KR100950977B1 - Full-wavelength ultrasonic welder of horizontal vibration type, and ultrasonic bonding apparatus having the same - Google Patents

Abstract

 Transversely oscillating full-wave ultrasonics that deliver uniform heat and pressure to the tool horn, are easy to change when replacing the tool horn, are easy to flatten, and allow the tool horn to be heated to increase bonding efficiency A welding machine and an ultrasonic bonding device having the same are provided. The transverse vibration wave ultrasonic welding machine is a transverse vibration type ultrasonic welding machine which bonds a metal to a metal as a bonded object. A converter generating lateral vibration; A booster coupled to the converter in a horizontal direction to amplify the ultrasonic vibration provided from the converter; The ultrasonic vibration amplified by the booster in conjunction with the booster converts the vibration into large amplitude vibration, and the horn body corresponding to the full-wavelength magnitude of the resonance frequency and the two protrusions protruding from the horn body as the point where the vibration is not induced A tool horn having a nodal point, for transferring heat and pressure to the workpiece through two nodal points; And a holder coupled with the two protruding nodal points of the tool horn such that the tool horn does not generate vibration in the vertical direction, thereby transferring uniform heat and pressure to the nodal points of the tool horn.

Ultrasonic welding machine, tool horn, transverse vibration, electric field, converter, booster, bonding device

Description

Full-wavelength ultrasonic welder of horizontal vibration type, and ultrasonic bonding apparatus having the same}

The present invention relates to a full-wave ultrasonic welder, and more particularly, to a full-wavelength ultrasonic welder of a lateral vibration method and an ultrasonic bonding apparatus having the same.

Ultrasonic welding machine is a device for bonding plastic or soft metal (copper, aluminum) by using sound wave between 15㎑ ~ 40㎑ which is inaudible to human ear. And a mechanical device moved by this vibrator.

In order to convert an electrical signal into a vibration in the vibrator, a nickel rotator, a ferrite vibrator, and a BLT (Bolted lanjuban Transducer) vibrator using piezoelectric ceramics are used. Here, the oscillator may also be referred to as a converter or a transducer.

In addition, the vibrator is connected to a duralumin amplification device called a booster (booster) for amplifying the vibration generated from the vibrator, and finally a tool horn of the duralumin material that transmits vibration directly to the plastic or metal Is connected.

The bonding principle of the ultrasonic welding machine is that 15,000 to 40,000 vibrations are transmitted to the plastic or the metal in one second, and heat and melt the contact surface of the target material between 0.1 to 1 second to melt and apply pressure.

On the other hand, in the conventional ultrasonic vibration welding technique, the resonator (ultrasonic horn) is brought into contact with the joining member, and ultrasonic vibration is caused, so that the lateral oscillation method uses the side surface parallel to the central axis of the tool horn, and thus the center axis direction. As a result, a lateral vibration welding technique is known in which a joining member is bonded to a member to be joined by finely stretching the tool horn. However, in the case of such a lateral vibration system, there is a fear that longitudinal vibration, which is a vibration component perpendicular to the working surface, is generated.

As a prior art for solving the above-described problems, Korean Patent Application No. 2003-7010122 (Application Date: July 31, 2003) discloses the invention named "ultrasonic vibration welding device and ultrasonic vibration horn (horn)" It is. The prior art eliminates the generation of longitudinal vibration, which is a vibration component perpendicular to the working surface, and enables lateral vibration type welding of high welding quality by generating only lateral vibration, which is a vibration component in a direction parallel to the working surface.

Figure 1 is a block diagram of the ultrasonic welding equipment according to the prior art, Figure 2 is a front view of the tool horn and the holder of Figure 1 combined.

Referring to FIG. 1, the ultrasonic welding apparatus according to the prior art includes a control unit 11, a lift driving unit 12, a vacuum suction unit 13, a table 14, an ultrasonic vibration supply unit 15, an operation unit 16, and a display unit. 17, a tool horn 20 and nodal support 30 are configured.

The ultrasonic welding apparatus according to the prior art is an ultrasonic horn mounted on an ultrasonic vibration welding apparatus which press-bonds a joining member containing a heat-melt material such as a thermoplastic resin material, and applies ultrasonic welding to weld, wherein the ultrasonic horn is mounted in the longitudinal direction thereof. In the joining operation part showing the symmetrical cross-sectional shape with respect to the central axis according to this, the work surface and the opposing surface which are inclined in a tapered shape are arranged symmetrically, and the recesses which follow the work surface and the opposing surface are symmetrically formed to be parallel to the joining working surface. Only ultrasonic vibration is generated on the working surface.

