JP2008287996A - Manufacturing method of organic electroluminescent element, and manufacturing device of the organic electroluminescent element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic electroluminescent element capable of prolonging the lifetime of the organic electroluminescent element, and of reducing the manufacturing cost. <P>SOLUTION: The manufacturing method of the organic electroluminescent element 100 provided with a substrate 12, a laminated structural body having an anode 14, a hole transport layer 16, an organic light-emitting layer 18, an electron transport layer 20, and a cathode 24 formed on the substrate 12, and a sealing film 26, contains an organic light-emitting layer forming process for forming an organic light-emitting layer 18, by discharging a vaporized material toward the substrate from a nozzle arranged at a position with a distance to the substrate of not larger than 15 mm. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method for manufacturing an organic electroluminescent element and an apparatus for manufacturing an organic electroluminescent element.

  An organic electroluminescence device has a configuration in which at least an organic light emitting layer is sandwiched between a cathode and an anode, and excitons (excitons) are generated by injecting electrons and holes into the organic light emitting layer and recombining them. The device emits light by utilizing light emission (fluorescence / phosphorescence) when the exciton is deactivated.

The characteristics of the organic electroluminescence device are that it can emit surface light with a high luminance of about 100 to 100,000 cd / m ² at a low voltage of 10 V or less, and can emit light from blue to red by selecting the type of fluorescent material. That is. For this reason, the organic electroluminescence element is expected to be widely used in displays and lighting devices.

  Organic electroluminescent elements include low molecular organic electroluminescent elements and high molecular organic electroluminescent elements, but low molecular organic electroluminescent elements can be manufactured by vacuum deposition. The use of a solvent is not necessary in the production process as in the case of polymer organic electroluminescence elements, and the characteristics are higher brightness, higher efficiency, and longer life than in the case of polymer organic electroluminescence elements. Have

  However, when a low molecular weight organic electroluminescent device is manufactured using a vacuum deposition method, the lifetime of the organic electroluminescent device is significantly shortened even if a small amount of moisture is present during vacuum deposition. In order to extend the lifetime of the luminescence element, it is necessary to reduce the moisture present during vacuum deposition as much as possible.

Therefore, by making the degree of vacuum in the vacuum deposition apparatus extremely high (for example, 10 ⁻⁸ to 10 ⁻¹⁰ Torr (about 10 ⁻⁸ to 10 ⁻¹⁰ Pa)), the amount of moisture present in the vacuum deposition is thoroughly reduced. A method of manufacturing an organic electroluminescence element that can be reduced to a low level is proposed (for example, see Non-Patent Document 1). Also, the amount of moisture present in the vacuum deposition can be reduced by making the inner wall of the vacuum deposition device extremely flat, or by removing the moisture attached to the inner wall of the vacuum deposition device by heating the inside of the vacuum deposition device with a heater from the outside. A method of manufacturing an organic electroluminescence element that can reduce the above is proposed (for example, see Non-Patent Document 2).

Hideyuki Murata and 5 others, “Enhanced stability of organic light-emitting devices fabricated under ultra-high vacuum conditions”, Chemical Physics Letters ( Chemical Physics Letters), June 7, 2006, 426, USA, 111-114. “Hokuriku Advanced University and Kitano Seiki, organic EL, 5 times longer life, thorough removal of moisture on inner wall”, Nikkei Sangyo Shimbun, April 19, 2007, morning edition 1

  However, in the method for manufacturing an organic electroluminescence element described in Non-Patent Document 1, since it is necessary to use an ultra-high vacuum vacuum deposition apparatus, there is a problem that the manufacturing cost increases. In addition, in the method of manufacturing an organic electroluminescence element described in Non-Patent Document 2, after using a high vacuum vacuum deposition apparatus, the inner wall of the vacuum deposition apparatus is made extremely flat, or the inside of the vacuum deposition apparatus is heated from the outside. However, it is necessary to remove the moisture attached to the inner wall of the vacuum vapor deposition apparatus by heating with the above-mentioned method.

  Therefore, the present invention has been made to solve such a problem, and it is possible to extend the life of the organic electroluminescence element, and to make the manufacturing cost cheaper than before. An object of the present invention is to provide a method for producing a possible organic electroluminescence device. Moreover, it aims at providing the manufacturing apparatus of the organic electroluminescent element which can implement the manufacturing method of such an organic electroluminescent element.

(1) The manufacturing method of the organic electroluminescent element of this invention is a manufacturing method of an organic electroluminescent element provided with a board | substrate and the laminated structure which is formed on the said board | substrate and has an anode, an organic light emitting layer, and a cathode at least. The organic light emitting layer is formed by discharging a vaporized material made of an organic light emitting material from a nozzle disposed at a position where the distance to the substrate is 15 mm or less in a vacuum atmosphere toward the substrate. It includes a forming step.

  For this reason, according to the method for manufacturing an organic electroluminescent element of the present invention, the vaporized material made of the organic light emitting material is discharged toward the substrate from the nozzle disposed at a position where the distance to the substrate is 15 mm or less. The vaporized material discharged from the nozzle reaches the substrate in a high density state, and as a result, the amount of moisture taken into the organic light emitting layer in the manufacturing process can be made extremely low, and the organic electroluminescent device It is possible to extend the service life.

  In addition, according to the method of manufacturing an organic electroluminescence element of the present invention, a high vacuum vacuum deposition apparatus is used, the inner wall of the vacuum deposition apparatus is made extremely flat, or the vacuum deposition apparatus is heated by a heater from the outside to form a vacuum. Since it becomes unnecessary to remove the moisture attached to the inner wall of the vapor deposition apparatus, the manufacturing cost can be made lower than that of the conventional one.

  In addition, according to the method of manufacturing an organic electroluminescence element of the present invention, since a vaporized material made of an organic light emitting material is discharged toward a substrate from a nozzle disposed at a position where the distance to the substrate is 15 mm or less, Thus, it is possible to form an organic light emitting layer in a high yield from a smaller amount of organic light emitting material, and from this point, it can be said that the manufacturing cost can be made lower than in the prior art.

  For this reason, the manufacturing method of the organic electroluminescent element of the present invention can extend the life of the organic electroluminescent element and can reduce the manufacturing cost as compared with the conventional organic electroluminescent element. It becomes the manufacturing method of an element.

  In addition, in the manufacturing method of the organic electroluminescent element of this invention, it is more preferable to discharge a vaporization material toward a board | substrate from the nozzle arrange | positioned in the position where the distance to a board | substrate is 10 mm or less, and the distance to a board | substrate is 5 mm or less. More preferably, the vaporized material is discharged from the nozzle disposed at the position toward the substrate.

(2) In the manufacturing method of the organic electroluminescent element of this invention, it is preferable to perform the said organic light emitting layer formation process in 1 * 10 < ^-3 > Pa-1 * 10 < ^-5 > Pa vacuum atmosphere.

As described above, in the organic electroluminescence element of the present invention, the amount of moisture taken into the organic light emitting layer is reduced by discharging the vaporized material from the nozzle disposed at a position where the distance to the substrate is 15 mm or less toward the substrate. Since it becomes possible to make the level extremely low, a high vacuum vacuum deposition apparatus (for example, an ultrahigh vacuum vacuum deposition apparatus of 5 × 10 ⁻⁸ Pa or higher or a high vacuum vacuum deposition of 5 × 10 ⁻⁵ Pa or higher, for example) For example, a long-life organic light emitting layer can be sufficiently formed under a relatively low vacuum condition of 1 × 10 ⁻³ Pa to 1 × 10 ⁻⁵ Pa, for example.

(3) In the manufacturing method of the organic electroluminescent element of this invention, it is preferable to perform the said organic light emitting layer formation process on the conditions which heated the said nozzle to the temperature which vaporization material does not reattach to the said nozzle.

  By adopting such a method, the vaporized material does not adhere again at the tip portion of the nozzle, so that the vaporized material discharged from the nozzle reaches the substrate in a high density state. As a result, the amount of moisture taken into the organic light emitting layer during the manufacturing process can be made extremely low, and the lifetime of the organic electroluminescence element can be extended. Further, since clogging of the nozzle is eliminated, maintenance in the organic electroluminescence element manufacturing apparatus is facilitated.

  From the same point of view, it is preferable to heat the communicating portion from the vaporization source for vaporizing the organic light emitting material to the nozzle to a temperature at which the vaporized material does not adhere again.

  The temperature at which the vaporized material does not reattach varies depending on the type of the organic light emitting material, but is generally in the range of 150 ° C to 400 ° C.

(4) In the manufacturing method of the organic electroluminescent element of this invention, it is preferable to perform the said organic light emitting layer formation process, moving the said board | substrate.

