TWI364902B - - Google Patents
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- TWI364902B TWI364902B TW96136449A TW96136449A TWI364902B TW I364902 B TWI364902 B TW I364902B TW 96136449 A TW96136449 A TW 96136449A TW 96136449 A TW96136449 A TW 96136449A TW I364902 B TWI364902 B TW I364902B
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1364902 « ^ 九、發明說明： ' 【發明所屬之技術領域】 本發明係關於藉由電磁力來獲得直線推力之線性致動器 及利用線性致動器之零件保持裝置、黏晶機裝置β • 【先前技術】 ' 線性致動器係於永久磁鐵所產生之磁場中配置電樞線 圈，基於對電樞線圈流入電流，藉由電磁力來獲得直線推 ^ 力之結構。 圖13係表示上述線性致動器之以往結構，其揭示於曰本 專利特開2004-88992號公報。此以往之線性致動器係具備 圓柱狀之内側軛101及圓筒狀之外側軛1〇2 ;内側軛1〇1係 對於外側軛102可往軸向移動地插入於外側軛1 〇2之内部。 於此内側輕101之外周面，往軸向3段地接合有圓筒狀之永 久磁鐵103。此等3個永久磁鐵1〇3各個係内周部被磁化為1< 極及S極之一方’且外周部被磁化為ν極及s極之另一方； φ 3個永久磁鐵103係配置為沿著軸向在内周部依序排列有Ν 極、S極與Ν極，沿著軸向在外周部依序排列有s極、ν極 與呂極。於此等3個永久磁鐵各個之外周面與外側軛1 〇2之 内周面間，插入有圓筒狀之電樞線圈丨〇4，3個電樞線圈 . 104經由外侧軛1〇2而相互機械式地連結。此等3個電樞線 圈104各個係設置於永久磁鐵1 〇3之磁場中，對3個電樞線 圈104之各個供給電流，以對於外侧軛1〇2賦予往下或往上 之推力。此以往之線性致動器之情況下，由於永久磁鐵 103及電樞線圈1〇4各個沿著軸向排列為3段，因此軸向之 I24792.doc 1364902 同度尺寸變大。而且’由於在轴向鄰接之永久磁鐵I”相 互間機械式地接觸，因此在軸向鄰接之永久磁鐵1〇3相互 間，磁通會直接環路。因此，將電柩線圈1〇4鏈交之磁通 減少，推力因而降低。 【發明内容】 本發明之目的在於提供一種可將軸向之高度尺寸抑制在 較小，同時產生大推力之線性致動器，及利用線性致動器 之裝置。 本發明之線性致動器係包含：筒狀5之内側軛，其係由 磁味體所組成，筒狀之第一内側永久磁鐵，其係接合於前 述内側耗之外周φ，内周部被磁化為N極及S極之一方，且 外=部被磁化為另_方；筒狀之第二内側永久磁鐵，其係 從則述第-内側水久磁鐵往轴向分開並接合於前述内側軛 卜周面Θ周部及外周部分別被磁化為對於前述第一内 側永久磁鐵之相同部分呈相反極性；磁性體製外側輕，直 係構成相較於前述第—内側永久磁鐵之外徑尺寸及前述第 —内側永久磁鐵之外;^ p y 夕拉 观义外^尺寸之各個，具有更大之内徑尺寸 之4狀，並配置於前诚筮— 、 、 内側永久磁鐵及前述第二内側 ==雙方之外周部；連結構件，其係以前述外側輕之 二^⑼“空隙與前述第—内側永久磁鐵 =述第二内侧永久磁鐵之外周面各個對向之方式，將前 :卜：耗及前述内側輕相互連結；第一 述第肉『 ^之内周面’構成從徑向經由間隙與前 攻第一内側求久磁鐵之外 卜周面對向之清狀’並且被磁化為 l24792.doc 1364902 内周錢外周部分別對於前述第—内側永久磁鐵之相同部 分呈同-極性1二外侧永久磁鐵，其係從前述第—外側 水久磁鐵往軸向分開並接合於前述外㈣之内周面1364902 « ^ IX. Description of the invention: 'Technical field of the invention>> The present invention relates to a linear actuator for obtaining linear thrust by electromagnetic force and a component holding device using a linear actuator, and a die bonding device device. [Prior Art] The linear actuator is configured such that an armature coil is disposed in a magnetic field generated by a permanent magnet, and a linear force is obtained by electromagnetic force based on an inflow current to the armature coil. Fig. 13 is a view showing a conventional structure of the above linear actuator, which is disclosed in Japanese Laid-Open Patent Publication No. 2004-88992. The conventional linear actuator includes a cylindrical inner yoke 101 and a cylindrical outer yoke 1〇2; the inner yoke 1〇1 is inserted into the outer yoke 1 对于2 in the axial direction of the outer yoke 102. internal. On the outer peripheral surface of the inner side light 101, a cylindrical permanent magnet 103 is joined to the axial direction in three stages. The inner peripheral portions of the three permanent magnets 1〇3 are magnetized to 1<one of the poles and the S poles' and the outer peripheral portion is magnetized to the other of the ν pole and the s pole; φ 3 permanent magnets 103 are arranged as The anode, the S pole, and the drain are arranged in this order along the axial direction, and the s pole, the ν pole, and the Lu pole are sequentially arranged in the outer peripheral portion along the axial direction. A cylindrical armature coil 4 is inserted between the outer peripheral surface of each of the three permanent magnets and the inner peripheral surface of the outer yoke 1 〇 2, and three armature coils 104 are inserted via the outer yoke 1 〇 2 Mechanically linked to each other. Each of the three armature coils 104 is disposed in a magnetic field of the permanent magnets 1 〇 3, and supplies current to each of the three armature coils 104 to impart a downward or upward thrust to the outer yoke 1 〇 2 . In the case of the conventional linear actuator, since the permanent magnet 103 and the armature coil 1〇4 are each arranged in three stages in the axial direction, the I24792.doc 1364902 in the axial direction becomes larger in size. Further, since the permanent magnets I are adjacent to each other in the axial direction are mechanically contacted with each other, the magnetic flux is directly looped between the permanent magnets 1 and 3 adjacent to each other in the axial direction. Therefore, the electric coil 1〇4 chain is connected. The magnetic flux is reduced, and the thrust is thus reduced. SUMMARY OF THE INVENTION An object of the present invention is to provide a linear actuator capable of suppressing a height dimension of an axial direction while generating a large thrust, and using a linear actuator The linear actuator of the present invention comprises: an inner yoke of a cylindrical shape 5, which is composed of a magnetic odor body, and a cylindrical first inner permanent magnet which is joined to the inner side outer circumference φ, inner circumference The portion is magnetized to one of the N pole and the S pole, and the outer portion is magnetized to the other side; the cylindrical second inner permanent magnet is axially separated and joined from the first inner tube The inner yoke peripheral surface and the outer peripheral portion are respectively magnetized to have opposite polarities with respect to the same portion of the first inner permanent magnet; the outer side of the magnetic system is light, and the direct structure is smaller than the outer diameter of the first inner permanent magnet. Size and the foregoing - Outside the inner permanent magnet; ^ py 夕 观 观 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ 夕 夕 夕 夕 夕 夕 夕 夕 夕 夕 夕 夕 夕 夕 夕 夕 夕a peripheral member; the connecting member is formed by the outer side of the light (2) "void" and the first inner permanent magnet = the outer peripheral surface of the second inner permanent magnet, and the front side: The inner side is lightly connected to each other; the first inner meat "the inner circumference of the ^" constitutes a clear shape from the radial direction through the gap and the front inner first magnet, and is magnetized to l24792.doc 1364902 The outer peripheral portion of the inner peripheral money respectively has the same-polarity 1 outer permanent magnet for the same portion of the first inner permanent magnet, which is axially separated from the first outer water permanent magnet and joined to the inner circumference of the outer (four) surface
從徑向經由空隙與前述第二内側永久磁鐵之外周面對向之 筒狀’並且被磁化為内周部及外周部分別對於前述第二内 侧永久磁鐵之相同部分呈同一極性；帛一電樞線圈，：係 筒狀地捲繞磁線而成’可往軸向相對移動地插入前述第」 内側永久磁鐵及前述第—外側永久磁鐵相互間之空隙；及 第二電樞線@，其係筒狀地捲繞磁線而成，可往軸向相對 移動地插入前述第二内側永久磁鐵及前述第二外侧永久磁 鐵相互間之空隙，且機械式地連結於前述第一電樞線圈， 並且電流在與前述第一電樞線圈相反方向流動。a cylindrical shape that faces the outer circumference of the second inner permanent magnet from the radial direction and is magnetized so that the inner peripheral portion and the outer peripheral portion have the same polarity for the same portion of the second inner permanent magnet; a coil: a magnetic wire is wound in a tubular shape to be inserted into the first axial permanent magnet and the first outer permanent magnet; and a second armature wire @, The magnetic wire is wound in a tubular shape, and a gap between the second inner permanent magnet and the second outer permanent magnet is inserted into the gap between the second inner permanent magnet and the second outer permanent magnet, and is mechanically coupled to the first armature coil, and The current flows in a direction opposite to the aforementioned first armature coil.
