JP2008227522A - Semiconductor device and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device in which a highly reliable full silicide MOSFET and a silicide MOSFET can be formed on the same substrate easily as compared with prior art. <P>SOLUTION: The method for manufacturing a semiconductor device includes steps of for forming a gate insulating film 30 on a semiconductor substrate 10, for forming a first gate electrode 40 and a second gate electrode 42 on the gate insulating film, for depositing a mask material 90 on the first gate electrode and the second gate electrode, for patterning the mask material to expose the upper surface of the first gate electrode while covering the second gate electrode, for etching the upper part of the first gate electrode by utilizing the mask material, for removing the mask material, for depositing a metal film 100 on the first gate electrode and the second gate electrode, and for silicificating the entire first gate electrode and the upper part of the second gate electrode. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a semiconductor device and a manufacturing method thereof.

  In recent years, MOSFETs for silicidation of the entire gate electrode (hereinafter referred to as full silicide MOSFET) and MOSFETs for silicidation of only the upper part of the gate electrode (hereinafter referred to as normal silicide MOSFET) have been manufactured on the same semiconductor substrate. It is considered.

However, when the full silicide MOSFET and the normal silicide MOSFET are formed on the same substrate, it has been necessary to individually form the gate electrodes of the full silicide MOSFET and the normal silicide MOSFET by using the photolithography technique and the etching technique. This has caused a problem of deteriorating the reliability of the gate insulating film and the like.
JP 2000-58822 A

  Provided is a semiconductor device manufacturing method in which a highly reliable full silicide MOSFET and normal silicide MOSFET can be formed on the same substrate more easily than in the past.

  A method of manufacturing a semiconductor device according to an embodiment of the present invention includes forming a gate insulating film on a semiconductor substrate, forming a gate electrode material on the gate insulating film, and a silicidation suppression material that is less likely to be silicided than the gate electrode material And patterning the gate electrode material and the silicidation suppression material to form a first gate electrode and a second gate electrode on the gate insulating film with the silicidation suppression material on top. Depositing a mask material on the silicidation inhibiting material, covering the silicidation inhibiting material on the second gate electrode, and exposing an upper surface of the silicidation inhibiting material on the first gate electrode. The mask material is patterned on the upper surface of the first gate electrode using the mask material. Removing the control material, the removal of the mask material, a metal film is deposited on the first gate electrode and the second gate electrode, comprising a siliciding the first gate electrode.

  The semiconductor device according to the present invention includes a highly reliable full silicide MOSFET and normal silicide MOSFET on the same substrate.

  In the method of manufacturing a semiconductor device according to the present invention, a highly reliable full silicide MOSFET and normal silicide MOSFET can be formed on the same substrate more easily than in the past.

  Embodiments according to the present invention will be described below with reference to the drawings. This embodiment does not limit the present invention.

(First embodiment)
1 to 4 are sectional views showing a flow of a method for manufacturing a semiconductor device according to the first embodiment of the present invention. For convenience, these drawings show a full silicide MOSFET and a normal silicide MOSFET one by one. In practice, a large number of full silicide MOSFETs and normal silicide MOSFETs are formed on a silicon substrate. The full silicide MOSFET is formed in, for example, a peripheral circuit. The normal silicide MOSFET is formed, for example, in the core circuit portion. For example, a full silicide MOSFET is employed for the core circuit portion of the semiconductor device, and a normal silicide MOSFET is employed for the peripheral circuit portion. Thereby, the gate leakage current in the core circuit portion can be suppressed, and the reliability of the semiconductor device is increased. A full silicide MOSFET may be employed for the logic portion of the semiconductor device, and a normal silicide MOSFET may be employed for the analog portion. Thereby, the threshold voltage of the transistor in the analog portion can be lowered, so that the semiconductor device can be operated at high speed.

