JP2008246653A - Stone connecting mechanism and stone connecting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To transport a rail supporting part made of stone and to easily work the rail supporting part by a working device even in enlarging the device. <P>SOLUTION: Transportation of the rail supporting part 6 is made free to carry out by dividing the rail supporting part 6 by constituting the rail supporting part 6 made of stone free to divide in the Y axis direction, and working of both of rail supporting parts 6a, 6b is made free to easily carry out by the working device. Additionally, both of the rail supporting parts 6a, 6b are easily divided and transported by releasing fastening of a bolt 13 after connecting both of the rail supporting parts 6a, 6b to each other by frictional force by the bolt 13, assembling a stage device and inspecting motion confirmation, etc. before carrying out transportation. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a stone connection structure and a stone connection method.

2. Description of the Related Art Conventionally, a stage device is known in which a rail portion having a sliding surface of a moving member and a rail support portion that supports the rail portion are made of a stone material. In this stage apparatus, a stone surface plate (rail support portion) fixed on the gantry and two guide members (rails) formed so as to be parallel to each other in the width direction on the stone surface plate and extend in the longitudinal direction Part) and a moving body that moves along the guide member by a linear motor drive system (see, for example, Patent Document 1).
Japanese Patent Laying-Open No. 2004-309459 (prior art, FIG. 3)

  However, when the size of the stage device is increased in response to the recent demand for larger size, the stone surface plate that supports the guide member also becomes larger, which makes transportation difficult and makes the stone surface plate by the processing device difficult. Processing may also be difficult.

  The present invention has been made to solve such a problem, and even when the apparatus is increased in size, it is possible to transport a rail support portion made of a stone material such as a stone surface plate. In addition, an object is to enable easy processing of the rail support portion by the processing device.

  The stone connection structure according to the present invention includes a rail support portion made of stone material that is configured to support a rail portion made of stone material having a sliding surface of a moving member and to be divided in a moving direction of the moving member. The rail support portions are connected to each other by a frictional force generated between the divided surfaces by fastening means.

  According to such a configuration, even when the apparatus is increased in size, the rail support portion can be transported by dividing the rail support portion made of stone in the moving direction of the moving member. The rail support portion can be easily processed by the processing apparatus. Here, it is necessary for the stage apparatus or the like to perform inspections such as operation confirmation by connecting the rail support portions and assembling the apparatus before transporting. Therefore, for example, when the rail support portions are connected using an adhesive or the like, the rail support portions cannot be divided after the device is assembled. However, in this invention, since the divided | segmented rail support parts are connected with the frictional force by a fastening means, it can divide | emit easily by canceling | releasing fastening and can carry out.

  Further, the fastening means has a bolt, and a recess is formed in the rail support part, and the bolt enters the rail support part to be connected from the surface facing the dividing surface on the side surface of the recess, whereby the rail support parts are connected to each other. Are preferably linked. As a result, it is possible to efficiently generate a frictional force between the divided surfaces without causing any trouble due to the concave portion on the sliding surface, and to accommodate the bolt inside the concave portion without protruding from the rail support portion. it can.

  Moreover, it is preferable to provide the support member which supports the edge part by the side of the division surface of rail support parts simultaneously from the downward direction. Thus, by adjusting the deviation in the height direction between the rail support portions and supporting the flatness and the horizontality when the upper surface of the rail support portion is a sliding surface, it can be supported from below by the support member. it can.

  Here, when the upper surface and the side surface of the rail portion are the sliding surfaces, it is necessary to simultaneously perform the adjustment for ensuring the levelness of the sliding surface on the upper surface side and the adjustment for ensuring the verticality of the sliding surface on the side surface side. Therefore, the adjustment work becomes very difficult. Therefore, it is preferable that the side surface of the rail portion and the upper surface of the rail support portion are sliding surfaces, and the rail portion is detachable from the rail support portion. As a result, the adjustment for ensuring the level of the sliding surface on the upper surface side of the rail support portion and the adjustment for ensuring the verticality of the sliding surface on the side surface side of the rail portion can be performed independently. be able to.

