JP2008304407A - Inner diameter measuring device - Google Patents

Inner diameter measuring device Download PDF

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JP2008304407A
JP2008304407A JP2007153579A JP2007153579A JP2008304407A JP 2008304407 A JP2008304407 A JP 2008304407A JP 2007153579 A JP2007153579 A JP 2007153579A JP 2007153579 A JP2007153579 A JP 2007153579A JP 2008304407 A JP2008304407 A JP 2008304407A
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laser beam
peripheral surface
inner diameter
inner peripheral
reflected
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Mikito Tanaka
幹人 田中
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TECHNO SYSTEM KK
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TECHNO SYSTEM KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inner diameter measuring device capable of measuring the inner diameter with a simple operation. <P>SOLUTION: According to the inner diameter measuring device 1, a reflective surface 4a of a prism 4 is fixed on the axial line of a laser beam emitted from a laser displacement meter 3. Thus, even when an object 20 to be measured is changed or the shape of the inner peripheral surface to be measured is varied, an operation to adjust arrangement of the laser displacement meter 3 and the prism 4 is unnecessary, thereby allowing measurement of the inner diameter D with a simple operation. The reflective surface 4a of the prism 4 is arranged so as to protrude from a support 6, even when the diameter of the inner peripheral surface 20a of the object 20 to be measured is small, and the entire measurement part 2 cannot be guided into the inner peripheral surface 20a, the reflective surface 4a of the prism 4 is guided, so that the inner diameter D of the inner peripheral surface 20a is measured. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、測定対象物が有する内周面にレーザ光を照射し、その内周面から反射される反射レーザ光を受光して、測定対象物の内径を測定する内径測定装置に関し、特に、簡単な操作で内径を測定することができる内径測定装置に関するものである。   The present invention relates to an inner diameter measuring device that irradiates an inner peripheral surface of a measurement object with laser light, receives reflected laser light reflected from the inner peripheral surface, and measures the inner diameter of the measurement object. The present invention relates to an inner diameter measuring apparatus capable of measuring an inner diameter with a simple operation.

従来より、測定対象物が有する内周面にレーザ光を照射し、そのレーザ光が照射された内周面から反射される反射レーザ光に基づいて、測定対象物の内径を測定する内径測定装置が知られている。このような内径測定装置に関し、特許文献１に記載されている技術では、測定対象物の外に配置されるレーザ変位計から出力されるレーザ光を、測定対象物の内周面に挿入する反射面で反射させて内周面に照射する。予めレーザ光の焦点距離（ピント）が内周面に合うようにレーザ変位計および反射面の位置を調整して固定しておき、測定対象物を移動させて又は反射面を回転させて測定対象物の内径を測定する。
特開２００３−４２７２５号公報（第００３６段落など） Conventionally, an inner diameter measuring device that irradiates an inner peripheral surface of a measurement object with laser light and measures the inner diameter of the measurement object based on reflected laser light reflected from the inner peripheral surface irradiated with the laser light. It has been known. With respect to such an inner diameter measuring apparatus, in the technique described in Patent Document 1, a laser beam output from a laser displacement meter arranged outside the measurement object is reflected to insert the laser light into the inner peripheral surface of the measurement object. It is reflected by the surface and irradiated to the inner peripheral surface. Adjust the position of the laser displacement meter and reflection surface so that the focal length (focus) of the laser beam matches the inner peripheral surface in advance, and then move the measurement object or rotate the reflection surface to measure Measure the inner diameter of the object.
JP2003-42725A (paragraph 0036, etc.)

しかしながら、特許文献１に記載された技術では、測定対象物を移動させるための昇降装置に測定対象物を取り付けてから、その測定対象物の内周に反射面を挿入してレーザ光の焦点距離を調整しなければならず、測定に至る調整の操作が煩わしいという問題点があった。   However, in the technique described in Patent Document 1, a measurement object is attached to an elevating device for moving the measurement object, and then a reflection surface is inserted into the inner periphery of the measurement object so that the focal length of the laser light is reached. There is a problem that the adjustment operation leading to the measurement is troublesome.

