JP2008277615A - 面発光レーザアレイおよびその製造方法ならびに半導体装置 - Google Patents
面発光レーザアレイおよびその製造方法ならびに半導体装置 Download PDFInfo
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- JP2008277615A JP2008277615A JP2007120878A JP2007120878A JP2008277615A JP 2008277615 A JP2008277615 A JP 2008277615A JP 2007120878 A JP2007120878 A JP 2007120878A JP 2007120878 A JP2007120878 A JP 2007120878A JP 2008277615 A JP2008277615 A JP 2008277615A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 56
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 53
- 230000007423 decrease Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 17
- 239000010931 gold Substances 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007120878A JP2008277615A (ja) | 2007-05-01 | 2007-05-01 | 面発光レーザアレイおよびその製造方法ならびに半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007120878A JP2008277615A (ja) | 2007-05-01 | 2007-05-01 | 面発光レーザアレイおよびその製造方法ならびに半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008277615A true JP2008277615A (ja) | 2008-11-13 |
| JP2008277615A5 JP2008277615A5 (enrdf_load_stackoverflow) | 2010-06-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007120878A Withdrawn JP2008277615A (ja) | 2007-05-01 | 2007-05-01 | 面発光レーザアレイおよびその製造方法ならびに半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008277615A (enrdf_load_stackoverflow) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102959811A (zh) * | 2009-12-19 | 2013-03-06 | 三流明公司 | 用于组合用于数字输出的激光器阵列的系统和方法 |
| JP2014057045A (ja) * | 2012-08-10 | 2014-03-27 | Ricoh Co Ltd | 面発光レーザ素子の製造方法、光源装置の製造方法、光走査装置、及び画像形成装置 |
| US8979338B2 (en) | 2009-12-19 | 2015-03-17 | Trilumina Corp. | System for combining laser array outputs into a single beam carrying digital data |
| JP2016225630A (ja) * | 2016-05-31 | 2016-12-28 | トリルミナ コーポレーション | デジタル出力用レーザアレイを組み合わせるためのシステムおよび方法 |
| US10038304B2 (en) | 2009-02-17 | 2018-07-31 | Trilumina Corp. | Laser arrays for variable optical properties |
| US10244181B2 (en) | 2009-02-17 | 2019-03-26 | Trilumina Corp. | Compact multi-zone infrared laser illuminator |
| US10615871B2 (en) | 2009-02-17 | 2020-04-07 | Trilumina Corp. | High speed free-space optical communications |
| JPWO2021020134A1 (enrdf_load_stackoverflow) * | 2019-07-30 | 2021-02-04 | ||
| US11095365B2 (en) | 2011-08-26 | 2021-08-17 | Lumentum Operations Llc | Wide-angle illuminator module |
-
2007
- 2007-05-01 JP JP2007120878A patent/JP2008277615A/ja not_active Withdrawn
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10938476B2 (en) | 2009-02-17 | 2021-03-02 | Lumentum Operations Llc | System for optical free-space transmission of a string of binary data |
| US11121770B2 (en) | 2009-02-17 | 2021-09-14 | Lumentum Operations Llc | Optical laser device |
| US11405105B2 (en) | 2009-02-17 | 2022-08-02 | Lumentum Operations Llc | System for optical free-space transmission of a string of binary data |
| US11075695B2 (en) | 2009-02-17 | 2021-07-27 | Lumentum Operations Llc | Eye-safe optical laser system |
| US10615871B2 (en) | 2009-02-17 | 2020-04-07 | Trilumina Corp. | High speed free-space optical communications |
| US10038304B2 (en) | 2009-02-17 | 2018-07-31 | Trilumina Corp. | Laser arrays for variable optical properties |
| US10244181B2 (en) | 2009-02-17 | 2019-03-26 | Trilumina Corp. | Compact multi-zone infrared laser illuminator |
| US8979338B2 (en) | 2009-12-19 | 2015-03-17 | Trilumina Corp. | System for combining laser array outputs into a single beam carrying digital data |
| CN102959811A (zh) * | 2009-12-19 | 2013-03-06 | 三流明公司 | 用于组合用于数字输出的激光器阵列的系统和方法 |
| JP2013527484A (ja) * | 2009-12-19 | 2013-06-27 | トリルミナ コーポレーション | デジタル出力用レーザアレイを組み合わせるためのシステムおよび方法 |
| US11451013B2 (en) | 2011-08-26 | 2022-09-20 | Lumentum Operations Llc | Wide-angle illuminator module |
| US11095365B2 (en) | 2011-08-26 | 2021-08-17 | Lumentum Operations Llc | Wide-angle illuminator module |
| JP2014057045A (ja) * | 2012-08-10 | 2014-03-27 | Ricoh Co Ltd | 面発光レーザ素子の製造方法、光源装置の製造方法、光走査装置、及び画像形成装置 |
| JP2016225630A (ja) * | 2016-05-31 | 2016-12-28 | トリルミナ コーポレーション | デジタル出力用レーザアレイを組み合わせるためのシステムおよび方法 |
| CN114144951A (zh) * | 2019-07-30 | 2022-03-04 | 索尼半导体解决方案公司 | 发光元件和测距装置 |
| TWI881986B (zh) * | 2019-07-30 | 2025-05-01 | 日商索尼半導體解決方案公司 | 發光元件及測距裝置 |
| WO2021020134A1 (ja) * | 2019-07-30 | 2021-02-04 | ソニーセミコンダクタソリューションズ株式会社 | 発光素子及び測距装置 |
| JP7544711B2 (ja) | 2019-07-30 | 2024-09-03 | ソニーセミコンダクタソリューションズ株式会社 | 発光ユニット及び測距装置 |
| JPWO2021020134A1 (enrdf_load_stackoverflow) * | 2019-07-30 | 2021-02-04 | ||
| CN114144951B (zh) * | 2019-07-30 | 2025-06-17 | 索尼半导体解决方案公司 | 发光元件和测距装置 |
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