  Moreover, it is preferable that a rail part is comprised so that division | segmentation is possible in the moving direction of a moving member, and the divided | segmented rail part is connected on the rail support part which supports the said rail part. As a result, the rail portion made of stone can also be divided, so that even if the size of the device is increased and the size of the rail portion is increased, transportation is possible and the processing of the rail portion by the processing device is easy. Can be done. Moreover, since a rail part is connected on the rail support part which supports the said rail part, it does not need to connect rail parts.

  Moreover, it is preferable that the dividing surface of a rail part and the dividing surface of a rail support part are not continuous. Thereby, in a rail part and a rail support part, a connection part with comparatively low rigidity can be distributed and arranged.

  Moreover, it is preferable to include a pin that is disposed across both of the dividing surfaces of the rail portions and prevents deviation in the plane of the dividing surface. Accordingly, it is possible to prevent the occurrence of a step on the sliding surface of the rail portion due to the deviation in the plane of the dividing surface with a simple structure.

  In addition, it is preferable to include a pin that is disposed across both of the divided surfaces of the rail support portions and prevents deviation in the plane of the divided surface. As a result, it is possible to prevent the occurrence of a step on the sliding surface of the rail support portion due to the deviation in the plane of the dividing surface with a simple structure.

  Further, it is preferable that a chamfered portion is formed at a corner where the sliding surface and the divided surface intersect, and the chamfered portion is filled with a filler. Accordingly, it is possible to prevent the corner portion from being applied and to ensure the flatness of the sliding surface by the filler.

  Further, in the stone connection method according to the present invention, one rail support portion and the other rail support portion are aligned so that the respective axis centers are parallel and the respective divided surfaces face the same direction. After surface processing is performed on the divided surfaces by co-processing, the divided surfaces are connected face to face so that the divided surfaces are parallel to each other.

  Here, when each of the divided surfaces is processed independently, the vertical surfaces of the processed surfaces must be produced with high accuracy, and when the divided surfaces are brought together, the divided surfaces do not fit together, and one rail is supported. The sliding surface of the part is inclined with respect to the other sliding surface (having an angle), and the desired sliding surface cannot be secured, and therefore it is very troublesome to perform surface processing on the divided surface. It will take. However, according to the method as described above, since the surface processing of the split surfaces of both rail support parts is performed by co-processing, when the split surfaces face each other so that the split surfaces face each other, the split surfaces are perfect. Can be connected together. By the above, a desired sliding surface can be ensured, without taking time and effort for surface processing on the divided surface.

  Further, in the stone connecting method according to the present invention, one rail portion and the other rail portion are aligned so that the respective axes are parallel and the respective divided surfaces face the same direction, and the respective divided surfaces are arranged. After surface processing is performed by co-processing, the divided surfaces are connected face to face so that they are parallel to each other.

  According to such a method, like the above-mentioned rail support part, a desired sliding surface can be ensured without taking time and effort for surface processing on the divided surface.

  Moreover, the stone connection method according to the present invention is characterized in that the end portions on the dividing surface side between the rail support portions are supported from below and the deviation in the height direction between the rail support portions is adjusted.

  According to such a method, the adjustment work for ensuring the flatness and levelness of the sliding surface on the upper surface of the rail support portion by adjusting the shift in the height direction between the rail support portions while supporting from below. Can be easily performed.

  Further, the stone connecting method according to the present invention is characterized in that after adjusting the parallelism of the sliding surface with respect to the base portion of the rail support portion, the position adjustment of the rail portion with respect to the rail support portion is connected.

  According to such a method, adjustment including adjustment for ensuring parallelism with respect to the base portion of the sliding surface on the upper surface side of the rail support portion and adjustment including adjustment for ensuring verticality of the sliding surface on the side surface side of the rail portion are performed. Since it can be performed independently, adjustment work can be easily performed.

  As described above, according to the present invention, even when the apparatus is increased in size, the rail support portion made of stone can be transported, and the rail support portion can be easily processed by the processing apparatus.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of a stone connecting structure and a stone connecting method according to the present invention will be described with reference to the accompanying drawings.

  FIG. 1 is a perspective view showing a stage apparatus 1 employing a stone connecting structure according to the present invention, and FIG. 2 is a front view of the stage apparatus 1 shown in FIG.

