JP2008263564A - Temperature-compensated piezoelectric oscillator - Google Patents

Temperature-compensated piezoelectric oscillator Download PDF

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JP2008263564A
JP2008263564A JP2007106676A JP2007106676A JP2008263564A JP 2008263564 A JP2008263564 A JP 2008263564A JP 2007106676 A JP2007106676 A JP 2007106676A JP 2007106676 A JP2007106676 A JP 2007106676A JP 2008263564 A JP2008263564 A JP 2008263564A
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integrated circuit
temperature
circuit element
recess
piezoelectric oscillator
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Takuo Masuyama
拓郎 益山
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Kyocera Crystal Device Corp
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Kyocera Crystal Device Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a temperature-compensated piezoelectric oscillator capable of temperature compensation with high accuracy, by eliminating the difference between the ambient temperature of a piezoelectric vibrating element and the temperature sensed by a temperature sensor element. <P>SOLUTION: The temperature compensated piezoelectric oscillator is provided with a container body constituted of a substrate, a first frame which is integrally provided on one principal surface of the substrate and forms a first recessed part, and a second frame which is integrally provided on another principal surface of the substrate and forms a second recessed part; a piezoelectric vibrating element mounted in the first recessed part; a first integrated circuit element; a second integrated circuit element mounted in the second recessed part; and a cover which air-tightly seals the first recessed part, wherein the first integrated circuit element comprises a temperature sensor and an oscillation circuit, and the second integrated circuit element comprises a temperature compensation circuit. Furthermore, the temperature compensated piezoelectric oscillator has a step which is provided to the substrate, within the first recessed part, and the first integrated circuit element is mounted in the step. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、携帯用通信機器等の電子機器に用いられる温度補償型圧電発振器に関するものである。   The present invention relates to a temperature compensated piezoelectric oscillator used in electronic equipment such as portable communication equipment.

従来から携帯用通信機器等の電子機器に温度補償型圧電発振器119が用いられている。従来の温度補償型圧電発振器119は、例えば図3に示されるように、基板体102上に圧電振動素子111が、基板体102の下面には集積回路素子116が搭載されている(例えば、特許文献1参照)。容器体101の一構成部分であるセラミックから成る基板体102の上面には枠状の第一の枠体103が形成されており、第一の枠体103の内部で基板体102の上面には圧電振動素子111が配置されている。圧電振動素子111は、基板体102の一方面に形成された配線パターンに導電性接着剤13を介して固着されて、電気的、機械的に保持されている。また、第一の枠体103上面には蓋体104がシーム溶接等により接合され、圧電振動素子111を気密封止している。また、セラミックの第二の枠体105に囲まれ、基板体102の下面には部品搭載パッド(不図示、以下同じ)が設けられ、発振用の集積回路素子116が部品搭載パッド115上に搭載されている。さらに、第二の枠体105の下面4隅部には4つの外部端子電極106が形成されている。この外部端子電極106は、例えば、集積回路素子116からセラミック内部で引出配線114を介して接続された入出力端子として用いられる。
特開2003−46251号公報
Conventionally, a temperature compensated piezoelectric oscillator 119 has been used in electronic devices such as portable communication devices. For example, as shown in FIG. 3, a conventional temperature compensated piezoelectric oscillator 119 has a piezoelectric vibration element 111 mounted on a substrate body 102 and an integrated circuit element 116 mounted on the lower surface of the substrate body 102 (for example, a patent). Reference 1). A frame-shaped first frame body 103 is formed on the upper surface of the substrate body 102 made of ceramic, which is a constituent part of the container body 101, and the upper surface of the substrate body 102 is formed inside the first frame body 103. A piezoelectric vibration element 111 is disposed. The piezoelectric vibration element 111 is fixed to a wiring pattern formed on one surface of the substrate body 102 via the conductive adhesive 13 and is electrically and mechanically held. A lid 104 is joined to the upper surface of the first frame 103 by seam welding or the like to hermetically seal the piezoelectric vibration element 111. In addition, a component mounting pad (not shown, the same applies hereinafter) is provided on the lower surface of the substrate body 102 and is surrounded by the ceramic second frame body 105, and an integrated circuit element 116 for oscillation is mounted on the component mounting pad 115. Has been. Further, four external terminal electrodes 106 are formed at the four corners of the lower surface of the second frame 105. The external terminal electrode 106 is used as, for example, an input / output terminal connected from the integrated circuit element 116 through the lead wiring 114 inside the ceramic.
JP 2003-46251 A