  By adopting such a method, it is possible to shorten the time that the substrate receives the radiant heat from the nozzle, and thus it is possible to suppress the deterioration of the substrate due to the temperature rise of the substrate.

  The moving speed of the substrate varies depending on the temperature of the nozzle, the distance from the nozzle to the substrate, the material of the substrate, the film thickness of the organic light emitting layer, the forming speed of the organic light emitting layer, etc., but is 0.1 m / s to 10 m / s. Preferably, it is in the range of 0.3 m / s to 3 m / s.

(5) In the manufacturing method of the organic electroluminescent element of this invention, it is preferable to perform the said organic light emitting layer formation process, cooling the said board | substrate.

  By adopting such a method, it becomes possible to suppress the deterioration of the substrate due to the temperature rise of the substrate.

(6) In the manufacturing method of the organic electroluminescent element of the present invention, the stacked structure is a stacked structure further including an organic layer other than the organic light emitting layer, and the distance to the substrate is 15 mm or less. It is preferable that the method further includes another organic layer forming step of forming the other organic layer by discharging a vaporized material made of an organic material other than the organic light emitting material from the other nozzle disposed in the substrate toward the substrate.

  By adopting such a method, the amount of moisture taken into another organic layer in the manufacturing process by discharging the vaporized material from another nozzle disposed at a position of 15 mm or less to the substrate toward the substrate. Therefore, the lifetime of the organic electroluminescence element can be further extended.

  As another organic layer, a positive hole transport layer, an electron carrying layer, a positive hole injection layer, an electron injection layer, etc. can be illustrated preferably.

  In addition, the other organic layer may be one or plural. Moreover, the order which performs an organic light emitting layer formation process and another organic layer formation process depends on the kind of other organic layer. For example, when the other organic layers are a hole transport layer and an electron transport layer, another organic layer formation step (hole transport layer formation step), an organic light emitting layer formation step, another organic layer formation step (electrons) Transport layer forming step).

(7) In the manufacturing method of the organic electroluminescent element of the present invention, the laminated structure is a laminated structure further including an inorganic layer, and a vaporized material made of an inorganic material is attached to the substrate by a vacuum deposition method. And an organic layer forming step for forming the inorganic layer, and a cathode forming step for forming the cathode by attaching a vaporized material made of a material constituting the cathode to the substrate by a vacuum deposition method, The light emitting layer forming step, the other organic layer forming step, the inorganic layer forming step, and the cathode forming step are preferably performed in the same vacuum apparatus.

  For this reason, according to the manufacturing method of the organic electroluminescent element of this invention, it is supposed that an organic light emitting layer formation process, another organic layer formation process, an inorganic layer formation process, and a cathode formation process are performed in the same vacuum apparatus. Therefore, the amount of moisture taken into the laminated structure during the manufacturing process can be made extremely low, and the life of the organic electroluminescence element can be extended.

  As an inorganic layer, a positive hole injection layer, an electron injection layer, etc. can be illustrated preferably.

(8) In the manufacturing method of the organic electroluminescent element of this invention, the said organic electroluminescent element is an organic electroluminescent element further provided with the sealing layer formed so that the said laminated structure might be covered on the said board | substrate. The method further includes a sealing layer forming step of forming the sealing layer by polymerizing a raw material monomer on the substrate by a vapor deposition polymerization method, the organic light emitting layer forming step, the other organic layer forming step, the inorganic The layer forming step, the cathode forming step, and the sealing layer forming step are preferably performed in the same vacuum apparatus.

  For this reason, according to the method for manufacturing an organic electroluminescent element of the present invention, the laminated structure can be covered with a sealing layer having a good sealing performance formed by vapor deposition polymerization. It becomes possible to make the amount of moisture that permeates into the laminated structure after manufacture extremely low, and it is possible to extend the life of the organic electroluminescence element.

  In addition, according to the method for manufacturing an organic electroluminescent element of the present invention, the organic light emitting layer forming step, the other organic layer forming step, the inorganic layer forming step, the cathode forming step, and the sealing layer forming step are performed in the same vacuum apparatus. Therefore, the amount of moisture taken into the organic electroluminescence element during the manufacturing process can be made extremely low, and the life of the organic electroluminescence element can be extended.

(9) In the method for manufacturing an organic electroluminescence element of the present invention, a flexible substrate is used as the substrate, and the organic light emitting layer forming step, the others are performed while moving the substrate along a rotation direction on a rotating drum. It is preferable to perform the organic layer forming step, the inorganic layer forming step, the cathode forming step, and the sealing layer forming step.

  For this reason, according to the manufacturing method of the organic electroluminescent element of this invention, it becomes possible to manufacture an organic electroluminescent element on a flexible substrate with high productivity.

(10) An apparatus for manufacturing an organic electroluminescent element of the present invention is for manufacturing an organic electroluminescent element comprising a substrate and a laminated structure formed on the substrate and having at least an anode, an organic light emitting layer, and a cathode. An apparatus for manufacturing an organic electroluminescence device, comprising: a vacuum chamber; a substrate transport mechanism that is disposed in the vacuum chamber and transports the substrate; and a distance to the substrate in the vacuum chamber is 15 mm or less. And a nozzle having a function of discharging a vaporized material made of an organic light emitting material toward the substrate.

  For this reason, according to the apparatus for manufacturing an organic electroluminescence element of the present invention, it is possible to discharge a vaporized material made of an organic light emitting material toward a substrate from a nozzle disposed at a position where the distance to the substrate is 15 mm or less. Therefore, the vaporized material discharged from the nozzle reaches the substrate in a high density state, and as a result, the amount of moisture taken into the organic light emitting layer during the manufacturing process can be reduced to an extremely low level. It is possible to extend the life of the element.

Moreover, according to the organic electroluminescent element manufacturing apparatus of the present invention, a high vacuum is not required (for example, a relatively low vacuum of about 1 × 10 ⁻³ Pa to 1 × 10 ⁻⁵ Pa is sufficient). In addition to this, it is not necessary to provide a mechanism for making the inner wall of the vacuum vapor deposition apparatus extremely flat or heating the inside of the vacuum vapor deposition apparatus with a heater to remove moisture attached to the inner wall of the vacuum vapor deposition apparatus. Thus, it becomes possible to make the manufacturing cost cheaper than the conventional one.

  Further, according to the apparatus for manufacturing an organic electroluminescent element of the present invention, it is possible to discharge a vaporized material made of an organic light emitting material toward a substrate from a nozzle disposed at a position where the distance to the substrate is 15 mm or less. Thus, it is possible to form an organic light emitting layer with a higher yield from a smaller amount of organic light emitting material than in the past, and from this point, it can be said that the manufacturing cost can be made lower than in the prior art.

  For this reason, the organic electroluminescent element manufacturing apparatus of the present invention can extend the life of the organic electroluminescent element, and can reduce the manufacturing cost as compared with the conventional organic electroluminescent element. It becomes an element manufacturing apparatus.

  Moreover, according to the manufacturing apparatus of the organic electroluminescent element of this invention, since a board | substrate conveyance mechanism is provided, it becomes possible to perform an organic light emitting layer formation process, moving a board | substrate. For this reason, since it becomes possible to shorten the time which a board | substrate receives the radiant heat from a nozzle, it becomes possible to suppress degradation of the board | substrate resulting from the temperature rise of a board | substrate.

(11) In the organic electroluminescent element manufacturing apparatus of the present invention, it is preferable to further include a nozzle heating mechanism that heats the nozzle to a temperature at which the vaporized material does not reattach to the nozzle.

  With this configuration, the vaporized material does not re-adhere at the tip portion of the nozzle, so that the vaporized material discharged from the nozzle reaches the substrate in a high density state. As a result, the amount of moisture taken into the organic light emitting layer during the manufacturing process can be made extremely low, and the lifetime of the organic electroluminescence element can be extended. Further, since clogging of the nozzle is eliminated, maintenance in the organic electroluminescence element manufacturing apparatus is facilitated.

  From the same viewpoint, it is preferable to further include a heating mechanism that heats the communicating portion from the vaporization source that vaporizes the organic light emitting material to the nozzle to a temperature at which the vaporized material does not reattach.

(12) In the organic electroluminescence element manufacturing apparatus of the present invention, the stacked structure is a stacked structure that further includes an organic layer other than the organic light emitting layer, and includes the layers up to the substrate in the vacuum chamber. It is preferable to further include another nozzle having a function of discharging a vaporized material made of an organic material other than the organic light emitting material toward the substrate at a distance of 15 mm or less.

  By configuring in this way, the amount of moisture taken into other organic layers in the manufacturing process can be reduced by discharging the vaporized material from another nozzle disposed at a position of 15 mm or less to the substrate toward the substrate. Therefore, the lifetime of the organic electroluminescence element can be further extended.