若根據本發明之線性致動器，由於在第—内側永久磁鐵 及第一外側永久磁鐵相互間，第一電樞線圈可往軸向相對 地移動地配置，於第二内側永久磁鐵及第二外側永久磁鐵 相互間’第二電樞線圈可往軸向相對移動地配置，因此線 性致動器之軸向之高度尺寸被抑制在較小。而且，由於將 第一電樞線圈及第二電柩線圈分別鏈交之磁通增加，因此 於第一電樞線圈及第二電樞線圈分別產生之推力變大。而 且，第一内側永久磁鐵及第二内側永久磁鐵在軸向分開配 置，第一外側永久磁鐵及第二外侧永久磁鐵在軸向分開配 置，因此抑制於第一内側永久磁鐵及第二内側永久磁鐵相 互間’磁通直接環路，並抑制於第一外側永久磁鐵及第二 外侧永久磁鐵相互間，磁通直接環路。因此，分別更加增 124792.doc 1364902 加將第-電樞線圈鏈交之磁通及將第二電樞線圈鏈交之磁 通，故於第一電樞線圈及第二電樞線圈分別產 加變大。 【實施方式】 [第一實施例] 根據圖1至圖7來說明本發明之笛—奋t 币—貫施例。如圖1所According to the linear actuator of the present invention, since the first inner permanent magnet and the first outer permanent magnet are mutually displaced, the first armature coil can be relatively moved in the axial direction, and the second inner permanent magnet and the second The outer permanent magnets are disposed such that the second armature coils are relatively movable in the axial direction, and thus the axial height dimension of the linear actuator is suppressed to be small. Further, since the magnetic flux that respectively links the first armature coil and the second electric coil is increased, the thrust generated in each of the first armature coil and the second armature coil is increased. Further, the first inner permanent magnet and the second inner permanent magnet are disposed apart from each other in the axial direction, and the first outer permanent magnet and the second outer permanent magnet are disposed apart in the axial direction, thereby suppressing the first inner permanent magnet and the second inner permanent magnet The magnetic flux is directly looped to each other and is suppressed from being directly looped between the first outer permanent magnet and the second outer permanent magnet. Therefore, the respective armature coils are connected to the magnetic flux and the second armature coil is connected to the magnetic flux, so that the first armature coil and the second armature coil are separately produced. Become bigger. [Embodiment] [First Embodiment] A flute-fighter-coal example of the present invention will be described with reference to Figs. As shown in Figure 1
示，半導體晶片1係於半導體晶圓2燒附電路圖案，於電路 圖案施以曝光及㈣等各處理後，將電路圖案切出長方形 而形成，其排列為複數行及複數段。於此等複數半^體晶 之右冑，複數引線架3排列為_行。*此等複數引線: 3之各個，形成有由接著劑組成之接著層；半導體晶片】係 基於將半導體晶片1按壓至引線架3之接著層，以固定於引The semiconductor wafer 1 is formed by baking a circuit pattern on the semiconductor wafer 2, and performing a process such as exposure and (4) on the circuit pattern, and then forming the circuit pattern into a rectangular shape, which is arranged in a plurality of rows and a plurality of segments. On the right side of the plurality of half-body crystals, the plurality of lead frames 3 are arranged in a row. *These plurality of leads: 3 are each formed with an adhesive layer composed of an adhesive; the semiconductor wafer is based on pressing the semiconductor wafer 1 to the back layer of the lead frame 3 to be fixed to the lead
生之推力更 線架3。此等複數引線架3搭載於輸送帶4。此輸送帶々係將 複數引線架3之各個搬運至下一步驟之黏晶機裝置；半導 體晶片1之電極及引線架3之引線相互間係由下—步驟之黏 a曰機裝置來結線。黏晶機裝置（Diejonder)1〇係從半導體 晶圓2取出半導體晶片1，並按壓至引線架3之接著層，其 構成如下。 移送頭11係連結於XY正交座標系機器人之臂部，如圖2 所不具有：往垂直方向延伸之縱長板狀之基座部12，及往 水平方向延伸之橫長板狀之保持器部i 3。此交座標 系機器人之臂部係將xii伺服馬達作為驅動源，來將移送 頭11往X方向直線地進行移動操作，並將Y軸伺服馬達作 為驅動源’來將移送頭11往γ方向直線地進行移動操作； 124792.doc -10· 1364902 Y方向係稱呼對於複數引線架3之排列方向呈水平之水平方 向’ X方向係稱呼對於γ方向呈直角交叉之水平方向。於 此移送頭11之基座部12，安裝有線性滑件14。此線性滑件 14係具有：導引部15，其係不可移動地固定於基座部12 ; 滑動部16，其係可往Ζ方向直線移動地安裝於導引部15 ; 及Ζ軸伺服馬達，其係將滑動部丨6往ζ方向進行移動操作； Z方向係稱呼分別對於X方向及γ方向呈直角交又之垂直方 向。此線性滑件14相當於操作機構，Χγ正交座標系機器 人相當於移送機構。 如圖2所示，於線性滑件14之滑動部16係不可移動地固 定有喷嘴頭17。於此喷嘴頭17，不可移動地固定有吸附喷 嘴1 8，XY正交座標系機器人係基於將移送頭丨丨分別往X方 向及Y方向進行移動操作，以於吸附前位置及固定前位置 相互間，將吸附喷嘴丨8進行移動操作。吸附前位置係吸附 喷嘴18對於作為吸附對象之半導體晶片丨，從正上方相對 向之位置，其相當於第一按壓位置。固定前位置係吸附噴 嘴18對於作為固定對象之引線架3，從正上方相對向之位 置，其相當於第二按壓位置。此吸附喷嘴18連接於真空泵 之吸氣口。此吸附喷嘴18係基於被真空泵之吸引力真空 化，以吸附半導體晶片丨；線性滑件丨4係基於在吸附喷嘴 18被移動操作至吸附前位置之狀態下，將喷嘴頭17往下方 移動操作，以將吸附喷嘴18按壓至作為吸附對象之半導體 晶片1，來吸附半導體晶片丨’並基於在吸附喷嘴18被移動 操作至固定前位置之狀態下，將喷嘴頭17往下方移動操 124792.doc 1364902 作’以將吸附喷嘴18吸附之半導體晶片1按壓至作為固定 對象之引線架3之接著層來固定。 如圖2所示，於喷嘴頭17連結有圓筒型之線性致動器 20。此線性致動器20係對於吸附噴嘴丨8及滑動部丨6，分別 賦予從上往下之方向之推力，藉由從線性致動器2〇對於滑 動部16所賦予之推力，來防止滑動部16因移送頭丨丨移動時 之振動而對於導引部15移動。而且，藉由從線性致動器2〇 對於吸附噴嘴18所賦予之推力，來分別調整吸附喷嘴18從 半導體晶圓2吸附半導體晶片1時，從吸附噴嘴丨8作用於半 導體晶片1之加壓力，以及吸附噴嘴i 8將半導體晶片i固定 於引線架3時，從吸附喷嘴18作用於半導體晶片1之加壓 力。如圖3所示’此線性致動器2〇具有磁鐵部3〇及捲線部 5〇，磁鐵部30固定於可動侧之喷嘴頭1γ，捲線部5〇固定於 固疋側之移送頭11。此等磁鐵部3 〇及捲線部5 〇分別之詳細 結構如下。 1·磁鐵部30之說明 如圖2所示，於喷嘴頭17固定有往垂直方向延伸之縱長 圓筒狀之内側輛31。此内側軛3丨係捲曲鐵鈷合金 (Permendur、Fe-C〇合金）製之冷軋鋼板而形成，内側軛31 之徑向之寬度尺寸係於軸向全區設定為一定，内側軛31之 内徑尺寸及外徑尺寸分別於軸向全區設定為一定。如圖4 所示’於此内側軛3 1之外周面，位於上端部以接觸狀態嵌 合有内侧上永久磁鐵32之内周面。此内側上永久磁鐵32相 當於第一内側永久磁鐵，藉由接著劑不可移動地接合於内 124792.doc -12· 1364902 側軛3 1。此内側上永久磁鐵32係對於内側軛3 1構成同心之 .圓筒狀，其被磁化為外周部成為N極且内周部成為S極。The thrust of life is more wire frame 3. These plurality of lead frames 3 are mounted on the conveyor belt 4. The conveyor belt transports each of the plurality of lead frames 3 to the next stage of the die bonding machine; the electrodes of the semiconductor wafer 1 and the leads of the lead frame 3 are connected to each other by a lower-step adhesive device. The die bonder device (1) removes the semiconductor wafer 1 from the semiconductor wafer 2 and presses it to the subsequent layer of the lead frame 3, which is constructed as follows. The transfer head 11 is coupled to the arm portion of the XY orthogonal coordinate robot, and as shown in FIG. 2, does not have a vertically long plate-like base portion 12 extending in the vertical direction, and a horizontally long plate-like shape extending in the horizontal direction. Department i 3 . The arm of the hand-based robot uses the xii servo motor as a drive source to linearly move the transfer head 11 in the X direction, and uses the Y-axis servo motor as a drive source to straighten the transfer head 11 to the γ direction. The movement operation is performed; 124792.doc -10· 1364902 The Y direction is called the horizontal direction in which the arrangement direction of the plurality of lead frames 3 is horizontal. The X direction is called the horizontal direction in which the γ direction intersects at right angles. The base portion 12 of the transfer head 11 is attached to the linear slider 14. The linear slider 14 has a guiding portion 15 that is non-movably fixed to the base portion 12, and a sliding portion 16 that is movably mounted to the guiding portion 15 in a linear direction; and a cymbal servo motor The movement of the sliding portion 丨6 in the ζ direction is performed; the Z direction is referred to as a vertical direction perpendicular to the X direction and the γ direction. This linear slider 14 corresponds to an operating mechanism, and the Χγ orthogonal coordinate system is equivalent to a transfer mechanism. As shown in Fig. 2, the nozzle head 17 is fixed to the sliding portion 16 of the linear slider 14 so as not to be movable. In the nozzle head 17, the adsorption nozzles are fixedly immovably fixed. The XY orthogonal coordinate system robot moves the transfer heads in the X direction and the Y direction, respectively, so as to move each other in the pre-adsorption position and the pre-fixation position. During the movement, the adsorption nozzle 丨 8 is moved. The pre-adsorption position adsorption nozzle 18 corresponds to the first pressing position of the semiconductor wafer 作为 to be adsorbed from the position directly above. The pre-fixed position suction nozzle 18 is opposed to the lead frame 3 as a fixed object from the upper side, and corresponds to the second pressing position. This adsorption nozzle 18 is connected to the suction port of the vacuum pump. The adsorption nozzle 18 is vacuumed based on the attraction force of the vacuum pump to adsorb the semiconductor wafer; the linear slider 丨4 is based on moving the nozzle head 17 downward in a state where the adsorption nozzle 18 is moved to the pre-adsorption position. The adsorption nozzle 18 is pressed to the semiconductor wafer 1 as the adsorption target to adsorb the semiconductor wafer 丨' and the nozzle head 17 is moved downward in a state where the adsorption nozzle 18 is moved to the pre-fixed position. 124792.doc 1364902 is fixed by pressing the semiconductor wafer 1 adsorbed by the adsorption nozzle 18 to the subsequent layer of the lead frame 3 to be fixed. As shown in Fig. 2, a cylindrical linear actuator 20 is coupled to the nozzle head 17. The linear actuator 20 applies a thrust force from the top to the bottom of the suction nozzle 8 and the sliding portion ,6, and prevents the sliding by the thrust applied to the sliding portion 16 from the linear actuator 2 The portion 16 moves to the guide portion 15 due to the vibration when the head cymbal is moved. Further, by the thrust applied from the linear actuator 2 to the adsorption nozzle 18, the pressure applied to the semiconductor wafer 1 from the adsorption nozzle 8 is adjusted when the adsorption nozzle 18 adsorbs the semiconductor wafer 1 from the semiconductor wafer 2, respectively. And when the adsorption nozzle i 8 fixes the semiconductor wafer i to the lead frame 3, the pressing force acts on the semiconductor wafer 1 from the adsorption nozzle 18. As shown in Fig. 3, the linear actuator 2 has a magnet portion 3A and a winding portion 5A. The magnet portion 30 is fixed to the nozzle tip 1γ on the movable side, and the winding portion 5 is fixed to the transfer head 11 on the fixed side. The detailed structure of each of the magnet portion 3 and the winding portion 5 is as follows. 1. Description of the magnet portion 30 As shown in Fig. 2, an inner side 31 of a vertically long cylindrical shape extending in the vertical direction is fixed to the nozzle head 17. The inner yoke 3 is formed by rolling a cold-rolled steel sheet made of a coiled iron-cobalt alloy (Permendur, Fe-C〇 alloy), and the width dimension of the inner yoke 31 in the radial direction is set to be constant in the entire axial direction, and the inner yoke 31 is The inner diameter size and the outer diameter size are set to be constant in the entire axial direction. As shown in Fig. 4, the inner peripheral surface of the inner upper yoke 31 is fitted with the inner peripheral surface of the inner upper permanent magnet 32 in the contact state. The inner upper permanent magnet 32 corresponds to the first inner permanent magnet and is non-movably joined to the inner side flank 31 by an adhesive. The inner upper permanent magnet 32 is concentric with respect to the inner yoke 31. The cylindrical shape is magnetized such that the outer peripheral portion becomes an N pole and the inner peripheral portion becomes an S pole.