本発明は、上記問題を解決するためになされたものであり、簡単な操作で内径を測定することができる内径測定装置に関するものである。   The present invention has been made to solve the above-described problem, and relates to an inner diameter measuring apparatus capable of measuring an inner diameter with a simple operation.

請求項１記載の内径測定装置は、レーザ光を出力するレーザ光出力部と、そのレーザ光出力部から出射され、測定対象物が有する内周面において反射される反射レーザ光を受光する反射レーザ光受光部と、前記レーザ光および前記反射レーザ光を反射する反射部と、前記レーザ光出力部から出力されたレーザ光と、前記反射レーザ光受光部により受光されたレーザ光との変位を測定する変位測定部と、前記レーザ光出力部および前記反射レーザ光受光部が固設されると共に、前記レーザ光が前記内周面に照射される配置であって、且つ、前記反射レーザ光が前記反射レーザ光受光部に受光される配置に前記反射部が固設される支持体とを備えている。   The inner diameter measuring device according to claim 1 is a laser beam output unit that outputs a laser beam, and a reflected laser beam that receives the reflected laser beam that is emitted from the laser beam output unit and reflected on the inner peripheral surface of the measurement object. Measures the displacement of the light receiving unit, the reflecting unit that reflects the laser beam and the reflected laser beam, the laser beam output from the laser beam output unit, and the laser beam received by the reflected laser beam receiving unit The displacement measuring unit, the laser beam output unit, and the reflected laser beam receiving unit are fixed, and the laser beam is disposed on the inner peripheral surface, and the reflected laser beam is And a support on which the reflecting portion is fixedly disposed in a position received by the reflected laser light receiving portion.

請求項１記載の内径測定装置によれば、支持体には、レーザ光出力部および反射レーザ光受光部が固設されると共に、レーザ光が内周面に照射される配置であって、且つ、反射レーザ光が反射レーザ光受光部に受光される配置に反射部が固設されているので、測定対象物を変更したり、測定する内周面の形状が変化した場合であっても、レーザ光出力部の光軸と、反射レーザ光受光部の光軸と、反射部の配置とを調整するという操作が不要となり、簡単な操作で内径を測定することができるという効果がある。   According to the inner diameter measuring apparatus of claim 1, the support is provided with a laser beam output unit and a reflected laser beam receiving unit, and the inner surface is irradiated with the laser beam, and Since the reflection part is fixed to the arrangement where the reflected laser light is received by the reflected laser light receiving part, even if the measurement object is changed or the shape of the inner peripheral surface to be measured is changed, There is no need to adjust the optical axis of the laser beam output unit, the optical axis of the reflected laser beam receiving unit, and the arrangement of the reflecting unit, and the inner diameter can be measured with a simple operation.

以下、本発明の好ましい実施形態について、添付図面を参照して説明する。図１は、本発明の実施形態における内径測定装置１の概略構成を示す概略構成図であり、図２は、測定部２の概略構成を示す概略構成図である。内径測定装置１は、筒状の内周面２０ａを有する測定対象物２０の内径Ｄ（図２参照）をマイクロメートルのオーダーで測定するための装置である。   Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a schematic configuration diagram illustrating a schematic configuration of an inner diameter measuring device 1 according to an embodiment of the present invention, and FIG. 2 is a schematic configuration diagram illustrating a schematic configuration of a measurement unit 2. The inner diameter measuring apparatus 1 is an apparatus for measuring the inner diameter D (see FIG. 2) of the measuring object 20 having a cylindrical inner peripheral surface 20a on the order of micrometers.

図１に示すように、内径測定装置１には、測定部２と、回転中心調整器１０と、回転軸１１と、回転軸受け１２と、回転モータ１３と、測定部支持台１４と、一軸ステージ１５とが主に設けられている。   As shown in FIG. 1, the inner diameter measuring device 1 includes a measuring unit 2, a rotation center adjuster 10, a rotating shaft 11, a rotating bearing 12, a rotating motor 13, a measuring unit support 14, and a uniaxial stage. 15 is mainly provided.