(13) In the apparatus for manufacturing an organic electroluminescence element of the present invention, the laminated structure is a laminated structure further including an inorganic layer, and is disposed in the vacuum chamber and vaporized from an inorganic material by a vacuum deposition method. By attaching a material to the substrate, a vapor deposition mechanism for forming the inorganic layer and a vaporized material disposed in the vacuum chamber and constituting a cathode by a vacuum deposition method are attached to the substrate. It is preferable to further include another vacuum deposition mechanism for forming the cathode.

  For this reason, according to the apparatus for manufacturing an organic electroluminescent element of the present invention, the organic light emitting layer forming step, the other organic layer forming step, the inorganic layer forming step, and the cathode forming step can be performed in the same vacuum apparatus. Therefore, the amount of moisture taken into the laminated structure during the manufacturing process can be made extremely low, and the life of the organic electroluminescence element can be further extended.

(14) In the organic electroluminescent element manufacturing apparatus of the present invention, the organic electroluminescent element is an organic electroluminescent element further including a sealing layer formed on the substrate so as to cover the stacked structure. It is preferable to further include a vapor deposition polymerization mechanism which is disposed in the vacuum chamber and forms the sealing layer by polymerizing a raw material monomer on the substrate by a vapor deposition polymerization method.

  For this reason, according to the organic electroluminescent element manufacturing apparatus of the present invention, the laminated structure can be covered with a sealing layer having a good sealing performance formed by vapor deposition polymerization. It becomes possible to make the amount of moisture permeating into the laminated structure after production extremely low, and to further extend the life of the organic electroluminescence element.

  Moreover, according to the organic electroluminescent element manufacturing apparatus of the present invention, the organic light emitting layer forming process, the other organic layer forming process, the inorganic layer forming process, the cathode forming process, and the sealing layer forming process are performed in the same vacuum apparatus. Therefore, the amount of moisture taken into the organic electroluminescence element during the manufacturing process can be made extremely low, and the lifetime of the organic electroluminescence element can be further extended.

(15) In the organic electroluminescent element manufacturing apparatus of the present invention, the substrate is a flexible substrate, and the substrate transport mechanism includes a feeding roller for unwinding the substrate, a take-up roller for winding the substrate, A rotating drum disposed in a substrate transport path and rotating as the substrate is transported, wherein the nozzle vaporizes toward the substrate transported on the surface of the rotating drum. It is preferable to be configured to discharge material.

  For this reason, according to the manufacturing apparatus of the organic electroluminescent element of this invention, it becomes possible to manufacture an organic electroluminescent element on a flexible substrate with high productivity.

(16) In the organic electroluminescent element manufacturing apparatus of the present invention, it is preferable that a cooling mechanism for cooling the surface of the rotating drum is installed inside the rotating drum.

  By comprising in this way, it becomes possible to suppress the deterioration of the board | substrate resulting from the temperature rise of the board | substrate conveyed on the surface of a rotating drum.

(17) In the organic electroluminescence device manufacturing apparatus of the present invention, in the vicinity of the nozzle, in the vicinity of the other nozzle, in the vicinity of the vacuum deposition mechanism, in the vicinity of the other vacuum deposition mechanism, and in the vicinity of the deposition polymerization mechanism. It is preferable to further include an operation exhaust mechanism that sets each of the above to a predetermined vacuum atmosphere.

  By comprising in this way, an organic light emitting layer formation process, another organic layer (for example, hole transport layer, electron transport layer) formation process, an inorganic layer (for example, electron injection layer) formation process, a cathode formation process In addition, each of the sealing layer forming step can be performed in an optimum vacuum atmosphere.

  Hereinafter, the manufacturing method of the organic electroluminescent element of this invention and the manufacturing apparatus of an organic electroluminescent element are demonstrated based on embodiment shown in a figure.

[Embodiment 1]
FIG. 1 is a cross-sectional view showing an organic electroluminescence element 10. FIG. 2 is a cross-sectional view illustrating the organic electroluminescence element manufacturing apparatus 100 according to the first embodiment. FIG. 3 is a flowchart illustrating the method for manufacturing the organic electroluminescence element according to the first embodiment.

  The manufacturing method of the organic electroluminescent element which concerns on Embodiment 1 is a manufacturing method for manufacturing the organic electroluminescent element 10 shown in FIG.

1. Organic electroluminescence device 10
As shown in FIG. 1, the organic electroluminescence element 10 is formed on a substrate 12 and the substrate 12, and includes an anode 14, a hole transport layer (other organic layer) 16, an organic light emitting layer 18, an electron transport layer (others). The organic electroluminescent element 10 for a lighting device includes a laminated structure having an organic layer) 20, an electron injection layer (inorganic layer) 22 and a cathode 24, and a sealing layer 26 covering the laminated structure.

  The substrate 12 is made of a quartz glass film having a thickness of 100 μm, a width of 2 mm, and a length of several tens of meters. The anode 14 is made of ITO (indium tin oxide) having a thickness of 200 nm. The hole transport layer 16 is made of CuPC (copper phthalocyanine) having a thickness of 10 nm. The organic light emitting layer 18 is made of α-NPD (bis [N- (1-naphthyl) -N-phenyl] benzidine) having a thickness of 50 nm. The electron transport layer 20 is made of Alq3 (8-hydroxyquinoline aluminum complex) having a film thickness of 65 nm. The electron injection layer 22 is made of LiF (lithium fluoride) having a thickness of 0.5 nm. The cathode 24 is made of Al (aluminum) having a thickness of 80 nm. The sealing layer 26 is made of PU (polyurea) having a thickness of 1000 nm.

  In the method for manufacturing an organic electroluminescence element according to the first embodiment, the organic electroluminescence element manufacturing apparatus 100 according to the first embodiment shown in FIG. Then, the hole transport layer 16, the organic light emitting layer 18, the electron transport layer 20, the electron injection layer 22, the cathode 24 and the sealing layer 26 are sequentially formed to manufacture the organic electroluminescent device 10.

2. Organic electroluminescent device manufacturing apparatus 100 according to Embodiment 1
As shown in FIG. 2, the organic electroluminescence element manufacturing apparatus 100 according to Embodiment 1 is disposed in a vacuum chamber 110, a substrate transfer mechanism disposed in the vacuum chamber 110, and a first vacuum deposition chamber 124. The first vacuum deposition mechanism 140, the second vacuum deposition mechanism 150, the third vacuum deposition mechanism 160, the fourth vacuum deposition mechanism 170 and the fifth vacuum deposition mechanism 172 disposed in the second vacuum deposition chamber 126, and the deposition polymerization chamber. And a vapor deposition polymerization mechanism 174 disposed at 128.

  The vacuum chamber 110 includes a substrate feeding / winding chamber 122, a first vacuum vapor deposition chamber 124, a second vacuum vapor deposition chamber 126, a vapor deposition polymerization chamber 128, partition walls 112, 114, 116, a differential exhaust mechanism 118, 120.

  The substrate moving mechanism is fed out by a feeding roller 130, rollers 132 and 136 and a winding roller 138 disposed in the substrate feeding / winding chamber 122, and a rotating drum 134 partially exposed in the substrate feeding / winding chamber 122. And a peeling roller (not shown) for peeling the protective film from the flexible substrate W. A cooling mechanism (not shown) that cools the surface of the rotating drum 134 is installed inside the rotating drum 134.

  The first vacuum evaporation mechanism 140 is a vacuum evaporation mechanism for forming the hole transport layer 16, and includes a vaporization part 142, a communication part 144, and a nozzle 146. The second vacuum evaporation mechanism 150 is a vacuum evaporation mechanism for forming the organic light emitting layer 18, and includes a vaporization unit 152, a communication unit 154, and a nozzle 156. The third vacuum deposition mechanism 160 is a vacuum deposition mechanism for forming the electron transport layer 20 and includes a vaporization unit 162, a communication unit 164, and a nozzle 166.

  The nozzles 146, 156, 166 are installed in the vicinity of the rotating drum 134. The nozzles 146, 156, and 166 are installed at positions where the distance between the nozzle tip and the rotary drum 134 is 3 mm.

  The nozzles 146, 156, and 166 have a rectangular tip having a length of 10 mm along the direction of movement of the flexible substrate W and a width of 2 mm along the direction orthogonal to the direction of movement of the flexible substrate W. Part.

  The nozzles 146, 156, and 166 are configured to discharge the vaporized material toward the flexible substrate W that is transported on the rotary drum 134 along the rotation direction.

  The first vacuum evaporation mechanism 140 has a heating function such as a nozzle that heats the communication portion 144 and the nozzle 146 to a temperature at which the vaporized material does not adhere again. The second vacuum deposition mechanism 150 also has a heating function such as a nozzle that heats the communicating portion 154 and the nozzle 156 to a temperature at which the vaporized material does not reattach. The third vacuum vapor deposition mechanism 160 has a heating function such as a nozzle that heats the communicating portion 164 and the nozzle 166 to a temperature at which the vaporized material does not adhere again.