如圖4所示，於内側軛3 1之外周面，以接觸狀態嵌合有 内側下永久磁鐵33之内周面，内側下永久磁鐵33係藉由接 著劑不可移動地接合於内側軛31 »此内側下永久磁鐵3 3相 當於第二内側永久磁鐵，從内側上永久磁鐵32分離而配置 於内側上永久磁鐵32之下方。此内侧下永久磁鐵33係對於 内側輛3 1構成同心之圓筒狀’其被磁化為外周部成為s極 且内周部成為N極。於此等内側下永久磁鐵3 3及内側上永 久磁鐵32相互間’介有由絕緣性合成樹脂所組成之内側間 隔物3 2。此内側間隔物3 4係對於内侧下永久磁鐵3 3及内側 上永久磁鐵32，分別構成同心之圓環狀；内側間隔物34之 轴向之寬度尺寸係設定為内側上永久磁鐵32及内側下永久 磁鐵33分別之徑向之寬度尺寸之1/2。亦即，内側下永久 磁鐵33係從内侧上永久磁鐵32，恰好往軸向分開内側上永As shown in Fig. 4, the inner peripheral surface of the inner lower permanent magnet 33 is fitted to the outer peripheral surface of the inner yoke 3 1 in a contact state, and the inner lower permanent magnet 33 is non-movably joined to the inner yoke 31 by an adhesive. The inner lower permanent magnet 3 3 corresponds to the second inner permanent magnet, and is separated from the inner upper permanent magnet 32 and disposed below the inner upper permanent magnet 32. The inner lower permanent magnet 33 is formed in a cylindrical shape concentric with respect to the inner vehicle 31. It is magnetized such that the outer peripheral portion becomes the s pole and the inner peripheral portion becomes the n pole. The inner lower permanent magnets 3 3 and the inner upper permanent magnets 32 interpose each other with an inner spacer 32 composed of an insulating synthetic resin. The inner spacers 34 are formed in a concentric annular shape for the inner lower permanent magnets 33 and the inner upper permanent magnets 32. The axial width of the inner spacers 34 is set to the inner upper permanent magnets 32 and the inner lower portions. The permanent magnets 33 have a radial width dimension of 1/2, respectively. That is, the inner lower permanent magnet 33 is a permanent magnet 32 from the inner side, which is just axially separated from the inner side.
久磁鐵32及内側下永久磁鐵33分別之徑向之寬度尺寸之一 半大小之距離而配置。 内側軛3 1之外周面，位於下端部嵌合有 。此連結板35係對於内側軛3丨構成同心 如圖4所示，於 連結板3 5之内周面 之圓環狀，藉由接著劑不可移動地接合於内側輛31。此連 結板35m等㈣性料為材料，於連結板以外周部 形成有往上方突出之圓筒狀之保持器36。此連結板Μ相當 於連結構件’於連結板35之保持器部36之内周面，藉由接 著劑接合料纏37。此㈣㈣係構成㈣於_上永 124792.doc •13- 1364902 久磁鐵32之外徑尺寸及内側下永久磁鐵33之外徑尺寸，分 別構成具有更A之内徑尺寸之圓筒狀，基於使外側耗37之 外周面接觸保持器36之内周面，以保持於對於内側軛31呈 同心之固定位置。此外側軛37係捲曲鐵鈷合金（permendur) 製之冷軋鋼板而形成，外側軛37之徑向之寬度尺寸係於軸 向全區設定為一定，外側軛37之内徑尺寸及外徑尺寸分別 於轴向全區設定為一定，外側軛37之内周面係於内側上永 久磁鐵32之外周面及内側下永久磁鐵33之外周面，分別從 徑向經由空隙而對向配置。 如圖4所示，於外側軛37之内周面，位於上端部，以接 觸狀態嵌合有外側上永久磁鐵38之外周面，外側上永久磁 鐵38係藉由接著劑不可移動地接合於外侧軛37。此外側上 永久磁鐵38相當於第一外側永久磁鐵，對於内侧輛31及外 側軛37分別構成同心之圓筒狀。此外側上永久磁鐵38係對 於内侧上永久磁鐵32 ’設定為軸向之高度尺寸相同，且對 於内側上永久磁鐵32，配置在軸向之相同高度，與外周部 為N極且内周部為s極之内側上永久磁鐵32以同一模式被磁 化。 如圖4所示，於外側軛37之内周面，以接觸狀態嵌合有 外側下永久磁鐵3 9之外周面，外側下永久磁鐵3 9係藉由接 著劑不可移動地接合於外側軛37。此外侧下永久磁鐵39係 對於内側軛31及外側軛37分別構成同心之圓筒狀，從外側 上永久磁鐵3 8分離而配置於外側上永久磁鐵3 8之下方。此 外侧下永久磁鐵39係對於内侧下永久磁鐵33，設定為轴向 124792.doc •14· 1364902 之尚度尺寸相同，且對於内側下永久磁鐵33，配置在軸向 之相同高度，與外周部為S極且内周部為N極之内側下永久 磁鐵33以同一模式被磁化。此外側下永久磁鐵39相當於第 二外側永久磁鐵。 如圖4所示，於外側下永久磁鐵39及外側上永久磁鐵38 相互間，介有外側間隔物4〇〇此外側間隔物4〇係將與内側 間隔物32同種類之絕緣體作為材料，其對於外側軛37構成 同心之圓環狀。此外侧間隔物40之軸向之寬度尺寸係設定 為外侧上永久磁鐵3 8及外側下永久磁鐵3 9分別之徑向之寬 度尺寸之1 /2，外側下永久磁鐵3 9係從外側上永久磁鐵 38 ’恰妤往軸向分開外側上永久磁鐵38及外側下永久磁鐵 39分別之徑向之寬度尺寸之一半大小之距離而配置。 2.捲線部50之說明 如圖2所示，於移送頭U之保持器部13，不可移動地固 定有圓筒狀之線圈架51。此線圈架51係以PPS(聚苯硫醚樹 脂）4絕緣性合成樹脂為材料而形成，如圖4所示，其對於 内側軛31及外側軛37分別配置為同心狀β此線圈架51之外 徑尺寸設定比外側上永久磁鐵38及外側下永久磁鐵39分別 之内徑尺寸小，線圈架51之内徑尺寸設定比内侧上永久磁 鐵32及内側下永久磁鐵33分別之外徑尺寸大。外側上永久 磁鐵38之内周面及外側下永久磁鐵39之内周面分別對於線 圈架5 1之外周面分離配置’内側上永久磁鐵32之外周面及 内側下永久磁鐵3 3之外周面分別對於線圈架5丨之内周面分 離配置。亦即’線圈架51可對於磁鐵部30相對地往轴向移 124792.doc •15- 1364902 動。 如圖4所示，於線圈架51形成有端板52。此端板52係稱 呼封閉線圈架51之上面之圓形板狀部分，如圖6所示，於 端板52之外周部，形成有銷孔53及銷孔54，於銷孔53之内 部，藉由接著劑不可脫落地固定有電源端子55之一端部， 於銷孔54之内部，藉由接著劑不可脫落地固定有電源端子 56之一端部。此等電源端子55及電源端子％分別以銅等導 電體為材料而構成銷狀，電源端子55中之一端部除外之其 他部分及電源端子56中之一端部除外之其他部分分別從端 板52突出。 如圖4所示’於線圈架5 1，位於内側上永久磁鐵3 2外側 上永久磁鐵38相互間形成有上線圈捲裝部57，位於内側下 永久磁鐵33及外側下永久磁鐵39相互間形成有下線圈捲裝 部5 8 ’此等上線圈捲裝部5 7及下線圈捲裝部5 8係分別構成 外周面開口之凹狀，以包圍線圈架51之方式形成於線圈架 51之全周。如圖7所示，於此線圈架51，位於上線圈捲裝 部57之上方’形成有上穿越溝59、上穿越溝6〇、上穿越溝 61及上穿越溝62 ’位於上線圈捲裝部57及下線圈捲裝部58 相互間形成有下穿越溝63及下穿越溝64。此等上穿越溝 59〜上穿越溝62及下穿越溝63〜下穿越溝64分別插入有磁 線’其構成沿著線圈架5 1之轴向直線地延伸之筆直狀。 如圖4所示，於上線圈捲裝部57之内部，收納有上電樞 線圈65 ’上電框線圈65係於内側上永久磁鐵32及外側上永 久磁鐵3 8相互間’可往轴向相對移動地配置。此上電枢線 124792.doc -16 · 1364902 圈65係將1條磁線，從軸向之一方側看來往順時針方向捲 繞於上線圈捲裝部57内而構成’上電樞線圈65之捲繞開始 端部係通過上穿越溝59之内部而焊接於電源端子55，上電 樞線圈65之捲繞結束端部係通過下穿越溝63而插入於下線 圈捲裝部58内。此上電樞線圈65相當於第一電樞線圈。 如圖4所示，於下線圈捲裝部58之内部，收納有下電樞 線圈66 ’下電樞線圈66係於内側下永久磁鐵33及外側下永 久磁鐵39相互間，可往軸向相對移動地配置。此下電樞線 圈66係將上電樞線圈65之捲繞結束端部捲繞於下線圈捲裝 部58内而形成’下電樞線圏66之捲繞方向設定為與上電樞 線圈65相反之逆時針方向，下電樞線圈66之捲繞結束端部 依序通過下穿越溝64及上穿越溝62而焊接於電源端子56。 此下電樞線圈66相當於第二電樞線圈，於内側上永久磁鐵 32產生之磁通依序通過上電樞線圈65、外側上永久磁鐵 3 8、外側軛37、外側下永久磁鐵39、下電樞線圈66、内側 下永久磁鐵3 3及内侧輕3 1而於内側上永久磁鐵3 2環路，於 上電樞線圈65及下電樞線圈66，分別對於磁線之捲繞方向 直角地交又有磁通。 上電樞線圈65及下電樞線圈66係相互串聯連接，於電源 端子55及電源端子56相互間施加有電壓時，於上電樞線圈 65及下電樞線圈66分別流有方向互為相反之電流。如此一 來，於上電樞線圈65及下電樞線圈66，分別按照弗萊明之 左手法則而往共同之下方產生推力，從固定側之捲線部5〇 往可動側之磁鐵部30賦予下方之推力。此等上電框線圈65 124792.doc •17- 1364902 及下電樞線圈66分別於吸附步驟中通電，並於固定步驟中 通電。吸附步驟係基於將吸附噴嘴18往下方進行移動操 作’以按壓至半導體晶片1，並藉由吸附噴嘴18來吸附半 導體曰曰片1之步驟；固定步驟係基於將吸附喷嘴a往下方 進行移動操作’以將吸附喷嘴18所吸附之半導體晶片1按 壓至引線架3之接著層’來將半導體晶片1固定於引線架3 之步驟；於吸附步驟及固定步驟，分別對於吸附噴嘴18賦 予從上往下之推力。 若根據上述第一實施例，可發揮以下效果。 由於在内側上永久磁鐵32及外側上永久磁鐵38相互間， 將上電樞線圈65配置為可往軸向相對地移動，於内側下永 久磁鐵33及外側下永久磁鐵39相互間’將下電樞線圈66配 置為可往軸向相對地移動’因此相較於圖丨3之以往之線性 制動器’軸向之高度尺寸抑制在較小。而且，將上電樞線 圈65及下電.樞線圈66分別鏈交之磁通係比圖π之以往之線 性制動器增加’因此於上電樞線圈65及下電柩線圈66分別 產生之推力變大。而且，未經由連結板35而於内側上永久 磁鐵32、内側下永久磁鐵33、外側上永久磁鐵38及外側下 永久磁鐵39形成磁通之流動。因此，可使用非磁性之鋁製 之連結板35 ’故線性制動器20被輕量化。 由於在軸向將内側上永久磁鐵32及内側下永久磁鐵33相 互間分開配置’因此抑制於内側上永久磁鐵3 2及内側下永 久磁鐵33相互間’磁通直接環路。而且，由於在軸向將外 側上永久磁鐵38及外側下永久磁鐵39相互間分開配置，因 124792.doc •18- 1364902 此抑制於外側上永久磁鐵3 8及外側下永久磁鐵3 9相互間， ' 磁通直接環路。因此，將上電樞線圈65鏈交之磁通及將下 電樞線圈66鏈交之磁通分別增加，從此等來看，推力亦變 大。此效果可藉由將内側上永久磁鐵32及内側下永久磁鐵 33相互間之分離距離，設定為内側上永久磁鐵32之徑向之 • 寬度尺寸及内側下永久磁鐵33之徑向之寬度尺寸分別之一 半大小來提高’並可藉由將外側上永久磁鐵3 8及外側下永 φ 久磁鐵3 9相互間之分離距離，設定為外側上永久磁鐵3 8之 徑向之寬度尺寸及外侧下永久磁鐵39之徑向之寬度尺寸分 別之一半大小來提高》 以飽和磁通密度比鐵等大之鐵鈷合金（Perinen(iur)之冷軋 材料來分別形成内侧軛31及外側軛37。因此，相較於由鐵 等分別形成内侧扼3 1及外側軛37之情況更薄壁化，故從此 點來看，線性制動器20亦被輕量化。而且，由於捲曲鐵始 合金（Permendur)之冷軋鋼板來分別形成内側輛31及外側輛 • 37 ’ 因此相較於切削鐵始合金（permendur)之冷軋材料來形 成之情況，廢料量變少。因此’可刪減鐵鈷合金 (Permendur)之使用量，故於省資源化及低成本化之各點方 面有利。 於黏晶機裝置10之移送頭11及吸附喷嘴18相互間，以上 電樞線圈65及下電樞線圈66分別可往z方向相對移動之方 式介有輕量之線性制動器20。因此，由於移送頭丨丨、線性 滑件14、喷嘴頭16、吸附喷嘴18及線性制動器2〇之合計重 量變輕，因此X軸伺服馬達、γ轴伺服馬達及z軸伺服馬達 124792.doc •19- 1364902 分別之負載變小。因此，x軸伺服馬達〜z軸伺服馬達各個 可使用低輪出且小型者，故可縮小黏晶機裝置10之全體結 構。而且，可使吸附喷嘴18往X方向、Y方向及Z方向分別 快速動作。因此，可縮短黏晶機裝置1〇之工作時間，故生 產性提高。 [第一實施例] 根據圖8來說明本發明之第二實施例。於輸送帶7〇搭載 有複數印刷布線基板71。此等複數印刷布線基板71分別形 成有由焊錫膏所組成焊錫層，基於輸送帶70運轉以沿著輸 送帶70搬運。於此輸送帶7〇之前方設置有複數捲盤”，於 複數捲盤72分別捲裝有捲帶73。此等複數捲帶73分別接合 有晶片電阻或晶片電容器等電子零件，基於電子零件從捲 帶73取出後被按屡至印刷布線基板71之洋錫層，以固定於 印刷布線基板71。此電，子零件相當於零件。 晶片固定裝置_從複數捲帶73分別取出電子零件，並 按壓至印刷布線基板71之焊錫層。此晶片固定裝置相當 於零件保持裝置’其具有^當於移動機構之XY正交座 標系機器人、移動頭"、相當於操作機構之線形滑件14、 嘴頭17、相當於保持構件之吸 20» ,貝方《及踝性制動器The long magnet 32 and the inner lower permanent magnet 33 are disposed at a distance of one-half the width of each of the radial widths. The outer peripheral surface of the inner yoke 3 1 is fitted to the lower end portion. The connecting plate 35 is concentric with respect to the inner yoke 3A. As shown in Fig. 4, the connecting plate 35 has an annular shape on the inner circumferential surface of the connecting plate 35, and is non-movably joined to the inner vehicle 31 by an adhesive. The (four) material such as the connecting plate 35m is made of a material, and a cylindrical retainer 36 that protrudes upward is formed on the outer peripheral portion of the connecting plate. The web Μ corresponds to the inner peripheral surface of the holder member 36 of the web 35 of the web 35 by means of an adhesive splicing 37. (4) (4) is composed of (4) in _ Shangyong 124792.doc • 13-1364902 The outer diameter of the permanent magnet 32 and the outer diameter of the inner lower permanent magnet 33 respectively form a cylindrical shape having an inner diameter of A, based on The outer peripheral surface 37 contacts the inner peripheral surface of the retainer 36 so as to be held at a fixed position concentric with respect to the inner yoke 31. Further, the side yoke 37 is formed by crimping a cold-rolled steel sheet made of permendur, and the radial width dimension of the outer yoke 37 is set to be constant in the entire axial direction, and the inner diameter and outer diameter of the outer yoke 37 are set. The inner circumferential surface of the outer yoke 37 is fixed to the outer circumferential surface of the inner upper permanent magnet 32 and the outer circumferential surface of the inner lower permanent magnet 33, respectively, and are disposed to face each other through the gap in the radial direction. As shown in Fig. 4, the inner peripheral surface of the outer yoke 37 is located at the upper end portion, and the outer peripheral surface of the outer upper permanent magnet 38 is fitted in a contact state, and the outer upper permanent magnet 38 is non-movably joined to the outer side by an adhesive. Yoke 37. Further, the side upper permanent magnet 38 corresponds to the first outer permanent magnet, and the inner side 31 and the outer side yoke 37 each have a concentric cylindrical shape. Further, the side upper permanent magnets 38 are set to have the same height dimension in the axial direction for the inner upper permanent magnets 32', and are disposed at the same height in the axial direction for the inner upper permanent magnets 32, and the outer peripheral portion is N poles and the inner peripheral portion is The permanent magnets 32 on the inner side of the s pole are magnetized in the same pattern. As shown in Fig. 4, on the inner peripheral surface of the