なお、前記した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を、本件出願時までに発見するには至らなかった。   In addition to the prior art documents specified by the prior art document information described above, no prior art documents related to the present invention have been found by the time of filing of the present application.

しかしながら、上述した従来の温度補償型圧電発振器では、容器体内で基板により分断された第一の凹部内に圧電素子、第二の凹部内に温度センサ素子が備えられた集積回路が備えられている為、この温度差により精度が高い温度補償が出来なくなるおそれがある。即ち、同一の密閉された容器体内に圧電振動素子と集積回路素子の両方が配置されていない為に圧電振動素子周囲の温度と、圧電振動素子が配置された空間と異なる空間に配置された集積回路素子内部に設けられた温度センサで感知する温度とに差が生じる。その結果、温度補償型圧電発振器の温度補償精度を改善することが困難であるという課題を有していた。   However, the above-described conventional temperature-compensated piezoelectric oscillator includes an integrated circuit in which a piezoelectric element is provided in a first recess and a temperature sensor element is provided in a second recess that is divided by a substrate in the container. Therefore, there is a possibility that temperature compensation with high accuracy cannot be performed due to this temperature difference. In other words, since both the piezoelectric vibration element and the integrated circuit element are not disposed in the same sealed container, the temperature around the piezoelectric vibration element and the integrated circuit disposed in a space different from the space where the piezoelectric vibration element is disposed. There is a difference between the temperature sensed by the temperature sensor provided inside the circuit element. As a result, it has been difficult to improve the temperature compensation accuracy of the temperature compensated piezoelectric oscillator.

本発明は上記課題に鑑み考え出されたものであり、従ってその目的は、圧電振動素子の周囲の温度と温度センサ素子が感知する温度に差が無く、精度の高い温度補償が可能な温度補償型圧電発振器を提供することにある。   The present invention has been conceived in view of the above-described problems, and therefore the object of the present invention is to provide temperature compensation capable of highly accurate temperature compensation without any difference between the temperature around the piezoelectric vibration element and the temperature sensed by the temperature sensor element. It is to provide a piezoelectric oscillator.

本発明の温度補償型圧電発振器は、基板体と、この基板体の一方の主面に一体で設けられて第一の凹部を形成する第一の枠体と、前記基板体の他方の主面に一体で設けられて第二の凹部を形成する第二の枠体とからなる容器体と、前記第一の凹部内に搭載される圧電振動素子と、第一の集積回路素子と、前記第二の凹部内に搭載される第二の集積回路素子と、前記第一の凹部を気密封止する蓋体とを備え、前記第一の集積回路素子が温度センサと発振回路とを備え、前記第二の集積回路素子が温度補償回路を備えて構成されていることを特徴とする。   The temperature-compensated piezoelectric oscillator of the present invention includes a substrate body, a first frame body integrally formed on one principal surface of the substrate body to form a first recess, and the other principal surface of the substrate body. A container body formed of a second frame body that is provided integrally with the first recess portion, a piezoelectric vibration element mounted in the first recess portion, a first integrated circuit element, and the first A second integrated circuit element mounted in the second recess, and a lid for hermetically sealing the first recess, wherein the first integrated circuit element includes a temperature sensor and an oscillation circuit, The second integrated circuit element includes a temperature compensation circuit.

また、本発明の温度補償型圧電発振器は、前記第一の凹部内であって前記基板体に設けられる段差部を備え、前記第一の集積回路素子を前記段差部内に搭載した構成であることを特徴とする。   The temperature compensated piezoelectric oscillator of the present invention has a step portion provided in the substrate body in the first recess, and the first integrated circuit element is mounted in the step portion. It is characterized by.