  In addition, the first vacuum deposition mechanism 140, the second vacuum deposition mechanism 150, and the third vacuum deposition mechanism 160 are configured so that the thicknesses of the hole transport layer, the organic light emitting layer, and the electron transport layer are within a predetermined range. It has a function of adjusting the heating temperature of the vaporized material in the vaporization units 142, 152, and 162, and hence the vaporization amount of the vaporized material.

  The fourth vacuum deposition mechanism 170 is a vacuum deposition mechanism for forming the electron injection layer (inorganic layer) 22. The fifth vacuum evaporation mechanism 172 is a vacuum evaporation mechanism for forming the cathode 24. A partition 114 is provided between the fourth vacuum deposition mechanism 170 and the fifth vacuum deposition mechanism 172, and the electron injection layer 22 and the cathode 24 are formed in order.

  The vapor deposition polymerization mechanism 174 includes an aliphatic diamine monomer vaporization unit 176 and an aliphatic isocyanate monomer vaporization unit 178. The aliphatic diamine monomer and the aliphatic isocyanate monomer are polymerized on the flexible substrate W to form PU on the flexible substrate W. A sealing layer 26 made of (polyurea) is formed.

  A partition 112 is installed between the substrate feeding / winding chamber 122 and the first vacuum deposition chamber 124, and a partition 116 is installed between the substrate feeding / winding chamber 122 and the deposition polymerization chamber 128. A first differential evacuation unit 118 is installed between the first vacuum deposition chamber 124 and the second vacuum deposition chamber 126, and a second differential evacuation is provided between the second vacuum deposition chamber 126 and the deposition polymerization chamber 128. Part 120 is installed. The substrate feeding / winding chamber 122, the first vacuum vapor deposition chamber 124, the second vacuum vapor deposition chamber 126, and the vapor deposition polymerization chamber 128 are each controlled to have an optimum vacuum atmosphere.

3. Method for Producing Organic Electroluminescent Device According to Embodiment 1 As shown in FIG. 3, the method for producing an organic electroluminescent device according to Embodiment 1 includes a flexible substrate preparation step, a hole transport layer forming step (another organic layer) Forming step), organic light emitting layer forming step, electron transport layer forming step (other organic layer forming step), electron injection layer forming step (inorganic layer forming step), cathode forming step, and sealing layer forming step. Including.

  In the method for manufacturing an organic electroluminescence element according to Embodiment 1, the hole transport layer forming step, the organic light emitting layer forming step, and the electron transport layer forming step are performed in the first vacuum deposition chamber 124 as shown in FIG. In the second vacuum vapor deposition chamber 126, an electron injection forming step and a cathode forming step are performed, and in the vapor deposition polymerization chamber 128, a sealing layer forming step is performed.

  In the hole transport layer forming step, a vaporized material made of an organic material constituting the hole transport layer 16 is discharged toward the flexible substrate W from the nozzle 146 arranged at a position where the distance to the flexible substrate W is 3 mm. Then, the hole transport layer 16 is formed.

  In the organic light emitting layer forming step, the organic light emitting layer 18 is formed by discharging a vaporized material made of an organic light emitting material toward the flexible substrate W from a nozzle 156 disposed at a position 3 mm away from the flexible substrate W. .

  In the electron transport forming step, electron transport is performed by discharging a vaporized material made of an organic material constituting the electron transport layer 20 from the nozzle 166 disposed at a distance of 3 mm to the flexible substrate W toward the flexible substrate W. Layer 20 is formed.

  In the electron injection layer forming step, the electron injection layer 22 is formed by attaching a vaporized material made of an inorganic material constituting the electron injection layer 22 to the flexible substrate W by a vacuum deposition method.

  In the cathode formation step, the cathode 24 is formed by attaching a vaporized material made of a material constituting the cathode 24 to the flexible substrate W by a vacuum deposition method.

  In the sealing layer formation step, the sealing layer 26 is formed by polymerizing the raw material monomer on the flexible substrate W by vapor deposition polymerization.

The hole transport layer forming step, the organic light emitting layer forming step, and the electron transport layer forming step are each performed in a vacuum atmosphere of 1 × 10 ⁻³ Pa to 1 × 10 ⁻⁵ Pa.

  The hole transport layer forming step, the organic light emitting layer forming step, and the electron transport layer forming step are each performed under conditions in which the nozzles 146, 156, and 166 are heated to a temperature at which the vaporized material does not reattach.

  In the hole transport layer forming step, the organic light emitting layer forming step, the electron transport layer forming step, the electron injection layer forming step, the cathode forming step, and the sealing layer forming step, the flexible substrate W is rotated along the rotation direction on the rotating drum 134. To move.

  The hole transport layer forming step, the organic light emitting layer forming step, the electron transport layer forming step, the electron injection layer forming step, the cathode forming step and the sealing layer forming step are each performed while cooling the flexible substrate W.

  In the method for manufacturing an organic electroluminescent element according to the first embodiment, the organic electroluminescent element manufacturing apparatus 100 includes vaporizations from the first vacuum vapor deposition mechanism 140, the second vacuum vapor deposition mechanism 150, and the third vacuum vapor deposition mechanism 160, respectively. By controlling the discharge speed of the material (for example, controlling the heating temperature of the vaporized molecules in the vaporization unit 142, the heating temperature of the vaporized molecules in the vaporization unit 152, and the heating temperature of the vaporized molecules in the vaporization unit 162), flexible. By controlling the transport speed of the substrate W, it has a function of controlling the film thicknesses of the hole transport layer 16, the organic light emitting layer 18 and the electron transport layer 20 within an appropriate range.

4). Effects of Manufacturing Method of Organic Electroluminescence Element According to Embodiment 1 According to the manufacturing method of the organic electroluminescence element according to Embodiment 1, from the nozzles 146, 156, 166 arranged at a position where the distance to the flexible substrate W is 3 mm. Since the vaporized material is discharged toward the flexible substrate W, the vaporized material discharged from the nozzles 146, 156 and 166 arrives at the flexible substrate W in a high density state. The amount of moisture taken into the transport layer 16, the organic light emitting layer 18 and the electron transport layer 20 can be made extremely low, and the lifetime of the organic electroluminescence element can be extended.

  Moreover, according to the manufacturing method of the organic electroluminescence element according to Embodiment 1, a high vacuum vacuum deposition apparatus is used, the inner wall of the vacuum deposition apparatus is made extremely flat, or the inside of the vacuum deposition apparatus is heated by a heater from the outside. Therefore, it is not necessary to remove the moisture attached to the inner wall of the vacuum vapor deposition apparatus, so that the manufacturing cost can be reduced as compared with the prior art.

  Moreover, according to the manufacturing method of the organic electroluminescent element which concerns on Embodiment 1, the vaporization material is discharged toward the flexible substrate W from the nozzles 146,156,166 arrange | positioned in the position whose distance to the flexible substrate W is 3 mm. Therefore, the hole transport layer 16, the organic light emitting layer 18 and the electron transport layer 20 are formed in a high yield from a smaller amount of materials (hole transport layer material, organic light emitting material and electron transport layer material) than in the past. In this respect, it can be said that the manufacturing cost can be made lower than that in the prior art.

  For this reason, the manufacturing method of the organic electroluminescent element according to Embodiment 1 can increase the lifetime of the organic electroluminescent element, and can reduce the manufacturing cost compared to the conventional one. It becomes a manufacturing method of an electroluminescent element.

Moreover, according to the manufacturing method of the organic electroluminescent element which concerns on Embodiment 1, long-life organic light emitting layer is formed on the conditions of comparatively low vacuum of 1 * 10 < ^-3 > Pa-1 * 10 < ^-5 > Pa, for example. Is fully possible.

  In addition, according to the method for manufacturing the organic electroluminescence element according to the first embodiment, the hole transport layer is formed under the condition that the nozzles 146, 156, 166 are heated to a temperature at which the vaporized material does not reattach to the nozzles 146, 156, 166. Since the step, the organic light emitting layer forming step, and the electron transport layer forming step are performed, the vaporized material does not reattach at the tip portions of the nozzles 146, 156, 166, and is discharged from the nozzles 146, 156, 166. The vaporized material arrives at the flexible substrate W in a high density state. As a result, the amount of moisture taken into the hole transport layer 16, the organic light emitting layer 18 and the electron transport layer 20 in the manufacturing process can be made extremely low, and the life of the organic electroluminescence device can be further extended. It becomes possible. Further, since the nozzles 146, 156, and 166 are not clogged, maintenance in the organic electroluminescence element manufacturing apparatus is facilitated.

