JP2006205279A - X-y stage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lightweight high performance X-Y stage device made of a fiber reinforced synthetic resin, capable of highly accurate machining such as grinding, reducing thermal deformation, and superior in vibration damping performance. <P>SOLUTION: This X-Y stage device 10 has a device body 11 for arranging a guide rail 12 on an upper surface 11a, an X axis moving body 20 for moving in the X axis direction along the guide rail 12 on this device body 11, and a Y axis moving body 30 for moving in the Y axis direction orthogonal to the X axis direction along a guide rail 28 arranged in this X axis moving body 20. The device body 11 and the respective moving bodies 20 and 30 are formed of the fiber reinforced synthetic resin, and a machining margin of the predetermined thickness is formed by adhering a plurality of small metallic pieces 50 for reducing the thermal deformation to respective part installing surfaces of the device body 11 and the respective moving bodies 20 and 30. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an XY stage apparatus suitable for use in, for example, a substrate inspection apparatus for inspecting a glass substrate pattern or the like of a liquid crystal display (LCD).

  2. Description of the Related Art Conventionally, a substrate inspection apparatus using an XY stage apparatus that moves a movable body (stage) in a predetermined axial direction is known as an apparatus for performing various inspections such as a glass substrate pattern used in an LCD ( For example, see Patent Documents 1 and 2.)

  Today, LCDs are becoming larger and demand for large XY stage devices is increasing for inspection and the like, and a drive system that drives a moving body that moves horizontally in a predetermined axial direction is high speed and high. Accurate positioning is required. Therefore, the necessity for constructing the moving body with a lightweight and highly rigid material is demanded.

  Generally, a light metal such as an aluminum alloy is used to reduce the weight of the moving body. However, this light metal has a large thermal expansion and a low rigidity, and is not suitable as a material for a high-precision device due to bending or the like. there were. That is, for example, a light metal such as an aluminum alloy extends about 23 μm at a temperature increase of 1 degree per 1 m, so that a mobile body for 2 m or 3 m extends as it is, and the overall deflection becomes large, so that high-precision positioning is difficult.

  On the other hand, the development of resin is remarkable, and today, the combination of resin that is hardly affected by temperature, carbon fiber, glass fiber, etc., is not affected by heat, is carbon fiber that has higher rigidity than metal such as iron and excellent vibration damping Fiber reinforced plastics (fiber reinforced synthetic resins) such as reinforced plastics and glass fiber reinforced plastics have been developed.

JP 2004-317485 A

JP 2002-82067 A

  However, since the fiber reinforced synthetic resin directly scratches the surface and the like, it damages the fiber and impairs its strength, so it cannot produce high-precision parts and uses this kind of material. It was difficult to construct the XY stage apparatus.

  Therefore, the present invention has been made to solve the above-described problems, and enables high-precision machining such as grinding, is made of a fiber-reinforced synthetic resin that has low thermal deformation, is lightweight, and has excellent vibration damping properties. An object is to provide a high-performance XY stage apparatus.

  According to the first aspect of the present invention, there is provided an apparatus main body having a guide member disposed on an upper surface thereof, one moving body that moves in a uniaxial direction along the guide member on the apparatus main body, and a guide disposed on the one moving body. An XY stage apparatus comprising: the other moving body that moves in the other axial direction perpendicular to the one axial direction along a member, wherein at least each of the moving bodies of the apparatus main body and each of the moving bodies is a fiber It is characterized in that it is made of reinforced synthetic resin and a plurality of small metal pieces with little thermal deformation are bonded to at least a part mounting surface of each moving body to form a machining allowance with a predetermined thickness.

  A second aspect of the present invention is the XY stage apparatus according to the first aspect, wherein the apparatus main body is formed of a fiber reinforced synthetic resin, and at least a component mounting surface of the apparatus main body has a small thermal deformation. A plurality of pieces are bonded to form a machining allowance having a predetermined thickness.

