JP2008237004A - Linera actuator and apparatus utilizing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To generate a large thrust while suppressing a height dimension in the axial direction to be small. <P>SOLUTION: An inner upper permanent magnet 32 and an inner lower permanent magnet 33 are joined to the outer peripheral surface of an inner yoke 31. An outer yoke 37 is disposed at the outer peripheral part of this inner yoke 31, and an outer upper permanent magnet 38 and an outer lower permanent magnet 39 are joined to the inner peripheral surface of the outer yoke 37. An upper armature coil 65 is movably disposed between these outer upper permanent magnet 38 and inner upper permanent magnet 32, and the lower armature coil 66 is movably disposed between the outer lower permanent magnet 39 and the inner lower permanent magnet 33. These upper armature coil 65 and lower armature coil 66 are wound around a common bobbin 51, and an electric current is made to flow through the upper armature coil 65 and the lower armature coil 66 in directions reverse to each other, respectively, so that the thrust is generated in the common direction. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a linear actuator that applies a linear thrust force to a medium by an electromagnetic force, a component mounting device that uses the properties of the linear actuator, and a die bonder device that uses the properties of the linear actuator.

FIG. 13 shows a linear actuator described in Patent Document 1. This conventional linear actuator includes a columnar inner yoke 101 and a cylindrical outer yoke 102. The inner yoke 101 is inserted into the outer yoke 102, and a cylindrical shape is formed on the outer peripheral surface of the inner yoke 101. Permanent magnets 103 are joined in three stages in the axial direction. Each of these three permanent magnets 103 has an inner peripheral portion magnetized to one of the N and S poles and an outer peripheral portion magnetized to the other of the N and S poles. The N pole, the S pole, and the N pole are arranged in order along the axial direction on the inner peripheral part, and the S pole, the N pole, and the S pole are arranged in order on the outer peripheral part along the axial direction. A cylindrical armature coil 104 is inserted between the outer peripheral surface of each of the three permanent magnets 103 and the inner peripheral surface of the outer yoke 102 so as to be movable in the axial direction. These three armature coils 104 are mechanically connected to each other, and a current flows through each of the three armature coils 104 so that thrust in a common direction is generated.
JP 2004-88992 A

  In the case of the conventional linear actuator, since the permanent magnet 103 and the armature coil 104 are arranged in three stages along the axial direction, the height dimension in the axial direction becomes large. Moreover, since the permanent magnets 103 adjacent in the axial direction are in contact with each other, the magnetic flux directly loops between the permanent magnets 103 adjacent in the axial direction. For this reason, since the magnetic flux interlinking the armature coil 104 is reduced, the thrust is reduced.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a linear actuator or the like that can generate a large thrust while keeping the axial height dimension small.

  The linear actuator of the present invention is formed by joining a cylindrical inner yoke made of a magnetic material to the outer peripheral surface of the inner yoke, the inner peripheral portion being magnetized to one of the N pole and the S pole, and the outer peripheral portion being A cylindrical first inner permanent magnet magnetized on the other side and joined to the outer peripheral surface of the inner yoke apart from the first inner permanent magnet in the axial direction. A cylindrical second inner permanent magnet that is magnetized so as to have a polarity opposite to that of the same portion of the first inner permanent magnet, the outer diameter of the first inner permanent magnet, and the first The inner permanent magnet has a cylindrical shape having a larger inner diameter than each of the outer diameters of the two inner permanent magnets, and is disposed on the outer peripheral portions of both the first inner permanent magnet and the second inner permanent magnet. An outer yoke made of magnetic material and the outer yoke The outer yoke and the inner yoke are connected to each other so that the peripheral surfaces of the outer peripheral surface of the first inner permanent magnet and the outer peripheral surface of the second inner permanent magnet face each other through a gap from the radial direction. The connecting member is joined to the inner peripheral surface of the outer yoke and has a cylindrical shape facing the outer peripheral surface of the first inner permanent magnet through a gap from the radial direction, and has an inner peripheral portion and an outer peripheral portion. Are magnetized so as to have the same polarity with respect to the same portion of the first inner permanent magnet, and from the first outer permanent magnet to the inner peripheral surface of the outer yoke. It is joined apart in the axial direction and forms a cylindrical shape that faces the outer peripheral surface of the second inner permanent magnet through a gap from the radial direction, and each of the inner peripheral portion and the outer peripheral portion is the second inner permanent magnet. Same for same part of inner permanent magnet A second outer permanent magnet magnetized to have a polarity and a magnet wire wound in a cylindrical shape, and a gap between the first inner permanent magnet and the first outer permanent magnet A first armature coil that is inserted so as to be relatively movable in the axial direction, and a magnet wire is wound in a cylindrical shape, and the second inner permanent magnet and the second outer permanent magnet are mutually connected. The second armature is inserted into the gap between the first armature coil so as to be relatively movable in the axial direction and is mechanically connected to the first armature coil, and a current flows in a direction opposite to that of the first armature coil. It is characterized in that it has an armature coil.

  A first armature coil is disposed between the first inner permanent magnet and the first outer permanent magnet so as to be relatively movable in the axial direction, and between the second inner permanent magnet and the second outer permanent magnet. Since the second armature coil is disposed so as to be relatively movable in the axial direction, the height dimension of the linear actuator in the axial direction can be kept small. Moreover, since the magnetic flux interlinking each of the first armature coil and the second armature coil increases, the thrust generated in each of the first armature coil and the second armature coil increases. At the same time, the first inner permanent magnet and the second inner permanent magnet are arranged apart from each other in the axial direction, and the first outer permanent magnet and the second outer permanent magnet are arranged apart from each other in the axial direction. Therefore, the magnetic flux is prevented from directly looping between the first inner permanent magnet and the second inner permanent magnet, and the magnetic flux is directly between the first outer permanent magnet and the second outer permanent magnet. Looping is suppressed. For this reason, since each of the magnetic flux interlinking the first armature coil and the magnetic flux interlinking the second armature coil further increases, the first armature coil and the second armature coil respectively. The generated thrust is further increased.

