JP2008296161A - Ultrasonic horn and ultrasonic bonding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable an ultrasonic horn to apply a vibration in the horizontal direction (lateral vibration) and a vibration in the vertical direction (longitudinal vibration) with respect to a bonding surface while overlapping each other at the same time, or to mainly apply the vibration in the vertical direction (longitudinal vibration), or to freely change the ratio of the vibration components between the vibrations in both the directions, depending the bonding conditions. <P>SOLUTION: The ultrasonic horn is provided with: a rodlike horn 52 having a prescribed length; an ultrasonic transducer 54 fixed to one end of the horn 52 in its longitudinal direction, and for exciting the horn 52 in its longitudinal direction; a pressurization receiving part 58 which is located on a face parallel to the longitudinal direction of the horn 52 and keeps a bonding load applied through a sliding member 96; and a bonding action part 60 which is on a face parallel to the longitudinal direction of the horn 52 and opposed to the forming face of the pressurization receiving part 58, and which is provided at a position other than the position where natural vibration in the longitudinal direction has maximum amplitude, and pressed by a bonding part. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an ultrasonic horn used for connecting a connection terminal by applying a load while applying ultrasonic waves to a joint portion where connection terminals of two electronic components are overlapped, a horn used for the ultrasonic horn, The present invention relates to a sonic bonding apparatus.

  Conventionally, an ultrasonic bonding method is used to connect bumps, which are metal connection terminals formed on a semiconductor chip, and circuit patterns, which are connection terminals formed on a printed wiring board. It is also known that ultrasonic bonding is performed by overlapping circuit patterns serving as connection terminals of two printed wiring boards.

Japanese Patent No. 3848637

  In the conventional ultrasonic bonding method between metals, vibration is applied in parallel to the bonding surface. This is to join a pair of upper and lower connection terminals by rubbing in parallel with each other. Patent Document 1 shows that an ultrasonic vibrator is attached to one end of a rod-shaped horn that is long in the horizontal direction, and a position where the maximum amplitude of the natural vibration in the longitudinal direction formed on the horn is pressed to the joint. Has been. By exciting one connection terminal at the maximum amplitude position of the natural vibration, the one connection terminal can be efficiently excited in parallel with the joint surface.

  FIG. 6 shows an ultrasonic horn 10 used here, which is formed by a horn 12 and an ultrasonic transducer 14. The metal horn 12 is a rod having a quadrangular cross section, and an ultrasonic transducer 14 is fixed to one end in the longitudinal direction. The ultrasonic transducer 14 applies longitudinal vibration to the horn 10. The length of the horn 12 is set to one wavelength (about 120 mm) with respect to the frequency (for example, 40 KHz) of the ultrasonic transducer 14.

  The horn 12 is used with its longitudinal direction horizontal. In this case, as shown by A in FIG. 6, the vibration in the longitudinal direction (lateral direction) of the horn 12 has the maximum amplitude at both ends and the center, and the minimum at a position 1/4 of the length from both ends. The horn 12 is held at a point 16 (nodal point, node) where the amplitude is minimized. Further, the pressure receiving portion 18 is provided on the central upper surface of the horn 12, and the bonding operation portion 20 is provided on the central lower surface. A pressurizing protrusion 22 that is a part of a pressurizing means (not shown) abuts on the pressurizing receiving portion 18 via a sliding member 24.

  Here, a load F along the vertical pressure shaft 26 is applied to the pressure receiving portion 18. The joining action part 20 abuts vertically on the joining part (not shown) of the electronic components arranged horizontally. In the horn 12, longitudinal vibration B in a direction perpendicular to the pressurizing shaft 26 (perpendicular to the pressurizing shaft 26) is generated along with a longitudinal lateral vibration A perpendicular to the pressurizing shaft 26.

  That is, as the horn 12 expands and contracts, the phase is shifted by 90 ° with respect to the expansion and contraction direction (longitudinal direction), and expansion and contraction occurs in the orthogonal direction. The vibration due to the expansion and contraction in the orthogonal direction (vibration in the direction orthogonal to the longitudinal direction) does not necessarily include a component parallel to the pressing shaft 26 but also includes a component perpendicular to the paper surface in FIG. Here, the component parallel to the pressure shaft 26 is referred to as longitudinal vibration B.