  As shown in FIG. 1, a stage apparatus 1 includes a flat rectangular frame 2 formed by combining metal members, a gantry unit (moving member) 3 that moves in the longitudinal direction on the frame 2, and a gantry unit. 3 includes a rail portion 4 that guides the movement of the rail 3, a rail support portion 6 that supports the rail portion 4 and is placed on the gantry 2, and a linear motor portion 7 that drives the gantry portion 3. The gantry portion 3 is a rail. It moves along the part 4. In FIG. 1, the longitudinal direction of the gantry 2 is defined as the Y-axis direction, and the horizontal direction perpendicular thereto is defined as the X-axis direction.

  The rail support portions 6 are formed into a quadrangular prism shape by processing a stone, and two rail support portions 6 are arranged so as to be parallel to each other on both sides of the gantry upper surface (base portion) 2a in the X axis direction and extend in the Y axis direction. The overall length of the rail support portion 6 substantially matches the length of the gantry 2 in the Y-axis direction. Further, as shown in FIG. 2, a leveling block (support member) 8 for adjusting the height is disposed between the rail support portion 6 and the gantry 2.

  Returning to FIG. 1, the rail portion 4 is formed into a quadrangular prism shape by processing a stone, extends in the Y-axis direction, and is disposed and fixed on the upper surface of the rail support portion 6. The total length of the rail portion 4 substantially matches the length of the rail support portion 6 in the Y-axis direction. The rail portion 4 may be provided only on one rail support portion 6.

  The gantry unit 3 includes a guide slider 3a that extends in the X-axis direction and is arranged at both ends, and a stage 3b that connects the guide sliders 3a to each other. As shown in FIG. 2, the guide slider 3a is formed so as to surround the rail portion 4 from above and from both sides, and air pads 3c are provided on the side surfaces of the rail portion 4 and the upper surface of the rail support portion 6, respectively. Is provided. The air pad 3c blows high-pressure air toward the rail portion 4 and the rail support portion 6, and causes the guide slider 3a to float on the rail portion 4 in a non-contact manner. The air pads 3c provided on the surfaces facing the side surfaces of the rail portion 4 of the guide sliders 3a at both ends are provided on both the surface facing the inner side surface of the rail portion 4 and the surface facing the outer side surface. Alternatively, it may be provided only on either the surface facing the inner side surface or the surface facing the outer side surface.

  The linear motor portion 7 includes an attachment portion 7a attached to the outer side surface of one rail support portion 6 and a U-shaped permanent magnet portion 7b provided on the upper surface of the attachment portion 7a. The attachment portion 7a and the permanent magnet portion 7b extend in the Y-axis direction, and the entire length thereof substantially matches the length of the rail portion 4 in the Y-axis direction. The opening 7c forming the U-shape of the permanent magnet portion 7b is directed to the rail portion 4, and a predetermined pattern of S and N poles is repeated in the Y-axis direction on the inner surface of the U-shape. Is formed. The armature coil 3d protrudes from the guide slider 3a on the linear motor portion 7 side so as to enter the opening 7c of the permanent magnet portion 7b. The armature coil 3d generates a magnetic field in accordance with the S-pole and N-pole patterns of the permanent magnet portion 7b and generates thrust between the permanent magnet portion 7b to support the gantry portion 3 with the rail portion 4 and the rail. It can be moved in the Y-axis direction while being guided by the portion 6. The linear motor unit 7 may be attached to both the rail support units 6.

  FIG. 3 is a perspective view showing the structure of the rail part 4 and the rail support part 6 in detail. As shown in FIG. 3, the rail part 4 is divided | segmented into the one rail part 4a and the other rail part 4b by the division surface 21 orthogonal to a Y-axis direction. The rail support portion 6 is divided into one rail support portion 6a and the other rail support portion 6b at a dividing surface 22 orthogonal to the Y-axis direction. The dividing surface 21 and the dividing surface 22 are not continuous and are formed apart from each other in the Y-axis direction. Further, the side surface of the rail portion 4 and the upper surface of the rail support portion 6 are the sliding surfaces 4c and 6c on which the air pad 3c of the gantry portion 3 slides.

