JP2008290230A - ポリマー層内にパターンを生成するための方法 - Google Patents
ポリマー層内にパターンを生成するための方法 Download PDFInfo
- Publication number
- JP2008290230A JP2008290230A JP2008119944A JP2008119944A JP2008290230A JP 2008290230 A JP2008290230 A JP 2008290230A JP 2008119944 A JP2008119944 A JP 2008119944A JP 2008119944 A JP2008119944 A JP 2008119944A JP 2008290230 A JP2008290230 A JP 2008290230A
- Authority
- JP
- Japan
- Prior art keywords
- polymer
- plasma
- dielectric material
- deposition
- sites
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920000642 polymer Polymers 0.000 title claims abstract description 70
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 238000000034 method Methods 0.000 claims abstract description 31
- 230000008021 deposition Effects 0.000 claims abstract description 28
- 239000003989 dielectric material Substances 0.000 claims abstract description 23
- 238000000151 deposition Methods 0.000 claims description 31
- 238000006243 chemical reaction Methods 0.000 claims description 19
- 229910003481 amorphous carbon Inorganic materials 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 238000007796 conventional method Methods 0.000 abstract 1
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 229920000359 diblock copolymer Polymers 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000012686 silicon precursor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/0032—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
- B01D67/0034—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00031—Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/3086—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/7682—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing the dielectric comprising air gaps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/08—Patterned membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0315—Cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0323—Grooves
- B81B2203/0338—Channels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0176—Chemical vapour Deposition
- B81C2201/018—Plasma polymerization, i.e. monomer or polymer deposition
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Drying Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
- Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
【解決手段】ポリマー部位が支持体(2)上に形成される。これらの部位は、誘電体材料(3)のプラズマ堆積にさらされ、このプラズマと優先的に反応して前記部位の高さにおいて開口部(6)を形成する。その結果、パターン構造が誘電体材料(3)内におよび/またはポリマー(4)内に形成される。
【選択図】図6
Description
Claims (10)
- 支持体(2)上に堆積されるポリマー(1、4)を用いてパターン構造を生成する方法であって、
所定のプラズマと優先的に反応するポリマー部位の前記支持体(2)上への形成と、
前記ポリマー部位の高さにおいて開口部(6、7)を形成するための前記プラズマによる誘電体材料(3)の堆積と、
を連続して備えることを特徴とする方法。 - 前記ポリマー部位の形成は、前記ポリマーのウエハ全面への堆積によって達成され、前記ポリマーは、優先的反応部位と前記プラズマに対して反応的ではない区域とを示すことを特徴とする、請求項1に記載の方法。
- 前記ポリマー部位は前記支持体(2)上へのポリマー集合体(1)の堆積によって形成され、前記集合体の配置が、要求されるパターン構造に対応することを特徴とする、請求項1に記載の方法。
- 前記開口部(6)が前記ポリマー部位に対向する前記誘電体材料内に形成されることを特徴とする、請求項1乃至3のいずれか一項に記載の方法。
- 前記開口部(6)が前記ポリマー内に形成されることを特徴とする、請求項1乃至4のいずれか一項に記載の方法。
- 前記プラズマは酸化型または還元型であることを特徴とする、請求項1乃至5のいずれか一項に記載の方法。
- 前記ポリマーが非晶質炭素であることを特徴とする、請求項1乃至6のいずれか一項に記載の方法。
- 前記ポリマー部位が、前記ポリマーの表面の残部と異なる粗さの区域および/または平均の全域的組成に対して異なる化学量論の区域によって形成されることを特徴とする、請求項1乃至7のいずれか一項に記載の方法。
- 前記プラズマは酸化型であり、堆積される前記誘電体材料がシリコン酸化物であることを特徴とする、請求項1乃至8のいずれか一項に記載の方法。
- 前記プラズマは還元型であり、堆積される前記誘電体材料がSiCNまたはSiCまたはSiNであることを特徴とする、請求項1乃至8のいずれか一項に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0703230A FR2915832B1 (fr) | 2007-05-04 | 2007-05-04 | Procede de fabrication de motifs au sein d'une couche de polymere |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008290230A true JP2008290230A (ja) | 2008-12-04 |
JP2008290230A5 JP2008290230A5 (ja) | 2011-06-16 |
Family
ID=38650054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008119944A Pending JP2008290230A (ja) | 2007-05-04 | 2008-05-01 | ポリマー層内にパターンを生成するための方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7846512B2 (ja) |
EP (1) | EP1988566B1 (ja) |
JP (1) | JP2008290230A (ja) |
FR (1) | FR2915832B1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010038810B4 (de) | 2010-08-03 | 2020-01-02 | Robert Bosch Gmbh | Verfahren zum Verkappen eines mikromechanischen Bauelements |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4599243A (en) * | 1982-12-23 | 1986-07-08 | International Business Machines Corporation | Use of plasma polymerized organosilicon films in fabrication of lift-off masks |
JPS642008A (en) * | 1987-06-24 | 1989-01-06 | Mitsubishi Electric Corp | Formation of diffraction grating |
JPS6459817A (en) * | 1987-08-31 | 1989-03-07 | Toshiba Corp | Fine processing |