  According to a third aspect of the present invention, there is provided an apparatus main body in which a guide member is disposed on an upper surface, one moving body that moves in a uniaxial direction along the guide member on the apparatus main body, and a guide that is disposed on the one moving body. An XY stage apparatus comprising: the other moving body that moves in the other axial direction perpendicular to the one axial direction along a member, wherein at least each of the moving bodies of the apparatus main body and each of the moving bodies is a fiber It is made of reinforced synthetic resin, and at least a part mounting surface of each moving body is plated to form a machining allowance with a predetermined thickness.

  A fourth aspect of the present invention is the XY stage apparatus according to the third aspect, wherein the apparatus main body is formed of a fiber reinforced synthetic resin, and hard chromium plating is applied to at least a component mounting surface of the apparatus main body. A machining allowance having a predetermined thickness is formed.

  According to a fifth aspect of the present invention, there is provided an apparatus main body having a guide member disposed on an upper surface thereof, one moving body that moves in a uniaxial direction along the guide member on the apparatus main body, and a guide disposed on the one moving body. An XY stage apparatus comprising: the other moving body that moves in the other axial direction perpendicular to the one axial direction along a member, wherein at least each of the moving bodies of the apparatus main body and each of the moving bodies is a fiber It is formed of a reinforced synthetic resin, and a machining allowance of a predetermined thickness is formed by spraying ceramic on at least a part mounting surface of each moving body.

  A sixth aspect of the present invention is the XY stage apparatus according to the fifth aspect of the present invention, wherein the apparatus main body is formed of a fiber reinforced synthetic resin, and ceramic is sprayed on at least a part mounting surface of the apparatus main body to be predetermined. Thick machining allowance is formed.

  As described above, according to the invention of claim 1, at least each of the moving bodies of the apparatus main body and each moving body is formed of fiber reinforced synthetic resin, and at least on the component mounting surface of each moving body. A predetermined thickness consisting of a plurality of metal pieces pre-bonded to the component mounting surface of each moving body made of fiber reinforced synthetic resin by forming a machining allowance of a predetermined thickness by bonding a plurality of small metal pieces with little thermal deformation The machining allowance part can be machined. This enables high-precision machining such as grinding without damaging the fibers of each mobile body made of fiber-reinforced synthetic resin and without damaging its strength, with less thermal deformation, light weight and vibration damping. A high-performance XY stage apparatus with good characteristics can be provided.

  According to the invention of claim 2, the apparatus main body is formed of fiber reinforced synthetic resin, and a plurality of small metal pieces with little thermal deformation are bonded to at least the component mounting surface of the apparatus main body to reduce the machining allowance of a predetermined thickness. By forming the portion, a machining allowance portion having a predetermined thickness made of a plurality of metal pieces previously bonded to the component mounting surface of the device body of the fiber reinforced synthetic resin can be machined. This enables high-precision machining such as grinding without damaging the fiber of the device body made of fiber-reinforced synthetic resin without damaging its strength, less thermal deformation, and lighter overall It is possible to provide a high-performance XY stage apparatus having excellent vibration damping properties.

  According to the invention of claim 3, at least each of the moving bodies of the apparatus main body and each moving body is formed of fiber reinforced synthetic resin, and at least a part mounting surface of each moving body is plated to have a predetermined thickness. By forming the machining allowance, it is possible to machine a machining allowance portion having a predetermined thickness obtained by plating the component mounting surface of each movable body made of fiber-reinforced synthetic resin in advance. This enables high-precision machining such as grinding without damaging the fibers of each mobile body made of fiber-reinforced synthetic resin and without damaging its strength, with less thermal deformation, light weight and vibration damping. A high-performance XY stage apparatus with good characteristics can be provided.

  According to the invention of claim 4, the apparatus main body is formed of fiber reinforced synthetic resin, and at least a part mounting surface of the apparatus main body is hard chrome plated to form a machining allowance having a predetermined thickness. A machined portion of a predetermined thickness, which is obtained by applying hard chrome plating in advance to the component mounting surface of the reinforced synthetic resin device main body, can be machined. This enables high-precision machining such as grinding without damaging the fiber of the device body made of fiber-reinforced synthetic resin without damaging its strength, less thermal deformation, and lighter overall It is possible to provide a high-performance XY stage apparatus having excellent vibration damping properties.