  A plurality of through holes 14 for inserting bolts 16 to be described later are formed on the upper surface 4d of the rail portion 4, and a hole 4m for inserting a pin 9 for preventing displacement is provided across the dividing surface 21. It is done. On the side surface 6e of the other rail support portion 6b, two concave portions 12 are formed at positions adjacent to the dividing surface 22 so as to accommodate bolts (fastening means) 13 described later, spaced apart in the vertical direction. Further, as shown in FIG. 4, a through-hole 6p for inserting a bolt 13 described later is provided on a surface 12a facing the dividing surface 22 in the recess 12 of the other rail support portion 6b. A female screw 6q for screwing the bolt 13 is provided on the dividing surface 22 side of the portion 6a. Further, a hole 6m for inserting the pin 11 for preventing deviation is provided across the dividing surface 22. Further, a female screw 6 n for screwing the bolt 16 is provided on the upper surface of the rail support portion 6. The two recesses 12 may be provided on the side surface 6e of one rail support portion 6a, and the female screw 6q may be provided on the dividing surface 22 side of the other rail support portion 6a. Alternatively, only one of the concave portions 12 may be provided on the side surface 6e of one rail support portion 6a. Moreover, the recessed part 12 may be provided in the side surface on the opposite side to the side surface 6e further.

  Bolts 16 are inserted into the through holes 14 of the rail portion 4 and screwed into the female screws 6 n of the rail support portion 6. Thus, one rail portion 4a is connected to one rail support portion 6a, and the other rail portion 4b is connected to the other rail support portion 6b. Further, the bolt 13 enters the one rail support portion 6a from the surface 12a facing the division surface 22 in the concave portion 12 of the other rail support portion 6c, is screwed into the female screw 6q, and is fastened. The one rail support portion 6a and the other rail support portion 6b are connected by the frictional force generated between the two rails. Further, pins 9 and 11 are inserted into the hole 4m of the rail portion 4 and the hole 6m of the rail support portion 6, respectively, and a gap between the holes 4m and 6m and the pins 9 and 11 is filled with an adhesive. .

  At the position of the dividing surface 22 on the lower surface 6d of the rail support portion 6, a support plate (support member) 17 for simultaneously supporting the end portions on the dividing surface 22 side of one rail support portion 6a and the other rail support portion 6b. And the leveling block 8 which supports this support plate 17 from the downward direction is arrange | positioned. In addition, it is good also as a structure which curves the support plate 17, supports one rail support part 6a in one edge part, and supports the other rail support part 6b in the other edge part.

  Next, the connection method of the rail part 4 and the rail support part 6 is demonstrated.

  First, one rail support portion 6a and the other rail support portion 6b are formed by processing a stone material into a quadrangular prism shape. In addition, the surface 6c is formed by performing surface processing for ensuring flatness on each upper surface. Further, female threads 6n are formed on the sliding surfaces 6c of the rail support portions 6a and 6b. In addition, a female screw 6q is formed on the end surface on the split surface side of one rail support portion 6a, a recess 12 is formed on the side surface 6e of the other rail support portion 6b, and a through hole 6p is formed on the end surface. In addition, a semicircular groove having a hole 6m is formed on the end face. All corner portions of both rail support portions 6a and 6b are chamfered to form a chamfered portion.

  5-7 is schematic which shows the processing method of the division surface 22 of the rail support part 6. FIG. As shown in FIGS. 5 (a) to 7 (a), one rail support portion 6a and the other rail support portion 6b are parallel to each other with the axis L1 and L2 being parallel to each other, After being aligned so as to face in the same direction and subjecting each of the divided surfaces 22 to co-processing, the divided surfaces 22 are parallel to each other as shown in FIGS. Face to face.

  Specifically, the divided surfaces 22 are aligned so as to form the same plane, and surface processing is performed by co-processing. Here, as shown in FIG. 5A, when the dividing surface 22 is inclined in the vertical direction with respect to the reference surface 22a, as shown in FIG. What is necessary is just to arrange | position so that the lower surface of the part 6b may make the same plane as the upper surface of one rail support part 6a, and each division surface 22 may face each other.

  Further, as shown in FIG. 6A, when the dividing surface 22 is inclined to the side with respect to the reference surface 22a, as shown in FIG. What is necessary is just to arrange | position so that the upper surface of 6b may make the same plane as the upper surface of one rail support part 6a, and each division surface 22 may face each other.

  Further, as shown in FIG. 7A, when the dividing surface 22 is inclined in the vertical direction with respect to the reference surface 22a and is inclined to the side, it is shown in FIG. 7B. As described above, the side surface of the other rail support portion 6b opposite to the side surface in contact with the one rail support portion 6a is flush with the upper surface of the one rail support portion 6a, and the respective divisions are made. What is necessary is just to arrange | position so that the surface 22 may face.