本発明の温度補償型圧電発振器によれば、温度センサ素子と発振回路が内部に設けられた第一の集積回路素子が圧電振動素子と同じ密閉凹部内容器体内に収容され、温度補償回路が設けられた第二の集積回路は圧電振動素子が収容された凹部とは別の凹部に搭載される為に、圧電振動素子の温度と、集積回路素子内部に設けられる温度センサが感知する温度差を小さくすることが出来、また、第二の集積回路内の温度補償回路やメモリ素子からの発熱を圧電振動素子が収容された空間と別の空間とすることで水晶の温度変化を少なくすることが出来、その結果、温度補償精度が改善された温度補償型圧電発振器の構造を得ることが出来る。   According to the temperature-compensated piezoelectric oscillator of the present invention, the first integrated circuit element in which the temperature sensor element and the oscillation circuit are provided is housed in the same sealed concave container as the piezoelectric vibration element, and the temperature compensation circuit is provided. Since the second integrated circuit is mounted in a recess different from the recess in which the piezoelectric vibration element is accommodated, the temperature difference between the temperature of the piezoelectric vibration element and the temperature sensor provided inside the integrated circuit element is detected. The temperature change of the crystal can be reduced by making the heat generation from the temperature compensation circuit and the memory element in the second integrated circuit different from the space in which the piezoelectric vibration element is accommodated. As a result, a temperature compensated piezoelectric oscillator structure with improved temperature compensation accuracy can be obtained.

また、本発明の温度補償型圧電発振器によれば、温度補償精度が改善され、圧電振動素子と第一の集積回路を同じ空間内に空間的に重ねた配置とした小型の温度補償型圧電発振器の構造を得ることが出来る。   Further, according to the temperature compensated piezoelectric oscillator of the present invention, the temperature compensated accuracy is improved, and a small temperature compensated piezoelectric oscillator in which the piezoelectric vibration element and the first integrated circuit are spatially stacked in the same space. Can be obtained.

以下、本発明を添付図面に基づいて詳細に説明する。なお、各図においての同一の符号は同じ対象を示すものとする。 Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. In addition, the same code | symbol in each figure shall show the same object.

図1は本発明の実施形態に係る温度補償型圧電発振器19の概略の断面図であり、図2はその温度補償型圧電発振器19の下面図である。図1に図示する温度補償型圧電発振器19は主に、容器体1と、圧電振動素子11と第一の集積回路素子12と、第二の集積回路素子16、樹脂17から構成されている。図1に図示する温度補償型圧電発振器19は、第一の凹部7内に圧電振動素子11と第一の集積回路素子12が収容される。第一の凹部7内には基板体2に設けられた段差部8が備えられ、第一の集積回路素子12が段差部8の下段側平面に搭載され、圧電振動素子11が段差部8の上段側平面上に搭載されている。また、容器体1の第二の凹部18内に第二の集積回路素子16が収容される。図2に図示するように第二の枠体5の下面の四隅部と第二の枠体5の長辺中央部に外部端子電極6が配置されている。また、第二の枠体5で囲まれる基板体2の下面に、第二の集積回路素子16を搭載した構造であり、第二の集積回路素子16と第二の枠体5内部は樹脂17で被われている。また、外部端子電極6のうち四隅部の外部端子電極6は温度補償型圧電発振器19の発振機能の動作端子として、また、第二の枠体5の長辺中央部に設けられた外部端子電極6は圧電振動素板の機能を動作端子に用いられる。   FIG. 1 is a schematic sectional view of a temperature compensated piezoelectric oscillator 19 according to an embodiment of the present invention, and FIG. 2 is a bottom view of the temperature compensated piezoelectric oscillator 19. A temperature-compensated piezoelectric oscillator 19 shown in FIG. 1 mainly includes a container body 1, a piezoelectric vibration element 11, a first integrated circuit element 12, a second integrated circuit element 16, and a resin 17. In the temperature compensated piezoelectric oscillator 19 shown in FIG. 1, the piezoelectric vibration element 11 and the first integrated circuit element 12 are accommodated in the first recess 7. A step portion 8 provided in the substrate body 2 is provided in the first recess 7, the first integrated circuit element 12 is mounted on the lower side plane of the step portion 8, and the piezoelectric vibration element 11 is provided on the step portion 8. It is mounted on the upper plane. The second integrated circuit element 16 is accommodated in the second recess 18 of the container body 1. As shown in FIG. 2, external terminal electrodes 6 are arranged at the four corners of the lower surface of the second frame 5 and at the center of the long side of the second frame 5. Further, the second integrated circuit element 16 is mounted on the lower surface of the substrate body 2 surrounded by the second frame body 5, and the second integrated circuit element 16 and the inside of the second frame body 5 are made of resin 17. It is covered with. The external terminal electrodes 6 at the four corners of the external terminal electrode 6 serve as operation terminals for the oscillation function of the temperature compensated piezoelectric oscillator 19 and are external terminal electrodes provided at the center of the long side of the second frame 5. 6 is a function of the piezoelectric vibrating base plate used as an operation terminal.

