JP2008293963A - 発光装置の作製方法 - Google Patents
発光装置の作製方法 Download PDFInfo
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- JP2008293963A JP2008293963A JP2008107455A JP2008107455A JP2008293963A JP 2008293963 A JP2008293963 A JP 2008293963A JP 2008107455 A JP2008107455 A JP 2008107455A JP 2008107455 A JP2008107455 A JP 2008107455A JP 2008293963 A JP2008293963 A JP 2008293963A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
-
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Abstract
【解決手段】レジストマスクを形成することなく、フォトリソグラフィ技術で用いられる露光装置を用いて、選択的に有機化合物を含む層の成膜を行う。プレート上に光重合開始剤、前記光重合開始材と重合する材料、及び有機化合物を含む材料層を形成し、露光装置を用いて露光を行い、選択的に硬化させる。そして、プレートに対向して被成膜基板を配置する。そして被成膜基板または材料層を加熱して、露光した領域、或いは露光されなかった領域に含まれる有機化合物を蒸発させることでプレートに対向する被成膜基板の面上に選択的に成膜を行う。
【選択図】図1
Description
図1(A)〜図1(D)を用いて発光装置の作製方法を説明する。
実施の形態1では、1種類の有機化合物を用いる例を示したが、複数種の有機化合物を用いることができる。ここでは、複数種の有機化合物を用いて共蒸着を行う例を示す。
実施の形態1では露光した領域に含まれる有機化合物を蒸着する例を示したが、本実施の形態では未露光領域の有機化合物を蒸着する例を示す。
102:第1の層
103:有機化合物
104:露光された領域
105:露光マスク
106:第1の基板
107:第1の電極
108:絶縁物
109:第2の層
201:第2の基板
202:第1の層
203:第1の有機化合物
204:露光された領域
205:露光マスク
206:第1の基板
207:第1の電極
208:絶縁物
210:第2の層
211:ホットプレート
213:第2の有機化合物
301:第2の基板
302:第1の層
303:露光された領域
305:露光マスク
306:第1の基板
307:第1の電極
308:絶縁物
311:第2の層
314:スイッチ
315:電源
401:絶縁基板
402:第1の電極
403:絶縁物
404:第1の材料層
405R:赤色の発光層
405G:緑色の発光層
405B:青色の発光層
406R:第2の材料層
406G:第3の材料層
406B:第4の材料層
407:第2の電極
501:成膜室
504:第1の基板支持手段
505:第2の基板支持手段
507:第1の基板
508:材料層
509:第2の基板
510:ランプ
1501:第1の基板
1504:絶縁膜
1513:第1の電極
1514:隔壁
1515R、1515G、1515B:発光層を含む積層膜
1516:第2の電極
1521:発光領域
1522:逆テーパ状の隔壁
1601:第1の基板
1602:データ線
1603:走査線
1604:隔壁
1605:領域
1607:入力端子
1608:接続配線
1609a、1609b:FPC
1700 有機化合物を含む層
1701 ソース側駆動回路
1702 画素部
1703 ゲート側駆動回路
1704 封止基板
1705 シール材
1707 空間
1709 FPC(フレキシブルプリントサーキット)
1710 素子基板
1711 スイッチング用TFT
1712 電流制御用TFT
1713 陽極
1714 絶縁物
1715 発光素子
1716 陰極
1723 nチャネル型TFT
1724 pチャネル型TFT
8001 筐体
8002 支持台
8003 表示部
8004 スピーカー部
8005 ビデオ入力端子
8101 本体
8102 筐体
8103 表示部
8104 キーボード
8105 外部接続ポート
8201 本体
8202 表示部
8203 筐体
8204 外部接続ポート
8205 リモコン受信部
8206 受像部
8207 バッテリー
8208 音声入力部
8209 操作キー
8301 照明部
8302 傘
8303 可変アーム
8304 支柱
8305 台
8306 電源
8401 本体
8402 筐体
8403 表示部
8404 音声入力部
8405 音声出力部
8406 操作キー
8407 外部接続ポート
8408 アンテナ
8501 本体
8502 耳当て部
8503 表示部
8504 音声入力部
8505 音声出力部
8506 操作キー
8507 外部接続ポート
Claims (8)
- 第1の基板上に第1の電極を形成し、
第2の基板上に光重合開始剤、前記光重合開始材と重合する材料、及び有機化合物を含む第1の層を形成し、
前記第1の層の露光及び現像を選択的に行い、
前記第1の基板の第1の電極が形成されている面と前記第2の基板の第1の層が形成されている面とを向かい合わせ、
現像された第1の層を加熱して、第1の層に含まれる有機化合物を蒸発させ、前記第1の電極上に有機化合物を含む第2の層を選択的に形成し、
前記第2の層上に第2の電極を形成する発光装置の作製方法。 - 請求項1において、前記有機化合物は低分子の発光材料である発光装置の作製方法。
- 第1の基板上に第1の電極を形成し、
第2の基板上に光重合開始剤、前記光重合開始材と重合する材料、及び第1の有機化合物及び第2の有機化合物を含む第1の層を形成し、
前記第1の層の露光及び現像を選択的に行い、
前記第1の基板の第1の電極が形成されている面と前記第2の基板の第1の層が形成されている面とを向かい合わせ、
現像された第1の層を加熱して、第1の層に含まれる第1の有機化合物及び第2の有機化合物を蒸発させ、前記第1の電極上に第1の有機化合物及び第2の有機化合物を含む第2の層を選択的に形成し、
前記第2の層上に第2の電極を形成する発光装置の作製方法。 - 請求項3において、前記第1の有機化合物及び前記第2の有機化合物は低分子の発光材料である発光装置の作製方法。
- 第1の基板上に第1の電極を形成し、
第2の基板上に有機化合物及び光重合開始剤を含む第1の層を形成し、
前記第1の層の露光を選択的に行って前記第1の層の露光した領域を重合させ、
前記第1の基板の第1の電極が形成されている面と前記第2の基板の第1の層が形成されている面とを向かい合わせ、
前記第1の層を加熱して、前記第1の層の露光した領域以外に含まれる有機化合物を蒸発させ、前記第1の電極上に有機化合物を含む第2の層を選択的に形成し、
前記第2の層上に第2の電極を形成する発光装置の作製方法。 - 請求項5において、前記有機化合物はモノマーである発光装置の作製方法。
- 請求項1乃至6のいずれか一において、前記第2の基板は、石英基板、ガラス基板、または金属基板である発光装置の作製方法。
- 請求項1乃至7のいずれか一において、前記第1の層の露光は、露光マスクを用いた露光装置で行う発光装置の作製方法。
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- 2008-03-27 KR KR1020080028414A patent/KR101424791B1/ko active IP Right Grant
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JP2012153970A (ja) * | 2011-01-28 | 2012-08-16 | Sony Corp | 蒸発源およびこれを用いた蒸着装置ならびに蒸着方法 |
JP2015508557A (ja) * | 2011-12-20 | 2015-03-19 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーE.I.Du Pont De Nemours And Company | 閉じ込め層およびそれを使って製造されるデバイスを製造するための方法および材料 |
Also Published As
Publication number | Publication date |
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KR101424791B1 (ko) | 2014-07-31 |
US8367152B2 (en) | 2013-02-05 |
KR20080096376A (ko) | 2008-10-30 |
JP5073566B2 (ja) | 2012-11-14 |
US20080268135A1 (en) | 2008-10-30 |
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