  Here, when each of the divided surfaces 22 is independently machined, the divided surfaces 22 do not exactly match each other when the divided surfaces 22 are aligned with each other unless the surface accuracy of the processed surfaces is high. The sliding surface 6c of the other rail support portion 6a is inclined (has an angle) with respect to the sliding surface 6c of the other rail support portion 6a, and a desired sliding surface 6c cannot be secured, and therefore, the divided surface It takes a lot of time to perform surface machining on the surface 22. However, according to the method as described above, the surface processing of the split surfaces 22 of both rail portions is performed by co-processing, and therefore, when the split surfaces 22 face each other in parallel, the split surfaces 22 Can be connected in a state in which As described above, the desired sliding surface 6c can be secured without taking time and effort for the surface processing on the dividing surface 22.

  Note that if the periphery of the central portion of the dividing surface 22 is recessed before the surface processing of the dividing surface 22 is performed, the region to be subjected to the surface processing can be limited to the edge of the dividing surface 22, so that the processing efficiency is improved. Can be improved.

  Moreover, one rail part 4a and the other rail part 4b are formed by processing a stone material in the shape of a quadrangular prism. And the other rail part 4b is piled up on the upper surface 4d of one rail part 4a, and the surface 4c is formed by co-processing the surface processing for ensuring flatness with respect to each side surface. Moreover, the through hole 14 is formed in the upper surface 4d of both the rail parts 4a and 4b. Further, a groove having a semicircular cross section to be the hole 4m is formed on the end face. All corner portions of both rail portions 4a and 4b are chamfered to form a chamfered portion.

  A method similar to that for the rail support portion 6 described above is adopted as a method for processing the dividing surface 21. As a result, similarly to the rail support portion 6 described above, the desired sliding surface 4c can be secured without taking time and effort for the surface processing on the dividing surface 21.

  Subsequently, one rail part 4a is mounted on the sliding surface 6c of one rail support part 6a, and the bolt 16 is temporarily tightened. Moreover, the other rail part 4b is mounted on the sliding surface 6c of the other rail support part 6b, and the volt | bolt 16 is temporarily tightened. Thereafter, as described above, the bolts 13 are temporarily fastened to the two rail support portions 6a and 6b facing each other, and the one rail support portion 6a and the other rail support portion 6b are connected. Then, the connected rail support 6 is placed on the leveling block 8.

  Next, the leveling block 8 is adjusted to adjust the height of each portion of the rail support portion 6 and the tightening strength of the bolt 13 is adjusted to ensure the flatness and levelness of the sliding surface 6c. To make adjustments. Thereby, the shift in the height direction between the rail support portions 6a and 6b can be adjusted while being supported from below, and the flatness and levelness of the sliding surface 6c which is the upper surface of the rail support portion 6 are ensured. Adjustment work can be performed easily.

  Then, after the position adjustment of the sliding surface 6c of the rail support portion 6 is completed, the adjustment for securing the flatness and the verticality of the sliding surface 4c of the rail portion 4 by adjusting the tightening strength of the bolt 16 is performed. I do.

  As described above, the adjustment including the adjustment for ensuring the level of the sliding surface 6c of the rail support portion 6 and the adjustment including the adjustment for ensuring the verticality of the sliding surface 4c of the rail portion 4 can be independently performed. Therefore, adjustment work can be performed easily.

  When adjustment work is completed and inspections such as operation confirmation are performed, disassemble and transport to the site for reassembly. And the pin 11 is inserted in the hole 6m formed in the position which straddles the division surface 22 of the rail support part 6, and it fixes with an adhesive agent. Similarly, a hole 4m and a pin 9 formed at a position across the dividing surface 21 of the rail portion 4 are inserted and fixed with an adhesive. Moreover, as shown in FIG. 8, the chamfering part between both the rail parts 4a and 4b in the sliding surface 4c is filled with the filler 18. Further, a filler 18 is filled in a chamfered portion between the rail support portions 6a and 6b on the sliding surface 6c. The filler 18 is preferably an epoxy-based material that hardly causes thermal expansion.