  Therefore, when the ultrasonic horn 10 shown in FIG. 6 is used, vibration in the horizontal direction (lateral vibration direction in the longitudinal direction of the horn 12) is applied to the joining portion pressed by the joining action portion 20. This vibration destroys the adsorbate and oxide film on the joint surface, mechanically cleans and flattens the contact surface, and adheres the metals together. The pressing protrusion 22 pressurizes the pressure receiving portion 18 on the pressing shaft 26 via the sliding member 24, so that the horizontal vibration of the horn 12 in the horizontal direction is absorbed by the sliding member 24 and is applied to the pressing means. Is not transmitted.

  The above-described conventional device applies a horizontal vibration to the joint. However, as a result of research, the inventor has found that depending on the joining conditions, it may be desirable to set the vibration direction to the vertical direction instead of the horizontal direction. Knew. For example, some electronic components are based on solid phase bonding, and it has become clear that it is desirable to include a vertical vibration component in this bonding. In order to use this vertical vibration, a conventional ultrasonic horn uses a rod-shaped horn with the longitudinal direction vertical, an ultrasonic vibrator is fixed at the upper end, and a bonding portion is provided at the lower end. It has a structure. Therefore, when this ultrasonic horn is mounted on an ultrasonic bonding apparatus, the pressure shaft is inevitably in the vertical direction, and the mechanism required for the pressure means is structurally high, so the apparatus becomes larger. There was a problem of being restricted in design.

In solid phase bonding, vertical vibration components are added, so it is necessary to consider both the bondability and the damage received by electronic components. It has also been found that it is desirable to vibrate in combination.
However, the conventional ultrasonic horn is configured as described above in order to obtain the horizontal vibration in the joining portion, so that no vertical vibration component is generated. Also, in order to obtain vibration in the vertical direction at the bonding action part, the longitudinal direction of the rod-shaped ultrasonic horn is vertical as described above, an ultrasonic vibrator is arranged at the upper end, and the lower end is bonded. Since it is used as a part, it is difficult to obtain a horizontal vibration component. That is, there is a problem that only vibration in the horizontal or vertical direction can be obtained.
Therefore, an ultrasonic horn capable of avoiding an increase in size of the apparatus and generating such a composite vibration has been demanded.

  According to the present invention, a vibration parallel to the joint surface (lateral vibration) and a vibration perpendicular to the joint surface (longitudinal vibration) are applied simultaneously or superposed depending on the joining conditions, or a vertical vibration (longitudinal vibration) is mainly applied It is a first object of the present invention to provide an ultrasonic horn in which the ratio of vibration components in both directions can be freely changed.

  Moreover, this invention makes it the 2nd objective to provide the horn used for this ultrasonic horn. A third object of the present invention is to provide an ultrasonic bonding apparatus using an ultrasonic horn.

  According to the present invention, a first object is an ultrasonic horn for use in an ultrasonic bonding apparatus that joins the joints by applying pressure while oscillating the joints in which the connection terminals of the electronic components are vertically stacked. A rod-shaped horn having a predetermined length, an ultrasonic vibrator fixed to one end of the horn in the longitudinal direction and vibrating the horn in the longitudinal direction, and a plane parallel to the longitudinal direction of the horn. A pressure receiving portion to which a bonding load is applied via a sliding member, and a surface parallel to the longitudinal direction of the horn and facing the surface on which the pressure receiving portion is formed, and the natural vibration in the longitudinal direction has the maximum amplitude. It is achieved by an ultrasonic horn characterized by comprising: one bonding action portion provided at a position other than the position and pressed against the bonding portion.

  A second object is a horn used in the ultrasonic horn according to any one of claims 1 to 7, wherein the horn is provided on a surface parallel to the longitudinal direction of the pressure horn and a joining load is applied via a sliding member. And one bonding action portion provided at a position parallel to the longitudinal direction and facing the surface on which the pressure receiving portion is formed and provided at a position other than the position where the natural vibration in the longitudinal direction has the maximum amplitude. This is achieved by a horn used for an ultrasonic horn characterized by the following.

