JP2008203827A5 - - Google Patents

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JP2008203827A5
JP2008203827A5 JP2008002164A JP2008002164A JP2008203827A5 JP 2008203827 A5 JP2008203827 A5 JP 2008203827A5 JP 2008002164 A JP2008002164 A JP 2008002164A JP 2008002164 A JP2008002164 A JP 2008002164A JP 2008203827 A5 JP2008203827 A5 JP 2008203827A5
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Japan
Prior art keywords
optical member
oxide layer
fine
member according
base material
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JP2008002164A
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Japanese (ja)
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JP2008203827A (en
JP4857290B2 (en
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Priority claimed from JP2008002164A external-priority patent/JP4857290B2/en
Priority to JP2008002164A priority Critical patent/JP4857290B2/en
Priority to EP08000663A priority patent/EP1947486B9/en
Priority to DE602008000987T priority patent/DE602008000987D1/en
Priority to US12/014,364 priority patent/US8999488B2/en
Priority to CN201310374058.8A priority patent/CN103454702B/en
Publication of JP2008203827A publication Critical patent/JP2008203827A/en
Publication of JP2008203827A5 publication Critical patent/JP2008203827A5/ja
Priority to US13/010,843 priority patent/US8778450B2/en
Publication of JP4857290B2 publication Critical patent/JP4857290B2/en
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Description

前記目的を達成するために、本発明の光学部材は、基材と、該基材表面に反射防止膜とを有する光学部材であって、前記反射防止膜は少なくとも、表面に微細凹凸構造を有する酸化物層と、前記酸化物層の少なくとも表面に形成されたリン酸塩化合物層とを含むことを特徴とする。   In order to achieve the above object, the optical member of the present invention is an optical member having a base material and an antireflection film on the surface of the base material, and the antireflection film has at least a fine uneven structure on the surface. It includes an oxide layer and a phosphate compound layer formed on at least the surface of the oxide layer.

また本発明の光学部材の製造方法は、基材と該基材表面に反射防止膜を有する光学部材の製造方法であって、前記基材表面に酸化物層を形成する工程と、前記酸化物層の表面に微細凹凸構造を形成する工程と、前記微細凹凸構造が形成された酸化物層に水溶性リン酸系化合物を接触させる工程と、を有することを特徴とする。
The method for producing an optical member of the present invention is a method for producing an optical member having a base material and an antireflection film on the surface of the base material, the step of forming an oxide layer on the surface of the base material, and the oxide And a step of forming a fine concavo-convex structure on the surface of the layer, and a step of bringing a water-soluble phosphoric acid compound into contact with the oxide layer having the fine concavo-convex structure formed thereon.

Claims (9)