  As shown in FIG. 1, first, an element isolation region STI (Shallow Trench Isolation) 20 is formed on a silicon substrate 10 as a semiconductor substrate. For example, a silicon oxide film and a silicon nitride film (not shown) are deposited on the silicon substrate 10. Next, the silicon nitride film is patterned by using a photolithography technique and an RIE method. Using this patterned silicon nitride film as a mask, the silicon oxide film and the silicon substrate 10 are etched to a predetermined depth to form a trench. Subsequently, a silicon oxide film is deposited on the entire surface of the silicon substrate 10, and the trench is filled with the silicon oxide film. This silicon oxide film is planarized by CMP or the like. Further, the element isolation region 20 is completed by removing the silicon nitride film.

  Next, a gate insulating film 30 is formed on the entire surface of the silicon substrate 10. For example, the silicon substrate 10 is thermally oxidized to form a thermal oxide film on the surface of the silicon substrate 10. The gate insulating film 30 may be an oxynitride film or a nitride film formed by further nitriding the thermal oxide film. Alternatively, the gate insulating film 30 may be a high dielectric film such as a hafnium oxide film or hafnium silicate. The thickness of the gate insulating film 30 is 3 nm or less, for example.

  Next, a first gate electrode 40 and a second gate electrode 42 made of polysilicon are formed on the gate insulating film 30. For example, polysilicon is deposited on the gate insulating film 30. The thickness of the polysilicon is, for example, 100 nm. This polysilicon is formed into a gate pattern by using a photolithographic technique and anisotropic etching such as RIE. Thereby, the first and second gate electrodes 40 and 42 are formed. As the material of the first and second gate electrodes 40 and 42, amorphous silicon may be used instead of polysilicon.

  Next, ion implantation is performed to form an extension (LDD (Lightly Doped Drain)) layer 50. Next, spacers 60 are formed on the side walls of the first and second gate electrodes 40 and 42, and ion implantation is performed to form the source / drain layers 70. Subsequently, annealing is performed to recover damage received by the silicon substrate 10 by ion implantation and to activate impurities. Thereby, the extension layer 50 and the source / drain layer 70 are formed. Next, after an interlayer insulating film 80 such as a silicon oxide film is deposited on the entire surface, the interlayer insulating film 80 is planarized by CMP or the like. At this time, the interlayer insulating film 80 is polished until the upper surfaces of the first and second gate electrodes 40 and 42 are exposed.

  Next, a photoresist 90 is deposited as a mask material on the first and second gate electrodes 40 and 42. Further, as shown in FIG. 2, by patterning the photoresist 90, the upper surface of the first gate electrode 40 is exposed while the second gate electrode 42 is covered with the photoresist 90. Next, the first gate electrode 40 is etched by etching such as RIE using the photoresist 90 as a mask. Thereby, the thickness of the first gate electrode 40 is thinner than that of the second gate electrode 42. For example, the thickness of the first gate electrode 40 is 50 nm to 70 nm, and the thickness of the second gate electrode 42 is 100 nm.

  The photoresist 90 is removed and the surface is pretreated. Next, as shown in FIG. 3, a nickel film 100 is deposited as a metal film for silicide. The thickness of the nickel film 100 is, for example, 50 nm to 70 nm. Next, the first and second gate electrodes 40 and 42 are reacted with the nickel film 100 by a heating process of about 500 ° C. Thereby, nickel silicide is formed as a gate electrode. Here, as shown in FIG. 4, since the height of the first gate electrode 40 is relatively low, the entire first gate electrode 40 is silicided. On the other hand, since the height of the second gate electrode 42 is relatively high, only the upper portion of the second gate electrode 42 is silicided. Thereby, the second gate electrode 42 has the polysilicon layer 44 on the gate insulating film 30 and the silicide layer 46 on the polysilicon layer 44. Thus, the first gate electrode 40 is fully silicided, and the second gate electrode 42 has a two-layer structure of the polysilicon layer 44 and the silicide layer 46.

  The subsequent manufacturing process may be the same as a normal transistor formation process. For example, after depositing an oxide film (not shown) as an interlayer film, contacts and wiring (not shown) are formed. Thereby, the semiconductor device is completed.