  A third object is an ultrasonic bonding apparatus using the ultrasonic horn according to any one of claims 1 to 7, and positioning means for positioning the connection terminals of both electronic components in an overlapping manner, and claims 1 to 7. A pressurizing unit that pressurizes the pressure receiving portion from above so as to be slidable in the horizontal direction while holding the ultrasonic horn by aligning the joining operation portion of any of the ultrasonic horns with the joint portion of both electronic components; This is achieved by an ultrasonic bonding apparatus comprising a control unit that controls the pressing load of the pressing unit and the driving of the ultrasonic transducer.

  The horn generates a natural vibration of a predetermined frequency in the longitudinal direction of the horn due to the vibration by the ultrasonic vibrator, and the horn other than the maximum amplitude position of the natural vibration is used as a bonding action part. The vibration in the longitudinal direction and the vibration in the direction orthogonal thereto can be included. For this reason, the addition ratio of this vibration component can be changed by appropriately determining the position of the joining action portion.

  For example, if the joining action part is provided at a position (nodal point, node) where the amplitude of the natural vibration in the horn longitudinal direction is minimum, that is, zero, the vibration of the joining action part is a vibration component (vertical component in the direction perpendicular to the horn longitudinal direction). Main component is vibration component). If the joining action part is separated from this position, the proportion of the vibration component in the longitudinal direction of the horn increases with an increase in the separation distance. Therefore, it is only necessary to determine the addition ratio of the vibration component optimum for the joining condition of the joining portion by experiments and determine the position of the joining action portion.

  In addition, since the load of a pressurization means is applied to a pressurization receiving part via a sliding member, the vibration of a horn longitudinal direction is not transmitted to a pressurization means. According to the present invention, although it is a laterally arranged horn, longitudinal vibration can be generated. Therefore, even when longitudinal vibration is generated, the longitudinally arranged horn is not used, so that it can be reduced in size, and thus can be reduced in weight. An ultrasonic bonding apparatus can be obtained.

  If the two pressure receiving parts are set at a position where the amplitude of the natural vibration in the horn longitudinal direction is maximized, the vibration component orthogonal to the horn longitudinal direction is minimized (zero) at this position. It is desirable that vibration in the direction (vertical direction) is not transmitted (claim 2). However, one pressure receiving part may be provided (claim 3). In this case, it is possible to prevent the horn from bending up and down with respect to the longitudinal direction by arranging the pressure receiving portion and the joining action portion on a vertical pressure shaft. The length of the horn is preferably equal to one wavelength of the natural vibration (Claim 4), but may be substantially equal to the half wavelength (Claim 5).

  It is preferable that the two pressure receiving portions are provided at the maximum amplitude position of the natural vibration in the longitudinal direction of the horn, and that one joining action portion is positioned between these two pressure receiving portions. In this case, the pressure reaction force of the joining action part is equally applied to the two pressure receiving parts, and the horn can be stably held.

  If the fixed position in the horn longitudinal direction of the joining action part can be changed, the addition ratio of the vibration component in the horn longitudinal direction and the vibration component in the direction orthogonal to the horn longitudinal direction can be changed according to the joining condition of the joining part. 7). Therefore, the vibration condition optimum for the joining condition can be obtained by changing the fixing position of the joining action portion and actually repeating the joining.

  The length of the horn used in the ultrasonic horn can be set to one wavelength (claim 9) or half wavelength (claim 10) of the natural vibration in the horn longitudinal direction.

  The positioning means used in the ultrasonic bonding apparatus includes a positioning table for positioning the lower electronic component around the horizontal direction and the vertical axis (pressure axis) (rotation direction), and the upper electronic component as the lower electronic component. And supply means for aligning the connection terminals of both electronic components. Here, the supply means may include a holding plate that detachably holds the upper electronic component on the lower surface (claim 13).

  A heater for heating the joint may be provided on one or both of the ultrasonic horn holding plate and the positioning table. Adhesive resin is interposed between the joints of both electronic components, and electrical joining of the joints using ultrasonic waves is performed in an uncured state of the resin, and then the adhesive resin is cured to mechanically reinforce the joints. Although it is conceivable, the adhesive resin can be softened during ultrasonic bonding by providing a heater, and the resin can be discharged from the overlapping portion of the connection terminals to ensure contact between the connection terminals. In this case, the heater is preferably set to 150 to 250 ° C. in order to soften and fluidize the resin.

