WO2008139788A1 - Method and device for manufacturing organic electroluminescence element - Google Patents

Method and device for manufacturing organic electroluminescence element Download PDF

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Publication number
WO2008139788A1
WO2008139788A1 PCT/JP2008/056577 JP2008056577W WO2008139788A1 WO 2008139788 A1 WO2008139788 A1 WO 2008139788A1 JP 2008056577 W JP2008056577 W JP 2008056577W WO 2008139788 A1 WO2008139788 A1 WO 2008139788A1
Authority
WO
WIPO (PCT)
Prior art keywords
organic electroluminescence
substrate
electroluminescence element
layer
manufacturing organic
Prior art date
Application number
PCT/JP2008/056577
Other languages
French (fr)
Japanese (ja)
Inventor
Yoshikazu Takahashi
Original Assignee
Silver Seiko Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silver Seiko Ltd. filed Critical Silver Seiko Ltd.
Publication of WO2008139788A1 publication Critical patent/WO2008139788A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A manufacturing method is provided for fabricating an organic electroluminescence element (10) which comprises a substrate (12), a laminated structure formed on the substrate (12), and a sealing film (26). The laminated structure is constituted of an anode (14), a hole transport layer (16), an organic electroluminescence layer (18), an electron transport layer (20), and a cathode (24). The method includes an organic electroluminescence layer formation process for forming the organic electroluminescence layer (18) by discharging a vaporizing material to the substrate from a nozzle arranged in a position where the distance to the substrate is 15 mm or less. By the way, the life of the organic electroluminescence element can be prolonged and also the reduction in manufacturing cost can be attained as compared with conventional cost.
PCT/JP2008/056577 2007-05-16 2008-04-02 Method and device for manufacturing organic electroluminescence element WO2008139788A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007130949A JP4881789B2 (en) 2007-05-16 2007-05-16 Organic electroluminescence device manufacturing method and organic electroluminescence device manufacturing apparatus
JP2007-130949 2007-05-16

Publications (1)

Publication Number Publication Date
WO2008139788A1 true WO2008139788A1 (en) 2008-11-20

Family

ID=40002011

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/056577 WO2008139788A1 (en) 2007-05-16 2008-04-02 Method and device for manufacturing organic electroluminescence element

Country Status (3)

Country Link
JP (1) JP4881789B2 (en)
TW (1) TW200847845A (en)
WO (1) WO2008139788A1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012147493A1 (en) * 2011-04-26 2012-11-01 日東電工株式会社 Method and device for producing organic el element
US20130288402A1 (en) * 2010-12-28 2013-10-31 Nitto Denko Corporation Organic el device manufacturing method and apparatus
CN103503567A (en) * 2011-10-24 2014-01-08 日东电工株式会社 Organic electroluminescence device manufacturing method and manufacturing apparatus
US9224953B2 (en) 2011-10-19 2015-12-29 Nitto Denko Corporation Method and apparatus for manufacturing organic el device
JP2016111016A (en) * 2014-12-03 2016-06-20 ユニバーサル ディスプレイ コーポレイション Methods for fabricating oled
CN118625875A (en) * 2024-08-13 2024-09-10 国鲸科技(广东横琴粤澳深度合作区)有限公司 Circuit temperature control system for spray header prepared from flexible luminescent material

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5326098B2 (en) * 2009-02-05 2013-10-30 シャープ株式会社 Substrate surface sealing device and organic EL panel manufacturing method
WO2012008275A1 (en) * 2010-07-16 2012-01-19 コニカミノルタホールディングス株式会社 Process for production of organic electroluminescent element
JP5694023B2 (en) * 2011-03-23 2015-04-01 小島プレス工業株式会社 Laminate structure manufacturing equipment
JP5284443B2 (en) * 2011-10-19 2013-09-11 日東電工株式会社 Manufacturing method and manufacturing apparatus for organic EL device
JP2013179019A (en) * 2012-02-02 2013-09-09 Nitto Denko Corp Guide member, guide mechanism and method for manufacturing organic el device
JP5269970B2 (en) * 2011-10-24 2013-08-21 日東電工株式会社 Manufacturing method and manufacturing apparatus for organic EL device
JP5856871B2 (en) * 2012-02-21 2016-02-10 日東電工株式会社 Organic EL device manufacturing apparatus and manufacturing method
JP5401583B2 (en) 2012-06-11 2014-01-29 日東電工株式会社 Organic EL device manufacturing method and organic EL device
CN107464890B (en) * 2016-06-03 2020-04-28 清华大学 Organic light emitting diode preparation method and preparation device
WO2019064417A1 (en) 2017-09-28 2019-04-04 シャープ株式会社 Film-forming method and display device production method using same