ここで、図２を参照して測定部２について説明する。図２に示すように、測定部２には、レーザ変位計３と、プリズム４と、プリズム４が固定されるプリズム固定台５と、レーザ変位計３およびプリズム固定台５が固設される支持体６とが主に設けられている。   Here, the measurement unit 2 will be described with reference to FIG. As shown in FIG. 2, the measurement unit 2 includes a laser displacement meter 3, a prism 4, a prism fixing base 5 to which the prism 4 is fixed, and a support in which the laser displacement meter 3 and the prism fixing base 5 are fixed. A body 6 is mainly provided.

レーザ変位計３は、レーザ光を一定の方向に発し、発したレーザ光と同一軸線上を戻った反射レーザ光との変位を検出する。プリズム４は、レーザ変位計３から発せられるレーザ光の方向、および、測定対象物２０から反射される反射レーザ光の方向を変化させる反射面４ａが先端に設けられている。このプリズム４として、例えば、クロビット（登録商標）などを用いても良い。   The laser displacement meter 3 emits laser light in a certain direction, and detects the displacement between the emitted laser light and the reflected laser light returning on the same axis. The prism 4 is provided with a reflection surface 4a at the tip for changing the direction of the laser light emitted from the laser displacement meter 3 and the direction of the reflected laser light reflected from the measurement object 20. As the prism 4, for example, a clobit (registered trademark) may be used.

支持台６には、レーザ変位計３から発せられるレーザ光の軸線と、回転軸１１（図１参照）の軸心とが一致するようにレーザ変位計３が固設され、また、プリズム４の反射面４ａが、レーザ光の軸線に対して１３５度傾斜するようにプリズム４を支持するプリズム固定台５が固設されている。   The laser displacement meter 3 is fixed to the support base 6 so that the axis of the laser beam emitted from the laser displacement meter 3 and the axis of the rotating shaft 11 (see FIG. 1) coincide with each other. A prism fixing base 5 that supports the prism 4 is fixed so that the reflecting surface 4a is inclined 135 degrees with respect to the axis of the laser beam.

従って、レーザ変位計３から（反射面４ａへ向けて）発せられたレーザ光は、プリズム４を通過してレーザ光の軸線に対して１３５度傾斜した反射面４ａにおいて反射して、９０度方向を変え、測定対象物２０の内周面２０ａの軸線に対して垂直方向に進み、その内周面２０ａに垂直に照射される。   Therefore, the laser light emitted from the laser displacement meter 3 (toward the reflection surface 4a) passes through the prism 4 and is reflected on the reflection surface 4a inclined by 135 degrees with respect to the axis of the laser light, and is in the direction of 90 degrees. , And proceed in a direction perpendicular to the axis of the inner peripheral surface 20a of the measuring object 20, and the inner peripheral surface 20a is irradiated perpendicularly.

そして、その内周面２０ａに照射されたレーザ光のうち、照射されたレーザ光の逆方向に反射される反射レーザ光は、反射面４ａにおいて反射して９０度方向を変え、レーザ変位計３から発せられるレーザ光の軸線上を逆方向に進みレーザ変位計３に戻る。   Of the laser light irradiated on the inner peripheral surface 20a, the reflected laser light reflected in the opposite direction of the irradiated laser light is reflected by the reflecting surface 4a and changed in direction by 90 degrees, and the laser displacement meter 3 The laser beam travels in the opposite direction on the axis of the laser beam emitted from the laser beam and returns to the laser displacement meter 3.