前記容器体1は、例えば、ガラス−セラミック、アルミナセラミックス等のセラミック材料から成る基板体2と、基板体2と同様のセラミック材料から成る第一の枠体3及び第二の枠体5からなる。第一の枠体3上には、42アロイやコバール、リン青銅等からなる蓋体4がシーム溶接等により接合されている。前記基板体2の上面に第一の枠体3を、下面に第二の枠体5を取着させ、第一の枠体3の上面に蓋体4を載置して固定させることによって容器体1が構成される。第一の枠体3の内側に位置する基板体2の上面に導電性接着剤13を介して圧電振動素子11と、第一の集積回路素子12が実装される。前記容器体1はその内部に、具体的には、基板体2の上面と、第一の枠体3の内面と、蓋体4の下面とで囲まれる第一の凹部7内に圧電振動素子11と、第一の集積回路素子12を収容して気密封止されている。   The container body 1 includes a substrate body 2 made of a ceramic material such as glass-ceramic and alumina ceramic, and a first frame body 3 and a second frame body 5 made of a ceramic material similar to the substrate body 2. . On the first frame 3, a lid 4 made of 42 alloy, Kovar, phosphor bronze or the like is joined by seam welding or the like. The first frame 3 is attached to the upper surface of the substrate body 2, the second frame 5 is attached to the lower surface, and the lid 4 is placed and fixed on the upper surface of the first frame 3. A body 1 is constructed. The piezoelectric vibration element 11 and the first integrated circuit element 12 are mounted on the upper surface of the substrate body 2 located inside the first frame 3 via the conductive adhesive 13. The container body 1 has a piezoelectric vibration element in the inside thereof, specifically, in a first recess 7 surrounded by an upper surface of the substrate body 2, an inner surface of the first frame body 3, and a lower surface of the lid body 4. 11 and the first integrated circuit element 12 are accommodated and hermetically sealed.

一方、容器体1の第一の凹部7内に収容される圧電振動素子11は、所定の結晶軸でカットした圧電片の両主面に一対の振動電極を被着・形成して出来ており、外部からの変動電圧が一対の振動電極を介して圧電振動素子11に印加されると、所定の周波数で厚みすべり振動を起こすようになっている。   On the other hand, the piezoelectric vibration element 11 accommodated in the first recess 7 of the container body 1 is formed by attaching and forming a pair of vibration electrodes on both main surfaces of a piezoelectric piece cut along a predetermined crystal axis. When an externally varying voltage is applied to the piezoelectric vibration element 11 via a pair of vibration electrodes, thickness shear vibration is caused at a predetermined frequency.