Specifically, the ultrasonic welding device according to the prior art, the nodal point (23) of the tool horn 20 is coupled to the holder 30 and maintains its position, the center axis of the tool horn 20 to be joined By inclining at an inclination angle of about 20 to 50 degrees with respect to the support surface 70 of the table 14 on which the member 50 is disposed, it is connected in a shape such that only one side is supported by the ultrasonic vibration supply unit 15, and a computer It is configured to generate ultrasonic vibration in the tool horn 20 in accordance with the instructions of the control unit 11, such as.

Holder 30 is connected to the lifting position change unit 12 disposed on the frame 60 of the ultrasonic welding equipment, the holder 30, as shown in Figs. 1 and 2, the main frame of the holder ( A tool horn 20 is disposed between the support legs 33 installed in the 31, and the support rod 32 having a cross-sectional square shape is disposed so as to pass through the hole located at the nodal point 23 of the tool horn 20. ) And both ends of the support rod 33 are inserted into the support leg 33, and the support rod 32 is supported by the first adjustment screw 34 in the longitudinal direction and the second adjustment screw 35 in the horizontal direction. It is fixedly installed so that position adjustment is possible between (33).

Ultrasonic vibration supply unit 15 is composed of an ultrasonic vibration oscillator, a converter (Converter) and a booster (Booster), etc., the central axis is connected to the shape supporting the tool horn 20 only one side inclined with respect to the joining work surface The ultrasonic vibration may be supplied to the tool horn 20 by generating ultrasonic vibration by a power supply.

The vacuum suction unit 13 communicates with a vacuum power source (not shown) and a vent hole extending to the suction hole 21 of the tool horn 20, and by attaching and detaching the joining member 40, the member to be joined 50. ).

The table 14 is movable in the X and Y directions, by positioning the member to be joined 50 on the table 14 and opposing it to be aligned with the joining member 40 adsorbed to the tool horn 20. The bonding member 40 and the joined member 50 can be welded by ultrasonic vibration.

The control unit 11 is composed of a personal computer having a data processing function and the like. The control unit 11 can be operated manually by the operation unit 16 to instruct each of the above components, and the liquid crystal panel with respect to the operation status thereof. It can display on the display part 17, such as these.

However, according to the related art, in the case of ultrasonic vibration in the horizontal direction (lateral vibration), it is necessary to suppress the ultrasonic vibration in the vertical direction (longitudinal vibration) and use only the horizontal direction. In order to solve this problem, the lateral vibration can be generated in the same manner as in the prior art, but as shown in FIGS. 1 and 2, the structure is so complicated that it is not easy to manufacture and to transmit a uniform pressure to the tool horn. There is a problem that is difficult.

The technical problem to be solved by the present invention for solving the above problems is to suppress the ultrasonic vibration (longitudinal vibration) in the vertical direction and generate only the horizontal vibration (lateral vibration), thereby preventing the damage to the bonded object An object of the present invention is to provide a vibrating electromagnetic wave ultrasonic welding machine and an ultrasonic bonding device having the same.

Another object of the present invention is to provide a transverse vibration type ultrasonic wave welding device capable of transmitting uniform pressure and heat to a tool horn and an ultrasonic bonding device having the same.

Another object of the present invention is to provide a transverse vibration type ultrasonic wave welding device capable of heating a tool horn and an ultrasonic bonding device having the same so as to increase the bonding efficiency.

As a means for achieving the above-mentioned technical problem, the lateral vibration type full-wave ultrasonic welding machine according to the present invention, in a lateral vibration type ultrasonic welding machine for bonding a metal and a metal as a bonded object, a high frequency provided from the ultrasonic oscillator A converter converting electrical energy into mechanical energy to generate lateral vibrations on the working surface where bonding is made; A booster coupled to the converter in a horizontal direction to amplify the ultrasonic vibration provided from the converter; The ultrasonic vibration amplified by the booster, coupled with the booster, converts the ultrasonic vibration into large amplitude vibration, and protrudes from the horn body as a horn body corresponding to the full-wavelength magnitude of the resonance frequency and a point where vibration is not induced. A tool horn having two nodal points configured to transfer heat and pressure to the object to be bonded through the two nodal points; And a holder coupled to the two protruding nodal points of the tool horn so that the tool horn does not generate vibration in the vertical direction, thereby transferring uniform heat and pressure to the nodal points of the tool horn.

Here, each of the two nodal points is characterized in that one side is formed to be inclined.

Here, the holder is inclined is formed on one side, characterized in that the bolt is fastened in the inclined direction of the holder so that the tool horn is fixed in a certain direction, the bolt may be tightened in one or both.