ここで、図１に戻り説明をする。測定部２の支持台６の一面は、回転中心調整器１０の一面に固定され、その回転中心調整器１０の測定部２が固定された面の反対面には、回転軸１１の一端が突設されている。回転中心調整器１０は、測定部２のレーザ変位計３から発せられるレーザ光の軸線と、回転軸１１の軸心とが一致する状態で測定部２を回転させるために、支持台６の固定位置を調整するものである。回転軸１１は、回転軸受け１２により回転可能に支持され、その他端が回転モータ１３に連結されている。従って、回転モータ１３の駆動力が、回転軸１１を介して測定部２へ伝達され、測定部２が回転軸１１の軸心を回転中心として回転させられる。   Here, returning to FIG. One surface of the support 6 of the measurement unit 2 is fixed to one surface of the rotation center adjuster 10, and one end of the rotation shaft 11 projects from the surface opposite to the surface of the rotation center adjuster 10 to which the measurement unit 2 is fixed. It is installed. The rotation center adjuster 10 fixes the support base 6 so that the axis of the laser beam emitted from the laser displacement meter 3 of the measuring unit 2 and the axis of the rotating shaft 11 coincide with each other. The position is adjusted. The rotary shaft 11 is rotatably supported by a rotary bearing 12, and the other end is connected to the rotary motor 13. Accordingly, the driving force of the rotary motor 13 is transmitted to the measuring unit 2 via the rotating shaft 11, and the measuring unit 2 is rotated about the axis of the rotating shaft 11 as the rotation center.

一軸ステージ１５には、可動部１５ａと、ベース部１５ｂと、ステージ搬送モータ１５ｃとが設けられている。測定部２、回転中心調整器１０、回転軸１１、回転軸受け１２および回転モータ１３が支持される測定部支持台１４は、一軸ステージ１５の可動部１５ａに結合されている。   The uniaxial stage 15 is provided with a movable portion 15a, a base portion 15b, and a stage transport motor 15c. A measurement unit support 14 on which the measurement unit 2, the rotation center adjuster 10, the rotation shaft 11, the rotation bearing 12, and the rotation motor 13 are supported is coupled to the movable unit 15 a of the uniaxial stage 15.

ステージ搬送モータ１５ｃが駆動されると、可動部１５ａがベース部１５ｂに対して相対的に、回転軸１１の軸心方向の何れか一方向に搬送される。この可動部１５ａを搬送させることにより、測定部２を測定対象物２０の内周面２０ａ（図２参照）において、回転軸１１の軸心と平行な方向へ案内し、その内周面２０ａの任意の位置で内径Ｄを測定することができる。   When the stage transport motor 15c is driven, the movable portion 15a is transported in any one of the axial directions of the rotary shaft 11 relative to the base portion 15b. By transporting the movable portion 15a, the measuring portion 2 is guided in a direction parallel to the axis of the rotating shaft 11 on the inner peripheral surface 20a (see FIG. 2) of the measuring object 20, and the inner peripheral surface 20a The inner diameter D can be measured at an arbitrary position.

この内径測定装置１では、予めプリズム４の反射面４ａが、レーザ変位計３から発せられるレーザ光の軸線上に固設されているので、測定対象物２０を変更したり、測定する内周面の形状が変化した場合であっても、レーザ変位計３およびプリズム４の配置を調整するという操作が不要となり、レーザ変位計３から出力されるレーザ光の焦点距離を調整するという簡単な操作で内径Ｄを測定することができる。   In this inner diameter measuring device 1, since the reflecting surface 4a of the prism 4 is fixed in advance on the axis of the laser beam emitted from the laser displacement meter 3, the inner peripheral surface for changing or measuring the measuring object 20 Even if the shape of the laser beam changes, the operation of adjusting the arrangement of the laser displacement meter 3 and the prism 4 is not necessary, and the simple operation of adjusting the focal length of the laser beam output from the laser displacement meter 3 is not necessary. The inner diameter D can be measured.