  According to the invention of claim 5, at least each of the moving bodies of the apparatus main body and each moving body is formed of fiber reinforced synthetic resin, and ceramic is sprayed on at least a part mounting surface of each moving body to be predetermined. By forming a thick machining allowance, it is possible to machine a machining allowance portion having a predetermined thickness obtained by previously spraying ceramic on the component mounting surface of each movable body made of fiber reinforced synthetic resin. This enables high-precision machining such as grinding without damaging the fibers of each mobile body made of fiber-reinforced synthetic resin and without damaging its strength, with less thermal deformation, light weight and vibration damping. A high-performance XY stage apparatus with good characteristics can be provided.

  According to the invention of claim 6, the apparatus main body is formed of a fiber reinforced synthetic resin, and ceramic is sprayed on at least a component mounting surface of the apparatus main body to form a machining allowance of a predetermined thickness, thereby A portion of machining allowance having a predetermined thickness, which is formed by previously spraying ceramic on the component mounting surface of the synthetic resin device main body, can be machined. This enables high-precision machining such as grinding without damaging the fiber of the device body made of fiber-reinforced synthetic resin without damaging its strength, less thermal deformation, and lighter overall It is possible to provide a high-performance XY stage apparatus having excellent vibration damping properties.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  1 is a plan view showing an XY stage apparatus suitable for use in a substrate inspection apparatus according to an embodiment of the present invention, FIG. 2 is a side view of the apparatus, FIG. 3 is a front view of the apparatus, and FIG. FIG. 5 is a partial plan view showing the main part of the apparatus main body, FIG. 6 is a front view of the apparatus main body, and FIG. 7 is a part of a moving body used in the apparatus. FIG. 8 is a plan view of the same column, FIG. 9 is a front view of the same column, FIG. 10 is a side view of the other column constituting a part of the movable body, and FIG. Is a plan view of the other column, FIG. 12 is a front view of the other column, FIG. 13 is a front view of a Y-axis base constituting a part of the movable body, and FIG. 14 is a plan view of the Y-axis base. FIG. 15 is a partial front view showing the main part of the Y-axis base, and FIG. 16 is a side view of the Y-axis base.

  As shown in FIGS. 1 to 3, the XY stage apparatus 10 includes an apparatus main body 11 as a base in which a pair of X-axis guide rails (guide members) 12 and 12 are arranged on an upper surface 11 a, and the apparatus main body 11. An X-axis moving body (one moving body) 20 that reciprocates in the X-axis direction (uniaxial direction) along the pair of X-axis guide rails 12 and 12, and a Y-axis base 25 described later of the X-axis moving body 20. A Y-axis moving body (the other moving body) 30 that reciprocates in the Y-axis direction (the other axis direction) perpendicular to the X-axis direction along a pair of Y-axis guide rails (guide members) 28, 28 arranged in The CCD camera (inspection jig) 40 is provided so as to be movable in the Z-axis direction (vertical direction) via the screw 42 of the Z-axis unit 41 with respect to the Y-axis moving body 30.

  As shown in FIGS. 1-6, the apparatus main body 11 is formed in the box shape which the lower surface side opened by fiber reinforced synthetic resins (FRP), such as carbon fiber reinforced synthetic resin (CFRP) or glass fiber reinforced synthetic resin (GFRP). It is. The pair of guide rail mounting surfaces (component mounting surfaces) 11b and 11b and the linear motor mounting surface (component mounting surface) 11c on the upper surface 11a of the apparatus main body 11 are rectangular so that thermal expansion can be ignored (less thermal deformation). A plurality of small plate-like metal pieces 50 are bonded to each other in the left-right and front-rear directions via a small interval via an adhesive. As a result, each guide rail mounting surface 11b and linear motor mounting surface 11c are formed with a predetermined thickness T of the adhesive plate, and each of the high-precision guides is ground by machining the machining allowance S from this adhesive plate thickness T. A rail mounting surface 11b and a linear motor mounting surface 11c are formed respectively.