Here, the fixing device may be further coupled to the holder, and connects the holder with the fixing device.

Here, a vacuum line connection part is formed inside the horn body, and a tip for adsorbing the object to be bonded is formed at the center lower portion of the horn body and the end of the vacuum line connection part, and the size of the tip is It can be adjusted according to the size of the bond.

Here, at least one heater inserting portion into which the heater for heating the tool horn is inserted is formed in the holder, and the heater may be a heater made of sus or ceramic.

The cooler may further include a cooler formed at a portion at which the booster and the converter are coupled to block heat transmitted to the converter through the booster.

Here, the cooler is an air-cooled cooler consisting of a cooler body, an air inlet, and an air outlet, and cools heat transferred from the booster to the converter by cooling air injected through the air intake. After being discharged through the air discharge portion.

As a means for achieving the above-mentioned technical problem, the bonding apparatus provided with the lateral oscillation-type full-wave ultrasonic welding machine which concerns on this invention is a bonding apparatus provided with the lateral-vibration-type full-wave ultrasonic welding machine, Comprising: A chip supply unit installed to supply chips; A stage unit installed at the other side of the table so that the substrate on which the chip is mounted may be mounted; A feeding unit installed on the table so as to horizontally move the fixed substrate and move the position of the substrate; It is provided with a transverse vibration type ultrasonic wave welding machine, and is installed to be movable relative to the table in the X and Y directions perpendicular to the Z direction and the Z direction perpendicular to the ground, and to have an axis along the Z direction. A head unit which is installed to be capable of relative rotation; And installed relative to the table in the X, Y, and Z directions, and installed in a relatively rotatable manner to have an axis along the Y direction to pick up chips of the chip supply unit, thereby generating the lateral vibration type full-wave ultrasonic waves. Including a pickup unit for transferring to the welder, wherein the transverse wave type ultrasonic wave welding machine, a converter for converting high-frequency electrical energy provided from the ultrasonic oscillator into mechanical energy to generate a lateral vibration on the working surface to be bonded; A booster coupled to the converter in a horizontal direction to amplify the ultrasonic vibration provided from the converter; The ultrasonic vibration amplified by the booster, coupled with the booster, converts the ultrasonic vibration into large amplitude vibration, and protrudes from the horn body as a horn body corresponding to the full-wavelength magnitude of the resonance frequency and a point where vibration is not induced. A tool horn having two nodal points configured to transfer heat and pressure to the workpiece through the two nodal points; And a holder coupled to the two protruding nodal points of the tool horn so as not to generate vibration in the vertical direction, thereby transferring uniform heat and pressure to the nodal points of the tool horn.

Here, each of the two nodal points is characterized in that one side is formed to be inclined.

Here, the holder is inclined is formed on one side, characterized in that the bolt is fastened in the inclined direction of the holder so that the tool horn is fixed in a predetermined direction.

According to the present invention, damage to the bonded object can be prevented by suppressing ultrasonic vibration (vertical vibration) in the vertical direction and generating only vibration (lateral vibration) in the horizontal direction.

According to the invention, it is possible to transfer uniform pressure and heat to the tool horn.

According to the present invention, the one side of the protrusion of the tool horn is inclined, so that it is easy to replace when the tool horn is replaced, and the flatness correction is easy.

According to the invention, heating of the tool horn is possible using a heatable holder, thereby increasing the bonding efficiency.

Hereinafter, with reference to the accompanying drawings, a full-wave ultrasonic wave welding machine of a transverse vibration method according to an embodiment of the present invention and an ultrasonic bonding apparatus having the same will be described in detail.

As an embodiment of the present invention, it is possible to transfer uniform pressure and heat to the tool horn, and to incline one side of the protrusion of the tool horn so that the tool horn can be replaced easily, the flatness is corrected, and the holder is heatable. Disclosed is a lateral vibration type full-wave ultrasonic welding machine capable of heating a tool horn and an ultrasonic bonding apparatus having the same. Here, full-wavelength means one wavelength that is twice the half-wavelength.

First, referring to FIGS. 3 to 5, an ultrasonic bonding apparatus according to an embodiment of the present invention will be described.

3 is a view showing an ultrasonic bonding apparatus according to an embodiment of the present invention.

Referring to FIG. 3, the ultrasonic bonding apparatus 200 according to the embodiment of the present invention may include a table 220, a chip supply unit 230, a stage unit 240, a head unit 260, and a full-wave ultrasonic welding machine. 100, etc. are comprised.

A chip supply unit 130 having a semiconductor chip such as an LSI or an IC is installed on one side of the upper part of the table 220, and a substrate for mounting the chip may be mounted on the other side of the upper part of the table 220. The stage unit 240 is installed.