  The semiconductor device formed according to the first embodiment includes a semiconductor substrate 10, a gate insulating film 30, a first gate electrode 40, and a second gate electrode 42. The gate insulating film 30 is formed on the semiconductor substrate 10. The first gate electrode 40 is formed on the gate insulating film 30 and is entirely made of silicide. The second gate electrode 42 is formed on the gate insulating film 30 and has a laminated structure including a polysilicon layer 44 and a silicide layer 46. The film thickness of the first gate electrode 40 is smaller than the film thickness of the second gate electrode 42.

  The effect of this embodiment will be described. In the conventional manufacturing method, after forming the polysilicon electrode, the polysilicon in the region where the metal gate is to be formed is temporarily removed. Further, a metal electrode is formed again in this region. Therefore, the reliability of the gate insulating film is lowered.

  However, in the first embodiment, this polysilicon can be fully silicided, that is, a metal gate, without removing the polysilicon in the gate region of the full silicide MOSFET. Therefore, the first embodiment does not reduce the reliability of the gate insulating film 30. That is, in this embodiment, a highly reliable full silicide MOSFET and normal silicide MOSFET can be formed on the same substrate.

  Further, as described above, in the conventional method, it is necessary to form the gate electrode twice in order to form the full silicide MOSFET and the normal silicide MOSFET on the same substrate. However, in the first embodiment, it is sufficient to form the gate electrode once. Therefore, in the first embodiment, the full silicide MOSFET and the normal silicide MOSFET can be formed on the same substrate more easily than in the past.

(Modification of the first embodiment)
In the modification of the first embodiment, the silicide layer 110 is also formed on the source / drain layer 70 as shown in FIG. In this case, silicide may be formed on the source / drain layer 70, the first gate electrode 40, and the second gate electrode 42 in the same step. Alternatively, the first and second gate electrodes 40 and 42 are covered with a mask material, and the silicide layer 110 is formed on the source / drain layer 70. Thereafter, after the upper surfaces of the first and second gate electrodes 40 and 42 are exposed by planarizing the interlayer insulating film 80, silicide may be formed on the first and second gate electrodes 40 and 42.

  In another modification of the first embodiment, as shown in FIG. 6, the semiconductor substrate is an SOI substrate. In particular, in this modification, a partial SOI substrate is used as the semiconductor substrate. For example, the full silicide MOSFET can be formed in the SOI region, and the normal silicide MOSFET can be formed on the bulk substrate.

  Since the work function of the metal gate electrode made of nickel silicide is in the vicinity of the middle of the band gap of silicon, when the full silicide MOSFET is formed on the bulk substrate, the threshold voltage may be increased. However, if the fully silicided MOSFET is made a fully depleted type (FD type) transistor by forming the fully silicided MOSFET in the SOI, this threshold voltage can be lowered. Therefore, by forming a full silicide MOSFET in the SOI region and forming a normal silicide MOSFET on the other bulk substrate, both threshold voltages can be adjusted appropriately.

  Furthermore, as shown in FIG. 7, both a full silicide MOSFET and a normal silicide MOSFET may be formed on an SOI substrate. In this case, the thickness of the SOI and the thickness of the BOX may be different between the formation region of the full silicide MOSFET and the formation region of the normal silicide MOSFET. Thereby, for example, the full silicide MOSFET can be a fully depleted (FD) transistor and the normal silicide MOSFET can be a partially depleted (PD) transistor.

(Second Embodiment)
8 to 10 are cross-sectional views showing the flow of the method for manufacturing the semiconductor device according to the second embodiment of the present invention. First, the structure shown in FIG. 1 is obtained through steps similar to those of the first embodiment. Next, a photoresist 90 is deposited as a mask material on the first and second gate electrodes 40 and 42. Next, as shown in FIG. 8, the photoresist 90 is patterned so that the upper surface of the second gate electrode 42 is exposed while the first gate electrode 40 is covered. Subsequently, for example, nitrogen ions are implanted into the second gate electrode 42 using the photoresist 90 as a mask. As a result, a nitrogen implantation layer 43 that is less susceptible to silicidation than polysilicon is formed inside the second gate electrode 42 as a silicidation suppression layer. The nitrogen implantation layer 43 is provided between the polysilicon layer 41 and the polysilicon layer 45. As described above, the second gate electrode 42 has a three-layer structure including the polysilicon layer 41, the nitrogen implantation layer 43, and the polysilicon layer 45.