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06326354A (en) * 1993-05-13 1994-11-25 Denki Kagaku Kogyo Kk Manufacture of organic electroluminescence element
JPH10105965A (en) * 1996-09-27 1998-04-24 Fuji Photo Film Co Ltd Medium and device for production of magnetic recording
JP2004103442A (en) * 2002-09-11 2004-04-02 Ulvac Japan Ltd Organic electroluminescent element and method for manufacturing the same
WO2005040450A2 (en) * 2003-10-14 2005-05-06 Battelle Memorial Institute Method and apparatus for making an organic thin film
JP2006193545A (en) * 2005-01-11 2006-07-27 Konica Minolta Medical & Graphic Inc Method for producing radiation image conversion panel and vacuum deposition apparatus
JP2006278021A (en) * 2005-03-28 2006-10-12 Pioneer Electronic Corp Inspection method and structure of organic function element sealing film
WO2007026649A1 (en) * 2005-08-29 2007-03-08 Matsushita Electric Industrial Co., Ltd. Vapor deposition head device and method of coating by vapor deposition

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004087130A (en) * 2002-06-24 2004-03-18 Victor Co Of Japan Ltd Organic electroluminescent element and its manufacturing method

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06326354A (en) * 1993-05-13 1994-11-25 Denki Kagaku Kogyo Kk Manufacture of organic electroluminescence element
JPH10105965A (en) * 1996-09-27 1998-04-24 Fuji Photo Film Co Ltd Medium and device for production of magnetic recording
JP2004103442A (en) * 2002-09-11 2004-04-02 Ulvac Japan Ltd Organic electroluminescent element and method for manufacturing the same
WO2005040450A2 (en) * 2003-10-14 2005-05-06 Battelle Memorial Institute Method and apparatus for making an organic thin film
JP2006193545A (en) * 2005-01-11 2006-07-27 Konica Minolta Medical & Graphic Inc Method for producing radiation image conversion panel and vacuum deposition apparatus
JP2006278021A (en) * 2005-03-28 2006-10-12 Pioneer Electronic Corp Inspection method and structure of organic function element sealing film
WO2007026649A1 (en) * 2005-08-29 2007-03-08 Matsushita Electric Industrial Co., Ltd. Vapor deposition head device and method of coating by vapor deposition

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130288402A1 (en) * 2010-12-28 2013-10-31 Nitto Denko Corporation Organic el device manufacturing method and apparatus
WO2012147493A1 (en) * 2011-04-26 2012-11-01 日東電工株式会社 Method and device for producing organic el element
CN103493593A (en) * 2011-04-26 2014-01-01 日东电工株式会社 Method and device for producing organic el element
EP2704533A1 (en) * 2011-04-26 2014-03-05 Nitto Denko Corporation Method and device for producing organic el element
EP2704533A4 (en) * 2011-04-26 2014-12-17 Nitto Denko Corp Method and device for producing organic el element
US9647224B2 (en) 2011-04-26 2017-05-09 Nitto Denko Corporation Method and apparatus for manufacturing organic EL device
US9224953B2 (en) 2011-10-19 2015-12-29 Nitto Denko Corporation Method and apparatus for manufacturing organic el device
CN103503567A (en) * 2011-10-24 2014-01-08 日东电工株式会社 Organic electroluminescence device manufacturing method and manufacturing apparatus
JP2016111016A (en) * 2014-12-03 2016-06-20 ユニバーサル ディスプレイ コーポレイション Methods for fabricating oled
CN118625875A (en) * 2024-08-13 2024-09-10 国鲸科技(广东横琴粤澳深度合作区)有限公司 Circuit temperature control system for spray header prepared from flexible luminescent material

Also Published As

Publication number Publication date
JP2008287996A (en) 2008-11-27
TW200847845A (en) 2008-12-01
JP4881789B2 (en) 2012-02-22

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