The head unit 260 is provided with a full-wave ultrasonic welding machine 100 according to an embodiment of the present invention, the head unit 260 is a Z direction perpendicular to the ground and X perpendicular to each other in the Z direction And it is provided to be relatively movable to the table 220 in the Y direction and to be relatively rotatable to have an axis along the Z direction.

That is, the head unit 260 is an X axis block 264 coupled to the table 220 so as to be relatively movable in the X direction, and a Y axis coupled to the X axis block 264 to be relatively movable in the Y direction. Z-axis block 265, Z-axis block 266 is coupled to the Y-axis block 265 so as to be relatively movable in the Z direction, and the relative rotation is possible to have an axis along the Z-axis direction to the Z-axis block 266 The rotating block 267 may be relatively moved relative to the table 220 in the X, Y, and Z directions, and may be rotated about an axis along the Z direction. At this time, it may be provided with a feeding unit which is fixedly supporting the substrate and is installed to be movable horizontally on the table to move the position of the substrate.

The full-wave ultrasonic welding machine 100 according to the embodiment of the present invention includes an ultrasonic generator, a converter, a booster, a tool horn, and the like. A tip, which is a vacuum adsorption unit, may be provided to be adsorbed.

Specifically, the tool horn of the full-wave ultrasonic welder 100 according to the embodiment of the present invention converts the ultrasonic vibration amplified by the booster, coupled with the booster, to a large amplitude vibration, and a full-wave of a resonance frequency. a horn body corresponding to the size of the wave-wavelength and two nodal points protruding from the horn body as vibration points are not induced, and transfer heat and pressure to the object to be bonded through the two nodal points. do. In addition, the holder combines with the two protruding nodal points of the tool horn so that the tool horn does not generate vibration in the vertical direction, thereby transmitting uniform heat and pressure to the nodal points of the tool horn. Here, the specific structure and operation of the full-wave ultrasonic welding machine 100 will be described later.

On one side of the table 220 proximate to the chip supply unit 230, a position detection camera 284 for detecting the position of the chip provided in the chip supply unit 230 is installed, and the head unit 260 is provided. One side of the adjacent table 220 is provided with a camera unit 280 for detecting the position of the substrate and the position of the chip attached to the full-wave ultrasonic welding machine 100.

That is, the camera unit 280 includes an upper camera 281 and a lower camera 282 each having a different imaging direction along the Z direction to move horizontally between the head unit 260 and the stage unit 240. It is possible to install.

By this structure, the camera unit 280 is selectively moved horizontally and the position of the chip attached to the full-wave ultrasonic welding machine 100 and the position of the substrate disposed on the stage unit 240 according to an embodiment of the present invention. Can be detected.

And the head unit 260 equipped with the full-wave ultrasonic welder 100 is operated by the control of the control unit by the signal detected by the camera unit 280, the full-wave ultrasonic welder 100 according to an embodiment of the present invention The chip adsorbed on the C) may be disposed at a predetermined position of the substrate and then welded or bonded.

On the other hand, the stage unit 240 may be of a structure capable of fine position correction according to the assembly tolerance and processing degree between each component. That is, the stage unit 240 includes a stage base 241 coupled to the table 220, a stage 242 and the stage 242 spaced apart from each other at a predetermined interval above the stage base 241. The stage base 241 is configured to include a control bolt 243 is coupled through the vertical direction, by adjusting the adjustment bolt 243 can be corrected the fine position of the stage 242.

By such a configuration, the chip disposed in the chip supply unit 230 may be transferred by the pickup unit and attached to the full-wave ultrasonic welding machine 100, and the head unit 260 is moved on the stage unit 240. After being transferred to the substrate seated in the pressurized, it is pressurized, it may be welded or bonded to the substrate by the mechanical vibration by the ultrasonic energy generated in the full-wave ultrasonic welder 100.

Ultrasonic bonding apparatus according to an embodiment of the present invention, metal direct bonding of the display drive chip (DDI) for TFT LCD, PDP and OLED, metal direct bonding for LED, RFID, SAW filter, and CMOS image sensor for camera module ( It can be applied to metal direct bonding of CIS).

Meanwhile, Table 1 defines various items of the ultrasonic bonding apparatus according to the embodiment of the present invention, but is not limited thereto.

According to the ultrasonic bonding apparatus according to the embodiment of the present invention, a high-speed bonding process of less than 1 second is possible, and sufficient ultrasonic waves capable of uniformly deforming 1000 or more bumps are provided. In addition, the powerful feedback function enables fast head movement for quick bump deformation and provides constant ultrasonic amplitude for uniform bonding. In addition, the control of the ultrasonic output and the pressing force is easy, the head mechanism can be easily replaced, and the camera enables visual recognition for high speed and high precision.