  FIG. 1 is a diagram showing the structure and function of an ultrasonic horn according to an embodiment of the present invention. FIG. 2 is a conceptual diagram showing a partial cross section of an ultrasonic bonding apparatus using the same.

In FIG. 1, reference numeral 50 denotes an ultrasonic horn, which has a metal horn 52 having a rectangular cross section and an ultrasonic transducer 54 fixed to one end in the longitudinal direction. The ultrasonic transducer 54 causes the horn 52 to generate a natural vibration in the longitudinal direction of the horn 52. That horn 52 is an oscillation frequency f of the ultrasonic transducer 54 (e.g. 40KH _Z) for one of the wavelengths length of the natural vibration of the horn 52 (e.g. 120 mm).

  The horn 52 is used with its longitudinal direction horizontal. Two pressure receiving portions 58 and 58 are provided on the horizontal upper surface 56 of the horn 52 having a quadrangular cross section, and the bonding operation portion 60 is provided on the horizontal lower surface. Here, the pressure receiving portions 58 and 58 are at positions where the amplitude of the vibration A (lateral vibration) in the horn longitudinal direction (horizontal direction) is maximized. In the horn 52, a vibration B (indicated by vertical vibration in the vertical direction in FIG. 1) is generated along with the lateral vibration A in a direction that is 90 ° out of phase and orthogonal thereto.

  The pressure receiving portions 58 and 58 are provided at two positions where the amplitude of the lateral vibration A is maximum. Here, the interval between the pressure receiving portions 58 and 58 is a half wavelength of the natural vibration. The pressure receiving portions 58 and 58 may be provided on the two-forked member 92 side described later. In this embodiment, the two protrusions 93 and 93 provided with the pressure receiving portions 58 and 58 on the bifurcated member 92 are pressed with the sliding members 96 and 96 interposed therebetween.

  The joining action part 60 is located at a position where the amplitude of the transverse vibration A is minimized, that is, between the two pressure receiving parts 58 and 58. In FIG. 1, reference numeral 62 denotes a pressure shaft, which passes vertically between the pressure receiving portions 58 and 58 (that is, the joining operation portion 60). The pressurizing load F of the pressurizing means 86 described later is along the pressurizing shaft 62. Therefore, the lateral vibration A is perpendicular to the pressure shaft 62 and the longitudinal vibration B is parallel.

  Positions 64 and 64 at which the amplitude of the transverse vibration A in the longitudinal direction is minimized on the horn 52 are nodal points (nodes) of the transverse vibration A. In other words, the nodal points 64 and 64 are located on the pressure shaft 62 and at a position away from the wavelength by a quarter wavelength.

  Next, the joining apparatus will be described with reference to FIG. In this figure, reference numeral 70 denotes a positioning table, which can be positioned in the orthogonal direction (XY direction) and the rotation angle around the vertical direction (θ direction) on the horizontal plane. A mounting table 72 is fixed on the upper surface of the table 70, and a rigid printed wiring board 74, which is a lower electronic component, is fixed thereon. An adhesive resin film 76 is stuck on the connection terminal of the wiring board 74. The position of the table 70 is controlled by the position control unit 76.

  78 is a supply means for supplying the flexible printed wiring board 80, which is an upper electronic component, to the upper side of the rigid printed wiring board 74, and holding the connection terminals of both the wiring boards 74 and 80 in the longitudinal direction. The supply means 78 is moved forward and backward by the position controller 76 and positioned. The supply means 78 includes a holding plate 82 on the lower surface thereof. The holding plate 82 sucks and holds the flexible printed wiring board 80 on the lower surface by, for example, intake negative pressure.

  Reference numeral 86 denotes a pressurizing means. The pressurizing means 86 includes a pressurizing unit 88 that pressurizes the overlapping portion (joining portion) of the connection terminals of the wiring boards 74 and 80 downward from above the flexible printed wiring board 80, and an overlapping portion of the pressurizing unit 88 and the connection terminal. And a vibration unit 90 that mainly applies ultrasonic vibration in the vertical direction to the overlapped portion. The vibration unit 90 includes the ultrasonic horn 50 shown in FIG. 1 and a bifurcated member 92 that holds the ultrasonic horn 50 and pressurizes the pressure receiving portions 58 and 58.