  As described above, according to the stone connection structure according to the present invention, even when the stage device 1 is increased in size, the rail support portion 6 made of stone is divided in the Y-axis direction to thereby provide a rail. The support portion 6 can be transported and the rail support portions 6a and 6b can be easily processed by the processing apparatus. As described above, the stage apparatus 1 needs to be assembled and inspected for operation confirmation and the like before being transported. Therefore, for example, when both rail support portions 6a and 6b are connected to each other using an adhesive or the like, the rail support portion 6 cannot be divided after the stage device 1 is assembled. , Since the divided rail support portions 6a and 6b are connected by the frictional force by the bolt 13, they can be easily divided by releasing the fastening and can be transported.

  Further, a recess 12 is formed in a side surface 6e which is a surface excluding the sliding surface 6c of the other rail support portion 6b, and a bolt 13 is connected to one rail support portion 4a from a surface 12a facing the dividing surface 22 on the side surface of the recess 12. The rail support portions 6a and 6b are coupled to each other by the entry of. Accordingly, it is possible to efficiently generate a frictional force between the divided surfaces 22 without hindering the sliding surface 6 c from being caused by the recess 12, and to prevent the bolt 13 from protruding from the rail support portion 6. Can be housed inside.

  Further, by supporting the end of the rail support portions 6a, 6b on the dividing surface 22 side simultaneously from below with the leveling block 8 and the support plate 17, the rail support portions 6a, 6b are displaced in the height direction. And the leveling block 8 and the support plate 17 can support from below with the flatness and horizontality secured when the upper surface of the rail support portion 6 is the sliding surface 6c.

  Here, when the upper surface and the side surface of the rail portion 4 are the sliding surfaces, the adjustment for securing the level of the sliding surface on the upper surface side and the adjustment for ensuring the verticality of the sliding surface on the side surface side must be performed simultaneously. However, in this embodiment, the side surface of the rail portion 4 is the sliding surface 4c, and the upper surface of the rail support portion 6 is the sliding surface 6c. 4 is attachable to and detachable from the rail support portion 6. Therefore, adjustment for ensuring the level of the sliding surface 6 c of the rail support portion 6 and adjustment for ensuring the verticality of the sliding surface 4 c of the rail portion 4 are performed. It can be performed independently and adjustment work can be easily performed.

  Moreover, the rail part 4 is comprised so that division | segmentation is possible in the Y-axis direction, and both the divided | segmented rail parts 4a and 4b are connected on both rail support parts 6a and 6b which support the said both rail parts 4a and 4b. Therefore, the rail portion 4 made of stone can also be divided, and even if the stage device 1 is increased in size and the rail portion 4 is increased in size, it can be transported and both rail portions 4a by the processing device can be used. , 4b can be easily performed. Moreover, since both the rail parts 4a and 4b are connected on the both rail support parts 6a and 6b which support the said rail parts 4a and 4b, both the rail parts 4a and 4b do not need to connect.

  Further, since the dividing surface 21 of the rail portion 4 and the dividing surface 21 of the rail support portion 6 are not continuous, the connecting portions having relatively low rigidity are distributed and arranged in the rail portion 4 and the rail support portion 6. be able to.

  Further, the pin 9 for preventing the deviation can prevent the occurrence of the step of the sliding surface 4c of the rail portion 4 due to the deviation in the plane of the dividing surface 21 with a simple structure.

  Further, the pin 11 for preventing the shift can prevent the occurrence of a step on the sliding surface 6c of the rail support portion 6 due to the shift in the plane of the dividing surface 22 with a simple structure.

  Further, by filling the chamfered portions of the sliding surfaces 4c and 6c with the filler 18, the corner portions of the rail portions 4a and 4b and the rail support portions 6a and 6b are prevented from being applied, and the sliding surface is provided by the filler 18. The flatness of 4c and 6c can be ensured.

  As described above, the present invention has been specifically described based on the embodiment. However, the present invention is not limited to the above embodiment. For example, only the upper side of the rail support portion 6 is formed of a stone, and the lower side is a metal. Moreover, it is good also as a product and the mount frame 2 is good also as a stone material with the rail support part 6. FIG.

  Even if the chamfered portion is not formed between the rail portions 4a and 4b on the sliding surface 4c and between the rail support portions 6a and 6b on the sliding surface 6c, the flatness of the sliding surfaces 4c and 6c is ensured. good. In addition, when a hook occurs, the corresponding part is filled with a filler.