  Next, after removing the photoresist 90, as shown in FIG. 9, a nickel film 100 is deposited as a metal film. Further, the first and second gate electrodes 40 and 42 are reacted with the nickel film 100 by a thermal process to form nickel silicide as the gate electrode as shown in FIG. At this time, in the second gate electrode 42, the polysilicon layer 45 and part of the nitrogen implantation layer 43 are silicided, but the polysilicon layer 41 is not silicided. This is because the nitrogen implantation layer 43 is less likely to be silicided than the polysilicon layers 41 and 45. On the other hand, since the entire first gate electrode 40 is made of polysilicon, it is fully silicided. Thereafter, the semiconductor device is completed through steps similar to those of the first embodiment.

  The second embodiment has the same effect as the first embodiment.

(Modification of the second embodiment)
In a modification of the second embodiment, a silicide layer (not shown) may also be formed on the source / drain layer 70 (see FIG. 5). In this case, the first and second gate electrodes 40 and 42 are covered with a mask material, and the silicide layer 110 is formed on the source / drain layer 70. Thereafter, the upper surfaces of the first and second gate electrodes 40 and 42 are exposed by planarizing the interlayer insulating film 80, and then nitrogen ions are implanted into the second gate electrode 42.

(Third embodiment)
FIG. 11 to FIG. 13 are cross-sectional views showing the flow of the method for manufacturing a semiconductor device according to the third embodiment of the present invention. First, the structure shown in FIG. 1 is obtained through steps similar to those of the first embodiment. Next, a photoresist 90 is deposited as a mask material on the first and second gate electrodes 40 and 42. Next, as shown in FIG. 11, the photoresist 90 is patterned so as to expose the upper surface of the first gate electrode 40 while covering the second gate electrode 42. Subsequently, for example, germanium or silicon is introduced into the first gate electrode 40 by ion implantation or the like using the photoresist 90 as a mask. As a result, the polysilicon on the first gate electrode 40 becomes amorphous. Thus, the first gate electrode 40 has a two-layer structure including the amorphous silicon layer 49 and the polysilicon layer 48.

  Next, after removing the photoresist 90, a nickel film 100 is deposited as a metal film as shown in FIG. Further, the first and second gate electrodes 40 and 42 are reacted with the nickel film 100 by a thermal process, and nickel silicide is formed as a gate electrode as shown in FIG. At this time, the amorphous silicon layer 49 and the polysilicon layer 48 are fully silicided in the first gate electrode 40. On the other hand, only the upper part of the second gate electrode 42 is silicided to have a two-layer structure including the silicide layer 46 and the polysilicon layer 44. This is because amorphous silicon is easier to be silicided than polysilicon. Therefore, when the first gate electrode 40 is fully silicided, the second gate electrode 42 is not yet fully silicided. Therefore, the heat treatment process may be stopped after the first gate electrode 40 is fully silicided and before the second gate electrode 42 is fully silicided. Thereafter, the semiconductor device is completed through steps similar to those of the first embodiment. The third embodiment can obtain the same effects as those of the first embodiment.

(Modification of the third embodiment)
In a modification of the third embodiment, a silicide layer (not shown) may also be formed on the source / drain layer 70 (see FIG. 5). In this case, the first and second gate electrodes 40 and 42 are covered with a mask material, and the silicide layer 110 is formed on the source / drain layer 70. Thereafter, after the upper surfaces of the first and second gate electrodes 40 and 42 are exposed by planarizing the interlayer insulating film 80, germanium or silicon is introduced into the first gate electrode 40 by ion implantation or the like.