[Example 1]
As shown in FIG. 1, a plurality of semiconductor chips 2 are arranged on the semiconductor wafer 1. Each of the plurality of semiconductor chips 2 is formed by baking a circuit pattern on the semiconductor wafer 1 and subjecting the circuit pattern to exposure and etching, and then cutting the circuit pattern into a rectangular shape. A plurality of lead frames 3 are arranged in a row on the right side of 1. Each of the plurality of lead frames 3 is formed with an adhesive layer made of an adhesive, and the semiconductor chip 2 is mounted on the lead frame 3 based on pressing the semiconductor chip 2 against the adhesive layer of the lead frame 3. . The plurality of lead frames 3 are mounted on the conveyor 4. The conveyor 4 sequentially conveys a plurality of lead frames 3 to a wire bonding apparatus in the next process, and the electrodes of the semiconductor chip 2 and the leads of the lead frame 3 are connected by a wire bonding apparatus.

The die bonder apparatus 10 takes out the semiconductor chip 2 from the semiconductor wearer 1 and presses it against the adhesive layer of the lead frame 3, and is configured as follows.
1. Description of Die Bonder Device 10 The transfer head 11 is connected to the arm of an XY Cartesian coordinate system robot, and as shown in FIG. 2, a plate-like base portion 12 extending in the vertical direction and a plate-like holder extending in the horizontal direction. Part 13 is provided. The arm of this robot moves the transfer head 11 linearly in the X direction using an X-axis servomotor as a drive source, and moves the transfer head 11 linearly in the Y direction using a Y-axis servomotor as a drive source. Yes, the Y direction refers to the direction in which the plurality of lead frames 3 are arranged, and the X direction refers to the direction perpendicular to the Y direction. A linear slider 14 is attached to the base portion 12 of the transfer head 11. The linear slider 14 is a guide unit 15 fixed to the base unit 12 so as not to move, a slide unit 16 mounted on the guide unit 15 so as to be linearly movable in the Z direction, and Z for moving the slide unit 16 in the Z direction. The nozzle head 17 is fixed to the slide portion 16 so as not to move. The linear slider 14 corresponds to an operation mechanism, and the XY rectangular coordinate system robot corresponds to a transfer mechanism.

  As shown in FIG. 2, the suction nozzle 18 is fixed to the nozzle head 17, and the robot moves the transport head 11 in the X direction and the Y direction, and the suction nozzle 18 is subject to suction. Moving operation is performed between the position before suction just above the semiconductor chip 2 and the position before mounting right above the lead frame 3 to be mounted. The suction nozzle 18 is connected to the suction port of the vacuum pump. The suction nozzle 18 sucks the semiconductor chip 2 based on being evacuated by the suction force of the vacuum pump, and the linear slider 14 is based on moving the nozzle head 17 from the pre-suction position in the Z direction. Then, the suction nozzle 18 is pressed against the semiconductor chip 2 to be sucked to suck the semiconductor chip 2, and the semiconductor chip 2 sucked by the suction nozzle 18 based on the operation of moving the nozzle head 17 from the pre-mounting position in the Z direction. Is pressed against the adhesive layer of the lead frame 3 to be mounted. This pre-mounting position corresponds to the second pressing position, the pre-adsorption position corresponds to the first pressing position, and the Z direction corresponds to the setting direction.

As shown in FIG. 2, a cylindrical linear actuator 20 is connected to the nozzle head 17. The linear actuator 20 applies thrust to the slide portion 16 of the linear slider 14 via the nozzle head 17, and the slide portion 16 of the linear slider 14 moves against the guide portion 15 due to vibration when the transfer head 11 moves. Is prevented by the thrust applied to the slide portion 16 from the linear actuator 20, and when the suction nozzle 18 sucks the semiconductor chip 2 from the semiconductor wafer 1, the applied pressure and suction acting on the semiconductor chip 2 from the suction nozzle 18. When the nozzle 18 mounts the semiconductor chip 2 on the lead frame 3, each of the pressure applied to the semiconductor chip 2 from the suction nozzle 18 is adjusted by the thrust applied from the linear actuator 20 to the slide portion 16. As shown in FIG. 3, the linear actuator 20 has a magnet portion 30 and a winding portion 50. The magnet portion 30 is fixed to the nozzle head 17 on the movable side, and the winding portion 50 is on the fixed side. It is fixed to a certain transfer head 11. The detailed configurations of the magnet unit 30 and the winding unit 50 are as follows.
2. Description of Magnet Unit 30 A vertically long cylindrical inner yoke 31 is fixed to the nozzle head 17 as shown in FIG. The inner yoke 31 is formed by rolling a cold rolled steel plate made of permendur (Fe-Co), and the radial thickness of the inner yoke 31 is set to be constant throughout the axial direction. Each of the inner diameter dimension and the outer diameter dimension of the inner yoke 31 is set to be constant throughout the axial direction. The inner peripheral surface of the inner upper permanent magnet 32 is fitted in contact with the outer peripheral surface of the inner yoke 31 at the upper end. The inner upper permanent magnet 32 corresponds to a first inner permanent magnet, and is joined to the inner yoke 31 so as to be immovable by an adhesive. The inner upper permanent magnet 32 has a cylindrical shape concentric with the inner yoke 31, and is magnetized so that the outer peripheral portion becomes an N pole and the inner peripheral portion becomes an S pole.

  As shown in FIG. 4, the inner peripheral surface of the inner lower permanent magnet 33 is fitted in contact with the outer peripheral surface of the inner yoke 31, and the inner lower permanent magnet 33 cannot be moved to the inner yoke 31 by an adhesive. It is joined to. The inner lower permanent magnet 33 corresponds to a second inner permanent magnet, and is disposed below the inner upper permanent magnet 32 and spaced from the inner upper permanent magnet 32. The inner lower permanent magnet 33 has a cylindrical shape concentric with the inner yoke 31, and is magnetized so that the outer peripheral portion becomes the S pole and the inner peripheral portion becomes the N pole. An annular inner spacer 34 is concentrically interposed between the inner lower permanent magnet 33 and the inner upper permanent magnet 32. The inner spacer 34 is made of an insulating synthetic resin, and the axial thickness of the inner spacer 34 is one of the radial widths of the inner upper permanent magnet 32 and the inner lower permanent magnet 33. / 2 is set. That is, the inner upper permanent magnet 32 and the inner lower permanent magnet 33 are arranged apart from each other in the axial direction by a distance that is half the radial width of each of the inner upper permanent magnet 32 and the inner lower permanent magnet 33. ing.

