JP2008525775A - 位置の決定のために軌道を備えた測定要素および測定方法 - Google Patents

位置の決定のために軌道を備えた測定要素および測定方法 Download PDF

Info

Publication number
JP2008525775A
JP2008525775A JP2007547470A JP2007547470A JP2008525775A JP 2008525775 A JP2008525775 A JP 2008525775A JP 2007547470 A JP2007547470 A JP 2007547470A JP 2007547470 A JP2007547470 A JP 2007547470A JP 2008525775 A JP2008525775 A JP 2008525775A
Authority
JP
Japan
Prior art keywords
measuring element
modulated
trajectory
sensors
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2007547470A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008525775A5 (enExample
Inventor
フィンクラー、ローラント
ケプケン、ハンスゲオルク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JP2008525775A publication Critical patent/JP2008525775A/ja
Publication of JP2008525775A5 publication Critical patent/JP2008525775A5/ja
Abandoned legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/248Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains by varying pulse repetition frequency
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/249Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
    • G01D5/2492Pulse stream
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776Absolute encoders with analogue or digital scales

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP2007547470A 2004-12-23 2005-12-16 位置の決定のために軌道を備えた測定要素および測定方法 Abandoned JP2008525775A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004062278A DE102004062278A1 (de) 2004-12-23 2004-12-23 Messelement und Messverfahren mit einer Spur zur Bestimmung einer Lage
PCT/EP2005/056866 WO2006069925A1 (de) 2004-12-23 2005-12-16 Messelement und messverfahren mit einer spur zur bestimmung einer lage

Publications (2)

Publication Number Publication Date
JP2008525775A true JP2008525775A (ja) 2008-07-17
JP2008525775A5 JP2008525775A5 (enExample) 2009-02-12

Family

ID=35994666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007547470A Abandoned JP2008525775A (ja) 2004-12-23 2005-12-16 位置の決定のために軌道を備えた測定要素および測定方法

Country Status (4)

Country Link
US (1) US20080180093A1 (enExample)
JP (1) JP2008525775A (enExample)
DE (1) DE102004062278A1 (enExample)
WO (1) WO2006069925A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007192778A (ja) * 2006-01-23 2007-08-02 Tokai Rika Co Ltd 回転角度検出装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006048628A1 (de) 2006-10-13 2008-04-17 Siemens Ag Messelement mit einer als Maßverkörperung fungierenden Spur und korrespondierendes, mit einem solchen Messelement ausführbares Messverfahren
EP2163854A1 (en) * 2008-09-12 2010-03-17 Austriamicrosystems AG Sensor arrangement and measuring method
US8723511B2 (en) * 2010-04-26 2014-05-13 Nidec Avtron Automation Corporation Absolute encoder
EP2995910B1 (de) * 2014-09-11 2016-11-16 Baumüller Nürnberg GmbH Absolutlage-Messsystem und -Verfahren
CN112344884B (zh) * 2020-10-16 2022-01-04 大连理工大学 一种用于框架组件的同轴度和间隙测量装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IE55855B1 (en) * 1984-10-19 1991-01-30 Kollmorgen Ireland Ltd Position and speed sensors
US4879508A (en) * 1986-04-04 1989-11-07 Mitutoyo Corporation Capacitance-type measuring device for absolute measurement of positions
US4737898A (en) * 1987-02-13 1988-04-12 Northern Telecom Limited Single-ended self-oscillating, DC-DC converter with regulation and inhibit control
JP3029657B2 (ja) * 1990-09-28 2000-04-04 カヤバ工業株式会社 位置検出装置
US5506579A (en) * 1991-06-06 1996-04-09 Trj & Company Absolute encoder using multiphase analog signals
US5497083A (en) * 1992-12-24 1996-03-05 Kayaba Kogyo Kabushiki Kaisha Rod axial position detector including a first scale having equidistant magnetic parts and a second scale having unequally distant parts and differing field strengths
US6433536B1 (en) * 1998-12-31 2002-08-13 Pacsci Motion Control, Inc. Apparatus for measuring the position of a movable member
DE60007202T2 (de) * 1999-03-15 2004-11-04 Goto, Atsutoshi, Fuchu Induktiver Stellungsdetektor
DE10158223B4 (de) * 2001-11-16 2017-10-05 Dr. Johannes Heidenhain Gmbh Drehwinkel-Messgerät
DE10219807C1 (de) * 2002-05-02 2003-07-17 Bruss Dichtungstechnik Vorrichtung zur Messung des Drehwinkels eines rotierenden Maschinenteils

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007192778A (ja) * 2006-01-23 2007-08-02 Tokai Rika Co Ltd 回転角度検出装置

Also Published As

Publication number Publication date
WO2006069925A1 (de) 2006-07-06
DE102004062278A1 (de) 2006-07-13
US20080180093A1 (en) 2008-07-31

Similar Documents

Publication Publication Date Title
US7571552B2 (en) Scale reading apparatus
JP5837201B2 (ja) 位置を求める方法および装置
CN101802552B (zh) 确定轴向对称振动传感器转速的方法及实施其的惯性装置
US8020310B2 (en) Measuring element comprising a track used as a material measure and corresponding measurement method carried out by means of such a measuring element
CN105424063B (zh) 绝对位置测量系统和方法
JPH07174586A (ja) 増分位置検出器の可動周期目盛盤の絶対位置測定方法及びその装置
CN101603840A (zh) 位移检测方法、校正表制作方法、马达控制设备、加工机
JP6400036B2 (ja) 位置検出装置、工作装置、および、露光装置
US20080180093A1 (en) Measuring element with a track for determining a position and corresponding measuring method
US7748251B2 (en) Circuit configuration and method for ascertaining tilt errors in connection with a position-measuring device
CN104089597B (zh) 一种多点位移测量装置
US7064316B2 (en) Code (ring) with two pairs of periodic line patterns
CN112461274B (zh) 一种圆光栅编码器信号生成方法
JP2011179914A (ja) 変位量検出装置
JPH0526658A (ja) 測尺装置
JP6440609B2 (ja) 位置検出装置、レンズ装置、撮像システム、工作装置、露光装置、位置検出方法、プログラム、記憶媒体
KR100890914B1 (ko) 고해상도의 조향각 검출 장치
JP2009271076A6 (ja) 位置および/または速度を検出する測定装置
US20140184206A1 (en) Device for determining motion parameters
US20250027794A1 (en) Movement measurement system with method for reducing interpolation error
CN114667438A (zh) 位置测量装置
RU2446381C1 (ru) Устройство для комплексного контроля зубчатых колес на основе метода полярных координат
US7091884B2 (en) Analog position encoder
US12429364B2 (en) Device and method for determining a reference curve for the rotational position of a rotary component
CN203949650U (zh) 一种多点位移测量装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081203

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20081203

A762 Written abandonment of application

Free format text: JAPANESE INTERMEDIATE CODE: A762

Effective date: 20090526