また、プリズム４の反射面４ａは、支持体６から突出するように配設されているので、測定対象物２０の内周面２０ａの径が小さく、内周面２０ａの中に測定部２全体を案内できない場合でも、プリズム４の反射面４ａを案内して、内周面２０ａの内径Ｄを測定することができる。   Further, since the reflecting surface 4a of the prism 4 is disposed so as to protrude from the support 6, the diameter of the inner peripheral surface 20a of the measuring object 20 is small, and the entire measuring unit 2 is included in the inner peripheral surface 20a. Can be guided, the inner diameter D of the inner peripheral surface 20a can be measured by guiding the reflecting surface 4a of the prism 4.

次に、内径測定装置１を用いた内周面２０ａの内径Ｄの測定方法について説明する。ステージ搬送モータ１５ｃを駆動し、測定部２を、測定対象物支持台２１に支持される測定対象物２０の内周面２０ａに案内して測定を開始する。   Next, a method for measuring the inner diameter D of the inner peripheral surface 20a using the inner diameter measuring apparatus 1 will be described. The stage conveyance motor 15c is driven, and the measurement unit 2 is guided to the inner peripheral surface 20a of the measurement target 20 supported by the measurement target support 21 to start measurement.

測定が開始されると、レーザ変位計３からレーザ光が出力される。その出力されたレーザ光は、反射面４ａに到達すると反射され、測定対象物２０の内周面２０ａに照射される。そして、内周面２０ａから反射されたレーザ光が、反射面４ａによりレーザ変位計３に向かって反射される。レーザ変位計３は、出力したレーザ光と受光した反射レーザ光との変位に基づいて、レーザ光が照射された位置における内周面２ａの半径を算出する。   When the measurement is started, laser light is output from the laser displacement meter 3. The output laser light is reflected when it reaches the reflecting surface 4 a and is irradiated on the inner peripheral surface 20 a of the measuring object 20. The laser beam reflected from the inner peripheral surface 20a is reflected toward the laser displacement meter 3 by the reflecting surface 4a. The laser displacement meter 3 calculates the radius of the inner peripheral surface 2a at the position irradiated with the laser beam based on the displacement between the output laser beam and the received reflected laser beam.

そして、回転モータ１３を駆動し、測定部２を一定角速度で回転させつつ、測定を繰り返すことにより、内周面２０ａの半径が連続的に算出されるので、その算出された複数の半径に基づいて内周面２０ａの内径Ｄを算出することができる。   Then, the radius of the inner peripheral surface 20a is continuously calculated by driving the rotary motor 13 and repeating the measurement while rotating the measuring unit 2 at a constant angular velocity. Therefore, based on the calculated plurality of radii. Thus, the inner diameter D of the inner peripheral surface 20a can be calculated.

また、内周面２０ａにおけるある位置の内径Ｄを測定した後に、ステージ搬送モータ１５ｃを駆動し、測定部２の位置を、内周面２０ａの軸線方向へ移動させ、内周面２０ａの内径Ｄを測定するという作業を繰り返せば、内周面２０ａの軸線方向の一端から他端までにわたる内径Ｄの測定を行うことができる。   Further, after measuring the inner diameter D at a certain position on the inner peripheral surface 20a, the stage transport motor 15c is driven to move the position of the measuring unit 2 in the axial direction of the inner peripheral surface 20a, and the inner diameter D of the inner peripheral surface 20a. Is repeated, the inner diameter D of the inner peripheral surface 20a extending from one end to the other end in the axial direction can be measured.

以上、実施形態に基づき本発明を説明したが、本発明は上述した実施形態に何ら限定されるものではなく、本発明の趣旨を逸脱しない範囲内で種々の改良変更が可能であることは容易に推察できるものである。   Although the present invention has been described based on the embodiments, the present invention is not limited to the above-described embodiments, and various improvements and modifications can be easily made without departing from the spirit of the present invention. Can be inferred.