  As shown in FIG. 4, the inner peripheral surface of the connecting plate 35 is fitted to the outer peripheral surface of the inner yoke 31 at the lower end. The connecting plate 35 has an annular shape concentric with the inner yoke 31 and is joined to the inner yoke 31 so as not to move by an adhesive. The connection plate 35 is made of a non-magnetic material such as aluminum, and a cylindrical holder portion 36 protruding upward is formed on the outer peripheral portion of the connection plate 35. The connecting plate 35 corresponds to a connecting member, and an outer yoke 37 is joined to the upper surface of the connecting plate 35 with an adhesive. The outer yoke 37 has a cylindrical shape having a larger inner diameter than the outer diameter of the inner upper permanent magnet 32 and the outer diameter of the inner lower permanent magnet 33. It is held at a fixed position concentric with the inner yoke 31 based on contact with the inner peripheral surface of the portion 36. The outer yoke 37 is formed by rolling a cold rolled steel plate made of permendur, and the radial thickness of the outer yoke 37 is set to be constant throughout the axial direction. Each of the inner diameter dimension and the outer diameter dimension is set to be constant throughout the axial direction. The inner peripheral surface of the outer yoke 37 is disposed opposite to the outer peripheral surface of the inner upper permanent magnet 32 and the outer peripheral surface of the inner lower permanent magnet 33 through a gap from the radial direction.

As shown in FIG. 4, the outer peripheral surface of the outer upper permanent magnet 38 is fitted in contact with the inner peripheral surface of the outer yoke 37 at the upper end, and the outer upper permanent magnet 38 is in contact with the outer yoke 37. It is immovably bonded with an adhesive. The outer upper permanent magnet 38 corresponds to a first outer permanent magnet and has a cylindrical shape concentric with the inner yoke 31. The outer upper permanent magnet 38 has the same axial height as the inner upper permanent magnet 32 and is disposed at the same axial height with respect to the inner upper permanent magnet 32. The magnet is magnetized in the same pattern as the inner upper permanent magnet 32 having a portion having an N pole and an inner peripheral portion having an S pole.
As shown in FIG. 4, the outer peripheral surface of the outer lower permanent magnet 39 is fitted in contact with the inner peripheral surface of the outer yoke 37, and the outer lower permanent magnet 39 cannot move to the outer yoke 37 by an adhesive. It is joined to. The outer lower permanent magnet 39 has a cylindrical shape concentric with the inner yoke 31 and is disposed below the outer upper permanent magnet 38 and spaced from the outer upper permanent magnet 38. The outer lower permanent magnet 39 has the same axial height as the inner lower permanent magnet 33 and is disposed at the same axial height with respect to the inner lower permanent magnet 33. The magnet is magnetized in the same pattern as that of the inner lower permanent magnet 33 with the portion being the S pole and the inner peripheral portion being the N pole. The outer lower permanent magnet 39 corresponds to a second outer permanent magnet, and an annular outer spacer 40 is concentrically interposed between the outer lower permanent magnet 39 and the outer upper permanent magnet 38. The outer spacer 40 is made of the same type of insulator as the inner spacer 34, and the axial thickness of the outer spacer 40 is the thickness of each of the outer upper permanent magnet 38 and the outer lower permanent magnet 39 in the radial direction. It is set to 1/2 of the size. That is, the outer upper permanent magnet 38 and the outer lower permanent magnet 39 are arranged apart from each other in the axial direction by a distance that is half the radial width of each of the outer upper permanent magnet 38 and the outer lower permanent magnet 39. ing. FIG. 5 shows the magnet unit 30 in an exploded state.
3. 2. Description of Winding Unit 50 As shown in FIG. 2, a cylindrical bobbin 51 is fixed to the holder unit 13 of the transfer head 11 so as not to move. The bobbin 51 is made of an insulating synthetic resin such as PPS (polyphenylene sulfide resin) and is arranged concentrically with the inner yoke 31 as shown in FIG. The outer diameter of the bobbin 51 is set to be smaller than the inner diameters of the outer upper permanent magnet 38 and the outer lower permanent magnet 39, and the inner diameter of the bobbin 51 is the inner upper permanent magnet 32 and the inner lower permanent magnet 33, respectively. The inner peripheral surface of the outer upper permanent magnet 38 and the inner peripheral surface of the outer lower permanent magnet 39 are arranged separately from the outer peripheral surface of the bobbin 51, and Each of the outer peripheral surface of the upper permanent magnet 32 and the outer peripheral surface of the inner lower permanent magnet 33 is disposed away from the inner peripheral surface of the bobbin 51. That is, the bobbin 51 is movable in the axial direction relative to the magnet unit 30.

  As shown in FIG. 4, an end plate 52 is formed on the bobbin 51. The end plate 52 refers to a circular plate-like portion that closes the upper surface of the bobbin 51. As shown in FIG. 6, a pin hole 53 and a pin hole 54 are formed on the outer peripheral portion of the end plate 52. One end of a pin-like power terminal 55 is fixed inside the hole 53 so that it cannot be removed by an adhesive, and one end of a pin-like power terminal 56 is fixed inside the pin hole 54 so that it cannot fall off by an adhesive. ing. Each of the power supply terminal 55 and the power supply terminal 56 is made of a conductor such as copper, and the remaining portion of the power supply terminal 55 and the remaining portion of the power supply terminal 56 protrude from the end plate 52.

  As shown in FIG. 4, an upper coil winding portion 57 is formed on the bobbin 51 between the inner upper permanent magnet 32 and the outer upper permanent magnet 38, and the inner lower permanent magnet 33 and the outer lower permanent magnet 39. A lower coil winding portion 58 is formed between them. Each of the upper coil winding portion 57 and the lower coil winding portion 58 has a concave shape whose outer peripheral surface is open, and is formed around the bobbin 51 so as to surround the bobbin 51. As shown in FIG. 7, the bobbin 51 is formed with an upper groove 59, an upper groove 60, an upper groove 61, and an upper groove 62 that are located above the upper coil winding portion 57. A lower passage groove 63 and a lower passage groove 64 are formed between the winding portion 57 and the lower coil winding portion 58. Each of the upper and lower grooves 59 to 62 and the lower and upper grooves 63 to 64 is inserted with a magnet wire, and has a straight shape extending linearly in the axial direction of the bobbin 51.