outer yoke 37, the outer peripheral surface of the outer lower permanent magnet 309 is fitted in a contact state, and the outer lower permanent magnet 39 is non-movably joined to the outer yoke 37 by an adhesive. . Further, the side lower permanent magnets 39 are formed in a concentric cylindrical shape with respect to the inner yoke 31 and the outer yoke 37, and are separated from the outer upper permanent magnets 38 and disposed below the outer upper permanent magnets 38. Further, the lower side permanent magnets 39 are set to have the same axial dimension of the inner lower permanent magnets 33, and the inner lower permanent magnets 33 are disposed at the same height in the axial direction and the outer peripheral portion. The inner lower permanent magnet 33 which is the S pole and whose inner circumference is the N pole is magnetized in the same mode. Further, the side lower permanent magnet 39 corresponds to the second outer permanent magnet. As shown in FIG. 4, between the outer lower permanent magnet 39 and the outer upper permanent magnet 38, the outer spacer 4 is interposed, and the outer spacer 4 is made of the same type of insulator as the inner spacer 32. The outer yoke 37 is formed in a concentric annular shape. Further, the axial width dimension of the side spacer 40 is set to be 1 / 2 of the radial width dimension of the outer upper permanent magnet 38 and the outer lower permanent magnet 39, respectively, and the outer lower permanent magnet 39 is permanently from the outer side. The magnet 38' is disposed so as to be axially separated by a distance of one-half the size of the radial width of the outer upper permanent magnet 38 and the outer lower permanent magnet 39, respectively. 2. Description of the winding portion 50 As shown in Fig. 2, a cylindrical bobbin 51 is fixedly fixed to the holder portion 13 of the transfer head U. The bobbin 51 is formed of a PPS (polyphenylene sulfide resin) 4 insulating synthetic resin, and as shown in FIG. 4, the inner yoke 31 and the outer yoke 37 are arranged concentrically. The outer diameter size is set smaller than the inner diameter of each of the outer upper permanent magnet 38 and the outer lower permanent magnet 39, and the inner diameter of the bobbin 51 is set larger than the outer diameter of the inner upper permanent magnet 32 and the inner lower permanent magnet 33, respectively. The inner circumferential surface of the outer upper permanent magnet 38 and the inner circumferential surface of the outer lower permanent magnet 39 are respectively disposed on the outer circumferential surface of the bobbin 51, and the outer circumferential surface of the inner permanent magnet 32 and the outer circumferential surface of the inner lower permanent magnet 3 3 are respectively disposed. The inner circumferential surface of the bobbin 5 is separated and disposed. That is, the bobbin 51 can be moved axially relative to the magnet portion 30 by 124792.doc • 15 - 1364902. As shown in FIG. 4, an end plate 52 is formed on the bobbin 51. The end plate 52 is referred to as a circular plate-like portion on the upper surface of the closed bobbin 51. As shown in FIG. 6, a pin hole 53 and a pin hole 54 are formed in the outer peripheral portion of the end plate 52, and inside the pin hole 53, One end of the power terminal 55 is fixed by the adhesive without being detached, and one end of the power terminal 56 is fixed to the inside of the pin hole 54 by the adhesive. Each of the power supply terminal 55 and the power supply terminal % is formed of a conductor such as copper as a material, and the other portion except the one end of the power supply terminal 55 and the other portion except the one end of the power supply terminal 56 are respectively from the end plate 52. protruding. As shown in FIG. 4, the coil bobbin 5 1 is located on the inner side of the inner permanent magnet 3 2 and the permanent magnet 38 is formed with an upper coil winding portion 57 therebetween. The inner lower permanent magnet 33 and the outer lower permanent magnet 39 are formed between each other. The lower coil winding portion 5 8 'the upper coil winding portion 57 and the lower coil winding portion 58 are respectively formed in a concave shape in which the outer peripheral surface is opened, and are formed on the bobbin 51 so as to surround the bobbin 51. week. As shown in FIG. 7, the bobbin 51 is located above the upper coil winding portion 57. The upper through groove 59, the upper through groove 6〇, the upper through groove 61, and the upper through groove 62 are formed in the upper coil package. The lower portion 57 and the lower coil portion 58 are formed with a lower passing groove 63 and a lower passing groove 64. The upper through grooves 59 to the upper through grooves 62 and the lower through grooves 63 to the lower through grooves 64 are respectively inserted with magnetic wires 'which are formed in a straight shape extending linearly along the axial direction of the bobbin 51. As shown in FIG. 4, the upper armature coil 65' is housed in the upper coil winding portion 57. The upper frame coil 65 is connected to the inner upper permanent magnet 32 and the outer upper permanent magnet 38. Relatively mobile configuration. The upper armature wire 124792.doc -16 · 1364902 ring 65 is formed by winding one magnetic wire in the clockwise direction from one side of the axial direction to form the upper armature coil 65. The winding start end portion is welded to the power supply terminal 55 through the inside of the upper through groove 59, and the winding end portion of the upper armature coil 65 is inserted into the lower coil winding portion 58 through the lower passing groove 63. This upper armature coil 65 corresponds to the first armature coil. As shown in Fig. 4, the lower armature coil 66 is housed inside the lower coil winding portion 58. The lower armature coil 66 is connected between the inner lower permanent magnet 33 and the outer lower permanent magnet 39, and is axially opposite. Mobile configuration. The lower armature coil 66 winds the winding end portion of the upper armature coil 65 in the lower coil winding portion 58 to form a winding direction of the lower armature coil 66 to be set with the upper armature coil 65. In the opposite counterclockwise direction, the winding end of the lower armature coil 66 is sequentially welded to the power terminal 56 through the lower through groove 64 and the upper through groove 62. The lower armature coil 66 corresponds to the second armature coil, and the magnetic flux generated by the inner permanent magnet 32 passes through the upper armature coil 65, the outer upper permanent magnet 38, the outer yoke 37, and the outer lower permanent magnet 39, respectively. The lower armature coil 66, the inner lower permanent magnet 3 3 and the inner side light 3 1 are looped on the inner upper permanent magnet 32, and the upper armature coil 65 and the lower armature coil 66 are respectively at right angles to the winding direction of the magnetic wire. There is a magnetic flux in the ground. The upper armature coil 65 and the lower armature coil 66 are connected in series to each other. When a voltage is applied between the power supply terminal 55 and the power supply terminal 56, the upper armature coil 65 and the lower armature coil 66 respectively flow in opposite directions. The current. As a result, the upper armature coil 65 and the lower armature coil 66 generate thrust under the common left-hand rule according to Fleming's left-hand rule, and the lower portion is provided from the fixed-side winding portion 5 to the movable-side magnet portion 30. thrust. The upper frame coils 65 124792.doc • 17-1364902 and the lower armature coil 66 are energized in the adsorption step, respectively, and energized in the fixing step. The adsorption step is based on a step of moving the adsorption nozzle 18 downward to press the semiconductor wafer 1 and adsorbing the semiconductor wafer 1 by the adsorption nozzle 18; the fixing step is based on moving the adsorption nozzle a downward 'The step of fixing the semiconductor wafer 1 to the lead frame 3 by pressing the semiconductor wafer 1 adsorbed by the adsorption nozzle 18 to the subsequent layer of the lead frame 3'; in the adsorption step and the fixing step, respectively, the adsorption nozzle 18 is given from the top to the top The thrust underneath. According to the first embodiment described above, the following effects can be exhibited. Since the inner permanent magnet 32 and the outer upper permanent magnet 38 are disposed between each other, the upper armature coil 65 is disposed to be relatively movable in the axial direction, and the inner lower permanent magnet 33 and the outer lower permanent magnet 39 are electrically disconnected from each other. The pivot coil 66 is configured to be relatively movable in the axial direction. Therefore, the axial dimension of the conventional linear brake of FIG. 3 is suppressed to be smaller. Further, the magnetic flux system in which the upper armature coil 65 and the lower electric power pivot coil 66 are respectively linked is increased from the conventional linear brake of FIG. π, and thus the thrust