4A and 4B are diagrams for explaining the welding principle of the longitudinal vibration type ultrasonic welding machine and the horizontal vibration type ultrasonic welding machine, respectively.

Ultrasonic welding of plastics is typically the longitudinal vibration shown in FIG. 4A, but for some applications or for metal bonding by ultrasound, the lateral vibration shown in FIG. 4B is used.

Specifically, referring to FIG. 4A, the longitudinal vibration type ultrasonic welding machine includes a plastic 320a formed on the lower substrate 310a, a plastic 340a formed on the upper substrate 330a, and a tool horn. The plastics 330a and 340a are welded to each other by heat generation, softening, and melting of the inside of the plastic by the ultrasonic vibration of the 350a. That is, it is a kind of thermal welding welded with an adhesive. Welding methods include direct welding and transfer welding. The former generates strong stress on the contact surface of the tool horn 350a that transmits ultrasonic energy, so that the plastic is rapidly exothermed and the latter is transferred from the tool horn to the plastic. Ultrasonic energy repeatedly generates strong collisions on the opposite plastic interface, resulting in heat-welding on the interface.

However, in the case of longitudinal vibration welding, since the welding surfaces of the two plastics 330a and 340a are not completely adhered, that is, they are melted in a state spaced by the reference numeral d, air is introduced and bubbles are generated. Since dust and impurities are easily mixed, there is a possibility that the sealability may be broken.

Referring to FIG. 4B, in the horizontal vibration type ultrasonic welding machine, a metal pad 320b is formed on a lower substrate 310b, a metal bump 340a is formed on a semiconductor chip 330b, and a metal pad ( 320b and the metal bump 340a are welded to each other by ultrasonic vibration of the tool horn 350b.

In the case of the lateral vibration welding, since the vibration direction and the welding surface become the same direction, the welding surface can be matched and it is not exposed to air. In addition, since the excess impurities due to lateral vibration are generated to generate heat, good airtightness and water tightness can be obtained. However, ultrasonic welding of the lateral oscillation method is difficult to apply in the case of welding a large area because there is a limit in the energy transfer and the size of the amplitude surface of the tool horn. In most cases, lateral vibration welding is used for direct welding of a tube or film, and in particular, when the thickness of the material is thin, better welding results can be obtained than longitudinal vibration.

5 is a view illustrating the welding principle of the ultrasonic welding machine according to an embodiment of the present invention.

As described above, in the case of metal bonding by ultrasonic waves, the lateral vibration shown in FIG. 4B is used. Ultrasonic Metal Welding (Ultrasonic Metal Welding) is a method in which a strong bonding is achieved by the physical diffusion action (diffusion) by the mechanical vibration to the two metal joint surface by the ultrasonic vibration.

Specifically, the ultrasonic metal welder converts a commercial power source having a voltage of 100 to 250V and a frequency of 50/60 Hz to electrical energy of 15 kV to 40 kV through a power supply, which is then converted into a converter. After converting into mechanical vibration energy through the booster (Booster) to amplify its amplitude. When the ultrasonic vibration energy thus formed is transferred to the metal deposit through the horn, strong bonding is achieved by forcibly diffusing to the bonding surface of the metal deposit. In particular, since the metal oxide film existing on the surface of the metal is removed by welding due to the diffusion phenomenon of the two metal joint surfaces by ultrasonic vibration, electrical properties with little high mechanical strength and resistance can be obtained.

Referring to FIG. 5, a metal pad 320 is formed on a substrate 310, a metal bump 340 is formed on an LSI chip 330, and the metal pad 320 and the metal bump ( After depositing the 340, optionally, plasma cleaning, and then after moving the full-wave ultrasonic welder 100 according to the embodiment of the present invention to the bonding position, and then vacuum-adsorbed the LSI chip 330, By vibrating (laterally oscillating) and pressing the full-wave ultrasonic welder 100 in the horizontal direction, the metal pad 320 and the metal bumps 340 are welded by a tool horn which eventually vibrates.

On the other hand, Figure 6 shows a full-wave ultrasonic welding machine according to an embodiment of the present invention, Figure 6 (a) is a front view, Figure 6 (b) is a side view.

Referring to FIG. 6, the full-wave ultrasonic welder 100 according to the embodiment of the present invention includes a tool horn 110, a booster 120, and a converter 130.

The converter 130 converts the high frequency electrical energy provided from the ultrasonic oscillator (not shown) into mechanical energy to generate lateral vibration with respect to the working surface on which the bonding is made.