  As shown in FIG. 4, the upper armature coil 65 is accommodated in the upper coil winding portion 57, and the upper armature coil 65 is arranged between the inner upper permanent magnet 32 and the outer upper permanent magnet 38. It is arranged to be relatively movable in the direction. The upper armature coil 65 is configured by winding one magnet wire in the upper coil winding portion 57 in the clockwise direction, and the winding start end portion of the upper armature coil 65 is the upper armature coil 65. The winding terminal 59 is soldered to the power supply terminal 55 through the transition groove 59, and the winding end end portion of the upper armature coil 65 is inserted into the lower coil winding portion 58 through the lower transition groove 63. The upper armature coil 65 corresponds to a first armature coil.

  As shown in FIG. 4, the lower armature coil 66 is accommodated in the lower coil winding portion 58, and the lower armature coil 66 is disposed between the inner lower permanent magnet 33 and the outer lower permanent magnet 39. It is arranged to be relatively movable in the direction. The lower armature coil 66 corresponds to a second armature coil, and the magnetic flux generated by the inner upper permanent magnet 32 is the upper armature coil 65, the outer upper permanent magnet 38, the outer yoke 37, and the outer lower permanent magnet. 39, the lower armature coil 66, the inner lower permanent magnet 33, and the inner yoke 31 are sequentially looped to the inner upper permanent magnet 32. The upper armature coil 65 and the lower armature coil 66 are each wound with a magnet wire. Magnetic fluxes intersect at right angles to the direction. The lower armature coil 66 is formed by winding the winding end end portion of the upper armature coil 65 into the lower coil winding portion 58, and the winding direction of the lower armature coil 66 is the upper side. It is set in the counterclockwise direction opposite to that of the armature coil 65, and the winding end end portion of the lower armature coil 66 is soldered to the power supply terminal 56 through the lower and upper grooves 64 and 62 in order. .

  The upper armature coil 65 and the lower armature coil 66 are connected in series with each other. When a voltage is applied between the power supply terminal 55 and the power supply terminal 56, the upper armature coil 65 and the lower armature coil 66 are Current flows in opposite directions to each other. Then, the upper armature coil 65 and the lower armature coil 66 generate thrust in a common axial direction according to Fleming's left-hand rule, and the lower armature coil 65 is moved from the fixed winding portion 50 to the movable magnet portion 30. Directional thrust is applied. That is, in the suction process in which the suction nozzle 18 is moved downward and pressed against the semiconductor chip 2 to suck the semiconductor chip 2 by the suction nozzle 18, the upper armature coil 65 and the lower armature coil 66 are energized. This is performed by applying a downward thrust to the suction nozzle 18 based on the movement of the suction nozzle 18, and the semiconductor chip 2 sucked by the suction nozzle 18 based on the downward movement operation of the suction nozzle 18 is bonded to the lead frame 3. The mounting process of pressing the semiconductor chip 2 onto the lead frame 3 by pressing against the layer applies a downward thrust to the suction nozzle 18 based on energization of the upper armature coil 65 and the lower armature coil 66, respectively. Done.

According to the said Example 1, there exists the following effect.
The upper armature coil 65 is disposed between the inner upper permanent magnet 32 and the outer upper permanent magnet 38 so as to be relatively movable in the axial direction, and the lower armature coil is disposed between the inner lower permanent magnet 33 and the outer lower permanent magnet 39. Since 66 is disposed so as to be relatively movable in the axial direction, the height dimension of the linear actuator 20 in the axial direction can be kept small. In addition, since the magnetic flux interlinking each of the upper armature coil 65 and the lower armature coil 66 is increased, the thrust generated in each of the upper armature coil 65 and the lower armature coil 66 is increased. At the same time, a flow of magnetic flux is formed by the inner upper permanent magnet 32, the inner lower permanent magnet 33, the outer upper permanent magnet 38 and the outer lower permanent magnet 39 without going through the connecting plate 35. For this reason, since the connection plate 35 made of nonmagnetic aluminum can be used, the linear actuator 20 is reduced in weight.

  Since the inner upper permanent magnet 32 and the inner lower permanent magnet 33 are spaced apart from each other in the axial direction, it is possible to suppress the magnetic flux from directly looping between the inner upper permanent magnet 32 and the inner lower permanent magnet 33. In addition, since the outer upper permanent magnet 38 and the outer lower permanent magnet 39 are arranged apart from each other in the axial direction, it is possible to suppress the magnetic flux from directly looping between the outer upper permanent magnet 38 and the outer lower permanent magnet 39. . For this reason, since each of the magnetic flux interlinking the upper armature coil 65 and the magnetic flux interlinking the lower armature coil 66 increases, the thrust also increases from this point. This effect is that the distance between the inner upper permanent magnet 32 and the inner lower permanent magnet 33 is more than half of the radial width dimension of the inner upper permanent magnet 32 and the radial width dimension of the inner lower permanent magnet 33. The distance between the outer upper permanent magnet 38 and the outer lower permanent magnet 39 is increased by the radial width dimension of the outer upper permanent magnet 38 and the radial width dimension of the outer lower permanent magnet 39. It is enhanced by setting it to more than half of each size.

  For each of the inner yoke 31 and the outer yoke 37, a cold rolled material having a permendur with a larger saturation magnetic flux density than that of iron or the like was formed. For this reason, since each of the inner yoke 31 and the outer yoke 37 can be made thinner than the case where iron or the like is formed of a material, the linear actuator 20 is also reduced in weight from this point. Moreover, since each of the inner yoke 31 and the outer yoke 37 is formed by rolling a cold rolled steel sheet of permendur, the amount of waste material is larger than that formed by cutting a cold rolled material of permendur. Less. For this reason, the amount of permendule used is reduced, which is advantageous in terms of resource saving and cost reduction.

A lightweight linear actuator 20 is interposed between the transfer head 11 and the suction nozzle 18 of the die bonder device 10 so that each of the upper armature coil 65 and the lower armature coil 66 can be relatively moved in the Z direction. For this reason, since the total weight of the transfer head 11, the linear slider 14, the nozzle head 16, the suction nozzle 18 and the linear actuator 20 is reduced, the load on each of the X-axis servo motor, the Y-axis servo motor, and the Z-axis servo motor is reduced. Get smaller. Therefore, since the X-axis servo motor to the Z-axis servo motor can each have a low output and a small size, the overall configuration of the die bonder apparatus 10 can be reduced. In addition, the suction nozzle 18 can be quickly operated in each of the X direction, the Y direction, and the Z direction. For this reason, since the tact time of the die bonder apparatus 10 can be shortened, productivity improves.
[Example 2]
As shown in FIG. 8, a plurality of printed wiring boards 71 are mounted on the belt conveyor 70. Each of the plurality of printed wiring boards 71 is formed with a solder layer made of cream solder, and is conveyed along the belt conveyor 70 based on the operation of the belt conveyor 70. A plurality of reels 72 are installed in front of the belt conveyor 70, and a tape 73 is wound around each reel 72. Electronic components such as a chip resistor and a chip capacitor are joined to each of these tapes 73. The electronic components are removed from the tape 73 and then pressed against the solder layer of the printed wiring board 71. Mounted. This electronic component corresponds to a component.