generated by the upper armature coil 65 and the lower electric coil 66 is changed. Big. Further, the inner permanent magnet 32, the inner lower permanent magnet 33, the outer upper permanent magnet 38, and the outer lower permanent magnet 39 form a flow of magnetic flux without passing through the connecting plate 35. Therefore, the non-magnetic aluminum connecting plate 35' can be used, so that the linear brake 20 is lightened. Since the inner upper permanent magnet 32 and the inner lower permanent magnet 33 are disposed apart from each other in the axial direction, the magnetic flux is directly looped between the inner upper permanent magnet 3 2 and the inner lower permanent magnet 33. Further, since the outer upper permanent magnet 38 and the outer lower permanent magnet 39 are disposed apart from each other in the axial direction, since the outer upper permanent magnet 38 and the outer lower permanent magnet 3 9 are restrained from each other, 124792.doc • 18-1364902 is restrained from each other. ' Flux direct loop. Therefore, the magnetic flux that links the upper armature coil 65 and the magnetic flux that links the lower armature coil 66 are respectively increased, and from this point of view, the thrust is also increased. This effect can be set by the separation distance between the inner upper permanent magnet 32 and the inner lower permanent magnet 33, and the radial width dimension of the inner upper permanent magnet 32 and the radial width dimension of the inner lower permanent magnet 33, respectively. Half of the size is increased by 'the distance between the outer upper permanent magnet 38 and the outer lower permanent magnet 3 9 is set to the radial width dimension of the outer upper permanent magnet 38 and the outer lower permanent The width dimension of the radial direction of the magnet 39 is increased by one-half and a half, respectively. The inner yoke 31 and the outer yoke 37 are respectively formed by a cold-rolled material having a saturation magnetic flux density larger than iron and the like (Perinen (iur). The linear brake 20 is also lighter in weight from the case where the inner side 扼 31 and the outer yoke 37 are formed by iron or the like, respectively, and further, cold rolling is performed by the crimped iron alloy (Permendur). The steel plates are respectively formed into the inner side 31 and the outer side. • 37 ', so compared with the cold-rolled material of the cut iron alloy (permendur), the amount of waste is reduced. Therefore, the iron-cobalt alloy can be deleted. The use amount of mendur) is advantageous in terms of resources and cost reduction. The transfer head 11 and the adsorption nozzle 18 of the die bonder device 10 are respectively between the armature coil 65 and the lower armature coil 66. The linear linear brake 20 is interposed in such a manner as to be relatively movable in the z direction. Therefore, since the total weight of the transfer head cymbal, the linear slider 14, the nozzle head 16, the adsorption nozzle 18, and the linear brake 2 is light, X The servo load of the shaft servo motor, γ-axis servo motor and z-axis servo motor 124792.doc •19- 1364902 is reduced. Therefore, the x-axis servo motor and the z-axis servo motor can be used in a low-round and small size, so they can be reduced. The entire structure of the die bonder device 10. Further, the adsorption nozzles 18 can be quickly moved in the X direction, the Y direction, and the Z direction. Therefore, the working time of the die bonder device can be shortened, so that the productivity is improved. [Embodiment] A second embodiment of the present invention will be described with reference to Fig. 8. A plurality of printed wiring boards 71 are mounted on a conveyor belt 7A. These plurality of printed wiring boards 71 are respectively formed with solder layers composed of solder paste. based on The feeding belt 70 is operated to be transported along the conveyor belt 70. A plurality of reels are provided in front of the conveyor belt 7〇, and a reel 73 is wound around the plurality of reels 72. The plurality of reels 73 are respectively bonded to the wafer. An electronic component such as a resistor or a chip capacitor is taken out from the tape 73 and then pressed to the tin layer of the printed wiring board 71 to be fixed to the printed wiring board 71. This electric component corresponds to a component. The fixing device removes the electronic component from the plurality of tapes 73 and presses it onto the solder layer of the printed wiring substrate 71. The wafer fixing device corresponds to the component holding device 'which has the XY orthogonal coordinate system robot of the moving mechanism, The moving head ", the linear slider 14 corresponding to the operating mechanism, the mouthpiece 17, the suction 20» corresponding to the holding member, the shell side and the elastic brake
不系機器人〜線性制動器20分別如「第 一實施型態J所說明；X 送頭u往X方向及丫方白八f交座標系機器人係基於將移 位置及固定前位置:互向：：進行移動操作，以於吸附前 吸附前位置係吸附嘴嘴 運订移動插作。 嘴對於作為吸附對象之電子零件， 124792.doc -20· 1364902 從正上方相對向之位置，固定前位置係吸附喷嘴1 8對於作 ' 為固定對象之印刷布線基板71，從正上方相對向之位置， 吸附前位置相當於按壓位置。 線性滑件14係將喷嘴頭17往Z方向進行移動操作，吸附 • 喷嘴18係基於在移動操作至吸附前位置之狀態下，將喷嘴 • 頭17往下方進行移動操作，以將吸附喷嘴18按壓至作為吸 附對象之電子零件來吸附電子零件，吸附喷嘴丨8係基於在 • 移動操作至固定前位置之狀態下，將喷嘴頭17往下方進行 移動操作’以將吸附喷嘴丨8所吸附之電子零件按壓至作為 固定對象之印刷布線基板71來固定。線性制動器2〇係對於 吸附喷嘴18賦予從上往下之方向之推力，藉由從線性致動 器20對於吸附噴嘴18所賦予之推力’來分別調整吸附喷嘴 18從捲帶73吸附電子零件時，從吸附噴嘴18作用於電子零 件之加壓力，以及吸附噴嘴18將電子零件固定於印刷布線 基板71時，從吸附喷嘴18作用於電子零件之加壓力。 φ 若根據上述第二實施例，可發揮以下效果。 於晶片固定裝置80之移送頭11及吸附喷嘴丨8相互間，以 上電樞線圈65及下電樞線圈66分別可往Z方向相對移動之 ' 方式介有輕量之線性制動器20，因此X軸伺服馬達、γ軸 - 伺服馬達及Z軸伺服馬達分別之負載變少。因此，X軸伺 服馬達〜Z軸伺服馬達各個可使用低輸出且小型者，故可縮 小aa片固疋裝置8 0之全體結構。而且，可使吸附喷嘴丨8往 X方向、Y方向及Z方向分別快速動作，因此生產性提高。 分別於上述第一實施例及第二實施例中，上電枢線圈65 124792.doc 1364902 之捲繞方向及下電樞線圈66之捲繞方向設定為相互一致， 將上電樞線圈65及下電樞線圈66並聯地連接，以便相互方 向相反地流有電流亦可。此結構之情況下，由於在線圈架 51依序捲繞上電樞線圈6 5及下電樞線圈66時，不需要進行 於中途切換捲繞方向之作業，因此可縮短作業時間。此等 上電樞線圈65及下電柩線圈66分別之捲繞步驟如下。將磁 線從軸向之一方側看來往順時針方向捲繞於線圈架5 1之上 線圈捲裝部57内，以構成上電樞線圈65，磁線之捲繞開始 端部係通過上穿越溝59而焊接於電源端子55。此磁線之捲 繞結束端部通過上穿越溝6 1而焊接於電源端子5 6，並依序 通過上穿越溝62及下穿越溝64而插入於線圈架51之下線圈 捲裝部58内。將剩餘磁線往與上電樞線圈65相同之順時針 方向捲繞於該下線圈捲裝部58内，以構成下電樞線圈66， 域線之捲繞結束端部依序通過下穿越溝63及上穿越溝60而 焊接於電源端子55。 分別於上述第一實施例及第二實施例令，使用内側輛3 j 及外側軛37分別之徑向之寬度尺寸非一定者亦可。以下， 分別說明有關控向之寬度尺寸非一定之内側轭3丨及徑向之 寬度尺寸非_定之外側輛3 7。 [第三實施例] 根據圖9及圖10來說明有關本發明之第三實施例。如圖9 所示，於内側耗3 1形成有内側薄壁部8丨及内側厚壁部82。 内側薄壁部81設定於内側軛31之軸向之下端部。此内侧薄 壁部81係相較於内側軛3丨中之内側薄壁部81之其他部分， 124792.doc •22· 1364902 較薄地設定徑向之寬度尺寸，内侧軛3丨之内側薄壁部8丨之 内抱尺寸設定為比内側薄壁部8 1之其他部分大之一定值。 内側厚壁部82設定於内侧耗3 1之轴向之中央部，内側上永 久磁鐵32、内側下永久磁鐵33及内側間隔物34分別從徑向 來與内侧厚壁部82相對向。此内側厚壁部82係相較於内側 輛31中之内側厚壁部82之其他部分，較厚地設定徑向之寬 度尺寸’内側軛3 1之内側厚壁部82之内徑尺寸設定為比内 側薄壁部82之其他部分小之一定值。符號Ri表示内側厚壁 部82之突出量，突出量Ri設定為「〇3mm」。 如圖10所示’於外側軛37形成有外侧厚壁部83。如圖9 所示’此外側厚壁部83設定於外側耗37之轴向之中央部， 外側上永久磁鐵38、外側下永久磁鐵39及外側間隔物40分 別從徑向來與外側厚壁部83相對向。此外側厚壁部83係相 較於外側軛37中之外側厚壁部83之其他部分，較厚地設定 徑向之寬度尺寸，外側軛37之外側厚壁部83之外徑尺寸設 定為比外側薄壁部83之其他部分大之一定值。符號R〇表示 外側厚壁部83之突出量，突出量R〇設定為「〇 5 mmj 。 若根據上述第三實施例’可發揮以下效果。 由於在内側軛3 1形成内側厚壁部82，將内側軛3丨中磁通 集中之内側上永久磁鐵3 2及内側下永久磁鐵3 3相互間之交 界部分之徑向之寬度尺寸設定比交界部分之其他部分大， 因此可抑制内側軛31之重量增加，同時可防止於内側軛31 發生磁性餘和《由於在外側軛37形成外側厚壁部83，將外 側軛37中磁通集中之外側上永久磁鐵38及外側下永久磁鐵 124792.doc •23· 39相互間之交界部分之徑向之寬度尺寸設定比交界部分之 其他部分大’因此可抑制外側軛37之重量增加，同時可防 止於外側軛3 7發生磁性飽和。 [第四實施例] 根據圖11及圖12來說明有關本發明之第四實施例。如圖 11所示’於内侧輛3 1，形成相當於第一内側傾斜部之内側 上傾斜部91。此内側上傾斜部91係徑向之寬度尺寸從下往 上變大之部分’内側輛3 1之内側上傾斜部91之外徑尺寸設 定從上往下變大，並於内側上永久磁鐵32及内側間隔物34 相互間之接觸面設定為最大。於此内側上傾斜部9丨之外周 面’以面接觸狀態接合有内側上永久磁鐵32之内側上傾斜 面92。此内側上傾斜面92係從上往下而往外周側傾斜，内 側上永久磁鐵32之徑向之寬度尺寸設定從上往下變小。此 内側上傾斜面92相當於第一内側傾斜面。 如圖11所示，於内側軛3丨，形成相當於第二内側傾斜部 之内側下傾斜部93。此内側下傾斜部93係徑向之寬度尺寸 從下往上變大之部分’内側軛3丨之内側下傾斜部93之外徑 尺寸設定從下往上變大’並於内側下永久磁鐵33及内側間 隔物34相互間之接觸面設定為最大。於此内側下傾斜部93 之外周面’以面接觸狀態接合有内側下永久磁鐵33之内側 下傾斜面94 ^此内側下傾斜面94係從下往上而往外周側傾 斜’内側下永久磁鐵33之徑向之寬度尺寸設定從下往上變 小。此内侧下傾斜面94相當於第二内側傾斜面，内側下傾 斜面94之傾斜角度Θ、内側下傾斜部93之傾斜角度Θ、内側 124792.doc -24- 1364902 上傾斜面92之傾斜角度θ及内側上傾斜㈣之傾斜角度0分 別設定為相互同一值。 如圖11所示，於外側耗37，形成相當於第—外側傾斜部 之外側上傾斜部95。心卜側上傾斜部95係徑向《寬度尺寸 從上往下變大之部分’外側軛37之外側上傾斜部％之内徑 尺寸成定從上往下變小，並於外側上永久磁鐵38及外側間 隔物4 0相互間之接觸面設定為最小。於此外側上傾斜部$ $ 之内周面，以面接觸狀態接合有外側上永久磁鐵38之外側 上傾斜面96 ^此外側上傾斜面96係從上往下而往内周側傾 斜，外側上永久磁鐵38之徑向之寬度尺寸設定從上往下變 小。此外側上傾斜面96相當於第一外側傾斜面。 如圖11所示，於外側軛37，形成相當於第二外側傾斜部 之外侧下傾斜部97。此外側下傾斜部97係徑向之寬度尺寸 從下往上變大之部分’外側軛37之外側下傾斜部97之内徑 尺寸設定從下往上變小，並於外侧下永久磁鐵39及外側間 隔物40相互間之接觸面設定為最小。於此外側下傾斜部97 之内周面’以面接觸狀態接合有外侧下永久磁鐵3 9之外側 下傾斜面98 »此外側下傾斜面98係從下往上而往内周側傾 斜’外側下永久磁鐵3 9之徑向之寬度尺寸設定從下往上變 小。此外側下傾斜面98相當於第二外侧傾斜面，外側下傾 斜面98之傾斜角度Θ、外側下傾斜部97之傾斜角度Θ、外側 上傾斜面96之傾斜角度Θ及外侧上傾斜部95之傾斜角度θ分 別設定為相互同一值。 若根據上述第四實施例，可發揮以下效果。 124792.doc -25- 1364902 於内側軛3 1分別形成内側上傾斜部9 i及内側下傾斜部 93。因此，内側軛31中磁通集中之内側上永久磁鐵”及内 側下永久磁鐵33相互間之交界部分之徑向之寬度尺寸比交 界部分之其他部分大，因此可抑制内側軛3丨之重量增加， 同時防止於内侧軛31發生磁性飽和。而且，於内側上永久 磁鐵32形成内側上傾斜面92，於内側下永久磁鐵33形成内 側下傾斜面94。因此，基於使内側軛3丨之内側上傾斜部9 i 及内側上永久磁鐵32之内側上傾斜面92相互間面接觸，可 將内側上永久磁鐵3 2固定於内側輛3 1之目標位置，並基於 使内側軛3 1之内側下傾斜部93及内侧下永久磁鐵33之内側 下傾斜面94相互間面接觸，可將内側下永久磁鐵33固定於 内侧3 1之目標位置，因此内側上永久磁鐵3 2及内側下永 久磁鐵3 3分別對於内側軛3 1之定位作業性提高。 於外側軛37分別形成外側上傾斜部95及外側下傾斜部 97。因此，外側軛37中磁通集中之外側上永久磁鐵38及外 側下永久磁鐵39相互間之交界部分之徑向之厚度尺寸比交 界部分之其他部分大’因此可抑制外側軛3 7之重量增加， 同時防止於外側辆3 7發生磁性飽和。而且，於外側上永久 磁鐵38形成外側上傾斜面96，於外側下永久磁鐵39形成外 側下傾斜面98。因此’基於使外側軛37之外側上傾斜部95 及外側上永久磁鐵33之外侧上傾斜面96相互間面接觸，可 將外側上永久磁鐵33固定於外側軛37之目標位置，並基於 使外侧軛37之外侧下傾斜部97及外側下永久磁鐵39之外侧 下傾斜面98相互間面接觸，可將外側下永久磁鐵39固定於 124792.doc -26- 1364902 外側軛37之目標位置，因此外側上永久磁鐵38及外側下永 久磁鐵39分別對於外側軛37之定位作業性提高》 圖12係表示將内側上永久磁鐵32之下端部之寬度尺寸Ta 及内側下永久磁鐵33之上端部之寬度尺寸Ta分別固定於 「1.0」，使内側上永久磁鐵32之上端部之寬度尺寸Tb及 内側下永久磁鐵33之下端部之寬度尺寸Tb分別共同地變化 時之最大推力及重量分別之運算結杲。若根據此圖12，由 於最大推力係與兩寬度尺寸Tb分別變大成比例而變大，因 此於提高最大推力方面，兩寬度尺寸Tb分別宜大。