JP2008539410A5 - - Google Patents

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Publication number
JP2008539410A5
JP2008539410A5 JP2008508296A JP2008508296A JP2008539410A5 JP 2008539410 A5 JP2008539410 A5 JP 2008539410A5 JP 2008508296 A JP2008508296 A JP 2008508296A JP 2008508296 A JP2008508296 A JP 2008508296A JP 2008539410 A5 JP2008539410 A5 JP 2008539410A5
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JP
Japan
Prior art keywords
stylus
surface detection
detection device
chip
measuring
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Granted
Application number
JP2008508296A
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English (en)
Japanese (ja)
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JP5324214B2 (ja
JP2008539410A (ja
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Publication date
Priority claimed from GBGB0508388.6A external-priority patent/GB0508388D0/en
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Publication of JP2008539410A publication Critical patent/JP2008539410A/ja
Publication of JP2008539410A5 publication Critical patent/JP2008539410A5/ja
Application granted granted Critical
Publication of JP5324214B2 publication Critical patent/JP5324214B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2008508296A 2005-04-26 2006-04-26 光学センサ付きの表面検出装置 Expired - Lifetime JP5324214B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0508388.6A GB0508388D0 (en) 2005-04-26 2005-04-26 Surface sensing device with optical sensor
GB0508388.6 2005-04-26
PCT/GB2006/001534 WO2006114627A1 (en) 2005-04-26 2006-04-26 Surface sensing device with optical sensor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012228071A Division JP5746121B2 (ja) 2005-04-26 2012-10-15 光学センサ付きの表面検出装置

Publications (3)

Publication Number Publication Date
JP2008539410A JP2008539410A (ja) 2008-11-13
JP2008539410A5 true JP2008539410A5 (https=) 2009-06-18
JP5324214B2 JP5324214B2 (ja) 2013-10-23

Family

ID=34640121

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008508296A Expired - Lifetime JP5324214B2 (ja) 2005-04-26 2006-04-26 光学センサ付きの表面検出装置
JP2012228071A Expired - Fee Related JP5746121B2 (ja) 2005-04-26 2012-10-15 光学センサ付きの表面検出装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012228071A Expired - Fee Related JP5746121B2 (ja) 2005-04-26 2012-10-15 光学センサ付きの表面検出装置

Country Status (6)

Country Link
US (3) US7847955B2 (https=)
EP (1) EP1875158B1 (https=)
JP (2) JP5324214B2 (https=)
CN (2) CN101166948A (https=)
GB (1) GB0508388D0 (https=)
WO (1) WO2006114627A1 (https=)

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JP6898966B2 (ja) * 2019-06-07 2021-07-07 株式会社ミツトヨ 不具合判定ユニット
JP7434535B2 (ja) 2019-09-18 2024-02-20 ディーダブリュー・フリッツ・オートメーション・インコーポレイテッド 非接触光学測定装置および交換可能光プローブ
CN110500958B (zh) * 2019-09-30 2021-03-12 北方民族大学 一种激光扫描精密测头装置
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