  The chip mounter 80 takes out electronic components from the tape 73 and presses them against the solder layer of the printed wiring board 71. This chip mounter device 80 corresponds to a component mounting device, and holds an XY Cartesian coordinate system robot corresponding to a transfer mechanism, a transfer head 11 corresponding to a base member, a linear slider 14 corresponding to an operation mechanism, and a nozzle head 17. It has a suction nozzle 18 and a linear actuator 20 corresponding to members. Each of these XY Cartesian coordinate system robot to linear actuator 20 is as described in the first embodiment, and the robot moves the suction head 18 based on the movement operation of the transfer head 11 in each of the X direction and the Y direction. The linear slider 14 moves the nozzle head 17 from the pre-suction position by moving between the pre-suction position immediately above the electronic component to be suctioned and the pre-mounting position just above the printed wiring board 71 to be mounted. The suction nozzle 18 is pressed against the electronic component to be sucked based on the movement operation in the Z direction to suck the electronic component, and the electronic component is moved based on the movement operation of the nozzle head 17 in the Z direction from the pre-mounting position. Is pressed against the printed circuit board 71 to be mounted and mounted. Chueta 20 applying thrust downward by the suction nozzle 18 in each case of And Mounting When the suction nozzle 18 to suck the electronic component. This pre-adsorption position corresponds to the pressing position, and the Z direction corresponds to the setting direction.

According to the said Example 2, there exist the following effects.
Since a lightweight linear actuator 20 is interposed between the transfer head 11 and the suction nozzle 18 of the chip mounter 80 so that the upper armature coil 65 and the lower armature coil 66 can be moved relatively in the Z direction. The loads on the X-axis servo motor, the Y-axis servo motor, and the Z-axis servo motor are reduced. For this reason, since a small thing with a low output can be used as each of the X-axis servo motor to the Z-axis servo motor, the entire configuration of the chip mounter device 80 can be reduced. Moreover, since the suction nozzle 18 can be operated quickly in the X direction, the Y direction, and the Z direction, the productivity is improved.
[Example 3]
An upper armature coil 65 is accommodated in the upper coil winding portion 57 of the bobbin 51 as shown in FIG. The upper armature coil 65 is formed by winding a magnet wire in a clockwise direction in the upper coil winding portion 57, and the winding start end portion of the upper armature coil 65 is an upper groove 59. And the end of winding of the upper armature coil 65 is soldered to the power terminal 56 through the upper groove 61 and then passes through the upper groove 62 and the lower groove 64 in order. It is inserted into the winding part 58. A lower armature coil 66 is accommodated in the lower coil winding portion 58. The lower armature coil 66 is formed by winding a magnet wire in the lower coil winding portion 58 in the same clockwise direction as the upper armature coil 65, and the lower armature coil 66 is wound. The end portion is soldered to the power terminal 55 through the lower groove 63 and the upper groove 60 in order. That is, the upper armature coil 55 and the lower armature coil 56 are connected in parallel so that currents flow in opposite directions.

According to the said Example 3, there exist the following effects.
The winding direction of the upper armature coil 55 and the winding direction of the lower armature coil 56 were set to be the same. For this reason, when the upper armature coil 55 and the lower armature coil 56 are wound around the bobbin 51 in sequence, it is not necessary to perform an operation for switching the winding direction in the middle, so that the operation time can be shortened.

In each of the first to third embodiments, the inner yoke 31 and the outer yoke 37 may each have a thickness dimension that is not set to be constant. Hereinafter, the inner yoke 31 whose radial thickness dimension is not constant and the outer yoke 37 whose radial thickness dimension is not constant will be described.
[Example 4]
As shown in FIG. 9, the inner yoke 31 is formed with an inner thin portion 81 and an inner thick portion 82. The inner thin portion 81 is disposed at the lower end portion of the inner yoke 31 in the axial direction. The inner thin portion 81 is set to have a smaller radial thickness than the remaining portion of the inner yoke 31, and the inner diameter of the inner thin portion 81 of the inner yoke 31 is smaller than that of the remaining portion. It is set to a large constant value. The inner thick part 82 is disposed at the axial center of the inner yoke 31, and the inner upper permanent magnet 32, the inner lower permanent magnet 33, and the inner spacer 34 are respectively connected to the inner thick part 82 from the radial direction. Opposite. The inner thick portion 82 is set to have a larger radial dimension than the remaining portion of the inner yoke 31, and the inner thick portion 82 of the inner yoke 31 has a larger inner diameter than the remaining portion. Is set to a small constant value. The symbol Ri indicates the protruding amount of the inner thick portion 82, and the protruding amount Wi is set to “0.3 mm”.

  As shown in FIG. 10, an outer thick portion 83 is formed in the outer yoke 37. As shown in FIG. 9, the outer thick portion 83 is disposed at the central portion in the axial direction of the outer yoke 37, and the outer upper permanent magnet 38, the outer lower permanent magnet 39, and the outer spacer 40 are respectively It faces the outer thick part 83 from the radial direction. The outer thick portion 83 is set to have a larger radial thickness than the remaining portion of the outer yoke 37, and the outer diameter of the outer thick portion 83 of the outer yoke 37 is the remaining portion. It is set to a large constant value. Symbol Ro indicates the protruding amount of the outer thick portion 83, and the protruding amount Wo is set to “0.5 mm”.