  Moreover, according to the manufacturing method of the organic electroluminescent element which concerns on Embodiment 1, since it is going to perform a positive hole transport layer formation process, an organic light emitting layer formation process, and an electron carrying layer formation process, moving the flexible substrate W, The time during which the flexible substrate W receives the radiant heat from the nozzles 146, 156, 166 can be shortened, and deterioration of the flexible substrate W due to the temperature rise of the flexible substrate W can be suppressed.

  Moreover, according to the manufacturing method of the organic electroluminescent element which concerns on Embodiment 1, a positive hole transport layer formation process, an organic light emitting layer formation process, an electron carrying layer formation process, an electron injection layer formation process, a cathode formation, cooling a board | substrate. Since the process and the sealing layer forming process are performed, it is possible to suppress the deterioration of the flexible substrate W due to the temperature rise of the flexible substrate W.

  Moreover, according to the manufacturing method of the organic electroluminescent element which concerns on Embodiment 1, since it becomes possible to cover a laminated structure with the sealing layer 26 with favorable sealing performance formed by the vapor deposition polymerization method, organic electroluminescence is possible. It is possible to reduce the amount of moisture that enters the laminated structure after manufacturing the device to an extremely low level, and it is possible to extend the life of the organic electroluminescence device.

  Moreover, according to the manufacturing method of the organic electroluminescent element which concerns on Embodiment 1, an organic light emitting layer formation process, another organic layer formation process, an inorganic layer formation process, a cathode formation process, and a sealing layer formation process are the same vacuum apparatus. Since it is performed in the (vacuum chamber 110), the amount of moisture taken into the organic electroluminescence element during the manufacturing process can be made extremely low, and the life of the organic electroluminescence element can be extended. It becomes.

  Moreover, according to the manufacturing method of the organic electroluminescent element which concerns on Embodiment 1, while moving the flexible substrate W along the rotation direction on the rotating drum 134, a positive hole transport layer formation process, an organic light emitting layer formation process, an electron Since the transport layer forming step, the inorganic layer forming step, the cathode forming step, and the sealing layer forming step are performed, the organic electroluminescence element can be manufactured on the flexible substrate W with high productivity.

5. Effect of Organic Electroluminescence Element Manufacturing Apparatus 100 According to Embodiment 1 According to the organic electroluminescence element manufacturing apparatus 100 according to Embodiment 1, the nozzles 146, 156 arranged at a position where the distance to the flexible substrate W is 3 mm. Since the vaporized material can be discharged from the nozzle 166 toward the flexible substrate W, the vaporized material discharged from the nozzles 146, 156, and 166 arrives at the flexible substrate W in a high density state. In the process, the amount of moisture taken into the hole transport layer 16, the organic light emitting layer 18, and the electron transport layer 20 can be reduced to an extremely small level, and the life of the organic electroluminescence element can be extended.

In addition, according to the organic electroluminescent element manufacturing apparatus 100 according to the first embodiment, a relatively high vacuum is not necessary (for example, a relatively low vacuum of about 1 × 10 ⁻³ Pa to 1 × 10 ⁻⁵ Pa is sufficient). In addition, there is no need to provide a mechanism that makes the inner wall of the vacuum deposition device extremely flat, or removes moisture attached to the inner wall of the vacuum deposition device by heating the inside of the vacuum deposition device with a heater from the outside. Therefore, the manufacturing cost can be made cheaper than before.

  In addition, according to the organic electroluminescence element manufacturing apparatus 100 according to the first embodiment, the vaporized material is discharged toward the flexible substrate W from the nozzles 146, 156, 166 disposed at a position where the distance to the flexible substrate W is 3 mm. Therefore, the hole transport layer 16, the organic light emitting layer 18 and the electron transport layer can be produced in a high yield from a smaller amount of material (a material for the hole transport layer, a material for the organic light emitting material and a material for the electron transport layer) than in the past. 20 can be formed, and from this point, it can be said that the manufacturing cost can be made lower than the conventional one.

  For this reason, the organic electroluminescent element manufacturing apparatus 100 according to Embodiment 1 can extend the life of the organic electroluminescent element, and can reduce the manufacturing cost as compared with the related art. It becomes an apparatus for manufacturing an organic electroluminescence element.

  In addition, according to the organic electroluminescent element manufacturing apparatus 100 according to the first embodiment, since the substrate transport mechanism is provided, the hole transport layer forming step, the organic light emitting layer forming step, and the electron transport layer forming are performed while moving the flexible substrate W. It becomes possible to perform a process. For this reason, since it becomes possible to shorten the time which the flexible substrate W receives the radiant heat from the nozzles 146, 156, 166, it is possible to suppress the deterioration of the flexible substrate W due to the temperature rise of the flexible substrate W. Become.

  In addition, according to the organic electroluminescence element manufacturing apparatus 100 according to the first embodiment, the nozzles 146, 156, and 166 are further provided with a nozzle heating function that heats the nozzles 146, 156, and 166 to a temperature at which the vaporized material does not adhere again. Thus, the vaporized material does not re-adhere at the tip portion, and the vaporized material discharged from the nozzles 146, 156, 166 arrives at the flexible substrate W in a high density state. As a result, the amount of moisture taken into the hole transport layer 16, the organic light emitting layer 18 and the electron transport layer 20 in the manufacturing process can be made extremely low, and the life of the organic electroluminescence device can be extended. It becomes. Further, since the nozzles 146, 156, and 166 are not clogged, maintenance in the organic electroluminescence element manufacturing apparatus is facilitated.

  Moreover, according to the manufacturing apparatus 100 of the organic electroluminescence element according to the first embodiment, the organic electroluminescence element manufacturing apparatus 100 further includes the vapor deposition polymerization mechanism 174 that forms the sealing layer 26 on the flexible substrate W by the vapor deposition polymerization method. The laminated structure can be covered with the sealing layer 26 having good sealing performance. For this reason, it becomes possible to make the amount of moisture permeating into the laminated structure after manufacturing the organic electroluminescent element extremely low, and to extend the life of the organic electroluminescent element.

  Moreover, according to the manufacturing apparatus 100 of the organic electroluminescent element which concerns on Embodiment 1, a positive hole transport layer formation process, an organic light emitting layer formation process, an electron carrying layer formation process, an electron injection layer formation process, a cathode formation process, and sealing Since the layer formation process can be performed in the same vacuum apparatus (vacuum chamber 110), the amount of moisture taken into the laminated structure or the organic electroluminescence element in the manufacturing process can be reduced to an extremely low level. In addition, it is possible to extend the life of the organic electroluminescence element.

  Moreover, according to the manufacturing apparatus 100 of the organic electroluminescence element according to the first embodiment, the feeding roller 130 that feeds out the flexible substrate W, the winding roller 138 that winds up the flexible substrate W, and the conveyance path of the flexible substrate W are arranged. And a rotating drum 134 that rotates as the flexible substrate W is transported, and the nozzles 146, 156, and 166 vaporize toward the flexible substrate W that is transported on the surface of the rotating drum 134. Since the material is discharged, the organic electroluminescence element can be manufactured on the flexible substrate W with high productivity.

  In addition, according to the organic electroluminescent element manufacturing apparatus 100 according to the first embodiment, since the cooling mechanism for cooling the surface of the rotating drum 134 is installed inside the rotating drum 134, It is possible to suppress the deterioration of the flexible substrate W due to the temperature rise of the flexible substrate W being conveyed.

  In addition, according to the organic electroluminescent element manufacturing apparatus 100 according to the first embodiment, the operation exhaust mechanism that sets each of the first vacuum vapor deposition chamber 124, the second vacuum vapor deposition chamber 126, and the vapor deposition polymerization chamber 128 to a predetermined vacuum atmosphere. 118, 120 are further provided, and each of the hole transport layer forming step, the organic light emitting layer forming step, the electron transport layer forming step, the electron injection layer forming step, the cathode forming step, and the sealing layer forming step is performed in an optimum vacuum atmosphere. Can be performed.

  In adopting the configuration of the organic electroluminescent element manufacturing method according to the first embodiment and the configuration of the organic electroluminescent element manufacturing apparatus 100 according to the first embodiment, the results of the following simulation experimental examples 1 and 2 were referred to. .

[Simulation Experiment Example 1]
In the simulation experiment example 1, even when a relatively low vacuum vacuum deposition apparatus (vacuum degree: 1 × 10 ⁻⁴ Pa) is used, the distance r from the vaporization source to the substrate is small (for example, 5 mm). This is an experimental example showing that it is possible to extend the life of the organic electroluminescence element by performing vacuum deposition.

