and printer utilizing the stage
US6778509B1 (en) 1999-11-19 2004-08-17 Hughes Electronics Corporation MAC layer protocol for a satellite based packet switched services
DE10154526B4 (de) * 2001-06-12 2007-02-08 Physik Instrumente (Pi) Gmbh & Co Piezoelektrisches Stellelement
JP2004140946A (ja) 2002-10-18 2004-05-13 Canon Inc アクチュエータ
DE10314810A1 (de) * 2003-01-08 2004-08-05 Physik Instrumente (Pi) Gmbh & Co. Kg Verfahren zum Betreiben eines piezoelektrischen Motors sowie piezoelektrischer Motor mit einem Stator in Form eines hohlzylindrischen Oszillators
US6993342B2 (en) 2003-05-07 2006-01-31 Motorola, Inc. Buffer occupancy used in uplink scheduling for a communication device
US20050053035A1 (en) 2003-08-16 2005-03-10 Samsung Electronics Co., Ltd. Method and apparatus for providing uplink packet data service on uplink dedicated channels in an asynchronous wideband code division multiple access communication system

Also Published As

Publication number Publication date
JP2008539486A (ja) 2008-11-13
GB2425882A (en) 2006-11-08
EP1880467B1 (en) 2012-03-14
GB0508911D0 (en) 2005-06-08
US8179019B2 (en) 2012-05-15
WO2006117525A3 (en) 2007-03-29
WO2006117525A2 (en) 2006-11-09
EP1880467A2 (en) 2008-01-23
US20100117486A1 (en) 2010-05-13

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