  An X-axis guide rail 12 is fastened and fixed to each guide rail mounting surface 11b of the upper surface 11a of the apparatus body 11 by a bolt 13, and a plurality of X-axis linear motors 14 are arranged on the linear motor mounting surface 11c. A fixed portion 14 a made of a permanent magnet is attached so as to be parallel to one X-axis guide rail 12. Further, on one inner side of the X-axis guide rail 12 on the upper surface 11 a of the apparatus body 11, a skeleton portion 15 a of a linear scale 15 that detects the position of the X-axis moving body 20 is parallel to the X-axis guide rail 12. It is attached. Further, a holder 16 for holding a glass substrate 60 of a liquid crystal display (LCD) is attached to the center of the upper surface 11a of the apparatus main body 11.

  As shown in FIGS. 1 to 3, the X-axis moving body 20 includes a pair of left and right spacers 21 and 22 and a pair of left and right columns 23 and 24 fastened and fixed to the pair of left and right spacers 21 and 22 by bolts 29. And a Y-axis base 25 that is fastened and fixed by the bolts 17 so as to be stretched over the pair of left and right columns 23 and 24 to form a gate shape.

  As shown in FIGS. 2 and 3, the pair of left and right spacers 21 and 22 are formed in a block shape from a fiber reinforced synthetic resin such as carbon fiber reinforced synthetic resin or glass fiber reinforced synthetic resin. A U-shaped guide 26 that slides along the X-axis guide rails 12 is fastened and fixed to the lower surface by bolts 18. Further, a head part (pulse output part) 15 b of a linear scale 15 for detecting the position of the X-axis moving body 20 is attached to the lower surface of the right spacer (the other spacer) 22.

  As shown in FIGS. 1 to 3 and FIGS. 7 to 12, the pair of left and right columns 23 and 24 are box-shaped whose outer side surfaces are opened by a fiber reinforced synthetic resin such as a carbon fiber reinforced synthetic resin or a glass fiber reinforced synthetic resin. Respectively. As shown in FIGS. 7 to 9, the upper and lower surfaces (part mounting surfaces) 23a and 23b of the left column (one column) 23 are rectangular plate-shaped so that thermal expansion can be ignored (less thermal deformation). A plurality of small metal pieces 50 are bonded to each other in the left-right and front-rear directions via a small interval via an adhesive. As a result, a predetermined thickness of the adhesive plate thickness T is formed on the upper and lower surfaces 23a, 23b of the left column 23. The machining allowance S is ground from the adhesive plate thickness T and the high accuracy upper and lower surfaces 23a, 23b is formed. 2 and 3, the left spacer (one spacer) 21 is fastened and fixed to the lower surface 23b of the left column 23 with bolts 17, and the upper surface 23a of the left column 23 is fixed to Y. The shaft base 25 is fastened and fixed by bolts 17. In addition, bolt insertion holes 23c are formed at the four corners of the upper and lower surfaces 23a and 23b of the left column 23, respectively.

  As shown in FIGS. 10 to 12, the upper and lower surfaces (component mounting surfaces) 24 a and 24 b of the right column (the other column) 24 have rectangular plate shapes that allow negligible thermal expansion (less thermal deformation). A plurality of small metal pieces 50 are bonded to each other in the left-right and front-rear directions via a small interval via an adhesive. As a result, a predetermined thickness of the adhesive plate thickness T is formed on the upper and lower surfaces 24a and 24b of the right column 24. The machining allowance S is grounded from the adhesive plate thickness T and the like with high accuracy. 24b is formed. As shown in FIG. 3, a right spacer 22 is fastened and fixed to the inner side of the lower surface 24b of the right column 24 by a bolt 17, and an X-axis linear is connected to the outer side of the lower surface 24b of the right column 24. A movable portion 14b of the motor 14 is attached. A Y-axis base 25 is fastened and fixed to the upper surface 24 a of the right column 24 with bolts 17. In addition, bolt insertion holes 24c are formed at the four corners of the upper and lower surfaces 24a and 24b of the right column 24, respectively.