(Fourth embodiment)
14 to 17 are sectional views showing the flow of the method for manufacturing the semiconductor device according to the fourth embodiment of the present invention. First, the gate insulating film 30 is formed on the silicon substrate 10 through the same process as in the first embodiment. Next, a polysilicon and a silicon nitride film are deposited on the gate insulating film 30. The polysilicon and the silicon nitride film are formed into a gate pattern by using a photolithography technique and anisotropic etching such as RIE. As a result, as shown in FIG. 14, the first and second gate electrodes 40, 42 and the silicon nitride film caps 170, 172 are formed. The silicon nitride film caps 170 and 172 cover the upper surfaces of the first and second gate electrodes 40 and 42 as silicidation suppression materials.

  Next, a photoresist (not shown) is deposited on the silicon nitride film caps 170 and 172. Further, the silicon nitride film cap 172 on the second gate electrode 42 is covered, and the photoresist is patterned so that the upper surface of the silicon nitride film cap 170 on the first gate electrode 40 is exposed. Using this photoresist as a mask, the silicon nitride film cap 170 is removed. Further, the structure shown in FIG. 15 is obtained by removing the photoresist.

  Next, as shown in FIG. 16, a nickel film 100 is deposited as a metal film. Further, the first gate electrode 40 and the nickel film 100 are reacted by a thermal process to form nickel silicide as the gate electrode as shown in FIG. At this time, the first gate electrode 40 is fully silicided. On the other hand, the second gate electrode 42 is not silicided. This is because the silicon nitride film cap 172 is less likely to be silicided than polysilicon, and silicidation does not proceed to the second gate electrode 42.

  When silicide is formed on the upper surface of the second gate electrode 42 in order to lower the gate resistance of the second gate electrode 42, the silicon nitride film cap 172 is removed, and nickel is again applied to the upper surface of the second gate electrode 42. It is necessary to deposit and heat-treat.

(Fifth embodiment)
18 to 20 are cross-sectional views showing the flow of the method for manufacturing the semiconductor device according to the fifth embodiment of the invention. First, the structure shown in FIG. 1 is obtained through steps similar to those of the first embodiment. Next, as shown in FIG. 18, a nickel film 100 is deposited as a metal film.

  Next, as shown in FIG. 19, for example, a titanium nitride film 190 is deposited as a heat shielding film. Next, using a photolithography technique and wet etching, the nickel film 100 on the second gate electrode 42 is covered, and the titanium nitride film 190 is patterned so that the nickel film 100 on the first gate electrode 40 is exposed. To do.

  Subsequently, the first and second gate electrodes 40 and 42 are reacted with the nickel film 100 by a thermal process. Thus, nickel silicide is formed as a gate electrode as shown in FIG. At this time, only the upper part of the second gate electrode 42 is silicided, but the lower part is not silicided. This is because silicidation of the second gate electrode 42 is suppressed by the titanium nitride film 190 shielding heat. On the other hand, since there is no titanium nitride film 190 on the first gate electrode 40, the first gate electrode 40 is fully silicided.

  Next, the titanium nitride 190 is removed. At this time, preferably, the remaining nickel film 100 is also removed together with the titanium nitride 190. The nickel film 100 and the titanium nitride 190 can be removed by, for example, processing (SH processing) with a hydrogen peroxide solution and a sulfuric acid solution. Thereafter, the semiconductor device is completed through steps similar to those of the first embodiment. The fifth embodiment has the same effect as the first embodiment.

  The heat shielding film 190 is not limited to titanium nitride, but preferably does not react with the metal film 100 (for example, nickel). This is because the metal film 100 is eroded when the heat shielding film 190 reacts with the metal film 100. The heat shielding film 190 is preferably a material that dissolves in hydrogen peroxide solution and sulfuric acid solution. This is because the metal film 100 and the heat shielding film 190 can be removed in the same process after the silicide is formed.