於此等 兩寬度尺寸Tb分別大之情況時，内側上永久磁鐵32之内側 傾斜面92及内側下永久磁鐵33之内側下傾斜面94分別之傾 斜角度Θ變大，因此内側上永久磁鐵32及内侧下永久磁鐵 33分別之製造作業變得困難。而且，於兩寬度尺寸几分別 大之情況時’内側上永久磁鐵32及内側下永久磁鐵33分別 重量變重，因此兩寬度尺寸Tb分別考慮最大推力、製造作 業性及重量相互間之平衡，而設定在「1 〇 < Tb $丨7」之 範圍内。 分別於上述第一實施例〜第四實施例中，亦可將肥粒鐵 (Ferrite)系鐵或肥粒鐵系不鏽鋼、麻田散鐵（Martensite)系 鐵或麻田散鐵系不鏽鋼等磁性體作為材料，來分別形成内 側輕3 1及外側輛3 7。 刀另】於上述第一實施例〜第四實施例中，亦可將peek (聚一醚酮树脂、p〇ly Ether Ether Ket〇ne)等絕緣性合成樹 脂作為材料’來形成線圈架51。 124792.doc -27- 1364902 分別於上述第一實施例〜第四實施例中，亦可將内側上 永久磁鐵32及内側下永久磁鐵33相互間，恰好往轴向分開 比内側上永久磁鐵32之徑向之寬度尺寸及内側下永久磁鐵 33之徑向之寬度尺寸分別一半大之距離而配置。The non-robot-linear brakes 20 are respectively described in the first embodiment J; the X-feed head u to the X direction and the 丫方白八f coordinate coordinate system are based on the position to be moved and the position before the fixation: mutual:: The moving operation is performed to adsorb the movement of the nozzle before the adsorption. The nozzle is for the electronic component to be adsorbed, 124792.doc -20· 1364902 from the directly upward position, the fixed position is adsorbed. The nozzle 18 is a position on the printed wiring board 71 to be fixed, and the position before the suction corresponds to the pressing position. The linear slider 14 moves the nozzle head 17 in the Z direction, and absorbs The nozzle 18 moves the nozzle head 17 downward in a state of moving to the position before the adsorption, and presses the adsorption nozzle 18 to the electronic component to be adsorbed to adsorb the electronic component. The adsorption nozzle 8 is based on In the state where the operation is moved to the fixed front position, the nozzle head 17 is moved downward to perform the operation of pressing the electronic component adsorbed by the adsorption nozzle 8 to The printed wiring board 71 to be fixed is fixed. The linear brake 2 is configured to apply a thrust force from the top to the bottom of the adsorption nozzle 18, and is adjusted by the thrust applied from the linear actuator 20 to the adsorption nozzle 18. When the adsorption nozzle 18 adsorbs the electronic component from the winding tape 73, when the adsorption nozzle 18 acts on the pressing force of the electronic component, and the adsorption nozzle 18 fixes the electronic component to the printed wiring substrate 71, the adsorption nozzle 18 acts on the electronic component. Pressure φ According to the second embodiment described above, the following effects can be exerted. Between the transfer head 11 and the adsorption nozzle 8 of the wafer fixing device 80, the upper armature coil 65 and the lower armature coil 66 can be respectively opposed to the Z direction. The "moving" method involves a lightweight linear brake 20, so the load on the X-axis servo motor, the γ-axis servo motor, and the Z-axis servo motor is reduced. Therefore, the X-axis servo motor to the Z-axis servo motor can be used at low levels. Since the output is small and small, the entire structure of the aA piece solid-state device 80 can be reduced. Further, the adsorption nozzle 丨8 can be quickly moved in the X direction, the Y direction, and the Z direction, respectively. The productivity is improved. In the first embodiment and the second embodiment, respectively, the winding direction of the upper armature coil 65 124792.doc 1364902 and the winding direction of the lower armature coil 66 are set to coincide with each other, and the upper armature is The coil 65 and the lower armature coil 66 are connected in parallel so that current flows in opposite directions to each other. In the case of this configuration, the armature coil 65 and the lower armature coil 66 are sequentially wound around the bobbin 51. In this case, it is not necessary to perform the operation of switching the winding direction in the middle, so that the working time can be shortened. The winding steps of the upper armature coil 65 and the lower electric coil 66 are as follows. The magnetic wire is viewed from one side of the axial direction. The upper and lower armature coils 65 are wound in the coil winding portion 57 in the clockwise direction to form the upper armature coil 65, and the winding start end of the magnetic wire is welded to the power supply terminal 55 through the upper through groove 59. The winding end portion of the magnetic wire is welded to the power terminal 56 by the upper through groove 61, and sequentially inserted into the coil winding portion 58 under the bobbin 51 through the upper through groove 62 and the lower through groove 64. . The remaining magnetic wire is wound in the lower coil winding portion 58 in the same clockwise direction as the upper armature coil 65 to constitute the lower armature coil 66, and the winding end end of the domain line passes through the lower pass sequentially. 63 and the upper through groove 60 are welded to the power terminal 55. In the first embodiment and the second embodiment, respectively, the widths of the radial directions of the inner side 3 j and the outer side yoke 37 are not constant. Hereinafter, the inner yoke 3 非 and the radial width dimension which are not constant in the width direction of the steering direction will be described separately. [Third Embodiment] A third embodiment relating to the present invention will be described with reference to Figs. 9 and 10 . As shown in FIG. 9, the inner thin portion 8A and the inner thick portion 82 are formed on the inner side 31. The inner thin portion 81 is set at the lower end portion of the inner yoke 31 in the axial direction. The inner thin portion 81 is thinner than the other portion of the inner thin portion 81 of the inner yoke 3, and the inner width of the inner yoke 3 is thinner. The inner grip size is set to be larger than the other portions of the inner thin portion 8 1 by a certain value. The inner thick portion 82 is set at the center portion in the axial direction of the inner side, and the inner upper permanent magnet 32, the inner lower permanent magnet 33, and the inner spacer 34 are opposed to the inner thick portion 82 from the radial direction. The inner thick portion 82 is thicker than the other portion of the inner thick portion 82 of the inner vehicle 31, and the inner diameter of the inner thick portion 82 of the inner yoke 31 is set to be larger than the thickness of the inner thick portion 82. The other portion of the inner thin portion 82 is smaller than a certain value. The symbol Ri indicates the amount of protrusion of the inner thick portion 82, and the amount of protrusion Ri is set to "〇3 mm". As shown in Fig. 10, an outer thick portion 83 is formed in the outer yoke 37. As shown in Fig. 9, the outer thick portion 83 is set at the center of the axial direction of the outer side, and the outer upper permanent magnet 38, the outer lower permanent magnet 39, and the outer spacer 40 are respectively radially outward and the outer thick portion 83. Relative. Further, the side thick portion 83 is thicker than the other portion of the outer thick portion 83 of the outer yoke 37, and the outer diameter of the outer thick portion 83 of the outer yoke 37 is set to be larger than the outer side. The other portion of the thin portion 83 is larger than a certain value. The symbol R〇 indicates the amount of protrusion of the outer thick portion 83, and the amount of protrusion R〇 is set to "〇5 mmj. The following effect can be exerted according to the third embodiment described above. Since the inner thick portion 82 is formed on the inner yoke 31, The width of the radial direction of the boundary portion between the inner permanent magnet 3 2 and the inner lower permanent magnet 3 3 in which the inner magnetic flux is concentrated in the inner yoke 3 is set larger than the other portions of the boundary portion, so that the inner yoke 31 can be suppressed. The weight is increased while preventing the magnetic yoke from occurring in the inner yoke 31. "Because the outer yoke 37 forms the outer thick portion 83, the magnetic flux in the outer yoke 37 is concentrated on the outer side of the permanent magnet 38 and the outer lower permanent magnet 124792.doc. The radial width dimension of the boundary portion between the 23 and 39 is larger than the other portions of the boundary portion. Therefore, the weight increase of the outer yoke 37 can be suppressed, and magnetic saturation of the outer yoke 37 can be prevented. [Fourth Embodiment] A fourth embodiment of the present invention will be described with reference to Fig. 11 and Fig. 12. As shown in Fig. 11, the inside inner side 3 1 is formed with an inner upper inclined portion 91 corresponding to the first inner inclined portion. The portion 91 is a portion in which the width of the radial direction becomes larger from the bottom to the upper side. The outer diameter of the inner upper inclined portion 91 of the inner portion 31 is set to be larger from the top to the bottom, and the inner permanent magnet 32 and the inner spacer are provided on the inner side. 34. The contact surface between each other is set to the maximum. The inner upper inclined surface 92 is joined to the inner upper inclined surface 92 of the inner upper permanent magnet 32 in the surface contact state. When it is inclined to the outer peripheral side, the width dimension of the inner upper permanent magnet 32 is set to be smaller from the top to the bottom. The inner upper inclined surface 92 corresponds to the first inner inclined surface. As shown in Fig. 11, the inner yoke 3 is shown.