  As shown in FIGS. 13 to 16, the Y-axis base 25 is formed in a rectangular tube shape from a fiber reinforced synthetic resin such as a carbon fiber reinforced synthetic resin or a glass fiber reinforced synthetic resin. A linear motor mounting surface (component mounting surface) 25d on the upper surface 25a of the Y-axis base 25 and a pair of guide rail mounting surfaces (component mounting surfaces) 25e, 25e on the front surface 25b and a pair of column mounting surfaces (components) on both sides of the lower surface 25c. On the mounting surfaces 25f and 25f, a plurality of small rectangular metal pieces 50 that can ignore thermal expansion (low thermal deformation) are adhered to each other in the left and right and front and rear directions via an adhesive, with a minute gap. It is. As a result, the adhesive plate thickness T of a predetermined thickness is formed on the linear motor mounting surface 25d, each guide rail mounting surface 25e, and each column mounting surface 25f, and the machining allowance S is ground from this adhesive plate thickness T. Thus, a highly accurate linear motor mounting surface 25d, guide rail mounting surfaces 25e, and column mounting surfaces 25f and 25f are formed, respectively.

  A fixed portion 27a composed of a plurality of permanent magnets arranged in a Y-axis linear motor 27 is attached to a linear motor mounting surface 25d on the upper surface 25a of the Y-axis base 25 so as to be parallel to the Y-axis base. A Y-axis guide rail 28 is fixed to each guide rail mounting surface 25 d of the front surface 25 b of the 25 by bolts 19. Further, the upper portions of the pair of left and right columns 23 and 24 are fastened and fixed to the pair of column mounting surfaces 25e and 25e on both sides of the lower surface 25c of the Y-axis base 25 through bolts 17, respectively. Further, a skeleton portion 29 a of a linear scale 29 that detects the position of the Y-axis moving body 30 is attached to the center of the front surface 25 b of the Y-axis base 25.

  The Y-axis moving body 30 is formed in a rectangular plate shape from fiber reinforced synthetic resin such as carbon fiber reinforced synthetic resin or glass fiber reinforced synthetic resin. As shown in FIGS. 1 to 3, U-shaped guides 31 that slide along the X-axis guide rails 28 are fastened and fixed to the upper and lower sides of the back surface 30 b of the Y-axis moving body 30 by bolts. . A movable portion 27b of the Y-axis linear motor 27 is attached to the upper end side of the back surface 30b of the Y-axis moving body 30. Further, a head part (pulse output part) 29 b of a linear scale 29 for detecting the position of the Y-axis moving body 30 is attached to the center of the back surface 30 b of the Y-axis moving body 30. A Z-axis unit 41 is attached to the front surface 30 a of the Y-axis moving body 30.

  The guide mounting surface and the linear motor mounting surface on the front surface 30a of the Y-axis moving body 30 and the unit mounting surface on the back surface 30b of the Y-axis moving body 30 are subjected to thermal expansion in the same manner as the X-axis moving body 20 described above. A small piece of rectangular plate-like metal that is negligible (low thermal deformation) is bonded to the left and right and front and back via a small distance via an adhesive, and this adhesive plate is ground and processed with high precision. The guide 31, the movable portion 27b of the Y-axis linear motor 27, and the Z-axis unit 41 are respectively attached to the mounting surfaces. Moreover, in each figure, while the dimension after the metal piece 50 adhere | attaches is shown with the code | symbol H, the dimension after a process is shown with the code | symbol L. FIG.

  According to the XY stage apparatus 10 of the above embodiment, the apparatus main body 11, the spacers 21 and 22 of the X axis moving body 20, the columns 23 and 24, the Y axis base 25, and the Y axis moving body 30. The guide rail mounting surface 11b and the linear motor mounting surface 11c of the apparatus main body 11 and the columns 23 of the X-axis moving body 20 are formed of fiber reinforced synthetic resin such as carbon fiber reinforced synthetic resin or glass fiber reinforced synthetic resin. 24, upper and lower surfaces 23a, 23b and 24a, 24b, a linear motor mounting surface 25d, a guide rail mounting surface 25e, a column mounting surface 25f of the Y-axis base 25, and a guide mounting surface of the Y-axis moving body 30 and a linear motor. Forming a machining allowance S of a predetermined thickness by bonding a plurality of small metal pieces 50 with little thermal deformation to the component mounting surfaces of the mounting surface and the unit mounting surface. Machine portion S of a predetermined thickness composed of a plurality of metal pieces 50 bonded in advance to the component mounting surfaces of the fiber reinforced synthetic resin device body 11 and the moving bodies 20 and 30, such as a grinding machine Can be processed.