また一方で図1、図2に図示するように、上述した基板体2の下面には、第二の枠体5が被着・形成されており、第二の枠体5内部の基板体2の下面には、矩形状のフリップチップ型の第二の集積回路素子16が搭載されている。第二の集積回路素子16は導電性接着剤13を介して基板体2に接続されている。また、第二の集積回路素子16と第二の枠体5内部は樹脂17で覆われており、樹脂17により第二の集積回路素子16を保護する構造となっている。   On the other hand, as shown in FIGS. 1 and 2, the second frame body 5 is attached and formed on the lower surface of the substrate body 2 described above, and the substrate body 2 inside the second frame body 5. A rectangular flip-chip type second integrated circuit element 16 is mounted on the lower surface of the substrate. The second integrated circuit element 16 is connected to the substrate body 2 via the conductive adhesive 13. The second integrated circuit element 16 and the inside of the second frame 5 are covered with a resin 17, and the second integrated circuit element 16 is protected by the resin 17.

第一の集積回路素子12はその回路形成面に、周囲の温度状態を検知する温度センサと発振回路を備えている。また、第二の集積回路素子16には圧電振動素子11の温度特性を補償する温度補償データが記憶され、この温度補償データに基づいて前記圧電振動素子11の振動特性を温度変化に応じて補正する温度補償回路等が備えられている。第一の集積回路素子12の発振回路で生成された発振出力は、温度補償型圧電発振器19外部に出力された後、例えばクロック信号等の基準信号として利用される。ここで圧電振動素子11と、第一の集積回路素子12と、第二の集積回路素子16は図1に図示する基板体2の内層に設けられた引出配線14により接続されている。   The first integrated circuit element 12 includes a temperature sensor for detecting the ambient temperature state and an oscillation circuit on the circuit formation surface. The second integrated circuit element 16 stores temperature compensation data for compensating the temperature characteristics of the piezoelectric vibration element 11, and the vibration characteristics of the piezoelectric vibration element 11 are corrected according to the temperature change based on the temperature compensation data. A temperature compensation circuit is provided. The oscillation output generated by the oscillation circuit of the first integrated circuit element 12 is output to the outside of the temperature compensated piezoelectric oscillator 19 and then used as a reference signal such as a clock signal. Here, the piezoelectric vibration element 11, the first integrated circuit element 12, and the second integrated circuit element 16 are connected by a lead wire 14 provided in the inner layer of the substrate body 2 shown in FIG. 1.

本発明の特徴部分は図1に図示するように、圧電振動素子11が収容される第一の凹部7内には温度センサや発振回路の機能を有する第一の集積回路素子12を配置し、第二の凹部18内には温度補償回路やメモリ素子等を備えた第二の集積回路素子16を固着・収納し、第一の凹部7と第二の凹部18を基板体2の上下にそれぞれの凹部開口面が反対方向を向いて一体構造としたことにある。このように、温度センサ機能を有する第一の集積回路素子12を圧電振動素子11と近接して密閉された第一の凹部7内に配置することで圧電振動素子11と、温度センサが感知する温度の温度差を小さく出来るため、精度の高い温度補償が可能となり、温度補償精度が改善された温度補償型圧電発振器19を得ることが出来る。   As shown in FIG. 1, the characteristic part of the present invention is that a first integrated circuit element 12 having a function of a temperature sensor or an oscillation circuit is disposed in a first recess 7 in which the piezoelectric vibration element 11 is accommodated. A second integrated circuit element 16 having a temperature compensation circuit, a memory element, and the like is fixed and accommodated in the second recess 18, and the first recess 7 and the second recess 18 are respectively placed above and below the substrate body 2. This is that the concave opening has a one-piece structure in the opposite direction. As described above, the first integrated circuit element 12 having the temperature sensor function is disposed in the first recess 7 sealed in the vicinity of the piezoelectric vibration element 11, so that the piezoelectric vibration element 11 and the temperature sensor sense. Since the temperature difference in temperature can be reduced, highly accurate temperature compensation is possible, and the temperature compensated piezoelectric oscillator 19 with improved temperature compensation accuracy can be obtained.