  In other words, the forked member 92 has an upper surface fixed to the lower surface of the plunger 94 in the vertical direction of the pressurizing portion 88, and two projecting portions 93, 93 projecting downward from the lower surface of the forked member 92 include the horn 52. The pressure receiving portions 58 and 58 are pressed. Sliding members 96, 96 are interposed between the pressure receiving portions 58, 58 of the horn 52 and the protrusion 93. The sliding members 96, 96 are members having a small frictional resistance, for example.

  The horn 52 is held at the position of the nodal points 64 and 64 in FIG. 1 so that the forked member 92 does not move downward. That is, the horn 52 is threaded with bolts 98, 98 that are screwed at nodal points 64, 64 only in the vicinity of the center of the upper and lower thickness of the horn 52, and the upper ends of these bolts 98, 98 are leaf springs to the forked member 92. It is latched via an elastic body. For this reason, the horn 52 is suspended and held by these two bolts 98 and 98.

  The pressure F (load) of the pressurizing unit 88 is detected by a pressure sensor 100 using a load cell or the like interposed in the middle of the plunger 94. The pressurizing force F detected by the pressure sensor 100 is input to the pressurizing control unit 102, and the pressurizing control unit 102 feedback-controls the pressurizing force F of the pressurizing unit 88. The ultrasonic transducer 54 is driven and controlled at a predetermined frequency by the vibration control unit 104. Reference numeral 106 denotes a control device that sends a control signal to each unit such as the position control unit 76, the temperature control unit 84, the pressurization control unit 102, and the vibration control unit 104 to control the whole.

  Around the horn 52, a heating unit 53 made of an electric heater is attached. The temperature of the heating unit 53 is detected by a temperature sensor (not shown) and input to the temperature control unit 84. The temperature control unit 84 performs feedback control so that the temperature of the heating unit 53 becomes the temperature T commanded by the control device 106.

  Next, the operation of this joining apparatus will be described. First, the lower rigid printed wiring board 74 is set on the mounting table 72 in the state shown in FIG. The flexible printed wiring board 80 is held on the lower surface of the holding plate 82 of the upper supply means 78. In this state, the position control unit 76 controls the position of the table 70 and the supply unit 78 so that the connection terminals of both the printed wiring boards 74 and 80 overlap each other.

  Next, the pressurizing unit 88 lowers the excitation unit 90 and presses the bonding operation unit 60 of the horn 52 from the upper surface of the flexible printed wiring board 80 to the overlapping part of the connection terminals of both the wiring boards 74 and 80. The ultrasonic transducer 54 is activated while controlling the pressure F to the set pressure and the temperature T to the set temperature. In this way, by applying a set pressure while applying ultrasonic vibration mainly in the vertical direction to the joint portion of both the wiring boards 74 and 80 and performing heating by the heating unit 53, the connection terminal is in an uncured state of the resin film 76. Solid phase bonded.

  This joining time is extremely short (about 0.5 seconds), and then the pressure unit 88 raises the vibration unit 90 while the resin film 76 is in an uncured state or after the resin is cured to an appropriate hardness. 52 is separated from the upper surface of the flexible printed wiring board 80. Thereafter, the supply means 78 and the holding plate 82 are separated from the flexible printed wiring board 80 and prepare for supply of the next flexible printed wiring board 80. The flexible printed wiring board 80 is transferred from the table 70 by another conveying means while being joined to the rigid printed wiring board 74, and is carried out to the next process. Then, the resin film 76 is cured by a predetermined procedure corresponding to the resin film 76.

  In this explanation of the operation, the heating of the joined portion by the heating portion 53 is to soften the resin film 76 by heating and discharge it from the overlapping portion of the connecting terminals to ensure the contact between the connecting terminals. Although the solid phase bonding is used, the present invention is not limited to this. For example, solid phase diffusion bonding using a diffusion phenomenon or liquid phase diffusion bonding (eutectic bonding) may be used.

  In the first embodiment, the ultrasonic bonding apparatus using the ultrasonic horn of the present invention has been described by taking as an example the bonding of a flexible printed wiring board and a rigid printed wiring board. However, for example, a semiconductor chip can be used as a flexible printed wiring board. Needless to say, it can also be used for bonding (flip chip mounting) to a rigid printed wiring board.