  FIG. 4 is a diagram for explaining the relationship between the distance r from the vaporization source to the substrate and the collision frequency Zmonomer of vaporized molecules to the substrate in the vacuum deposition method. 4A is a diagram showing the positional relationship between the vaporization source and the substrate, and FIG. 4B is a diagram showing the relationship between the distance r from the vaporization source to the substrate and the collision frequency Zmonomer of the vaporized molecule to the substrate. It is.

  First, it is assumed that the vaporization source and the substrate are in a positional relationship as shown in FIG. At this time, the collision frequency Zmonomer of the vaporized molecule to the substrate is expressed by the following formula (1).

Zmonomer = S · Mv / 4πr ² (1)

Here, S represents a vaporization area [m ² ] in the vaporization source, Mv represents a vaporization rate [molecules / m ² s], and r represents a distance [m] from the vaporization source to the substrate.

FIG. 4B shows the vaporization source to the substrate when the vaporization area S in the vaporization source is 1 [cm ² ] and the vaporization rate Mv is 10 ²¹ [molecules / m ² s] in the equation (1). It is a figure which shows the relationship between the distance r of and the collision frequency Zmonomer of the vaporization molecule | numerator to the board | substrate. As is clear from FIG. 4B, it can be seen that the collision frequency Zmonomer of the vaporized molecule to the substrate increases as the distance r from the vaporization source to the substrate decreases.

On the other hand, the collision frequency Z _H2O of water molecules with the substrate is expressed by the following equation (2).

Z _H2O = 2.6 × 10 ²⁴ P _H2O / (MT) ^1/2 (2)

Here, P _H2O represents the partial pressure [Pa] of water, M represents the molecular weight of the vaporized molecule, and T represents the absolute temperature [K].

As is clear from equation (2), the collision frequency Z _H2O of water molecules with the substrate decreases as the partial pressure P _H2O (or the degree of vacuum) of water decreases. It can be seen that the distance r does not change even if the distance r is reduced.

Therefore, considering the equations (1) and (2) together, if the vacuum deposition is performed under the condition that the distance r from the vaporization source to the substrate is reduced, the collision frequency Z _H2O of the water molecule to the substrate is Since it is possible to increase only the collision frequency (Zmonomer) of vaporized molecules to the substrate without changing, the ratio of water molecules taken in even without vacuum deposition using an ultra-high vacuum vacuum deposition device It can be seen that can be reduced.

5, the distance r from the vaporization source to the substrate is a view for explaining the relationship between the ratio of the collision frequency Z _{H2 O} to a substrate water molecules for collision frequency Zmonomer to the substrate vaporized molecules. FIG. 5A is a diagram showing the relationship when the distance r from the vaporization source to the substrate is taken from 0 mm to 600 mm on the horizontal axis, and FIG. 5B is a diagram showing the distance r from the vaporization source to the substrate at 0 mm. It is a figure which shows the said relationship in the case of taking from 60 mm to 60 mm.

As is clear from FIGS. 5A and 5B, an ultra-high vacuum deposition apparatus (vacuum degree: 1 × 10 ⁻⁸ Pa) is used, and the distance r from the vaporization source to the substrate is 500 mm. When vacuum deposition is performed under the conditions (see arrow A in FIG. 5 (a)), a relatively low vacuum vacuum deposition apparatus (vacuum degree: 1 × 10 ⁻⁴ Pa) is used, and the substrate is evaporated from the vaporization source. If the distance r to perform vacuum evaporation under conditions of 5 mm (in FIGS. 5 (a) and 5 (b), an arrow a ₁ see.) and de, the water molecules for the collision frequency Zmonomer to the substrate of the vaporized molecules The ratio of the collision frequency Z _H2O to the substrate is the same (10 ⁻² ).

Therefore, even when a relatively low vacuum vacuum deposition apparatus (degree of vacuum: 1 × 10 ⁻⁴ Pa) is used, vacuum deposition is performed under the condition that the distance r from the vaporization source to the substrate is small (for example, 5 mm). By doing so, it becomes possible to reduce the ratio of the collision frequency Z _H2O of the water molecule to the substrate with respect to the collision frequency Zmonomer of the vaporized molecule to the substrate, which in turn can extend the lifetime of the organic electroluminescence device. It becomes.

As is clear from FIG. 5B, the distance r from the vaporization source to the substrate can be obtained by performing vacuum deposition using a vacuum deposition apparatus (vacuum degree: 1 × 10 ⁻⁵ Pa) having a slightly high degree of vacuum. There can be expected even if the vacuum evaporation under conditions of 15mm obtain the same effect (in FIG. 5 (b), the reference arrow a _2.). On the other hand, even if vacuum deposition is performed using a vacuum deposition apparatus (vacuum degree: 1 × 10 ⁻³ Pa) having a slightly low degree of vacuum, the same applies if the vacuum deposition is performed under the condition that the distance r from the vaporization source to the substrate is 2 mm. It can be expected to obtain the effect (in FIG. 5 (b), the reference arrow _{a 3.).}

[Simulation Experiment Example 2]
The simulation experiment example 2 is an experiment example showing that the vapor deposition rate on the substrate can be controlled by controlling the vaporization temperature in the vaporization source.

  FIG. 6 is a diagram for explaining the relationship between the temperature of the vaporization source and the vaporization rate. In FIG. 6, for the case of CuPC as the material of the hole transport layer, α-MPD as the organic light emitting material, and Alq3 as the material of the electron transport layer, the horizontal axis represents the vaporization temperature of each material, and the vertical axis represents The vaporization rate of vaporized molecules in each material is shown.

  As can be seen from FIG. 6, in any material of CuPC, α-NPD, and Alq3, the vaporization rate can be controlled by controlling the temperature of the vaporization source. Therefore, by controlling the vaporization temperatures in CuPC, α-NPD and Alq3, the deposition rate of CuPC, α-NPD and Alq3 on the substrate (and thus the film thickness of the hole transport layer, organic light emitting layer and electron transport layer). It became clear that it was possible to control.

[Embodiment 2]
FIG. 7 is a view for explaining the organic electroluminescence element manufacturing apparatus 200 according to the second embodiment. In FIG. 7, reference numeral 290 indicates a dry cleaning mechanism, reference numeral 292 indicates a UV ozone irradiation mechanism, and reference numeral 294 indicates a partial dry etching mechanism.

  The organic electroluminescence element manufacturing apparatus 200 according to the second embodiment basically has the same configuration as the organic electroluminescence element manufacturing apparatus 100 according to the first embodiment, but the first vacuum evaporation mechanism 240, The second vacuum deposition mechanism 250 and the third vacuum deposition mechanism 260 each include four nozzles (nozzles 246a to 246d, 256a to 256d, and 266a to 266d), and two deposition polymerizations for forming a sealing layer. Mechanisms 274 and 278 (each forming an organic sealing layer made of PU (polyurea)) and two sixth vacuum deposition mechanisms 276 and 280 (each forming an inorganic sealing layer made of SiN (silicon nitride)). ) Is different.

  However, in the organic electroluminescence element manufacturing apparatus 200 according to the second embodiment, the nozzle disposed at a position where the distance to the flexible substrate W is 3 mm, as in the case of the organic electroluminescence element manufacturing apparatus 100 according to the first embodiment. Since it is possible to discharge the vaporized material from the nozzles 246a to 246d, 256a to 256d, 266a to 266d toward the flexible substrate W, it is possible to extend the life of the organic electroluminescence element, and The manufacturing apparatus of the organic electroluminescence element can be manufactured at a lower manufacturing cost than the conventional one.

  In addition, according to the organic electroluminescent element manufacturing apparatus 200 according to the second embodiment, the first vacuum deposition mechanism 240, the second vacuum deposition mechanism 250, and the third vacuum deposition mechanism 260 each include four nozzles (nozzles 246a to 246d). , 256a to 256d, 266a to 266d), the hole transport layer 16, the organic light emitting layer 18 and the electron transport layer 20 can be formed at a higher speed than in the first embodiment.

  Moreover, according to the manufacturing apparatus 200 for an organic electroluminescence element according to the second embodiment, a hole transport layer forming step, an organic light emitting layer forming step, and an electron transport layer forming are performed using an appropriate number of nozzles out of twelve nozzles. By performing the steps, it is possible to easily adjust the tact time in the hole transport layer forming step, the organic light emitting layer forming step, and the electron transport layer forming step.

  In addition, according to the organic electroluminescent element manufacturing apparatus 200 according to Embodiment 2, an organic sealing layer made of PU, an inorganic sealing layer made of SiN, an organic sealing layer made of PU, and an inorganic sealing layer made of SiN Therefore, it is possible to manufacture an organic electroluminescent element having a longer life than that of the first embodiment.

[Embodiment 3]
FIG. 8 is a view for explaining the organic electroluminescence element manufacturing apparatus 300 according to the third embodiment. In FIG. 8, reference numeral 390 indicates a dry cleaning mechanism, reference numeral 392 indicates a UV ozone irradiation mechanism, and reference numeral 394 indicates a partial dry etching mechanism.