US20070134916A1 (en) * | 2005-12-14 | 2007-06-14 | Shin-Etsu Chemical Co., Ltd. | Antireflection film composition, patterning process and substrate using the same |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR702218A (fr) | 1930-09-04 | 1931-04-02 | Enseigne pour la reproduction des caractères, des chiffres, des images, etc., à l'aide de lumière réfléchie par surface miroitante | |
US5470693A (en) * | 1992-02-18 | 1995-11-28 | International Business Machines Corporation | Method of forming patterned polyimide films |
KR100447552B1 (ko) * | 1999-03-18 | 2004-09-08 | 가부시끼가이샤 도시바 | 수계 분산체 및 반도체 장치의 제조에 사용하는 화학 기계연마용 수계 분산체 및 반도체 장치의 제조 방법 및 매립배선의 형성 방법 |
US7455955B2 (en) * | 2002-02-27 | 2008-11-25 | Brewer Science Inc. | Planarization method for multi-layer lithography processing |
US20050216075A1 (en) * | 2003-04-08 | 2005-09-29 | Xingwu Wang | Materials and devices of enhanced electromagnetic transparency |
WO2005024960A1 (en) * | 2003-09-08 | 2005-03-17 | Group Iv Semiconductor Inc. | Solid state white light emitter and display using same |
FR2913816B1 (fr) * | 2007-03-16 | 2009-06-05 | Commissariat Energie Atomique | Procede de fabrication d'une structure d'interconnexions a cavites pour circuit integre |
-
2007
- 2007-05-04 FR FR0703230A patent/FR2915832B1/fr not_active Expired - Fee Related
-
2008
- 2008-04-28 EP EP08354025.2A patent/EP1988566B1/fr not_active Not-in-force
- 2008-04-30 US US12/149,367 patent/US7846512B2/en not_active Expired - Fee Related
- 2008-05-01 JP JP2008119944A patent/JP2008290230A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4599243A (en) * | 1982-12-23 | 1986-07-08 | International Business Machines Corporation | Use of plasma polymerized organosilicon films in fabrication of lift-off masks |
JPS642008A (en) * | 1987-06-24 | 1989-01-06 | Mitsubishi Electric Corp | Formation of diffraction grating |
JPS6459817A (en) * | 1987-08-31 | 1989-03-07 | Toshiba Corp | Fine processing |
US20070134916A1 (en) * | 2005-12-14 | 2007-06-14 | Shin-Etsu Chemical Co., Ltd. | Antireflection film composition, patterning process and substrate using the same |
Also Published As
Publication number | Publication date |
---|---|
EP1988566A3 (fr) | 2010-08-04 |
EP1988566A2 (fr) | 2008-11-05 |
EP1988566B1 (fr) | 2017-08-02 |
FR2915832A1 (fr) | 2008-11-07 |
US7846512B2 (en) | 2010-12-07 |
US20080274301A1 (en) | 2008-11-06 |
FR2915832B1 (fr) | 2009-07-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102394042B1 (ko) | 사전패터닝된 리소그래피 템플레이트, 상기 템플레이트를 이용한 방사선 패터닝에 기초한 방법 및 상기 템플레이트를 형성하기 위한 방법 | |
US20210013034A1 (en) | Methods for making euv patternable hard masks | |
US6995439B1 (en) | Method of fabricating low dielectric constant dielectric films | |
US7235478B2 (en) | Polymer spacer formation | |
Liu et al. | Integration of block copolymer directed assembly with 193 immersion lithography | |
JP5726693B2 (ja) | 半導体装置の製造方法 | |
TWI338332B (en) | Method for etching a molybdenum layer suitable for photomask fabrication | |
KR102532238B1 (ko) | Euv 레지스트 및 하드 마스크 선택도를 개선하기 위한 패터닝 방식 | |
TWI313394B (en) | Method for photomask plasma etching using a protected mask | |
TW200822185A (en) | Etching of nano-imprint templates using an etch reactor | |
CN105190840A (zh) | 用于多图案化应用的光调谐硬掩模 | |
WO2012048108A2 (en) | Radiation patternable cvd film | |
TWI285919B (en) | Method and apparatus for manufacturing semiconductor | |
JP2009182075A (ja) | インプリントによる構造体の製造方法 | |
JP3506248B2 (ja) | 微小構造の製造方法 | |
JP2009094279A (ja) | ホールパターンの形成方法および半導体装置の製造方法 | |
TW200913011A (en) | Oxygen SACVD to form sacrificial oxide liners in substrate gaps | |
Yasmeen et al. | Atomic layer deposition beyond thin film deposition technology | |
Subramanian et al. | Vapor‐Phase Infiltrated Organic–Inorganic Positive‐Tone Hybrid Photoresist for Extreme UV Lithography | |
US9111875B2 (en) | Pattern formation method | |
CN101295643B (zh) | 通孔刻蚀方法及通孔掩膜 | |
JP2008290230A (ja) | ポリマー層内にパターンを生成するための方法 | |
JP2012174976A (ja) | パターンの形成方法 | |
Wan et al. | Circular Double‐Patterning Lithography Using a Block Copolymer Template and Atomic Layer Deposition | |
JP2007253544A (ja) | インプリント法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110421 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110421 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130507 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130805 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130808 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20140121 |