WO2008139788A1 - Method and device for manufacturing organic electroluminescence element - Google Patents
Method and device for manufacturing organic electroluminescence element Download PDFInfo
- Publication number
- WO2008139788A1 WO2008139788A1 PCT/JP2008/056577 JP2008056577W WO2008139788A1 WO 2008139788 A1 WO2008139788 A1 WO 2008139788A1 JP 2008056577 W JP2008056577 W JP 2008056577W WO 2008139788 A1 WO2008139788 A1 WO 2008139788A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- organic electroluminescence
- substrate
- electroluminescence element
- layer
- manufacturing organic
- Prior art date
Links
- 238000005401 electroluminescence Methods 0.000 title abstract 6
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 abstract 4
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000007599 discharging Methods 0.000 abstract 1
- 230000005525 hole transport Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 230000008016 vaporization Effects 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
A manufacturing method is provided for fabricating an organic electroluminescence element (10) which comprises a substrate (12), a laminated structure formed on the substrate (12), and a sealing film (26). The laminated structure is constituted of an anode (14), a hole transport layer (16), an organic electroluminescence layer (18), an electron transport layer (20), and a cathode (24). The method includes an organic electroluminescence layer formation process for forming the organic electroluminescence layer (18) by discharging a vaporizing material to the substrate from a nozzle arranged in a position where the distance to the substrate is 15 mm or less. By the way, the life of the organic electroluminescence element can be prolonged and also the reduction in manufacturing cost can be attained as compared with conventional cost.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007130949A JP4881789B2 (en) | 2007-05-16 | 2007-05-16 | Organic electroluminescence device manufacturing method and organic electroluminescence device manufacturing apparatus |
JP2007-130949 | 2007-05-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008139788A1 true WO2008139788A1 (en) | 2008-11-20 |
Family
ID=40002011
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/056577 WO2008139788A1 (en) | 2007-05-16 | 2008-04-02 | Method and device for manufacturing organic electroluminescence element |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4881789B2 (en) |
TW (1) | TW200847845A (en) |
WO (1) | WO2008139788A1 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012147493A1 (en) * | 2011-04-26 | 2012-11-01 | 日東電工株式会社 | Method and device for producing organic el element |
US20130288402A1 (en) * | 2010-12-28 | 2013-10-31 | Nitto Denko Corporation | Organic el device manufacturing method and apparatus |
CN103503567A (en) * | 2011-10-24 | 2014-01-08 | 日东电工株式会社 | Organic electroluminescence device manufacturing method and manufacturing apparatus |
US9224953B2 (en) | 2011-10-19 | 2015-12-29 | Nitto Denko Corporation | Method and apparatus for manufacturing organic el device |
JP2016111016A (en) * | 2014-12-03 | 2016-06-20 | ユニバーサル ディスプレイ コーポレイション | Methods for fabricating oled |
CN118625875A (en) * | 2024-08-13 | 2024-09-10 | 国鲸科技(广东横琴粤澳深度合作区)有限公司 | Circuit temperature control system for spray header prepared from flexible luminescent material |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5326098B2 (en) * | 2009-02-05 | 2013-10-30 | シャープ株式会社 | Substrate surface sealing device and organic EL panel manufacturing method |
WO2012008275A1 (en) * | 2010-07-16 | 2012-01-19 | コニカミノルタホールディングス株式会社 | Process for production of organic electroluminescent element |
JP5694023B2 (en) * | 2011-03-23 | 2015-04-01 | 小島プレス工業株式会社 | Laminate structure manufacturing equipment |
JP5284443B2 (en) * | 2011-10-19 | 2013-09-11 | 日東電工株式会社 | Manufacturing method and manufacturing apparatus for organic EL device |
JP2013179019A (en) * | 2012-02-02 | 2013-09-09 | Nitto Denko Corp | Guide member, guide mechanism and method for manufacturing organic el device |
JP5269970B2 (en) * | 2011-10-24 | 2013-08-21 | 日東電工株式会社 | Manufacturing method and manufacturing apparatus for organic EL device |
JP5856871B2 (en) * | 2012-02-21 | 2016-02-10 | 日東電工株式会社 | Organic EL device manufacturing apparatus and manufacturing method |
JP5401583B2 (en) | 2012-06-11 | 2014-01-29 | 日東電工株式会社 | Organic EL device manufacturing method and organic EL device |