また、本発明の温度補償型圧電発振器19によれば、第一の凹部7内に段差部8を設け、圧電振動素子11と、第一の集積回路素子12を上下方向に空間的に重なるように立体的に配置したことから、仮に圧電振動素子11と、第一の集積回路素子12を同一平面に並設した場合と比較して、温度補償型圧電発振器19の実装基板への実装面積を縮小することが可能となる。   Further, according to the temperature compensated piezoelectric oscillator 19 of the present invention, the step portion 8 is provided in the first recess 7 so that the piezoelectric vibration element 11 and the first integrated circuit element 12 are spatially overlapped in the vertical direction. Since the piezoelectric vibration element 11 and the first integrated circuit element 12 are arranged in parallel on the same plane, the mounting area of the temperature compensated piezoelectric oscillator 19 on the mounting board is reduced. It becomes possible to reduce.

なお、本発明は上述の実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。例えば上述の実施形態においては、図1に示すように、基板体2の上に圧電振動素子11と第一の集積回路素子12を搭載し、基板体2の下に第二の集積回路素子16を搭載する構造としているが、圧電振動素子11と第一の集積回路素子12を搭載する容器体と第二の集積回路素子16を搭載する容器体を重ねた構造とすることが出来る。   In addition, this invention is not limited to the above-mentioned embodiment, A various change, improvement, etc. are possible in the range which does not deviate from the summary of this invention. For example, in the above-described embodiment, as illustrated in FIG. 1, the piezoelectric vibration element 11 and the first integrated circuit element 12 are mounted on the substrate body 2, and the second integrated circuit element 16 is disposed below the substrate body 2. However, the container body in which the piezoelectric vibration element 11 and the first integrated circuit element 12 are mounted and the container body in which the second integrated circuit element 16 is mounted can be stacked.

また、上述の実施形態においては、第一の凹部7内に圧電振動素子11と第一の集積回路素子12のみを収容しているが、さらに第一の集積回路素子12の機能を分けた、例えば、発振回路機能と温度センサ機能に関連しないコンデンサや抵抗といった定数を集積させた保護回路といった第三の集積回路素子を収容しても構わない。また、同様に第二の凹部18内にはひとつの第二の集積回路素子16のみを搭載しているが、さらに別の第二の集積回路素子16の機能を分けた集積回路素子を収容することが出来る。   In the above-described embodiment, only the piezoelectric vibration element 11 and the first integrated circuit element 12 are accommodated in the first recess 7, but the function of the first integrated circuit element 12 is further divided. For example, a third integrated circuit element such as a protection circuit in which constants such as capacitors and resistors not related to the oscillation circuit function and the temperature sensor function are integrated may be accommodated. Similarly, only one second integrated circuit element 16 is mounted in the second recess 18, but an integrated circuit element in which the functions of another second integrated circuit element 16 are divided is accommodated. I can do it.

本発明の実施形態に係る温度補償型圧電発振器の概略の断面図である。1 is a schematic cross-sectional view of a temperature compensated piezoelectric oscillator according to an embodiment of the present invention. 本発明の温度補償型圧電発振器の概略の下面図である。It is a schematic bottom view of the temperature compensated piezoelectric oscillator of the present invention. 従来の温度補償型圧電発振器の概略の断面図である。It is a schematic sectional view of a conventional temperature compensated piezoelectric oscillator.

符号の説明Explanation of symbols

1・・・容器体
2・・・基板体
3・・・第一の枠体
4・・・蓋体
5・・・第二の枠体
6・・・外部端子電極
7・・・第一の凹部
8・・・段差部
11・・・圧電振動素子
12・・・第一の集積回路素子
13・・・導電性接着剤
14・・・引出配線
16・・・第二の集積回路素子
17・・・樹脂
18・・・第二の凹部
19・・・温度補償型圧電発振器
DESCRIPTION OF SYMBOLS 1 ... Container body 2 ... Substrate body 3 ... 1st frame 4 ... Lid 5 ... 2nd frame 6 ... External terminal electrode 7 ... 1st Concave part 8 ... Step part 11 ... Piezoelectric vibration element 12 ... First integrated circuit element 13 ... Conductive adhesive 14 ... Lead-out wiring 16 ... Second integrated circuit element 17 ..Resin 18 ... second recess 19 ... temperature compensated piezoelectric oscillator