例えば、上記実施形態の内径測定装置１では、発するレーザ光と受光する反射レーザ光とが同一軸線上であるレーザ変位計３を用いているが、三角測量方式のレーザ変位計を用いてもよい。なお、本発明は、レーザ光による測定に限定するものではなく、例えば、赤外線などを用いた測定にも適用することができる。   For example, although the laser displacement meter 3 in which the emitted laser beam and the received reflected laser beam are on the same axis is used in the inner diameter measuring device 1 of the above embodiment, a triangulation laser displacement meter may be used. . In addition, this invention is not limited to the measurement by a laser beam, For example, it can apply also to the measurement using infrared rays etc.

また、上記実施形態では、プリズム４の反射面４ａにより、レーザ光を反射させているが、プリズムでなくても、レーザ光を反射可能な部材であれば良い。   Moreover, in the said embodiment, although the laser beam is reflected by the reflective surface 4a of the prism 4, what is necessary is just the member which can reflect a laser beam even if it is not a prism.

また、レーザ変位計３に代えて、カメラおよび照明を測定部２に設けることにより、内周面２０ａの画像を撮影できる内径検査装置を構成しても良い。即ち、レーザ変位計３が固設されていた場合に発せられるレーザ光の軸線と、カメラの光軸とが一致するようにカメラを測定部２に固設し、カメラの光軸に対して４５度傾斜するようにハーフミラーを、プリズム４とカメラとの間に固設する。そして、照明から発せられる光の大部分が、ハーフミラーで反射された後に、プリズム４ａの反射面４ａに向かい、且つ、カメラの光軸上に位置するように、カメラの光軸に対して垂直に照明を固設する。即ち、照明から発せられた光は、ハーフミラーで９０度反射して、カメラの光軸上をプリズム４の反射面４ａに向かって進み、反射面４ａにおいて９０度反射して、内周面２０ａに垂直に照射される。そして、内周面２０ａに照射された光の一部が反射面４ａに向かって反射して戻り、反射面４ａにおいて反射して９０度方向を変え、カメラの光軸上をハーフミラーに向かって戻る。その戻ってきた光がハーフミラーに到達すると、一部の光がハーフミラーを通過して、カメラに受光される。従って、カメラにより内周面２０ａを撮影することができる。なお、ハーフミラーは、プリズム４と一体に設けても良い。   Moreover, it may replace with the laser displacement meter 3, and you may comprise the internal diameter test | inspection apparatus which can image | photograph the image of the internal peripheral surface 20a by providing the measurement part 2 with a camera and illumination. That is, the camera is fixed to the measuring unit 2 so that the axis of the laser beam emitted when the laser displacement meter 3 is fixed and the optical axis of the camera coincide with each other, and the camera is fixed at 45 with respect to the optical axis of the camera. A half mirror is fixed between the prism 4 and the camera so as to be inclined at a degree. Then, most of the light emitted from the illumination is reflected by the half mirror, and then is perpendicular to the optical axis of the camera so as to face the reflecting surface 4a of the prism 4a and be on the optical axis of the camera. Fixed lighting. That is, the light emitted from the illumination is reflected by 90 degrees by the half mirror, travels on the optical axis of the camera toward the reflecting surface 4a of the prism 4, is reflected by 90 degrees on the reflecting surface 4a, and the inner peripheral surface 20a. Is irradiated vertically. Then, a part of the light irradiated on the inner peripheral surface 20a is reflected and returned toward the reflecting surface 4a, is reflected on the reflecting surface 4a, changes its direction by 90 degrees, and moves on the optical axis of the camera toward the half mirror. Return. When the returned light reaches the half mirror, a part of the light passes through the half mirror and is received by the camera. Therefore, the inner peripheral surface 20a can be photographed by the camera. The half mirror may be provided integrally with the prism 4.

また、上記実施形態では、測定部２のプリズム４は、プリズム固定台５により固定されているが、レーザ変位計３から発せられるレーザ光の軸線を回転中心として、プリズム４を回転可能に構成しても良い。そうすることで、様々な形状の内周面２０ａを有する測定対象物２０の内径Ｄを測定することができる。   In the above-described embodiment, the prism 4 of the measuring unit 2 is fixed by the prism fixing base 5. However, the prism 4 is configured to be rotatable around the axis of the laser beam emitted from the laser displacement meter 3. May be. By doing so, the inner diameter D of the measuring object 20 having the inner peripheral surface 20a of various shapes can be measured.

