JP2008241287A5 - - Google Patents

Download PDF

Info

Publication number
JP2008241287A5
JP2008241287A5 JP2007078383A JP2007078383A JP2008241287A5 JP 2008241287 A5 JP2008241287 A5 JP 2008241287A5 JP 2007078383 A JP2007078383 A JP 2007078383A JP 2007078383 A JP2007078383 A JP 2007078383A JP 2008241287 A5 JP2008241287 A5 JP 2008241287A5
Authority
JP
Japan
Prior art keywords
pair
pressure
diaphragm
sensitive element
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007078383A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008241287A (ja
JP4888715B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007078383A priority Critical patent/JP4888715B2/ja
Priority claimed from JP2007078383A external-priority patent/JP4888715B2/ja
Publication of JP2008241287A publication Critical patent/JP2008241287A/ja
Publication of JP2008241287A5 publication Critical patent/JP2008241287A5/ja
Application granted granted Critical
Publication of JP4888715B2 publication Critical patent/JP4888715B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007078383A 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法 Expired - Fee Related JP4888715B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007078383A JP4888715B2 (ja) 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007078383A JP4888715B2 (ja) 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法

Publications (3)

Publication Number Publication Date
JP2008241287A JP2008241287A (ja) 2008-10-09
JP2008241287A5 true JP2008241287A5 (cg-RX-API-DMAC10.html) 2010-05-06
JP4888715B2 JP4888715B2 (ja) 2012-02-29

Family

ID=39912844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007078383A Expired - Fee Related JP4888715B2 (ja) 2007-03-26 2007-03-26 圧力センサ用の感圧素子、及びその製造方法

Country Status (1)

Country Link
JP (1) JP4888715B2 (cg-RX-API-DMAC10.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5305028B2 (ja) * 2008-10-16 2013-10-02 セイコーエプソン株式会社 圧力センサー
JP4998860B2 (ja) 2009-02-26 2012-08-15 セイコーエプソン株式会社 圧力センサー素子、圧力センサー
JP2010230401A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧力センサー
JP2010281573A (ja) * 2009-06-02 2010-12-16 Seiko Epson Corp 圧力センサー
JP2011013062A (ja) * 2009-07-01 2011-01-20 Seiko Epson Corp 圧力センサー
JP2011220722A (ja) * 2010-04-05 2011-11-04 Seiko Epson Corp 圧力センサー

Similar Documents

Publication Publication Date Title
JP2008524590A5 (cg-RX-API-DMAC10.html)
KR20200090774A (ko) 사운드 변환기 장치
TWI530158B (zh) 具有微機械麥克風構造的構件
JP2012147228A5 (cg-RX-API-DMAC10.html)
TWI493983B (zh) A sound generator and an acoustic generating device using the same
CN109495829A (zh) 压电式mems麦克风
JP2009293566A (ja) 圧電駆動体及び圧電ブロア
JP2012060628A5 (cg-RX-API-DMAC10.html)
RU2012112811A (ru) Ультразвуковой датчик с большим полем обзора и способ изготовления данного ультразвукового датчика
JP2014004681A5 (cg-RX-API-DMAC10.html)
WO2002007234A9 (en) Piezoelectric device and acousto-electric transducer and method for manufacturing the same
JP2000007455A5 (cg-RX-API-DMAC10.html)
JP2011060807A5 (ja) 半導体チップの製造方法
JP2013026809A5 (cg-RX-API-DMAC10.html)
JP2007121167A5 (cg-RX-API-DMAC10.html)
JP2022181814A5 (cg-RX-API-DMAC10.html)
JP2009188150A5 (cg-RX-API-DMAC10.html)
JP2014134427A (ja) 物理量センサおよびその製造方法
JP5472557B1 (ja) 複合電子部品及びそれを備える電子装置
JP2010109526A5 (ja) 振動片、振動子及び振動片の製造方法
EP1847509A3 (en) Mechanical isolation for MEMS devices
JPWO2022230677A5 (cg-RX-API-DMAC10.html)
KR102416721B1 (ko) 에어 매트리스 및 에어 매트리스 제작 방법
JP2018042072A5 (cg-RX-API-DMAC10.html)
JP2007025639A5 (cg-RX-API-DMAC10.html)