  In the above-described embodiment, the application to the uniaxial type in which the gantry unit 3 moves in the Y-axis direction has been described. Applicable.

  Moreover, the rail part 4 may be comprised from one stone material.

It is a perspective view which shows the stage apparatus which employ | adopted the stone connection structure which concerns on this invention. It is a front view of the stage apparatus shown in FIG. It is a perspective view which shows the structure of a rail part and a rail support part in detail. It is an enlarged side view of the division part of a rail part and a rail support part. It is the schematic which shows the processing method of the division surface of a rail support part, (a) is a perspective view which shows a mode in the case of performing surface processing by co-processing with respect to a division surface, (b) is both rails after a process. It is a perspective view which shows a mode that the support parts faced each other. It is the schematic which shows the other processing method of the division surface of a rail support part, and is a figure corresponding to FIG. It is the schematic which shows the further another processing method of the division surface of a rail support part, and is a figure corresponding to FIG. It is a partial expanded sectional view which shows the filling material with which the chamfering part and the chamfering part were filled.

Explanation of symbols

  2a ... Upper surface of base (base portion), 3 ... Gantry portion (moving member), 4 ... Rail portion, 4a ... One rail portion, 4b ... Other rail portion, 4c ... Sliding surface, 6 ... Rail support portion, 6a ... One rail support part, 6b ... the other rail support part, 6c ... sliding surface, 8 ... leveling block (support member), 9, 11 ... pin, 12 ... recess, 13 ... bolt (fastening means), 17 ... support plate (Support member), 18... Filler, 21, 22.

Claims (13)

A rail supporting portion made of stone material provided with a sliding surface of the moving member, and a rail supporting portion made of stone material configured to be divided in the moving direction of the moving member;
The divided rail support portions are connected to each other by a frictional force generated between the divided surfaces by fastening means. The fastening means comprises a bolt;
A recess is formed in the rail support portion, and the rail support portions are connected to each other when the bolt enters the rail support portion to be connected from the surface facing the dividing surface on the side surface of the recess. The stone connection structure according to claim 1, characterized in that:   The stone connection structure according to claim 1, further comprising a support member that simultaneously supports the end portions of the rail support portions on the dividing surface side from below.   The side surface of the rail part and the upper surface of the rail support part are the sliding surfaces, and the rail part is detachable from the rail support part. The stone connection structure according to one item. The rail portion is configured to be divisible in the moving direction of the moving member,
The stone connecting structure according to any one of claims 1 to 4, wherein the divided rail part is connected to a rail support part that supports the rail part.   The stone connecting structure according to claim 5, wherein the dividing surface of the rail portion and the dividing surface of the rail support portion are not continuous.   The stone connecting structure according to claim 5 or 6, further comprising a pin that is disposed across both of the dividing surfaces of the rail portions and prevents a shift in the surface of the dividing surface.   8. The device according to claim 1, further comprising a pin that is disposed across both of the dividing surfaces of the rail support portions and prevents a shift in the surface of the dividing surface. 9. Stone connection structure.   The stone connection structure according to any one of claims 1 to 8, wherein a chamfered portion is formed at a corner portion where the sliding surface and the divided surface intersect, and the chamfered portion is filled with a filler. . A method of connecting the rail support portions according to claim 1,
One rail support and the other rail support are aligned so that their axes are parallel and each split surface faces the same direction. After the application, the stone connecting method is characterized in that the divided surfaces are connected so as to be parallel to each other. A method for connecting the rail portions according to claim 5,
One rail part and the other rail part are aligned so that the respective axis centers are parallel and the respective divided surfaces face in the same direction, and surface processing is applied to each divided surface by co-processing. After that, the stone connecting method is characterized in that the divided surfaces are connected to face each other in parallel. A method of connecting the rail support portions according to claim 1,
A stone connecting method characterized by supporting the end of the rail support portions on the dividing surface side from below and adjusting the deviation in the height direction between the rail support portions. A method for connecting the rail portion and the rail support portion according to claim 1,
A method for connecting stones, comprising: adjusting a position of the rail portion relative to the rail support portion after adjusting a parallelism of the sliding surface with respect to a base portion of the rail support portion.

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