JP2008505364A5 - - Google Patents

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Publication number
JP2008505364A5
JP2008505364A5 JP2007519490A JP2007519490A JP2008505364A5 JP 2008505364 A5 JP2008505364 A5 JP 2008505364A5 JP 2007519490 A JP2007519490 A JP 2007519490A JP 2007519490 A JP2007519490 A JP 2007519490A JP 2008505364 A5 JP2008505364 A5 JP 2008505364A5
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JP
Japan
Prior art keywords
pixel
grayscale
square
value
map
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Application number
JP2007519490A
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English (en)
Japanese (ja)
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JP4753942B2 (ja
JP2008505364A (ja
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Priority claimed from US10/882,959 external-priority patent/US7529421B2/en
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Publication of JP2008505364A publication Critical patent/JP2008505364A/ja
Publication of JP2008505364A5 publication Critical patent/JP2008505364A5/ja
Application granted granted Critical
Publication of JP4753942B2 publication Critical patent/JP4753942B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2007519490A 2004-07-01 2005-07-01 角適合テンプレートに基づくラスタ走査型印刷における光学近接効果補正 Expired - Fee Related JP4753942B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/882,959 2004-07-01
US10/882,959 US7529421B2 (en) 2004-07-01 2004-07-01 Optical proximity correction in raster scan printing based on corner matching templates
PCT/US2005/023590 WO2006007570A1 (en) 2004-07-01 2005-07-01 Optical proximity correction in raster scan printing based on corner matching templates

Publications (3)

Publication Number Publication Date
JP2008505364A JP2008505364A (ja) 2008-02-21
JP2008505364A5 true JP2008505364A5 (enExample) 2008-08-14
JP4753942B2 JP4753942B2 (ja) 2011-08-24

Family

ID=35276133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007519490A Expired - Fee Related JP4753942B2 (ja) 2004-07-01 2005-07-01 角適合テンプレートに基づくラスタ走査型印刷における光学近接効果補正

Country Status (4)

Country Link
US (1) US7529421B2 (enExample)
EP (1) EP1766571A1 (enExample)
JP (1) JP4753942B2 (enExample)
WO (1) WO2006007570A1 (enExample)

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US20030233630A1 (en) * 2001-12-14 2003-12-18 Torbjorn Sandstrom Methods and systems for process control of corner feature embellishment
US7340713B2 (en) * 2004-09-29 2008-03-04 Synopsys, Inc. Method and apparatus for determining a proximity correction using a visible area model
KR101407913B1 (ko) * 2005-09-26 2014-06-17 마이크로닉 마이데이터 아베 설계 데이터의 다중 형태에 기반한 패턴 발생 방법 및시스템
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WO2010063827A1 (en) * 2008-12-05 2010-06-10 Micronic Laser Systems Ab Gradient assisted image resampling in micro-lithographic printing
JP5438848B2 (ja) * 2010-02-23 2014-03-12 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置及びデバイス製造方法
US8539395B2 (en) 2010-03-05 2013-09-17 Micronic Laser Systems Ab Method and apparatus for merging multiple geometrical pixel images and generating a single modulator pixel image
US11195213B2 (en) * 2010-09-01 2021-12-07 Apixio, Inc. Method of optimizing patient-related outcomes
CN102135725B (zh) * 2011-03-20 2012-07-04 北京理工大学 Pbopc优化掩膜图形的分割矩形总数的获取方法
CN103208111B (zh) * 2012-01-17 2015-10-07 富士通株式会社 用于修正图像角点的方法和装置以及图像处理设备
US9047658B2 (en) * 2013-11-05 2015-06-02 United Microelectronics Corp. Method of optical proximity correction
CN105549920B (zh) * 2015-12-10 2018-04-03 河北远东通信系统工程有限公司 一种基于Flex的客户端大幅地图打印方法
CN108073043A (zh) * 2016-11-07 2018-05-25 俞庆平 一种直写式丝网制版系统的光均匀性补偿方法
EP3461116B1 (en) * 2017-09-23 2024-04-17 Heidelberg Polska Sp. z o.o. A method and system for am screening and protecting printouts
KR102688569B1 (ko) 2018-12-13 2024-07-25 삼성전자주식회사 마스크 레이아웃 설계 방법, opc 방법, 및 그 opc 방법을 이용한 마스크 제조방법
US10614340B1 (en) * 2019-09-23 2020-04-07 Mujin, Inc. Method and computing system for object identification
CN111681284A (zh) * 2020-06-09 2020-09-18 商汤集团有限公司 一种角点检测方法、装置、电子设备及存储介质

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