  The organic electroluminescence element manufacturing apparatus 300 according to the third embodiment basically has the same configuration as the organic electroluminescence element manufacturing apparatus 100 according to the first embodiment, but the first vacuum evaporation mechanism 340, The second vacuum vapor deposition mechanism 350 and the third vacuum vapor deposition mechanism 360 are arranged in a straight line, and two vapor deposition polymerization mechanisms 374 and 378 (each of which is made of PU (polyurea) for forming a sealing layer). A sealing layer is formed) and two sixth vacuum deposition mechanisms 376 and 380 (each forming an inorganic sealing layer made of SiN (silicon nitride)).

  However, the organic electroluminescent element manufacturing apparatus 300 according to the third embodiment is similar to the organic electroluminescent element manufacturing apparatus 100 according to the first embodiment in that the nozzle disposed at a position where the distance to the flexible substrate W is 3 mm. Since it is possible to discharge the vaporized material from 346, 356, and 366 toward the flexible substrate W, it is possible to extend the life of the organic electroluminescence element, and the manufacturing cost is lower than the conventional one. It becomes the manufacturing apparatus of the organic electroluminescent element which can be made.

  Moreover, according to the organic electroluminescent element manufacturing apparatus 300 according to Embodiment 3, an organic sealing layer made of PU, an inorganic sealing layer made of SiN, an organic sealing layer made of PU, and an inorganic sealing layer made of SiN Therefore, it is possible to manufacture an organic electroluminescent element having a longer life than that of the first embodiment.

  As mentioned above, although the manufacturing method of the organic electroluminescent element of this invention and the manufacturing apparatus of the organic electroluminescent element were demonstrated based on said each embodiment, this invention is not limited to this, It deviates from the summary. For example, the following modifications are possible.

(1) In each of the above embodiments, the present invention has been described with reference to an example of a method for manufacturing an organic electroluminescence element including a quartz glass film as the substrate 12, but the present invention is not limited to this. For example, as the substrate 12, various substrates other than films (for example, rigid substrates), glass films other than quartz glass films (for example, borosilicate glass films), resin films (for example, PET films, PES films, PEEK films, PC films, etc.) ) Or a laminated film of glass / resin (for example, a laminated film of quartz glass film / PET film), the present invention can also be applied to a method for producing an organic electroluminescent element. In addition, the present invention can be applied to a method for manufacturing an organic electroluminescence element including a substrate 12 having any shape and size (for example, a film having a width of 30 mm, a film having a width of 300 mm, etc.).

(2) In each of the above embodiments, a rectangular opening having a length of 10 mm along the moving direction of the flexible substrate W and a width of 2 mm along the direction orthogonal to the moving direction of the flexible substrate W is provided. Although this invention was demonstrated taking the case of manufacturing an organic electroluminescent element using a nozzle as an example, this invention is not limited to this. For example, in the case where a film having a width of 30 mm or a film having a width of 300 mm is used as the flexible substrate W, organic electroluminescence using a wider nozzle (for example, a nozzle having a rectangular opening having a width of 30 mm or 300 mm). The element can also be manufactured, and has a smoothly curved shape along the moving direction of the flexible substrate W so that the distance between the rotating drum and the nozzle is substantially constant along the moving direction of the flexible substrate W. An organic electroluminescent element can also be manufactured using the nozzle which has a nozzle front-end | tip part.

(3) In each of the above-described embodiments, the present invention has been described by taking as an example a method for manufacturing an organic electroluminescent element including a transparent electrode made of ITO as the anode 14, but the present invention is not limited to this. For example, the present invention can also be applied to a method of manufacturing an organic electroluminescent element that includes an anode made of a transparent electrode material other than ITO (for example, ZnO) as the anode 14.

(4) In each of the above-described embodiments, the present invention has been described by taking as an example a method for manufacturing an organic electroluminescent element including a hole transport layer made of CuPC as the hole transport layer 16, but the present invention is limited to this. It is not a thing. For example, the present invention can also be applied to a method for manufacturing an organic electroluminescent element including a hole transport layer made of an organic material other than CuPC (for example, TPAC, TPD) as the hole transport layer 16.

(5) In each of the above-described embodiments, the present invention has been described by taking as an example a method for manufacturing an organic electroluminescent element including an organic light-emitting layer made of α-NPD as the organic light-emitting layer 18, but the present invention is limited to this. It is not a thing. For example, the present invention is applied to a method of manufacturing an organic electroluminescent element including an organic light emitting layer made of an organic light emitting material other than α-NPD (for example, Alq3, ZnPBO, DOFL-5 to which dimethylquinacridone is added) as the organic light emitting layer 18. You can also

(6) In each of the above embodiments, the present invention has been described with reference to an example of a method for manufacturing an organic electroluminescence device including an electron transport layer made of Alq3 as the electron transport layer 20, but the present invention is not limited to this. Absent. For example, the present invention can also be applied to a method of manufacturing an organic electroluminescence element that includes an electron transport layer 20 made of an organic material other than Alq3 (for example, BND, PBD) as the electron transport layer 20.

(7) In each of the embodiments described above, the present invention has been described by taking as an example a method for manufacturing an organic electroluminescent element including an electron injection layer made of LiF as the electron injection layer 22, but the present invention is not limited thereto. Absent. For example, the present invention can also be applied to a method of manufacturing an organic electroluminescent element that includes an electron injection layer made of a material other than LiF (for example, BaF ₂ , SrF ₂ , CaF ₂ , MgF ₂ ) as the electron injection layer 22.

(8) In each of the embodiments described above, the present invention has been described by taking as an example a method for manufacturing an organic electroluminescence element including a cathode made of Al as the cathode 24, but the present invention is not limited to this. For example, the present invention can also be applied to a method for manufacturing an organic electroluminescent element including a cathode made of a material other than Al (for example, a mixed metal of Mg and Ag) as the cathode 24.

(9) In the said Embodiment 2 and 3, the manufacturing method of an organic electroluminescent element provided with the lamination | stacking sealing layer by which the sealing layer which consists of PU (polyurea), and the sealing layer which consists of SiN (silicon nitride) was laminated | stacked. However, the present invention is not limited to this. For example, instead of a sealing film made of SiN (silicon nitride), a sealing film made of Al ₂ O ₃ , a sealing film made of ZrO ₂ , a sealing film made of MgF ₂ , a sealing film made of ITO, etc. The present invention can also be applied to a method for producing an organic electroluminescence element having an inorganic sealing film.

(10) In each of the embodiments described above, a method for manufacturing an organic electroluminescence element including a laminated structure including the anode 14, the hole transport layer 16, the organic light emitting layer 18, the electron transport layer 20, the electron injection layer 22, and the cathode 24. However, the present invention is not limited to this. For example, the present invention can be applied to a method for manufacturing an organic electroluminescence device that does not include at least one of a hole transport layer, an electron transport layer, and an electron injection layer, or a hole injection layer (for example, TPDA, TPA- 6) The present invention can also be applied to a method for producing an organic electroluminescence device further comprising other layers.

(11) In each of the above embodiments, the present invention has been described by taking an example of a method for manufacturing an organic electroluminescent element including a hole transport layer forming step, an organic light emitting layer forming step, and an electron transport layer forming step. The present invention is not limited to this. For example, the present invention can be applied to a method for manufacturing an organic electroluminescence device that does not include at least one of a hole transport layer forming step and an electron transport layer forming step, and a hole injection layer and other layers are formed. The present invention can also be applied to a method for producing an organic electroluminescence device further including a step.

(12) In each of the above embodiments, the present invention has been described by taking an example of a method for manufacturing an organic electroluminescence element for a lighting device, but the present invention is not limited to this. For example, the present invention can also be applied to a method for manufacturing an organic electroluminescence element for display.