基材と、該基材表面に反射防止膜とを有する光学部材であって、前記反射防止膜は少なくとも、表面に微細凹凸構造を有する酸化物層と、前記酸化物層の少なくとも表面に形成されたリン酸塩化合物層とを含むことを特徴とする光学部材。   An optical member having a base material and an antireflection film on the surface of the base material, wherein the antireflection film is formed on at least the oxide layer having a fine uneven structure on the surface and at least the surface of the oxide layer. An optical member comprising a phosphate compound layer. 前記酸化物層は、アモルファス層と、該アモルファス層上に前記微細凹凸構造を形成する異方性の結晶性酸化物微粒子の層と、からなることを特徴とする請求項1記載の光学部材。   The optical member according to claim 1, wherein the oxide layer includes an amorphous layer and a layer of anisotropic crystalline oxide fine particles that form the fine uneven structure on the amorphous layer. 前記微細凹凸構造の高さが0.1μm以上5μm以下であることを特徴とする請求項1または2記載の光学部材。   The optical member according to claim 1 or 2, wherein a height of the fine concavo-convex structure is 0.1 µm or more and 5 µm or less. 前記酸化物層は、酸化アルミニウムからなることを特徴とする請求項1乃至3いずれか1項記載の光学部材。   The optical member according to claim 1, wherein the oxide layer is made of aluminum oxide. 前記異方性の結晶性酸化物微粒子はベーマイトであることを特徴とする請求項2記載の光学部材。   The optical member according to claim 2, wherein the anisotropic crystalline oxide fine particles are boehmite. 基材と該基材表面に反射防止膜を有する光学部材の製造方法であって、前記基材表面に酸化物層を形成する工程と、前記酸化物層の表面に微細凹凸構造を形成する工程と、前記微細凹凸構造が形成された酸化物層に水溶性リン酸系化合物を接触させる工程と、を有することを特徴とする光学部材の製造方法。   A method for producing an optical member having a base material and an antireflection film on the surface of the base material, the step of forming an oxide layer on the surface of the base material, and the step of forming a fine relief structure on the surface of the oxide layer And a step of bringing a water-soluble phosphoric acid compound into contact with the oxide layer having the fine relief structure formed thereon. 前記水溶性リン酸系化合物の主成分が第1リン酸金属塩またはリン酸アミン塩であることを特徴とする請求項6記載の光学部材の製造方法。   The method for producing an optical member according to claim 6, wherein a main component of the water-soluble phosphate compound is a first metal phosphate or an amine phosphate. 前記微細凹凸構造が形成された酸化物層に水溶性リン酸系化合物を接触させる工程は、前記水溶性リン酸系化合物を0.01重量%以上30重量%以下含有させた水系の分散液に、前記微細凹凸構造が形成された酸化物層を接触させることを特徴とする請求項6または7記載の光学部材の製造方法。   The step of bringing the water-soluble phosphate compound into contact with the oxide layer on which the fine concavo-convex structure has been formed is performed in an aqueous dispersion containing 0.01 to 30% by weight of the water-soluble phosphate compound. The method for producing an optical member according to claim 6, wherein the oxide layer on which the fine concavo-convex structure is formed is brought into contact. 前記酸化物層の表面に微細凹凸構造を形成する工程は、前記酸化物層を水と接触させ、異方性の結晶性酸化物粒子を形成することにより、前記微細凹凸構造を形成することを特徴とする請求項7記載の光学部材の製造方法。   The step of forming the fine concavo-convex structure on the surface of the oxide layer includes forming the fine concavo-convex structure by bringing the oxide layer into contact with water and forming anisotropic crystalline oxide particles. 8. The method of manufacturing an optical member according to claim 7,
JP2008002164A 2007-01-22 2008-01-09 Optical member and optical member manufacturing method Active JP4857290B2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2008002164A JP4857290B2 (en) 2007-01-22 2008-01-09 Optical member and optical member manufacturing method
EP08000663A EP1947486B9 (en) 2007-01-22 2008-01-15 Optical member with antireflection coating and method of manufacturing the same
DE602008000987T DE602008000987D1 (en) 2007-01-22 2008-01-15 Optical component with anti-reflection coating and manufacturing method therefor
US12/014,364 US8999488B2 (en) 2007-01-22 2008-01-15 Optical member and method of manufacturing the same
CN201310374058.8A CN103454702B (en) 2007-01-22 2008-01-22 The method of optics and this optics of manufacture
US13/010,843 US8778450B2 (en) 2007-01-22 2011-01-21 Optical member and method of manufacturing the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007011429 2007-01-22
JP2007011429 2007-01-22
JP2008002164A JP4857290B2 (en) 2007-01-22 2008-01-09 Optical member and optical member manufacturing method

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JP2010188659A Division JP5147910B2 (en) 2007-01-22 2010-08-25 Optical member

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JP2008203827A JP2008203827A (en) 2008-09-04
JP2008203827A5 true JP2008203827A5 (en) 2009-10-15
JP4857290B2 JP4857290B2 (en) 2012-01-18

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JP (2) JP4857290B2 (en)
CN (2) CN103454702B (en)
DE (1) DE602008000987D1 (en)

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JP5279858B2 (en) 2010-05-07 2013-09-04 キヤノン株式会社 Aluminum oxide precursor sol and method for producing optical member
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JP2015068853A (en) * 2013-09-26 2015-04-13 ソニー株式会社 Laminated body, imaging element package, imaging apparatus, and electronic apparatus
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US11105960B2 (en) 2017-12-19 2021-08-31 Canon Kabushiki Kaisha Optical element and method of producing the element, and optical instrument
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US5514478A (en) * 1993-09-29 1996-05-07 Alcan International Limited Nonabrasive, corrosion resistant, hydrophilic coatings for aluminum surfaces, methods of application, and articles coated therewith
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