  FIG. 3 shows another embodiment of the ultrasonic horn. The ultrasonic horn 150 includes a horn 152 having a length corresponding to ½ wavelength of the natural vibration, and an ultrasonic vibrator 154 fixed to one end thereof. In this case, the natural vibration (lateral vibration A) in the longitudinal direction of the horn 152 has a maximum amplitude at both ends and a minimum (zero) at the center. That is, this center position becomes the nodal point 164.

  The upper surfaces of both ends of the horn 152 are the pressure receiving portions 158 and 158, and the protruding portion 93 (see FIG. 2) of the pressing means is pressed with the sliding member 196 interposed therebetween. A bonding operation portion 160 is provided on the central lower surface. The ultrasonic horn 150 is used in place of the ultrasonic horn 50 in the first embodiment shown in FIG. That is, one nodal point 164 is suspended from a forked member (not shown) by a bolt (not shown). Therefore, the horn 152 is held by a pressurizing means (not shown) in a state where the two pressurizing members 158 and 158 are pushed downward by the bifurcated member 92 and are lifted upward at the center nodal point 164. .

  Since the longitudinal vibration B having a phase shifted by 90 ° with respect to the lateral vibration A is generated in the horn 152, vibration in the vertical direction (vertical direction) is mainly generated in the bonding action portion 160. For this reason, vibrations favorable for solid phase bonding (room temperature bonding) can be applied to the bonded portion. Further, according to this embodiment, the length of the horn 152 can be halved compared to that of the first embodiment (FIG. 1), which is suitable for downsizing of the apparatus.

  FIG. 4 is a diagram showing another embodiment of the ultrasonic horn. The ultrasonic horn 250 has substantially the same structure as the ultrasonic horn 150 shown in FIG. For this reason, the same code | symbol is attached | subjected to the same part and the description is not repeated. What is different from that of FIG. 3 is that the joining action portion 260 is set at a different fixed position other than the position where the longitudinal vibration amplitude B is maximum.

  FIG. 4 shows that the bonding operation portions 260 are provided at three different positions in the longitudinal direction of the lower surface of the horn 152, but in reality, one is provided for each of the three horns. In addition, you may enable it to change the fixed position of the three joining action parts 260 with one horn. One position P is a position shifted by 1/8 wavelength from the center (or one end) of the horn 152, that is, an intermediate position between one end and the center of the horn 152. A vibration having an amplitude of about 70% of the maximum amplitude of the transverse vibration A and the longitudinal vibration B is applied to the joining action portion 260 provided at this position P. Accordingly, the lateral vibration A and the longitudinal vibration B are applied with substantially the same component ratio.

  The position Q is the center of the horn 152 as in FIG. 3, and in this case, mainly the longitudinal vibration B is applied to the joining portion 260, and the component of the lateral vibration A becomes almost zero. The position R is a position deviated from the middle between the center and one end of the horn 152 to one end side. The transverse vibration A is about 85% of the maximum amplitude and the longitudinal vibration B is about 50 of the maximum amplitude in the joining action portion 260. Vibration with an amplitude of% is added.

  Thus, by changing the position of the bonding operation part 260, the component ratio of the transverse vibration A and the longitudinal vibration B generated in the bonding operation part 260 can be changed. Therefore, by selecting an optimal vibration component ratio depending on the object to be joined, appropriate joining can be performed.

  FIG. 5 is a diagram showing another embodiment. The ultrasonic horn 360 has substantially the same structure as the ultrasonic horn 260 shown in FIG. 4, and the same reference numerals are given to the same portions, and the description thereof will not be repeated. The difference from FIG. 4 is that the pressure receiving portion 93 and the bonding operation portion 260 are arranged on a common vertical pressure shaft 362.

  According to this embodiment, since the direction of the pressure F is applied to the pressure shaft 362 passing through the pressure receiving portion 93 and the bonding action portion 260, the pressure F is directly transmitted to the bonding action portion 260. For this reason, the load of a bending direction is not added to the horn 152, and holding | maintenance of the horn 152 is stabilized.