CN107464890B (en) * | 2016-06-03 | 2020-04-28 | 清华大学 | Organic light emitting diode preparation method and preparation device |
WO2019064417A1 (en) | 2017-09-28 | 2019-04-04 | シャープ株式会社 | Film-forming method and display device production method using same |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06326354A (en) * | 1993-05-13 | 1994-11-25 | Denki Kagaku Kogyo Kk | Manufacture of organic electroluminescence element |
JPH10105965A (en) * | 1996-09-27 | 1998-04-24 | Fuji Photo Film Co Ltd | Medium and device for production of magnetic recording |
JP2004103442A (en) * | 2002-09-11 | 2004-04-02 | Ulvac Japan Ltd | Organic electroluminescent element and method for manufacturing the same |
WO2005040450A2 (en) * | 2003-10-14 | 2005-05-06 | Battelle Memorial Institute | Method and apparatus for making an organic thin film |
JP2006193545A (en) * | 2005-01-11 | 2006-07-27 | Konica Minolta Medical & Graphic Inc | Method for producing radiation image conversion panel and vacuum deposition apparatus |
JP2006278021A (en) * | 2005-03-28 | 2006-10-12 | Pioneer Electronic Corp | Inspection method and structure of organic function element sealing film |
WO2007026649A1 (en) * | 2005-08-29 | 2007-03-08 | Matsushita Electric Industrial Co., Ltd. | Vapor deposition head device and method of coating by vapor deposition |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004087130A (en) * | 2002-06-24 | 2004-03-18 | Victor Co Of Japan Ltd | Organic electroluminescent element and its manufacturing method |
-
2007
- 2007-05-16 JP JP2007130949A patent/JP4881789B2/en not_active Expired - Fee Related
-
2008
- 2008-04-02 WO PCT/JP2008/056577 patent/WO2008139788A1/en active Application Filing
- 2008-04-30 TW TW097115930A patent/TW200847845A/en unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06326354A (en) * | 1993-05-13 | 1994-11-25 | Denki Kagaku Kogyo Kk | Manufacture of organic electroluminescence element |
JPH10105965A (en) * | 1996-09-27 | 1998-04-24 | Fuji Photo Film Co Ltd | Medium and device for production of magnetic recording |
JP2004103442A (en) * | 2002-09-11 | 2004-04-02 | Ulvac Japan Ltd | Organic electroluminescent element and method for manufacturing the same |
WO2005040450A2 (en) * | 2003-10-14 | 2005-05-06 | Battelle Memorial Institute | Method and apparatus for making an organic thin film |
JP2006193545A (en) * | 2005-01-11 | 2006-07-27 | Konica Minolta Medical & Graphic Inc | Method for producing radiation image conversion panel and vacuum deposition apparatus |
JP2006278021A (en) * | 2005-03-28 | 2006-10-12 | Pioneer Electronic Corp | Inspection method and structure of organic function element sealing film |
WO2007026649A1 (en) * | 2005-08-29 | 2007-03-08 | Matsushita Electric Industrial Co., Ltd. | Vapor deposition head device and method of coating by vapor deposition |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130288402A1 (en) * | 2010-12-28 | 2013-10-31 | Nitto Denko Corporation | Organic el device manufacturing method and apparatus |
WO2012147493A1 (en) * | 2011-04-26 | 2012-11-01 | 日東電工株式会社 | Method and device for producing organic el element |
CN103493593A (en) * | 2011-04-26 | 2014-01-01 | 日东电工株式会社 | Method and device for producing organic el element |
EP2704533A1 (en) * | 2011-04-26 | 2014-03-05 | Nitto Denko Corporation | Method and device for producing organic el element |
EP2704533A4 (en) * | 2011-04-26 | 2014-12-17 | Nitto Denko Corp | Method and device for producing organic el element |
US9647224B2 (en) | 2011-04-26 | 2017-05-09 | Nitto Denko Corporation | Method and apparatus for manufacturing organic EL device |
US9224953B2 (en) | 2011-10-19 | 2015-12-29 | Nitto Denko Corporation | Method and apparatus for manufacturing organic el device |
CN103503567A (en) * | 2011-10-24 | 2014-01-08 | 日东电工株式会社 | Organic electroluminescence device manufacturing method and manufacturing apparatus |
JP2016111016A (en) * | 2014-12-03 | 2016-06-20 | ユニバーサル ディスプレイ コーポレイション | Methods for fabricating oled |
CN118625875A (en) * | 2024-08-13 | 2024-09-10 | 国鲸科技(广东横琴粤澳深度合作区)有限公司 | Circuit temperature control system for spray header prepared from flexible luminescent material |
Also Published As
Publication number | Publication date |
---|---|
JP2008287996A (en) | 2008-11-27 |
TW200847845A (en) | 2008-12-01 |
JP4881789B2 (en) | 2012-02-22 |
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