According to the said Example 4, there exists the following effect.
An inner thick portion 82 is formed in the inner yoke 31, and the thickness dimension in the radial direction of the boundary portion between the inner upper permanent magnet 32 and the inner lower permanent magnet 33 where the magnetic flux is concentrated in the inner yoke 31 is determined. Since it is set larger than the remaining portion, it is possible to prevent magnetic saturation from occurring in the inner yoke 31 while suppressing an increase in the weight of the inner yoke 31. An outer thick portion 83 is formed in the outer yoke 37, and the thickness dimension in the radial direction of the boundary portion between the outer upper permanent magnet 38 and the outer lower permanent magnet 39 where the magnetic flux concentrates in the outer yoke 37 is determined. Since it is set larger than the remaining portion, it is possible to prevent magnetic saturation from occurring in the outer yoke 37 while suppressing an increase in the weight of the outer yoke 37.
[Example 5]
As shown in FIG. 11, the inner yoke 31 has an inner upper inclined portion 91 corresponding to the first inner inclined portion. The inner upper inclined portion 91 is a portion whose thickness in the radial direction increases from top to bottom, and the outer diameter at the inner upper inclined portion 91 of the inner yoke 31 is set to increase from top to bottom. The maximum contact surface between the inner upper permanent magnet 32 and the inner spacer 34 is set. The inner upper inclined surface 92 of the inner upper permanent magnet 32 is joined to the outer peripheral surface of the inner upper inclined portion 91 in a surface contact state. The inner upper inclined surface 92 is inclined from the upper side to the lower side toward the outer peripheral side, and the thickness dimension in the radial direction of the inner upper permanent magnet 32 is set smaller from the upper side to the lower side. The inner upper inclined surface 92 corresponds to a first inner inclined surface.

  As shown in FIG. 11, an inner lower inclined portion 93 corresponding to the second inner inclined portion is formed in the inner yoke 31. This inner lower inclined portion 93 is a portion where the radial thickness dimension increases from the bottom to the top, and the outer diameter dimension at the inner lower inclined portion 93 of the inner yoke 31 is set to increase from the bottom upward. The contact surface between the inner lower permanent magnet 33 and the inner spacer 34 is set to the maximum. The inner lower inclined surface 94 of the inner lower permanent magnet 33 is joined to the outer peripheral surface of the inner lower inclined portion 93 in a surface contact state. The inner lower inclined surface 94 is inclined outward from the bottom to the upper side, and the thickness dimension in the radial direction of the inner lower permanent magnet 33 is set to be smaller from the bottom to the top. The inner lower inclined surface 94 corresponds to a second inner inclined surface, and an inclination angle θ of the inner lower inclined surface 94, an inclination angle θ of the inner lower inclined portion 93, an inclination angle θ of the inner upper inclined surface 92, and The inclination angles θ of the inner upper inclined portions 91 are set to the same value.

  As shown in FIG. 11, the outer yoke 37 is formed with an outer upper inclined portion 95 corresponding to the first outer inclined portion. This outer upper inclined portion 95 is a portion where the thickness dimension in the radial direction increases from top to bottom, and the inner diameter dimension at the outer upper inclined portion 95 of the outer yoke 37 is set to decrease from top to bottom, The contact surface between the outer upper permanent magnet 38 and the outer spacer 40 is set to a minimum. The outer upper inclined surface 96 of the outer upper permanent magnet 38 is joined to the inner peripheral surface of the outer upper inclined portion 95 in a surface contact state. The outer upper inclined surface 96 is inclined from the upper side to the lower side toward the inner peripheral side, and the radial thickness dimension of the outer upper permanent magnet 38 is set to be smaller from the upper side to the lower side. The outer upper inclined surface 96 corresponds to a first outer inclined surface.

  As shown in FIG. 11, the outer yoke 37 is formed with an outer lower inclined portion 97 corresponding to the second outer inclined portion. The outer lower inclined portion 97 is a portion in which the radial thickness dimension increases from the bottom to the top, and the inner diameter dimension at the outer lower inclined portion 97 of the outer yoke 37 is set to decrease from the bottom to the top. The contact surface between the outer lower permanent magnet 39 and the outer spacer 40 is set to a minimum. The outer lower inclined surface 98 of the outer lower permanent magnet 39 is joined to the inner peripheral surface of the outer lower inclined portion 97 in a surface contact state. The outer lower inclined surface 98 is inclined from the bottom upward to the inner peripheral side, and the radial thickness of the outer lower permanent magnet 39 is set to be smaller from the bottom upward. The outer lower inclined surface 98 corresponds to a second outer inclined surface, and an inclination angle θ of the outer lower inclined surface 98, an inclination angle θ of the outer lower inclined portion 97, and an inclination angle θ of the outer upper inclined surface 96. The inclination angles θ of the outer upper inclined portions 95 are set to the same value.

According to the said Example 5, there exist the following effects.
Each of the inner upper inclined portion 91 and the inner lower inclined portion 93 is formed on the inner yoke 31. For this reason, since the thickness dimension in the radial direction of the boundary portion between the inner upper permanent magnet 32 and the inner lower permanent magnet 33 where the magnetic flux is concentrated in the inner yoke 31 is larger than the remaining portion of the inner yoke 31, It is possible to prevent magnetic saturation from occurring in the inner yoke 31 while suppressing an increase in the weight of the yoke 31. Moreover, the inner upper inclined surface 92 is formed on the inner upper permanent magnet 32, and the inner lower inclined surface 94 is formed on the inner lower permanent magnet 33. Therefore, both of the inner upper inclined portion 91 of the inner yoke 31 and the inner upper inclined surface 92 of the inner upper permanent magnet 32 are brought into surface contact with each other, so that both of them are fixed at the target position. Since both of the inclined portion 93 and the inner lower inclined surface 94 of the inner lower permanent magnet 33 are brought into surface contact with each other, both of them can be fixed at the target position, and therefore, the inner upper permanent magnet 32 and the inner lower permanent magnet 33. The positioning workability with respect to each inner yoke 31 is improved.

  Each of the outer upper inclined portion 95 and the outer lower inclined portion 97 is formed on the outer yoke 37. For this reason, since the thickness dimension in the radial direction of the boundary portion between the outer upper permanent magnet 38 and the outer lower permanent magnet 39 where the magnetic flux is concentrated in the outer yoke 37 is larger than the remaining portion of the outer yoke 37, It is possible to prevent magnetic saturation from occurring in the outer yoke 37 while suppressing an increase in the weight of the yoke 37. Moreover, the outer upper inclined surface 96 is formed on the outer upper permanent magnet 38, and the outer lower inclined surface 98 is formed on the outer lower permanent magnet 39. For this reason, both of the outer upper inclined portion 95 of the outer yoke 37 and the outer upper inclined surface 96 of the outer upper permanent magnet 33 are brought into surface contact with each other, and both of them are fixed to the target position. Since both of the inclined portion 97 and the outer lower inclined surface 98 of the outer lower permanent magnet 39 are brought into surface contact with each other, both of them can be fixed at the target position, so that the outer upper permanent magnet 38 and the outer lower permanent magnet 39 are fixed. The positioning workability with respect to the respective outer yokes 37 is improved.