The booster 120 is fastened by the bolt 140a in the horizontal direction with the converter 130 to amplify the ultrasonic vibration provided from the converter 130.

Tool horn 110 is fastened by the booster 120 and the bolt (140b) to convert the ultrasonic vibration amplified by the booster 120 to a large amplitude vibration, the horn body corresponding to the full-wave amplitude of the resonance frequency And a nodal point 112a, 112b protruding from the horn body 111 as a point where vibration is not induced, and at this time, heat and pressure are applied to the object to be bonded through the two nodal points. Will be delivered. Here, each of the two nodal points is formed such that one surface is inclined.

In addition, a vacuum line connection part is formed inside the horn body 111, and a tip 113 for adsorbing a bonded object is formed at an end of the vacuum line connection part, and the size of the tip 113 is measured. It can be adjusted according to the size of the bond.

Figure 7 shows a holder coupled to the full-wave ultrasonic welding machine according to an embodiment of the present invention, Figure 7 (a) is a front view, Figure 7 (b) is a side view.

Referring to FIG. 7, the full-wave ultrasonic welding machine according to the embodiment of the present invention includes two protruding nodal points 112a of the tool horn 110 such that the tool horn 110 does not generate vibration in the vertical direction. And a holder 150 coupled to the holder 150 to transmit uniform heat and pressure to the nodal points 112a and 112b of the tool horn 110, and also coupled to the holder 150. It includes a fixing device connecting portion 160 for connecting the holder 150 with the fixing device.

8 shows an ultrasonic welding machine in which a tool horn is coupled to a holder according to an embodiment of the present invention, FIG. 8 (a) is a front view, and FIG. 8 (b) is a side view.

Referring to FIG. 8, the full-wave ultrasonic wave welding machine of the lateral vibration type according to the embodiment of the present invention shows that the full-wave ultrasonic welding machine shown in FIG. 6 and the holder shown in FIG. 7 are fastened to each other. The full-wave ultrasonic welding machine according to the embodiment of the present invention forms protrusions at two nodal points 112a and 112b where vibrations are not induced, and heat and pressure can be transmitted through the portions, and this protrusion is nodal. By inclining one side of the points 112a and 112b, the tool horn 110 can be easily replaced during replacement, and the flatness can be easily corrected.

The transverse vibration wave ultrasonic welding machine 100 according to the embodiment of the present invention converts the commercial power of 100 ~ 250V, 50 / 60Hz into electrical energy of 5 ~ 40 kHz through a power supply (not shown) Then, this is converted back to the vibration energy through the converter 130 and then the amplitude of the booster 120 is adjusted.

Specifically, the lateral vibration type full-wave ultrasonic welder 100 vibrates the converter 130, that is, the vibrator at the resonant frequency of the entire vibrometer using a high frequency power source, amplifies the vibration through the booster 120, and then amplifies it. The transmitted vibration is transmitted to the tool horn 110 to make a large amplitude vibration. The radial surface of the tool horn 110 having a large amplitude vibration is directed to the metal bump to be joined, and the vibration is made by ultrasonic vibration energy to be bonded.

In other words, when the ultrasonic oscillator supplies high frequency electrical energy to the converter 130, the electrical energy is converted into mechanical energy by the converter 130 to generate ultrasonic vibration.

At this time, the converter 130 has a small amplitude of about 3㎛ 5㎛ bad processing efficiency but the amplitude is expanded by the booster 120 and the tool horn 110, the amplitude sufficient for bonding at the end of the tool horn 110 You get Since the design of the booster 120 and the tool horn 110 has different ultrasonic vibration characteristics depending on the material and shape, when the ultrasonic vibration is used, the booster 120 and the tool horn 110 should be properly designed and used. In particular, a poor resonant design of a vibration system increases resistance, reduces power, and generates heat.

Tool horn 110 acts as a kind of transducer, and it is difficult to process with limited amplitude occurring in converter 130, so that booster 120 is mounted to increase its amplitude and required at tool horn 110 end. To generate a constant amplitude. The tool horn 110 needs to be designed in consideration of the resonance frequency of the converter 130 to obtain desired energy. In addition, the selection of the tool horn 110 shape should be determined in response to the dimensional shape of the tool and the required machining conditions. In general, it is difficult to obtain an amplitude suitable for processing with only one tool horn 110, so that the booster 120 is disposed between the converter 130 and the tool horn 110, and the amplitude of the converter 130 is 4 to 5 times higher. Zoom in to actual machining. In this case, the tool horn 110 generates resonance at a half-wavelength, which is an intermediate portion of the full-wave field.

