JP2008523618A5 - - Google Patents

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Publication number
JP2008523618A5
JP2008523618A5 JP2007545499A JP2007545499A JP2008523618A5 JP 2008523618 A5 JP2008523618 A5 JP 2008523618A5 JP 2007545499 A JP2007545499 A JP 2007545499A JP 2007545499 A JP2007545499 A JP 2007545499A JP 2008523618 A5 JP2008523618 A5 JP 2008523618A5
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JP
Japan
Prior art keywords
substrate
surface modification
exposed portion
modification treatment
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007545499A
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English (en)
Japanese (ja)
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JP2008523618A (ja
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Publication date
Priority claimed from US11/010,846 external-priority patent/US20060128165A1/en
Application filed filed Critical
Publication of JP2008523618A publication Critical patent/JP2008523618A/ja
Publication of JP2008523618A5 publication Critical patent/JP2008523618A5/ja
Withdrawn legal-status Critical Current

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JP2007545499A 2004-12-13 2005-11-22 表面改質によるパターン化方法 Withdrawn JP2008523618A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/010,846 US20060128165A1 (en) 2004-12-13 2004-12-13 Method for patterning surface modification
PCT/US2005/042307 WO2006065474A2 (en) 2004-12-13 2005-11-22 Method for patterning by surface modification

Publications (2)

Publication Number Publication Date
JP2008523618A JP2008523618A (ja) 2008-07-03
JP2008523618A5 true JP2008523618A5 (OSRAM) 2009-01-15

Family

ID=36216851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007545499A Withdrawn JP2008523618A (ja) 2004-12-13 2005-11-22 表面改質によるパターン化方法

Country Status (6)

Country Link
US (1) US20060128165A1 (OSRAM)
EP (1) EP1825327A2 (OSRAM)
JP (1) JP2008523618A (OSRAM)
KR (1) KR20080016781A (OSRAM)
CN (1) CN101080670A (OSRAM)
WO (1) WO2006065474A2 (OSRAM)

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