  FIG. 12 shows that the thickness dimension Ta of the lower end portion of the inner upper permanent magnet 32 and the thickness dimension Ta of the upper end portion of the inner lower permanent magnet 33 are fixed to “1.0”, and the upper end portion of the inner upper permanent magnet 32 is fixed. FIG. 6 shows calculation results of maximum thrust and weight when the thickness dimension Tb and the thickness dimension Tb of the lower end portion of the inner lower permanent magnet 33 are changed in common. According to FIG. 12, since the maximum thrust increases in proportion to the increase in both thickness dimensions Tb, it is preferable that both the thickness dimensions Tb are large in terms of increasing the maximum thrust. When both of these thickness dimensions Tb are large, the inclination angle θ of each of the inner inclined surface 92 of the inner upper permanent magnet 32 and the inner lower inclined surface 94 of the inner lower permanent magnet 33 becomes larger. 32 and the inner lower permanent magnet 33 are difficult to manufacture. In addition, since the weights of the inner upper permanent magnet 32 and the inner lower permanent magnet 33 are heavy when both the thickness dimensions Tb are large, the both thickness dimensions Tb are the maximum thrust, manufacturing workability, and weight. In consideration of the balance between them, it is set within the range of “1.0 <Tb ≦ 1.7”.

In each of the first to fifth embodiments, each of the inner yoke 31 and the outer yoke 37 may be made of a magnetic material such as ferritic iron, ferritic stainless steel, martensitic iron, or martensitic stainless steel. .
In each of the first to fifth embodiments, the bobbin 51 may be formed of an insulating synthetic resin such as PEEK (polyether / ether / ketone resin).

  In each of the first to fifth embodiments, the radial width dimension of the inner upper permanent magnet 32 and the radial width dimension of the inner lower permanent magnet 33 are respectively between the inner upper permanent magnet 32 and the inner lower permanent magnet 33. They may be spaced apart in the axial direction by a distance greater than half of the distance.

  In each of the first to fifth embodiments, the radial width dimension of the outer upper permanent magnet 38 and the radial width dimension of the outer lower permanent magnet 39 are respectively between the outer upper permanent magnet 38 and the outer lower permanent magnet 39. They may be spaced apart in the axial direction by a distance greater than half of the distance.

Perspective view schematically showing appearance of die bonder device Sectional view along line X2 in FIG. A perspective view showing the appearance of the magnet part and the appearance of the winding part in an exploded state of both Cross section showing linear actuator The perspective view which shows the external appearance of a magnet part in the decomposition | disassembly state of a magnet part Perspective view showing the appearance of the winding part A perspective view showing the appearance of the winding part in an exploded state of the winding part The figure which shows Example 2 (The perspective view which shows roughly the external appearance of a chip mounter apparatus) FIG. 4 equivalent view showing Example 4 3 equivalent figure FIG. 4 equivalent diagram showing Example 5 The figure which shows each change of maximum thrust and weight when changing the inclination angle of the inner upper inclined surface and the inclination angle of the inner lower inclined surface in common Figure showing a conventional example

Explanation of symbols

  1 is a semiconductor wafer, 2 is a semiconductor chip, 3 is a lead frame, 10 is a die bonder device, 11 is a transfer head (base member), 14 is a linear slider (operation mechanism), 18 is a suction nozzle (holding member), and 20 is linear Actuator, 31 is an inner yoke, 32 is an inner upper permanent magnet (first inner permanent magnet), 33 is an inner lower permanent magnet (second inner permanent magnet), 35 is a connecting plate (connecting member), and 37 is an outer yoke. , 38 is an outer upper permanent magnet (first outer permanent magnet), 39 is an outer lower permanent magnet (second outer permanent magnet), 51 is a bobbin, 65 is an upper armature coil (first armature coil), 66 is a lower armature coil (second armature coil), 80 is a chip mounter device (component mounting device), 82 is an inner thick part, 83 is an outer thick part, and 91 is an inner upper inclined part (first Inner slope) 92 is an inner upper inclined surface (first inner inclined surface), 93 is an inner lower inclined portion (second inner inclined portion), 94 is an inner lower inclined surface (second inner inclined surface), and 95 is an outer upper inclined surface. Portion (first outer inclined portion), 96 is an outer upper inclined surface (first outer inclined surface), 97 is an outer lower inclined portion (second outer inclined portion), and 98 is an outer lower inclined surface (second outer inclined surface). The outer inclined surface) is shown.

Claims (12)