1 is a cross-sectional view showing an organic electroluminescence element 10. 1 is a cross-sectional view showing an organic electroluminescence element manufacturing apparatus 100 according to Embodiment 1. FIG. 3 is a flowchart illustrating a method for manufacturing the organic electroluminescence element according to the first embodiment. It is a figure shown in order to demonstrate the relationship between the distance r from a vaporization source to a board | substrate, and the collision frequency Zmonomer of a vaporization molecule | numerator to the board | substrate in a vacuum evaporation method. A distance r from the vaporization source to the substrate is a view for explaining the relationship between the ratio of the collision frequency Z _{H2 O} to a substrate water molecules for collision frequency Zmonomer to the substrate vaporized molecules. It is a figure shown in order to demonstrate the relationship between the temperature of a vaporization source, and the vaporization rate of a vaporization molecule | numerator. It is a figure shown in order to demonstrate the manufacturing apparatus 200 of the organic electroluminescent element which concerns on Embodiment 2. FIG. It is a figure shown in order to demonstrate the manufacturing apparatus 300 of the organic electroluminescent element which concerns on Embodiment 3. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Organic electroluminescent element, 12 ... Board | substrate, 14 ... Anode, 16 ... Hole transport layer, 18 ... Organic light emitting layer, 20 ... Electron transport layer, 22 ... Electron injection layer, 24 ... Cathode, 26 ... Sealing layer, DESCRIPTION OF SYMBOLS 100,200,300 ... Organic electroluminescent element manufacturing apparatus, 110 ... Vacuum chamber, 112, 114, 116 ... Partition, 118, 120 ... Differential exhaust mechanism, 122 ... Substrate feeding / winding chamber, 124, 224, 324 ... 1st vacuum evaporation chamber, 126 ... 2nd vacuum evaporation chamber, 128 ... Deposition polymerization chamber, 130, 230, 330 ... Feeding roller, 132, 136, 232, 233, 236, 332, 333, 336 ... Roller, 134 ... Rotating drum, 138, 238, 338 ... take-up roller, 140, 240, 340 ... first vacuum deposition mechanism, 142, 152, 162 342, 352, 362... Vaporization section, 144, 154, 164, 344, 254, 364 ... communication section, 146, 156, 166, 246a, 246b, 246c, 246d, 256a, 256b, 256c, 256d, 266a, 266b, 266c, 266d, 346, 356, 366 ... nozzle, 150, 250, 350 ... second vacuum deposition mechanism, 160, 260, 360 ... third vacuum deposition mechanism, 170, 270, 370 ... fourth vacuum deposition mechanism, 172 272, 372 ... fifth vacuum deposition mechanism, 174, 274, 278, 374, 378 ... deposition polymerization mechanism, 222, 322 ... substrate feeding chamber, 226, 326 ... fourth vacuum deposition chamber, 228, 328 ... substrate winding chamber 276, 280, 376, 380 ... sixth vacuum deposition mechanism, 290, 390 ... dry cleaning mechanism, 92,392 ... UV ozone irradiation mechanism, 294,394 ... partial dry etching mechanism, W ... flexible substrate

Claims (17)

A substrate,
A method for producing an organic electroluminescent device comprising a laminated structure having at least an anode, an organic light emitting layer and a cathode formed on the substrate,
An organic light emitting layer forming step of forming the organic light emitting layer by discharging a vaporized material made of an organic light emitting material from a nozzle disposed at a position where the distance to the substrate is 15 mm or less in a vacuum atmosphere toward the substrate. The manufacturing method of the organic electroluminescent element characterized by including. In the manufacturing method of the organic electroluminescent element of Claim 1,
The manufacturing method of the organic electroluminescent element characterized by performing the said organic light emitting layer formation process in the vacuum atmosphere of 1 * 10 < ^-3 > Pa-1 * 10 < ^-5 > Pa. In the manufacturing method of the organic electroluminescent element of Claim 1 or 2,
A method for producing an organic electroluminescent element, wherein the organic light emitting layer forming step is performed under a condition in which the nozzle is heated to a temperature at which the vaporized material does not reattach to the nozzle. In the manufacturing method of the organic electroluminescent element in any one of Claims 1-3,
A method of manufacturing an organic electroluminescent element, wherein the organic light emitting layer forming step is performed while moving the substrate. In the manufacturing method of the organic electroluminescent element in any one of Claims 1-4,
A method for producing an organic electroluminescent element, wherein the organic light emitting layer forming step is performed while cooling the substrate. In the manufacturing method of the organic electroluminescent element in any one of Claims 1-5,
The laminated structure is a laminated structure further including an organic layer other than the organic light emitting layer,
By discharging a vaporized material made of an organic material other than an organic light emitting material from another nozzle disposed at a position where the distance to the substrate is 15 mm or less toward the substrate, another organic layer forming the other organic layer is formed. The manufacturing method of the organic electroluminescent element characterized by further including a layer formation process. In the manufacturing method of the organic electroluminescent element of Claim 6,
The laminated structure is a laminated structure further including an inorganic layer,
An inorganic layer forming step of forming the inorganic layer by attaching a vaporized material made of an inorganic material to the substrate by a vacuum deposition method;
A cathode forming step of forming the cathode by attaching a vaporized material comprising a material constituting the cathode to the substrate by a vacuum evaporation method;
The method for producing an organic electroluminescent element, wherein the organic light emitting layer forming step, the other organic layer forming step, the inorganic layer forming step, and the cathode forming step are performed in the same vacuum apparatus. In the manufacturing method of the organic electroluminescent element of Claim 7,
The organic electroluminescence element is an organic electroluminescence element further comprising a sealing layer formed on the substrate so as to cover the laminated structure,
Further comprising a sealing layer forming step of forming the sealing layer by polymerizing a raw material monomer on the substrate by a vapor deposition polymerization method;
An organic electroluminescence device characterized in that the organic light emitting layer forming step, the other organic layer forming step, the inorganic layer forming step, the cathode forming step, and the sealing layer forming step are performed in the same vacuum apparatus. Manufacturing method. In the manufacturing method of the organic electroluminescent element of Claim 8,
As the substrate, a flexible substrate is used,
The organic light emitting layer forming step, the other organic layer forming step, the inorganic layer forming step, the cathode forming step, and the sealing layer forming step are performed while moving the substrate along the rotation direction on a rotating drum. The manufacturing method of the organic electroluminescent element characterized by the above-mentioned. A substrate,
An organic electroluminescent element manufacturing apparatus for manufacturing an organic electroluminescent element, which is formed on the substrate and includes a laminated structure including at least an anode, an organic light emitting layer, and a cathode,
A vacuum chamber;
A substrate transport mechanism disposed in the vacuum chamber and transporting the substrate;
And a nozzle having a function of discharging a vaporized material made of an organic light emitting material toward the substrate at a position where the distance to the substrate is 15 mm or less in the vacuum chamber. apparatus. In the manufacturing apparatus of the organic electroluminescent element according to claim 10,
The apparatus for manufacturing an organic electroluminescence element, further comprising a nozzle heating mechanism for heating the nozzle to a temperature at which the vaporized material does not reattach to the nozzle. In the manufacturing apparatus of the organic electroluminescent element according to claim 10 or 11,
The laminated structure is a laminated structure further including an organic layer other than the organic light emitting layer,
The apparatus further includes another nozzle having a function of discharging a vaporized material made of an organic material other than an organic light emitting material toward the substrate at a position where the distance to the substrate is 15 mm or less in the vacuum chamber. Organic electroluminescence device manufacturing equipment. In the manufacturing apparatus of the organic electroluminescent element according to claim 12,
The laminated structure is a laminated structure further including an inorganic layer,
A vacuum evaporation mechanism that is disposed in the vacuum chamber and forms the inorganic layer by attaching a vaporized material made of an inorganic material to the substrate by a vacuum evaporation method;
An organic material further comprising: another vapor deposition mechanism which is disposed in the vacuum chamber and forms a cathode by adhering a vaporized material made of a material constituting the cathode by a vacuum deposition method to the substrate. Electroluminescence element manufacturing equipment. In the manufacturing apparatus of the organic electroluminescent element according to claim 13,
The organic electroluminescence element is an organic electroluminescence element further comprising a sealing layer formed on the substrate so as to cover the laminated structure,
An apparatus for manufacturing an organic electroluminescent element, further comprising a vapor deposition polymerization mechanism that is disposed in the vacuum chamber and polymerizes a raw material monomer on the substrate by a vapor deposition polymerization method to form the sealing layer. In the manufacturing apparatus of the organic electroluminescent element in any one of Claims 10-14,
The substrate is a flexible substrate,
The substrate transport mechanism includes a feed roller that feeds the substrate, a take-up roller that winds the substrate, a rotating drum that is disposed in the substrate transport path and rotates as the substrate is transported. Further comprising
The said nozzle is comprised so that a vaporization material may be discharged toward the said board | substrate conveyed on the surface of the said rotating drum, The manufacturing apparatus of the organic electroluminescent element characterized by the above-mentioned. In the manufacturing apparatus of the organic electroluminescent element according to claim 15,
An apparatus for manufacturing an organic electroluminescence element, wherein a cooling mechanism for cooling the surface of the rotating drum is installed inside the rotating drum. In the manufacturing apparatus of the organic electroluminescent element according to claim 14,
An operating exhaust mechanism is further provided in which the vicinity of the nozzle, the vicinity of the other nozzle, the vicinity of the vacuum deposition mechanism, the vicinity of the other vacuum deposition mechanism, and the vicinity of the deposition polymerization mechanism are set to a predetermined vacuum atmosphere. An organic electroluminescence device manufacturing apparatus characterized by the above.

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