(Sixth embodiment)
FIG. 21 to FIG. 26 are cross-sectional views showing the flow of the method for manufacturing the semiconductor device according to the sixth embodiment of the present invention. First, the gate insulating film 30 is formed on the silicon substrate 10 through the same process as in the first embodiment. Next, a polysilicon and a silicon nitride film are deposited on the gate insulating film 30. The polysilicon and the silicon nitride film are formed into a gate pattern by using a photolithography technique and anisotropic etching such as RIE. Thereby, as shown in FIG. 21, the first and second gate electrodes 40 and 42 and the silicon nitride film cap 177 are formed. The silicon nitride film cap 177 covers the upper surfaces of the first and second gate electrodes 40 and 42.

  Next, as shown in FIG. 22, the silicon nitride film cap 177 is etched by hot phosphoric acid solution or RIE. As a result, a groove 175 is formed at a position where the silicon nitride film cap 177 was present.

  Next, a photoresist 90 is deposited as a mask material on the first and second gate electrodes 40 and 42. Further, as shown in FIG. 23, by patterning the photoresist 90, the upper surface of the first gate electrode 40 is exposed while the second gate electrode 42 is covered with the photoresist 90. Next, the first gate electrode 40 is etched by etching such as RIE using the photoresist 90 as a mask. Thereby, the thickness of the first gate electrode 40 is thinner than that of the second gate electrode 42. For example, the thickness of the first gate electrode 40 is 50 nm to 70 nm, and the thickness of the second gate electrode 42 is 100 nm. At this time, the groove on the first gate electrode 40 is designated as 176, and the groove on the second gate electrode is designated as 175.

  The photoresist 90 is removed and the surface is pretreated. Next, as shown in FIG. 24, a nickel film 100 is deposited as a metal film.

  Subsequently, as shown in FIG. 25, the nickel film 100 is planarized by CMP. As a result, the nickel film 100 existing outside the grooves 175 and 176 is removed, and the nickel film 100 in the grooves 175 and 176 remains. Next, the first and second gate electrodes 40 and 42 are reacted with the nickel film 100 by a thermal process. Thereby, nickel silicide is formed as a gate electrode. Here, the amount of the nickel film 100 in the trench 176 needs to be a sufficient amount so that the first gate electrode 40 is sufficiently silicided. On the other hand, the amount of the nickel film 100 in the trench 175 is such that only the upper part of the second gate electrode 42 is silicided and the polysilicon layer 44 remains below the second gate electrode 42.

  In this embodiment, nickel is not supplied from the periphery of the first and second gate electrodes 40 and 42. Therefore, the ratio between the amount of polysilicon of each of the first and second gate electrodes 40 and 42 and the nickel film 100 is constant regardless of the gate pattern. In order to change the ratio between the polysilicon amount and the nickel film, the thickness of the silicon nitride film cap 177 shown in FIG. 21 and the etching amount of RIE shown in FIG. 23 may be changed. That is, by controlling the thickness of the silicon nitride film cap 177 and the etching amount of the first gate electrode 40, the ratio between the polysilicon amount and the nickel film can be determined. As a result, the second gate electrode 42 can be partially silicided, and the first gate electrode 40 can be fully silicided.

  The structure shown in FIG. 26 is obtained through the above steps. The subsequent manufacturing process may be the same as in the first embodiment. Thereby, the semiconductor device is completed. The sixth embodiment has the same effect as the first embodiment.

  In the first to sixth embodiments, in order to control the threshold voltage of the transistor, an impurity is introduced into the polysilicon used as the material of the first and second gate electrodes before the gate pattern is processed. You can.

  The material of the first and second gate electrodes may be amorphous silicon. However, in the third embodiment, the material of the first and second gate electrodes needs to be polysilicon.

  The metal film 100 is not limited to nickel, and may be titanium (Ti), cobalt (Co), platinum (Pt), tungsten (W), erbium (Er), yttrium (Y), or the like.

  The gate insulating film 30 may be a high dielectric other than the above materials, an oxide film thereof, an oxynitride film, or the like. Insulating films having different thicknesses may be formed in the full silicide region and other regions by a known method. For example, a thin gate insulating film (eg, 3 nm or less) is formed in the core circuit region where the full silicide MOSFET is formed, and a thick gate (eg, 3 nm or more) is formed in the peripheral circuit region where the normal silicide MOSFET is formed. An insulating film may be formed.