  This enables high-precision machining such as grinding without damaging the fibers of the device body 11 made of fiber-reinforced synthetic resin and the movable bodies 20 and 30 without damaging the strength. Each component can be mounted on each accurate component mounting surface. As a result, it is possible to provide a high-performance XY stage apparatus 10 that has less thermal deformation, is lighter overall, and has excellent vibration damping properties.

  17 is a front view of an apparatus main body used in an XY stage apparatus according to another embodiment of the present invention, FIG. 18 is a front view of one column constituting a part of a moving body used in the apparatus, and FIG. FIG. 20 is a front view of the other column that constitutes a part of the movable body, and FIG. 20 is a side view of a Y-axis base that constitutes a part of the movable body.

  In this other embodiment, the apparatus main body 11, the spacers 21 and 22 of the X-axis moving body 20, the columns 23 and 24, the Y-axis base 25, and the Y-axis moving body 30 are made of carbon fiber reinforced synthetic resin or glass. As shown in FIGS. 17 to 20, the guide rail mounting surface 11 b, the linear motor mounting surface 11 c of the apparatus main body 11, and the X-axis moving body 20 are respectively formed of a fiber reinforced synthetic resin such as a fiber reinforced synthetic resin. Hard chrome plating 51 is applied to the respective component mounting surfaces of the upper and lower surfaces 23a, 23b and 24a, 24b of the columns 23, 24, the linear motor mounting surface 25d, the guide rail mounting surface 25e, and the column mounting surface 25f of the Y-axis base 25. Alternatively, the machining allowance of a predetermined thickness is formed by thermal spraying (coating) the ceramic 52. Thereby, the guide rail mounting surface 11b and the linear motor mounting surface 11c of the apparatus main body 11, the upper and lower surfaces 23a and 23b and 24a and 24b of each column 23 and 24 of the X-axis moving body 20, and the linear motor of the Y-axis base 25 A predetermined thickness of plating or sprayed thickness T is formed on each of the component mounting surfaces of the mounting surface 25d, the guide rail mounting surface 25e, and the column mounting surface 25f, and the machining allowance S is ground by this plating or spraying thickness T. High-precision linear motor mounting surfaces 11c and 25d, guide rail mounting surfaces 11b and 25e, upper and lower surfaces 23a and 23b and 24a and 24b, and column mounting surfaces 25f and 25f are formed, respectively.

  In this way, the machine mounting allowance S of a predetermined thickness formed by applying hard chrome plating 51 in advance to the component mounting surfaces of the fiber reinforced synthetic resin device main body 11 and the X-axis moving body 20 or spraying the ceramic 52. The part can be machined. This enables high-precision machining such as grinding without damaging the fibers of the device body 11 and the X-axis moving body 20 made of fiber-reinforced synthetic resin and without damaging the strength, thereby preventing thermal deformation. It is possible to provide a high-performance XY stage apparatus 10 that is less in number and is lighter overall and excellent in vibration damping.

  In addition, according to each said embodiment, although the apparatus main body as a base was formed with the fiber reinforced synthetic resin, you may use stone surface plates, such as a granite. Further, according to each of the above embodiments, a small metal piece with little thermal deformation is bonded to each component mounting surface on the upper surface of the fiber reinforced synthetic resin device body, but the entire upper surface is heated. Of course, a small metal piece with little deformation may be bonded.