On the other hand, Figure 9 is a view for explaining a tool horn according to an embodiment of the present invention.

Referring to FIG. 9, the tool horn 110 according to the embodiment of the present invention forms protrusions at two nodal points 112a and 112b, respectively, and transmits heat and pressure through the portions. By inclining one side of the in-nodal points 112a and 112b, it is easy to replace when the tool horn 110 is replaced, and the flatness can be easily corrected.

delete

On the other hand, Figure 10 is a view for explaining that the holder according to an embodiment of the present invention has a heater inserting portion, one side of the holder is inclined and fastened with a bolt.

Referring to FIG. 10, in the full-wave ultrasonic welding machine 100 according to the embodiment of the present invention, a heater inserting unit 170 into which a heater for heating the tool horn 110 is inserted is formed in the holder 150. In this case, the heater may be a heater (SUS) or a ceramic material. Accordingly, the holder 150 may be heated by the heater, and the tool horn 110 may be heated, thereby improving the bonding efficiency during the bonding operation.

In addition, the holder 150, as shown by the reference numeral C, the inclination is formed on one side, the bolt is fastened in the inclined direction of the holder 150 so that the tool horn 110 is fixed in a certain direction. Can be.

On the other hand, Figure 11 is a view for explaining that both sides of the holder according to an embodiment of the present invention is formed to be inclined and fastened with a bolt.

Referring to FIG. 11, as shown by reference numerals C and D, the holder 150 is inclined at both sides thereof, and the tool horn 110 of the holder 150 is fixed in a predetermined direction. The bolt may be fastened in both inclined directions. That is, the bolt can be tightened on one or both sides.

On the other hand, Figure 12 is a view showing a cooler according to an embodiment of the present invention, Figure 13 is a view showing a combined cooler according to the embodiment of the present invention with the booster of the ultrasonic welding machine. Here, FIG. 12A is a front view and FIG. 12B is a side view. 13A is a front view and FIG. 13B is a side view.

12 and 13, when the temperature of the tool horn 110 is raised, heat transmitted to the horn is transferred to the converter 130 through the booster 120, and the converter 130 is transferred by the heat thus transferred. The piezoelectric properties of are changed. In general, as the temperature increases, the frequency of the piezoelectric material decreases, so that the ultrasonic characteristics change. Therefore, in order to prevent this, a cooler 180 is additionally provided in the booster 120 to enable cooling, and the heat transmitted to the converter 130 through the booster 120 may be blocked.

The cooler 180 is an air-cooled cooler, and includes a cooler body 181, an air inlet 182, and an air outlet 183, and is cooled through the air inlet 182. Air blocks heat transferred from the booster 120 to the converter 130.

The present invention described above is not limited to the above-described embodiments and the accompanying drawings, and it is common in the art that various substitutions, modifications, and changes can be made without departing from the technical spirit of the present invention. It will be evident to those who have knowledge of.

1 is a block diagram of the ultrasonic welding equipment according to the prior art.

2 is a front view of the tool horn and the holder of FIG. 1 coupled;

3 is a view showing an ultrasonic bonding apparatus according to an embodiment of the present invention.

4A and 4B are views for explaining the welding principle of the longitudinal vibration type ultrasonic welding machine and the horizontal vibration type ultrasonic welding machine, respectively.

5 is a view illustrating the welding principle of the ultrasonic welding machine according to an embodiment of the present invention.

6 is a front view and a side view showing a full-wave ultrasonic welding machine according to an embodiment of the present invention.

7 is a front view and a side view showing a holder coupled to the full-wave ultrasonic welder according to the embodiment of the present invention.

8 is a front view and a side view showing a full-wave ultrasonic welder combined with a tool horn holder according to an embodiment of the present invention.

9 is a view for explaining a tool horn according to an embodiment of the present invention.

10 is a view for explaining that the holder according to the embodiment of the present invention has a heater inserting portion, one side of the holder is inclined and fastened with bolts.

11 is a view for explaining that both sides of the holder according to an embodiment of the present invention is formed to be inclined and fastened by bolts.

12 is a view showing a cooler according to an embodiment of the present invention.

13 is a view showing that the cooler according to the embodiment of the present invention is combined with the booster of the ultrasonic welding machine.