  As a modification of the second to sixth embodiments, an SOI substrate or a partial SOI substrate may be adopted as a semiconductor substrate, as in the modification of the first embodiment shown in FIG. 6 or FIG.

  In the planarization process of the interlayer insulating film 80, the etching by CMP is stopped in a state where the silicon oxide film is slightly left on the upper surfaces of the first and second gate electrodes 40 and 42, and the remaining silicon oxide film is made of RIE or the like. It may be removed by etching.

  The above embodiment is applied to a planar transistor, but can also be applied to a transistor having a three-dimensional channel and gate electrode, such as a Fin transistor.

Sectional drawing which shows the manufacturing method of the semiconductor device according to 1st Embodiment concerning this invention. Sectional drawing which shows the manufacturing method of the semiconductor device following FIG. Sectional drawing which shows the manufacturing method of the semiconductor device following FIG. FIG. 4 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 3. Sectional drawing which shows the modification of 1st Embodiment. Sectional drawing which shows the other modification of 1st Embodiment. Sectional drawing which shows the other modification of 1st Embodiment. Sectional drawing which shows the manufacturing method of the semiconductor device according to 2nd Embodiment based on this invention. FIG. 9 is a cross-sectional view showing the method for manufacturing the semiconductor device following FIG. 8. FIG. 10 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 9; Sectional drawing which shows the manufacturing method of the semiconductor device according to 3rd Embodiment concerning this invention. FIG. 12 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 11. FIG. 13 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 12. Sectional drawing which shows the manufacturing method of the semiconductor device according to 4th Embodiment concerning this invention. FIG. 15 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 14. FIG. 16 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 15; FIG. 17 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 16; Sectional drawing which shows the manufacturing method of the semiconductor device according to 5th Embodiment concerning this invention. FIG. 19 is a cross-sectional view showing the method for manufacturing the semiconductor device following FIG. 18. FIG. 20 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 19; Sectional drawing which shows the manufacturing method of the semiconductor device according to 6th Embodiment concerning this invention. FIG. 22 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 21; FIG. 23 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 22; FIG. 24 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 23; FIG. 25 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 24; FIG. 26 is a cross-sectional view showing a method for manufacturing the semiconductor device following FIG. 25;

Explanation of symbols

10 ... Silicon substrate 20 ... STI
DESCRIPTION OF SYMBOLS 30 ... Gate insulating film 40 ... 1st gate electrode 42 ... 2nd gate electrode 41, 44, 45, 48 ... Polysilicon layer 46 ... Silicide layer 49 ... Amorphous silicon layer 43 ... Nitrogen injection layer 50 ... Extension layer 60 ... Spacer 70 ... Source / drain layer 80 ... Interlayer insulating film 90 ... Photoresist 100 ... Nickel film

Claims (2)

Forming a gate insulating film on the semiconductor substrate;
Depositing a gate electrode material and a silicidation-suppressing material that is less susceptible to silicidation than the gate electrode material on the gate insulating film;
By patterning the gate electrode material and the silicidation suppression material, a first gate electrode and a second gate electrode having the silicidation suppression material placed on an upper surface are formed on the gate insulating film,
Depositing a mask material on the silicidation inhibiting material;
Coating the silicidation inhibiting material on the second gate electrode, patterning the mask material to expose the upper surface of the silicidation inhibiting material on the first gate electrode,
Removing the silicidation suppression material on the upper surface of the first gate electrode using the mask material;
Removing the mask material;
Depositing a metal film on the first gate electrode and the second gate electrode;
A method of manufacturing a semiconductor device comprising siliciding the first gate electrode. The first gate electrode is formed in a core circuit of a semiconductor device,
The method for manufacturing a semiconductor device according to claim 2, wherein the second gate electrode is formed in a peripheral circuit of the semiconductor device.

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