本発明の実施形態である内径測定装置の概略構成を示す概略構成図である。It is a schematic block diagram which shows schematic structure of the internal diameter measuring apparatus which is embodiment of this invention. 測定部の概略構成を示す概略構成図である。It is a schematic block diagram which shows schematic structure of a measurement part.

符号の説明Explanation of symbols

１ 内径測定装置
２ 測定部
３ レーザ変位計
４ プリズム
４ａ 反射面
５ プリズム固定台
６ 支持体
１０ 回転中心調整器
１１ 回転軸
１２ 回転軸受け
１３ 回転モータ
１４ 測定部支持台
１５ 一軸ステージ
２０ 測定対象物
２０ａ 測定対象物の内周面
２１ 測定対象物支持台 DESCRIPTION OF SYMBOLS 1 Inner diameter measuring apparatus 2 Measuring part 3 Laser displacement meter 4 Prism 4a Reflecting surface 5 Prism fixed base 6 Support body 10 Rotation center adjuster 11 Rotating shaft 12 Rotating bearing 13 Rotating motor 14 Measuring part support stand 15 Uniaxial stage 20 Measuring object 20a Measuring object inner peripheral surface 21 Measuring object support stand

Claims (1)

レーザ光を出力するレーザ光出力部と、
そのレーザ光出力部から出射され、測定対象物が有する内周面において反射される反射レーザ光を受光する反射レーザ光受光部と、
前記レーザ光および前記反射レーザ光を反射する反射部と、
前記レーザ光出力部から出力されたレーザ光と、前記反射レーザ光受光部により受光されたレーザ光との変位を測定する変位測定部と、
前記レーザ光出力部および前記反射レーザ光受光部が固設されると共に、前記レーザ光が前記内周面に照射される配置であって、且つ、前記反射レーザ光が前記反射レーザ光受光部に受光される配置に前記反射部が固設される支持体とを備えていることを特徴とする内径測定装置。 A laser beam output unit for outputting a laser beam;
A reflected laser beam receiving unit that receives the reflected laser beam emitted from the laser beam output unit and reflected on the inner peripheral surface of the measurement object;
A reflecting portion for reflecting the laser beam and the reflected laser beam;
A displacement measuring unit for measuring a displacement between the laser beam output from the laser beam output unit and the laser beam received by the reflected laser beam receiving unit;
The laser beam output unit and the reflected laser beam receiving unit are fixed, and the laser beam is disposed on the inner peripheral surface, and the reflected laser beam is applied to the reflected laser beam receiving unit. An inner diameter measuring apparatus comprising: a support body on which the reflecting portion is fixed in an arrangement for receiving light.
JP2007153579A 2007-06-11 2007-06-11 Inner diameter measuring device Pending JP2008304407A (en)

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Publication number Priority date Publication date Assignee Title
US9541380B2 (en) 2012-10-04 2017-01-10 Hitachi, Ltd. Shape measuring method and device
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JP2014126396A (en) * 2012-12-25 2014-07-07 Aisin Aw Co Ltd Inner diameter measuring device
JP2014126395A (en) * 2012-12-25 2014-07-07 Aisin Aw Co Ltd Inner diameter measuring device
US9733066B2 (en) 2013-07-09 2017-08-15 Hitachi, Ltd. Shape measuring method and device
US9801265B2 (en) 2015-04-24 2017-10-24 Verity Instruments, Inc. High dynamic range measurement system for process monitoring
CN106918319A (en) * 2017-03-21 2017-07-04 华侨大学 A kind of roadbed pore size measurement apparatus and method
JP2020186926A (en) * 2019-05-10 2020-11-19 ブリヂストンフローテック株式会社 Measuring apparatus and measuring method of test object
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