丨, an inner lower inclined portion 93 corresponding to the second inner inclined portion is formed. The inner lower inclined portion 93 is a portion in which the width of the radial direction becomes larger from the bottom to the upper side than the inner lower yoke portion 93 of the inner yoke 3丨The diameter dimension is set to be larger from the bottom to the top, and the contact surface between the inner lower permanent magnet 33 and the inner spacer 34 is set to the maximum. The outer peripheral surface of the inner lower inclined portion 93 is joined to the inner side by the surface contact state. The inner side of the permanent magnet 33 is inclined downward Face 94 ^ This inner lower inclined surface 94 is inclined from the bottom to the outer peripheral side. The width dimension of the inner lower permanent magnet 33 in the radial direction is set to be smaller from the bottom to the top. This inner lower inclined surface 94 corresponds to the second inner side. The inclined surface, the inclination angle Θ of the inner lower inclined surface 94, the inclination angle Θ of the inner lower inclined portion 93, the inclination angle θ of the upper inclined surface 92 of the inner side 124792.doc -24-1364902, and the inclination angle 0 of the inner upper inclination (four) are respectively set. As shown in Fig. 11, the outer side consumes 37, forming an inclined portion 95 on the outer side corresponding to the outer side inclined portion. The upper side inclined portion 95 is radially "the width dimension becomes larger from the top to the bottom. The inner diameter of the inclined portion % on the outer side of the outer yoke 37 is set to be smaller from the top to the bottom, and the contact surface between the outer permanent magnet 38 and the outer spacer 40 on the outer side is set to be the smallest. The inner peripheral surface of the outer upper inclined portion $$ is joined to the outer upper upper permanent magnet 38 on the outer side inclined surface 96 in the surface contact state. The outer upper inclined surface 96 is inclined from the top to the bottom and to the inner peripheral side. The radial width dimension of the upper permanent magnet 38 is set to be smaller from the top to the bottom. Further, the side upper inclined surface 96 corresponds to the first outer inclined surface. As shown in Fig. 11, the outer yoke 37 is formed with an outer lower inclined portion 97 corresponding to the second outer inclined portion. Further, the side lower inclined portion 97 is a portion in which the width dimension of the radial direction becomes larger from the bottom to the upper side. The outer diameter of the outer lower yoke 37 on the outer side of the outer yoke 37 is set to be smaller from the bottom to the upper side, and the outer lower permanent magnet 39 and The contact faces of the outer spacers 40 are set to be the smallest. The inner peripheral surface of the outer lower inclined portion 97 is joined to the outer lower permanent magnet 3 9 in the surface contact state. The outer lower inclined surface 98 is inclined from the bottom to the inner side. The width dimension of the radial direction of the lower permanent magnet 39 is reduced from the bottom to the top. Further, the side lower inclined surface 98 corresponds to the second outer inclined surface, the inclined angle Θ of the outer lower inclined surface 98, the inclined angle Θ of the outer lower inclined portion 97, the inclined angle Θ of the outer upper inclined surface 96, and the outer upper inclined portion 95 The inclination angles θ are set to be mutually the same value. According to the fourth embodiment described above, the following effects can be exhibited. 124792.doc -25- 1364902 forms an inner upper inclined portion 9 i and an inner lower inclined portion 93 on the inner side yoke 3 1 , respectively. Therefore, the width of the radial direction between the inner permanent magnets ” and the inner lower permanent magnets 33 in the inner yoke 31 is larger than the other portions of the boundary portion, so that the weight of the inner yoke 3丨 can be suppressed from increasing. At the same time, the inner yoke 31 is prevented from being magnetically saturated. Further, the inner upper permanent magnet 32 forms an inner upper inclined surface 92, and the inner lower permanent magnet 33 forms an inner lower inclined surface 94. Therefore, based on the inner side of the inner yoke 3 The inclined portion 9 i and the inner upper inclined surface 92 of the inner upper permanent magnet 32 are in surface contact with each other, and the inner upper permanent magnet 3 2 can be fixed to the target position of the inner vehicle 3 1 and tilted based on the inner side of the inner yoke 3 1 . The inner portion 93 and the inner lower inclined surface 94 of the inner lower permanent magnet 33 are in surface contact with each other, and the inner lower permanent magnet 33 can be fixed to the target position of the inner side 3 1 . Therefore, the inner upper permanent magnet 3 2 and the inner lower permanent magnet 3 3 respectively The positioning workability of the inner yoke 31 is improved. The outer yoke 37 is formed with an outer upper inclined portion 95 and an outer lower inclined portion 97. Therefore, the outer yoke 37 is concentrated on the outer side of the magnetic flux. The thickness of the boundary between the permanent magnet 38 and the outer lower permanent magnet 39 in the radial direction is larger than the other portions of the boundary portion. Therefore, the increase in the weight of the outer yoke 37 can be suppressed, and magnetic saturation of the outer unit 37 can be prevented. Further, the outer upper permanent magnet 38 forms an outer upper inclined surface 96, and the outer lower permanent magnet 39 forms an outer lower inclined surface 98. Therefore, the upper outer yoke 37 is provided on the outer side of the outer side and the outer upper permanent magnet 33. The inclined faces 96 are in surface contact with each other, and the outer upper permanent magnets 33 can be fixed to the target position of the outer yoke 37, and the outer yoke 37 outer side lower inclined portion 97 and the outer lower lower permanent magnet 39 outer side lower inclined surface 98 can be mutually In the surface contact, the outer lower permanent magnet 39 can be fixed to the target position of the outer yoke 37 of 124792.doc -26-1364902, so that the positioning workability of the outer upper permanent magnet 38 and the outer lower permanent magnet 39 for the outer yoke 37 is improved. The 12 series indicates that the width dimension Ta of the lower end portion of the inner upper permanent magnet 32 and the width dimension Ta of the upper end portion of the inner lower permanent magnet 33 are respectively fixed at "1.0". Maximum thrust and weight are in common so that the variation width of the upper end portion of the permanent magnet 32 size and width dimension Tb of the lower end portion of the permanent magnet 33 on the inner side of the inner Tb when the operation result of each Gao. According to this Fig. 12, since the maximum thrust system and the two width dimensions Tb become larger in proportion to each other, the two width dimensions Tb are preferably larger in terms of increasing the maximum thrust. When the two width dimensions Tb are respectively large, the inclination angle Θ of the inner inclined surface 92 of the inner upper permanent magnet 32 and the inner lower inclined surface 94 of the inner lower permanent magnet 33 is increased, so that the inner upper permanent magnet 32 and The manufacturing work of the inner lower permanent magnets 33 becomes difficult. Further, when the two width dimensions are respectively large, the inner inner permanent magnet 32 and the inner lower permanent magnet 33 are respectively heavier in weight, and therefore the two width dimensions Tb are considered in consideration of the maximum thrust, the manufacturing workability, and the weight, respectively. Set within the range of "1 〇 < Tb $丨7". In the first to fourth embodiments described above, magnetic materials such as ferrite iron or ferrite iron stainless steel, Martensite iron or 麻田散铁 stainless steel may be used as the magnetic body. Materials, to form the inner light 3 1 and the outer side 3 7 respectively. Further, in the first to fourth embodiments described above, the coil bobbin 51 may be formed by using an insulating synthetic resin such as peek (polyetherketone resin or p〇ly Ether Ether Ket〇ne) as the material. 124792.doc -27- 1364902 In the first embodiment to the fourth embodiment, respectively, the inner upper permanent magnet 32 and the inner lower permanent magnet 33 may be separated from each other just in the axial direction than the inner upper permanent magnet 32. The width dimension of the radial direction and the width dimension of the radial direction of the inner lower permanent magnet 33 are respectively arranged at a half distance.