Claims (2)

基板体とこの基板体の一方の主面に一体で設けられて第一の凹部を形成する第一の枠体と、前記基板体の他方の主面に一体で設けられて第二の凹部を形成する第二の枠体とからなる容器体と、
前記第一の凹部内に搭載される圧電振動素子と第一の集積回路素子と、
前記第二の凹部内に搭載される第二の集積回路素子と、
前記第一の凹部を気密封止する蓋体とを備え、
前記第一の集積回路素子が温度センサと発振回路とを備え、
前記第二の集積回路素子が温度補償回路を備えて構成されていることを特徴とする温度補償型圧電発振器。
A substrate body and a first frame body integrally formed on one main surface of the substrate body to form a first recess, and a second recess portion integrally formed on the other main surface of the substrate body A container body comprising a second frame body to be formed;
A piezoelectric vibration element and a first integrated circuit element mounted in the first recess;
A second integrated circuit element mounted in the second recess;
A lid for hermetically sealing the first recess,
The first integrated circuit element includes a temperature sensor and an oscillation circuit;
The temperature-compensated piezoelectric oscillator, wherein the second integrated circuit element includes a temperature compensation circuit.
前記第一の凹部内であって前記基板体に設けられる段差部を備え、
前記第一の集積回路素子を前記段差部内に搭載した構成であることを特徴とする請求項1に記載の温度補償型圧電発振器。
A step portion provided in the substrate body in the first recess,
2. The temperature compensated piezoelectric oscillator according to claim 1, wherein the first integrated circuit element is mounted in the stepped portion.
JP2007106676A 2007-04-16 2007-04-16 Temperature-compensated piezoelectric oscillator Pending JP2008263564A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010171968A (en) * 2008-12-26 2010-08-05 Nippon Dempa Kogyo Co Ltd Temperature compensated crystal oscillator
JP2011211340A (en) * 2010-03-29 2011-10-20 Kyocera Kinseki Corp Piezoelectric device
KR101227837B1 (en) * 2011-03-11 2013-01-31 세이코 엡슨 가부시키가이샤 Piezoelectric device and electronic apparatus
US8749123B2 (en) 2010-03-29 2014-06-10 Kyocera Kinseki Corporation Piezoelectric device
JP2016027737A (en) * 2015-09-17 2016-02-18 セイコーエプソン株式会社 Vibration device and electronic equipment

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010171968A (en) * 2008-12-26 2010-08-05 Nippon Dempa Kogyo Co Ltd Temperature compensated crystal oscillator
JP2011211340A (en) * 2010-03-29 2011-10-20 Kyocera Kinseki Corp Piezoelectric device
US8749123B2 (en) 2010-03-29 2014-06-10 Kyocera Kinseki Corporation Piezoelectric device
KR101227837B1 (en) * 2011-03-11 2013-01-31 세이코 엡슨 가부시키가이샤 Piezoelectric device and electronic apparatus
US8754718B2 (en) 2011-03-11 2014-06-17 Seiko Epson Corporation Piezoelectric device and electronic apparatus
US9054604B2 (en) 2011-03-11 2015-06-09 Seiko Epson Corporation Piezoelectric device and electronic apparatus
US9160254B2 (en) 2011-03-11 2015-10-13 Seiko Epson Corporation Piezoelectric device and electronic apparatus
US9685889B2 (en) 2011-03-11 2017-06-20 Seiko Epson Corporation Piezoelectric device and electronic apparatus
US10715058B2 (en) 2011-03-11 2020-07-14 Seiko Epson Corporation Piezoelectric device and electronic apparatus
JP2016027737A (en) * 2015-09-17 2016-02-18 セイコーエプソン株式会社 Vibration device and electronic equipment

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