It is a top view which shows the XY stage apparatus suitable for using for the board | substrate inspection apparatus of embodiment of this invention. It is a side view of the said XY stage apparatus. It is a front view of the said XY stage apparatus. It is a top view of the apparatus main body used for the said XY stage apparatus. It is a fragmentary top view which shows the principal part of the said apparatus main body. It is a front view of the said apparatus main body. It is a side view of one column which comprises a part of moving body used for the said XY stage apparatus. It is a top view of the said one column. It is a front view of the said one column. It is a side view of the other column which comprises a part of said moving body. It is a top view of the other column. It is a front view of the other column. It is a front view of the Y-axis base which comprises a part of said moving body. It is a top view of the said Y-axis base. It is a partial front view which shows the principal part of the said Y-axis base. It is a side view of the said Y-axis base. It is a front view of the apparatus main body used for the XY stage apparatus of other embodiment of this invention. It is a front view of one column which comprises a part of moving body used for the XY stage apparatus of the said other embodiment. It is a front view of the other column which comprises a part of moving body of the said other embodiment. It is a side view of the Y-axis base which comprises some moving bodies of the said other embodiment.

Explanation of symbols

10 XY stage device 11 device body 11a upper surface 11b guide rail mounting surface (component mounting surface)
11c Linear motor mounting surface (component mounting surface)
12 X-axis guide rail (guide member)
20 X-axis moving body (one moving body)
23 One column 23a Upper surface (component mounting surface)
23b Bottom surface (component mounting surface)
24 Other column 24a Upper surface (component mounting surface)
24b Bottom surface (component mounting surface)
25d Linear motor mounting surface (component mounting surface)
25e Guide rail mounting surface (component mounting surface)
25f Column mounting surface (component mounting surface)
28 Y-axis guide rail (guide member)
30 Y-axis moving body (the other moving body)
50 Small metal piece with little thermal deformation 51 Hard chrome plating 52 Ceramic S Machining allowance

Claims (6)

The apparatus main body having a guide member disposed on the upper surface, one moving body that moves in a uniaxial direction along the guide member on the apparatus main body, and the uniaxial direction along the guide member disposed on the one moving body An XY stage apparatus comprising: the other moving body that moves in the direction of the other axis orthogonal to
At least each of the moving bodies of the apparatus main body and the moving bodies is formed of a fiber reinforced synthetic resin, and a plurality of small metal pieces with little thermal deformation are bonded to at least a part mounting surface of the moving bodies. An XY stage apparatus characterized by forming a machining allowance for a thickness. The XY stage apparatus according to claim 1,
The apparatus main body is formed of a fiber reinforced synthetic resin, and a machining allowance having a predetermined thickness is formed by bonding a plurality of small metal pieces with little thermal deformation to at least a component mounting surface of the apparatus main body. -Y stage device. The apparatus main body having a guide member disposed on the upper surface, one moving body that moves in a uniaxial direction along the guide member on the apparatus main body, and the uniaxial direction along the guide member disposed on the one moving body An XY stage apparatus comprising: the other moving body that moves in the direction of the other axis orthogonal to
At least each moving body of the apparatus main body and each moving body is formed of fiber reinforced synthetic resin, and at least a part mounting surface of each moving body is plated to form a machining allowance having a predetermined thickness. The XY stage apparatus characterized by the above-mentioned. The XY stage apparatus according to claim 3,
An XY stage apparatus characterized in that the apparatus main body is formed of fiber reinforced synthetic resin, and at least a part mounting surface of the apparatus main body is subjected to hard chrome plating to form a machining allowance having a predetermined thickness. The apparatus main body having a guide member disposed on the upper surface, one moving body that moves in a uniaxial direction along the guide member on the apparatus main body, and the uniaxial direction along the guide member disposed on the one moving body An XY stage apparatus comprising: the other moving body that moves in the direction of the other axis orthogonal to
At least each of the moving bodies of the apparatus main body and the moving bodies is formed of a fiber reinforced synthetic resin, and at least a part mounting surface of the moving bodies is thermally sprayed to form a machining allowance having a predetermined thickness. An XY stage apparatus characterized by that. The XY stage apparatus according to claim 5,
An XY stage apparatus, wherein the apparatus main body is formed of a fiber reinforced synthetic resin, and a machining allowance having a predetermined thickness is formed by spraying ceramic on at least a component mounting surface of the apparatus main body.

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