分別於上述第一實施例〜第四實施例中，亦可將外側上 永久磁鐵38及外側下永久磁鐵39相互間，恰好往轴向分開 比外側上永久磁鐵38之徑向之寬度尺寸及外側下永久磁鐵 39之徑向之寬度尺寸分別—半大之距離而配置。 【圖式簡單說明】 圖1係表示本發明之第一實施例，其表示黏晶機裝置之 外觀之立體圖。 圖2係沿著圖i(a)_(a)線之剖面圖。 圖3係將磁鐵部之外觀及捲線部之外觀分別以兩者之分 解狀態來表示之立體圖。 圖4係表示線性致動器之剖面圖。In the first to fourth embodiments, respectively, the outer upper permanent magnet 38 and the outer lower permanent magnet 39 may be separated from each other in the axial direction by the width dimension and the outer side of the outer upper permanent magnet 38. The width dimension of the radial direction of the lower permanent magnet 39 is respectively arranged at a half maximum distance. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the appearance of a die bonder apparatus, showing a first embodiment of the present invention. Figure 2 is a cross-sectional view taken along line i (a) - (a) of Figure 1. Fig. 3 is a perspective view showing the appearance of the magnet portion and the appearance of the winding portion in a state in which they are separated. Figure 4 is a cross-sectional view showing a linear actuator.
圖5係以磁鐵部之分艇灿 — 刀解狀態來表不磁鐵部之外觀之立體 圖。 圖6係表示捲線部之外觀之立體圖。 圖7係以捲線部之分解壯能办志_ 鮮狀惑來表不捲線部之外觀之立體 固8係表示本發明之第 之外觀之立體圖。 圖9係表示本發明之第： 圖10係相當於圖3之圖 耳死例，其表示晶片 實施例之相當於圖4之圖 124792.doc •28-Fig. 5 is a perspective view showing the appearance of the magnet portion by the state of the knife in the magnet portion. Fig. 6 is a perspective view showing the appearance of the winding portion. Fig. 7 is a perspective view showing the appearance of the first embodiment of the present invention in which the appearance of the unwinding portion is indicated by the disintegration of the winding portion. Fig. 9 is a view showing the present invention: Fig. 10 is a diagram corresponding to Fig. 3, an example of an ear, which is equivalent to the wafer embodiment, which corresponds to Fig. 4, 124792.doc • 28-
圖11係表示本發明之第四實施例之相當於圖4之圖。 圖12係表示使内侧上傾斜面之傾斜角度及内側下傾斜面 之傾斜角度分別相互共同地變化時之最大推力及重量分別 之變化之圖》 圖13係表示以往例之圖。 【主要元件符號說明】Fig. 11 is a view corresponding to Fig. 4 showing a fourth embodiment of the present invention. Fig. 12 is a view showing changes in maximum thrust and weight when the inclination angle of the inner upper inclined surface and the inclination angle of the inner lower inclined surface are mutually changed, respectively. Fig. 13 is a view showing a conventional example. [Main component symbol description]
1 半導體晶片 2 半導體晶圓 3 引線架 4, 70 輸送帶 10 黏晶機裝置 11 移送頭 12 基座部 13 保持器部 14 線性滑件 15 導引部 16 滑動部 17 喷嘴頭 18 吸附喷嘴 20 線性致動器 30 磁鐵部 31， 101 内側軛 32 内侧上永久磁鐵 33 内侧下永久磁鐵 124792.doc -29 1364902 34 内側間隔物 35 連結板 36 保持器部 37, 102 外側軛 38 外側上永久磁鐵 39 外側下永久磁鐵 40 外側間隔物 50 捲線部 51 線圈架 52 端板 53, 54 銷孔 55, 56 電源端子 57 上線圈捲裝部 58 下線圈捲裝部 59, 60, 61, 62 上穿越溝 63, 64 下穿越溝 65 上電樞線圈 66 下電樞線圈 71 印刷布線基板 72 捲盤 73 捲帶 80 晶片固定裝置 81 内側薄壁部 82 内側厚壁部 124792.doc -30- 13649021 semiconductor wafer 2 semiconductor wafer 3 lead frame 4, 70 conveyor belt 10 die bonder device 11 transfer head 12 base portion 13 holder portion 14 linear slider 15 guide portion 16 sliding portion 17 nozzle head 18 adsorption nozzle 20 linear Actuator 30 magnet portion 31, 101 inner yoke 32 inner upper permanent magnet 33 inner lower permanent magnet 124792.doc -29 1364902 34 inner spacer 35 web 36 retainer portion 37, 102 outer yoke 38 outer upper permanent magnet 39 outer side Lower permanent magnet 40 outer spacer 50 winding portion 51 bobbin 52 end plate 53, 54 pin hole 55, 56 power terminal 57 upper coil winding portion 58 lower coil winding portion 59, 60, 61, 62 passes through the groove 63, 64 lower crossing groove 65 upper armature coil 66 lower armature coil 71 printed wiring board 72 reel 73 tape 80 wafer fixing device 81 inner thin portion 82 inner thick portion 124792.doc -30- 1364902
83 外侧厚壁部 91 内側上傾斜部 92 内側上傾斜面 93 内側下傾斜部 94 内側下傾斜面 95 外側上傾斜部 96 外側上傾斜面 97 外側下傾斜部 98 外侧下傾斜面 103 永久磁鐵 104 電樞線圈 Ri，Ro 突出量 Ta, Tb 寬度尺寸 Θ 傾斜角度83 outer thick portion 91 inner upper inclined portion 92 inner upper inclined surface 93 inner lower inclined portion 94 inner lower inclined surface 95 outer upper inclined portion 96 outer upper inclined surface 97 outer lower inclined portion 98 outer lower inclined surface 103 permanent magnet 104 electric Pivot coil Ri, Ro protrusion amount Ta, Tb width dimension 倾斜 inclination angle
124792.doc -31 -124792.doc -31 -
Claims (1)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007043795 | 2007-02-23 | ||
| JP2007180951A JP5150155B2 (en) | 2007-02-23 | 2007-07-10 | Linear actuators and devices using linear actuators |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200836456A TW200836456A (en) | 2008-09-01 |
| TWI364902B true TWI364902B (en) | 2012-05-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96136449A TW200836456A (en) | 2007-02-23 | 2007-09-28 | Linear actuator and parts holding apparatus/die bonder apparatus utilizing same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5150155B2 (en) |
| CN (1) | CN101252304B (en) |
| TW (1) | TW200836456A (en) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI469475B (en) * | 2008-11-17 | 2015-01-11 | Komatsu Ind Corp | A linear actuator |
| CN101873046A (en) * | 2010-06-11 | 2010-10-27 | 蹇兴亮 | Electromagnetic driving device for permanent magnet containing steady state |
| KR101388085B1 (en) * | 2010-06-10 | 2014-04-22 | 엘에스산전 주식회사 | Bistable permanent magnetic actuator |
| JP5926017B2 (en) | 2010-09-29 | 2016-05-25 | 日亜化学工業株式会社 | Cylindrical bonded magnet |
| US8736086B2 (en) * | 2011-03-25 | 2014-05-27 | Tai-Her Yang | Reciprocal vibration type power generator equipped with inner columnar and outer annular magnetic members, a power storage device, a rectifying circuit, and a charging circuit |
| US8546964B2 (en) * | 2011-03-25 | 2013-10-01 | Tai-Her Yang | Reciprocal vibration type power generator equipped with a moving inner columnar magnetic block surrounded by at least one coil set, and a moving outer annular magnetic block that surrounds the at least one coil set |
| JP2013229247A (en) * | 2012-04-26 | 2013-11-07 | Toshiba Corp | Switchgear for electric power and operation mechanism thereof |
| CN102710090B (en) * | 2012-06-06 | 2014-12-10 | 西安交通大学 | Stackable large displacement electromagnetic loading machine and loading method therefor |
| CN102931801B (en) * | 2012-10-31 | 2014-07-02 | 西安交通大学 | Large-displacement magnetic actuator utilizing electromagnetic force to carry out position control |
| WO2014207996A1 (en) * | 2013-06-25 | 2014-12-31 | パナソニックＩｐマネジメント株式会社 | Actuator and lens barrel equipped with actuator |
| JP6426931B2 (en) * | 2014-07-24 | 2018-11-21 | 学校法人東海大学 | Generator |
| WO2016066129A1 (en) * | 2014-10-30 | 2016-05-06 | 陈启星 | Linear motor based on radial magnetic tube |
| JP6667326B2 (en) * | 2016-03-17 | 2020-03-18 | ファスフォードテクノロジ株式会社 | Die bonder and bonding method |
| CN109698598A (en) * | 2017-10-24 | 2019-04-30 | 博格华纳公司 | Push rod and its manufacturing method for electromechanical actuator system |
| CN108900064A (en) * | 2018-05-28 | 2018-11-27 | 胡明 | A kind of use for diesel engine voice coil motor |
| CN110824850B (en) * | 2018-08-10 | 2021-02-02 | 上海微电子装备（集团）股份有限公司 | Silicon wafer handing-over manipulator and silicon wafer handing-over device |
| JP2020054122A (en) * | 2018-09-27 | 2020-04-02 | 日本電産サンキョー株式会社 | Actuator and panel loudspeaker |
| CN113965040B (en) * | 2020-12-01 | 2022-12-30 | 上海隐冠半导体技术有限公司 | Voice coil motor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56115071U (en) * | 1980-02-04 | 1981-09-03 | ||
| JPH0695387B2 (en) * | 1987-07-23 | 1994-11-24 | 三菱電機株式会社 | Voice coil type actuator |
| US4808955A (en) * | 1987-10-05 | 1989-02-28 | Bei Electronics, Inc. | Moving coil linear actuator with interleaved magnetic circuits |
| JPH069373U (en) * | 1992-06-30 | 1994-02-04 | 株式会社ユニシアジェックス | Linear motor |
| JP2606903Y2 (en) * | 1993-12-27 | 2001-02-19 | 株式会社安川電機 | Field yoke of linear motor |
| JP4734766B2 (en) * | 2000-07-18 | 2011-07-27 | Ｓｍｃ株式会社 | Magnet movable electromagnetic actuator |
| JP4485672B2 (en) * | 2000-10-20 | 2010-06-23 | パナソニック株式会社 | Linear motor and component mounting device |
| JP3927089B2 (en) * | 2002-07-16 | 2007-06-06 | 日本電産サンキョー株式会社 | Linear actuator, pump device and compressor device using the same |
-
2007
- 2007-07-10 JP JP2007180951A patent/JP5150155B2/en not_active Expired - Fee Related
- 2007-09-28 CN CN2007101531559A patent/CN101252304B/en not_active Expired - Fee Related
- 2007-09-28 TW TW96136449A patent/TW200836456A/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200836456A (en) | 2008-09-01 |
| JP2008237004A (en) | 2008-10-02 |
| JP5150155B2 (en) | 2013-02-20 |
| CN101252304A (en) | 2008-08-27 |
| CN101252304B (en) | 2012-02-15 |
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