The figure which shows the ultrasonic horn which is one Example of this invention Figure showing a partial cross section of an ultrasonic bonding device The figure which shows the other Example of an ultrasonic horn The figure which shows the other Example of an ultrasonic horn The figure which shows the other Example of an ultrasonic horn The figure which shows the conventional example of the ultrasonic horn

Explanation of symbols

50, 150, 250, 360 Ultrasonic horn 52, 152 Horn 54, 154 Ultrasonic vibrator 58, 158 Pressurization receiving part 60, 160, 260 Joining action part 62, 362 Pressurization shaft 64 Nodal point 70 Positioning table 74 Rigid Printed wiring board (lower electronic component)
76 Position control unit 78 Supply means 80 Flexible printed wiring board (upper electronic component)
82 Holding Plate 84 Temperature Control Unit 86 Pressurization Means 88 Pressurization Unit 90 Excitation Unit 92 Bifurcated Member 93 Protrusion 96 Sliding Member 100 Pressure Sensor 102 Pressurization Control Unit 104 Excitation Control Unit

Claims (14)

An ultrasonic horn for use in an ultrasonic bonding apparatus for bonding the bonding portion by applying vibration while applying pressure to the bonding portion in which the connection terminals of the electronic components are vertically stacked,
A rod-shaped horn of a predetermined length;
An ultrasonic vibrator fixed to one end of the horn in the longitudinal direction and vibrating the horn in the longitudinal direction;
A pressure receiving portion on a surface parallel to the longitudinal direction of the horn, to which a bonding load is applied via a sliding member;
One joint provided on a surface parallel to the longitudinal direction of the horn and opposed to the surface on which the pressure receiving portion is formed, provided at a position other than the position where the natural vibration in the longitudinal direction has the maximum amplitude, and pressed by the joint portion An action part;
An ultrasonic horn comprising:   The ultrasonic horn according to claim 1, wherein the two pressure receiving portions are provided at a position where the natural vibration in the longitudinal direction of the horn has a maximum amplitude.   The ultrasonic horn according to claim 1, wherein one pressure receiving portion and the joining action portion are disposed on a vertical pressure shaft.   2. The ultrasonic horn according to claim 1, wherein the horn has a length equal to one wavelength of natural vibration caused by vibration of the ultrasonic vibrator.   The ultrasonic horn according to claim 1, wherein the horn has a length equal to a half wavelength of the natural vibration caused by the vibration of the ultrasonic vibrator.   The ultrasonic horn according to claim 2, wherein the two pressure receiving parts are provided at a position where the amplitude of the natural vibration in the longitudinal direction of the horn is maximum, and the joining action part is located between the two pressure receiving parts.   The ultrasonic horn according to any one of claims 1 to 6, wherein the fixing position of the bonding portion in the horn longitudinal direction can be changed. A horn used for the ultrasonic horn according to claim 1,
A pressure receiving portion provided on a surface parallel to the longitudinal direction to which a bonding load is applied via a sliding member;
One joining action part provided in a position parallel to the longitudinal direction and opposed to the surface on which the pressure receiving part is formed, at a position other than the position where the natural vibration in the longitudinal direction has the maximum amplitude;
A horn used for an ultrasonic horn characterized by comprising:   The horn used for an ultrasonic horn according to claim 8, wherein the length in the longitudinal direction is one wavelength of the natural vibration in the same direction.   The horn used for an ultrasonic horn according to claim 8, wherein the length in the longitudinal direction is a half wavelength of the natural vibration in the same direction. An ultrasonic bonding apparatus using the ultrasonic horn according to claim 1,
Positioning means for positioning the connection terminals of both electronic components in an overlapping manner;
The joining portion of the ultrasonic horn according to any one of claims 1 to 7 is aligned with the joint portion of both electronic components, and the pressure receiving portion is slidable in the horizontal direction from above while holding the ultrasonic horn. Pressurizing means;
A control unit for controlling the pressing load of the pressing unit and the driving of the ultrasonic transducer;
An ultrasonic bonding apparatus comprising: The positioning means includes a positioning table capable of positioning the lower electronic component in the horizontal direction and the rotational direction around the vertical axis;
Supply means for supplying the upper electronic component above the lower electronic component and aligning the connection terminals of both electronic components;
An ultrasonic bonding apparatus according to claim 11.   13. The ultrasonic bonding apparatus according to claim 12, wherein the supply means includes a holding plate that detachably holds the upper electronic component on the lower surface.   The ultrasonic bonding apparatus according to claim 11, wherein a heater for heating the bonding portion is attached to at least one of the horn and the positioning table.

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