BRIEF DESCRIPTION OF THE DRAWINGS

100: full-wave ultrasonic welding machine 110: Tool Horn

120: Booster 130: Converter

140a, 140b: Fastening bolt 150: Holder

160: fixing device connection 111: horn body

112a, 112b: Nodal Point 113: Tip

170: heater inserting portion 180: air-cooled cooler

181: cooler body 182: air intake

183: air outlet

Claims (17)

In the ultrasonic welding machine of the lateral vibration method of bonding a metal and a metal as a bonded object, A converter converting the high frequency electrical energy provided from the ultrasonic oscillator into mechanical energy to generate lateral vibration with respect to the working surface where bonding is made; A booster coupled to the converter in a horizontal direction to amplify the ultrasonic vibration provided from the converter; The ultrasonic vibration amplified by the booster, coupled with the booster, converts the ultrasonic vibration into large amplitude vibration, and protrudes from the horn body as a horn body corresponding to the full-wavelength magnitude of the resonance frequency and a point where vibration is not induced. A tool horn having two nodal points configured to transfer heat and pressure to the object to be bonded through the two nodal points; And And a holder coupled to the two protruding nodal points of the tool horn so as not to generate vibration in the vertical direction, thereby transferring uniform heat and pressure to the nodal points of the tool horn. At least one heater insert into which the heater for heating the tool horn is inserted is formed in the holder, And a cooler configured to block heat transmitted to the converter through the booster at a portion at which the booster and the converter are fastened. The method of claim 1, Each of the two nodal points is a transverse wave type ultrasonic welding machine, characterized in that formed on one side inclined. The method of claim 1, The holder is formed with an inclination on one side, the horizontal wave type full-wave ultrasonic welding machine, characterized in that the bolt is fastened in the inclined direction of the holder so that the tool horn is fixed in a constant direction. The method of claim 3, The bolt is a transverse wave type ultrasonic welding machine, characterized in that the one side or both sides can be tightened. The method of claim 1, And a fixing device connecting portion coupled to the holder to connect the holder with the fixing device. delete delete delete The method of claim 1, The heater is a lateral vibration type full-wave ultrasonic welding machine, characterized in that the heater (SUS) or a ceramic material. delete The method of claim 1, The cooler is an air-cooled cooler consisting of a cooler body, an air inlet, and an air outlet, and after cooling air injected through the air intake unit cools heat transferred from the booster to the converter. The horizontal wave ultrasonic welding machine of the horizontal vibration method characterized in that is discharged through the air discharge. In the bonding apparatus provided with the electric wave ultrasonic welding machine of a lateral vibration system, A chip supply unit installed at one side of the table to supply chips; A stage unit installed at the other side of the table so that the substrate on which the chip is mounted may be mounted; A feeding unit installed on the table so as to horizontally move the fixed substrate and move the position of the substrate; It is provided with a transverse vibration type ultrasonic wave welding machine, and is installed to be movable relative to the table in the X and Y directions perpendicular to the Z direction and the Z direction perpendicular to the ground, and to have an axis along the Z direction. A head unit which is installed to be capable of relative rotation; And It is installed on the table in the X, Y, and Z directions so as to be relatively movable, and is installed so as to be relatively rotatable so as to have an axis along the Y direction. Pick-up unit Including, but the lateral vibration type full-wave ultrasonic welding machine, A converter converting the high frequency electrical energy provided from the ultrasonic oscillator into mechanical energy to generate lateral vibration with respect to the working surface where bonding is made; A booster coupled to the converter in a horizontal direction to amplify the ultrasonic vibration provided from the converter; The ultrasonic vibration amplified by the booster, coupled with the booster, converts the ultrasonic vibration into large amplitude vibration, and protrudes from the horn body as a horn body corresponding to the full-wavelength magnitude of the resonance frequency and a point where vibration is not induced. A tool horn having two nodal points configured to transfer heat and pressure to the workpiece through the two nodal points; And And a holder coupled to the two protruding nodal points of the tool horn so as to not generate vibration in the vertical direction, the holder transferring a uniform heat and pressure to the nodal points of the tool horn, At least one heater insert portion into which a heater (SUS) or a ceramic material for heating the tool horn is inserted is formed in the holder, Bonding device having a transverse vibration type ultrasonic wave welding machine further comprises a cooler formed to block the heat transmitted to the converter through the booster in the portion where the booster and the converter is fastened. The method of claim 12, Bonding device having a transverse vibration type ultrasonic wave welding device, characterized in that each of the two nodal points are formed so that one side is inclined. The method of claim 12, The holder is inclined is formed on one side, the bonding device having a transverse vibration type ultrasonic welding machine, characterized in that the bolt is fastened in the inclined direction of the holder so that the tool horn is fixed in a constant direction. delete delete The method of claim 12, The cooler is an air-cooled cooler consisting of a cooler body, an air inlet, and an air outlet, and after cooling air injected through the air intake unit cools heat transferred from the booster to the converter. Bonding device having a transverse vibration type full-wave ultrasonic welding machine characterized in that the discharge through the air discharge.

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