A cylindrical inner yoke made of a magnetic material;
A cylindrical first inner permanent magnet that is bonded to the outer peripheral surface of the inner yoke, the inner peripheral portion being magnetized to one of the N pole and the S pole, and the outer peripheral portion being magnetized to the other;
The inner yoke is joined to the outer circumferential surface of the first inner permanent magnet so as to be separated from the first inner permanent magnet in the axial direction, and each of the inner circumferential portion and the outer circumferential portion is connected to the same portion of the first inner permanent magnet. A cylindrical second inner permanent magnet magnetized to have opposite polarity;
The first inner permanent magnet has a cylindrical shape having an inner diameter larger than the outer diameter of the first inner permanent magnet and the outer diameter of the second inner permanent magnet. An outer yoke made of a magnetic material disposed on the outer periphery of both of the second inner permanent magnets;
The outer yoke and the inner yoke so that the inner peripheral surface of the outer yoke faces the outer peripheral surface of the first inner permanent magnet and the outer peripheral surface of the second inner permanent magnet from the radial direction through a gap. Connecting members that connect each other,
It is joined to the inner peripheral surface of the outer yoke, and has a cylindrical shape opposed to the outer peripheral surface of the first inner permanent magnet from the radial direction via a gap, and each of the inner peripheral portion and the outer peripheral portion is A first outer permanent magnet magnetized to have the same polarity with respect to the same portion of the first inner permanent magnet;
A cylinder which is joined to the inner circumferential surface of the outer yoke and spaced apart from the first outer permanent magnet in the axial direction, and which is opposed to the outer circumferential surface of the second inner permanent magnet through a gap from the radial direction. A second outer permanent magnet having a shape and magnetized so that each of the inner peripheral portion and the outer peripheral portion has the same polarity with respect to the same portion of the second inner permanent magnet;
A magnet wire is wound into a cylindrical shape, and is inserted into a gap between the first inner permanent magnet and the first outer permanent magnet so as to be relatively movable in the axial direction. An armature coil;
A magnet wire is wound into a cylindrical shape, and is inserted into a gap between the second inner permanent magnet and the second outer permanent magnet so as to be relatively movable in the axial direction, and the first A linear actuator comprising a second armature coil that is mechanically connected to the armature coil and flows a current in a direction opposite to that of the first armature coil.   The second armature coil is configured by winding a magnet wire in a direction opposite to that of the first armature coil, and a current is applied in a direction opposite to that of the first armature coil. The linear actuator according to claim 1, wherein the linear actuator is connected in series to the first armature coil so as to flow.   The second armature coil is configured by winding a magnet wire in the same direction as the first armature coil, and a current flows in the opposite direction with respect to the first armature coil. The linear actuator according to claim 1, wherein the linear actuator is connected in parallel to the first armature coil so as to flow. The space between the first inner permanent magnet and the second inner permanent magnet is a half of the radial width dimension of the first inner permanent magnet and the radial width dimension of the second inner permanent magnet. It is arranged apart in the axial direction by a distance of the above size,
The space between the first outer permanent magnet and the second outer permanent magnet is half of the radial width dimension of the first outer permanent magnet and the radial width dimension of the second outer permanent magnet. The linear actuator according to any one of claims 1 to 3, wherein the linear actuator is disposed apart in the axial direction by a distance of the above magnitude.   The linear actuator according to claim 1, wherein the connecting member is made of a nonmagnetic material.   The first armature coil and the second armature coil are mechanically connected to each other based on being wound around a common bobbin. Linear actuator described in 1.   The linear actuator according to claim 1, wherein each of the inner yoke and the outer yoke is not set to have a constant radial thickness dimension. Of the inner yoke, the first inner permanent magnet and the second inner permanent magnet are provided at positions facing each other in the radial direction, compared to the remaining portion of the inner yoke. An inner thick part having a large radial thickness,
Among the outer yokes, the first outer permanent magnets and the second outer permanent magnets are provided to be located at portions facing each other in the radial direction, and compared to the remaining portion of the outer yoke. The linear actuator according to claim 1, further comprising an outer thick portion having a large radial thickness. The inner yoke is provided at a portion facing the first inner permanent magnet from the radial direction, and is opposite to the second inner permanent magnet in the first inner permanent magnet. A first inner inclined portion having a radial thickness that increases from one end to the other end on the same side;
The inner yoke is provided at a portion facing the second inner permanent magnet from the radial direction, and is on the same side as the first inner permanent magnet of the second inner permanent magnet. A second inner inclined portion in which the thickness dimension in the radial direction decreases from the one end portion to the other end portion on the opposite side;
A first inner inclined surface that is provided on the first inner permanent magnet and is joined to an outer peripheral surface of the first inner inclined portion in a surface contact state;
A second inner inclined surface that is provided in the second inner permanent magnet and is joined to the outer peripheral surface of the second inner inclined portion in a surface contact state;
The outer yoke is provided at a portion facing the first outer permanent magnet from the radial direction, and is opposite to the second outer permanent magnet in the first outer permanent magnet. A first outer inclined portion having a radial thickness that increases from one end to the other end on the same side;
The outer yoke is provided at a portion facing the second outer permanent magnet from the radial direction, and is on the same side as the first outer permanent magnet of the second outer permanent magnet. A second outer inclined portion having a radial thickness dimension that decreases from one end to the other end on the opposite side;
A first outer inclined surface that is provided on the first outer permanent magnet and is joined to the inner peripheral surface of the first outer inclined portion in a surface contact state;
The second outer permanent magnet is provided on the second outer permanent magnet, and has a second outer inclined surface joined to the outer peripheral surface of the second outer inclined portion in a surface contact state. The linear actuator in any one of 1-7. A holding member for holding the component;
A base member that supports the holding member to be movable in a predetermined setting direction;
A transfer mechanism for transferring the holding member from a pressing position for pressing the holding member to a component based on a movement operation of the base member in a direction different from the setting direction, to a position different from the pressing position;
An operation mechanism for pressing the holding member against a component based on moving the holding member from the pressing position in the setting direction;
The linear actuator according to any one of claims 1 to 9, wherein the first armature coil and the second armature coil are relatively in the set direction between the base member and the holding member. The component holding device is interposed so as to be movable. In what takes a semiconductor chip from a semiconductor wafer and mounts it on a lead frame,
An adsorption nozzle for adsorbing a semiconductor chip;
A transfer head that supports the suction nozzle so as to be movable in a predetermined setting direction;
A first pressing position for pressing the suction nozzle against the semiconductor chip based on a movement operation of the transfer head in a direction different from the setting direction and the semiconductor chip sucked by the suction nozzle against the lead frame A transfer mechanism for transferring between the second pressing positions for
Based on the operation of moving the suction nozzle in the setting direction, the suction nozzle is pressed against the semiconductor chip from the first pressing position, and the semiconductor chip sucked by the suction nozzle is moved from the second pressing position to the lead frame. With an operating mechanism to press
The linear actuator according to any one of claims 1 to 9, wherein each of the first armature coil and the second armature coil is relatively in the set direction between the transfer head and the suction nozzle. A die bonder device characterized by being interposed so as to be movable. In a method of taking a semiconductor chip from a semiconductor wafer and mounting it on a lead frame,
A suction step of pressing the suction nozzle against the semiconductor chip based on a movement operation in a predetermined setting direction, and sucking the semiconductor chip by the suction nozzle;
A mounting step of pressing the semiconductor chip sucked by the suction nozzle against the lead frame based on the operation of moving the suction nozzle in the setting direction, and mounting the semiconductor chip on the lead frame;
Each of said adsorption | suction process and said mounting process is said adsorption nozzle based on supplying with electricity to both the 1st armature coil of a linear actuator in any one of Claims 1-9, and a 2nd armature coil. The semiconductor chip mounting method is performed by applying a thrust in the set direction to the above.

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