CN106044695B - A kind of micro-nano-scale material of good mechanical performance and preparation method thereof - Google Patents
A kind of micro-nano-scale material of good mechanical performance and preparation method thereof Download PDFInfo
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- CN106044695B CN106044695B CN201610398281.XA CN201610398281A CN106044695B CN 106044695 B CN106044695 B CN 106044695B CN 201610398281 A CN201610398281 A CN 201610398281A CN 106044695 B CN106044695 B CN 106044695B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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Abstract
The invention discloses micro-nano-scale material of a kind of good mechanical performance and preparation method thereof, including micro-nano-scale material matrix and the dense film for being covered in micro-nano-scale material matrix surface.The micro-nano-scale material has good deformation stability and significant work hardening ability, and preparation method is simple.
Description
Technical field
The invention belongs to micro-nano-scale Material Field, be related to a kind of good mechanical performance micro-nano-scale material and its
Preparation method.
Background technology
Micro-nano-scale material is the important component of micro-nano Mechatronic Systems.In order to ensure micro-nano Mechatronic Systems just
Informal dress is used as a servant, and micro-nano-scale material needs have excellent comprehensive mechanical property.But compared to macroscopical block materials, it is micro-nano
Sized materials deformation is unstable, and does not have work hardening capacity substantially.Therefore, design with excellent comprehensive mechanical property
Micro-nano-scale material is significant.
Uchic etc. has started micro-nano-scale material mechanical performance measuring technology.They press at the nickel to micron-scale
Contracting experiment, finds the trend that material is shown under the size " smaller stronger ".However, material deformation frequently goes out under the yardstick
Now strain saltation electrophoresis, deformation easily unstability, and there's almost no processing hardening [Uchic M.D.et al.Science 305,
986-989(2004).].Hereafter people have carried out similar research to multiple material, find to deform unstable and low processing hardening
The features such as be prevalent in micro-nano-scale material.These features seriously hinder micro-nano-scale material in micro-nano electromechanics
Extensive use in system.
To solve this problem, people have carried out many trials, wherein representative is to introduce to separate out in the material
Phase and interface etc..The oxide particle that Girault etc. introduces Dispersed precipitate in nickel base superalloy is compressed experiment
[Girault B.et al.Adv.Eng.Mater.12,385-388(2010).].They are had found when scantling reaches nanometer
During level, the effect of oxide particle is extremely limited, can not effectively improve the deformation stability and work hardening capacity of material.
In addition, oxide particle needs to introduce by high energy ball mill method, then it is sintered, extrudes, technique is complex, obtains
Material can also contain substantial amounts of defect and impurity.Kunz etc. has carried out compression experiment [Kunz A.et to aluminum single crystal and twin crystal aluminium
al.Acta Mater.59,4416-4424(2011).].As a result showing, twin crystal aluminium shows the strain kick of single crystal-like aluminium,
Deformation stability is not improved because crystal boundary introduces.Equally, in the compression experiment of the twin crystal copper of the progress such as Li, twin crystal
The deformation of copper, which is also shown, frequently strains kick [Li L.L.et al.Sci.Rep.5,15631 (2015)].From processing
From the point of view of technique and mechanical property, all there is many deficiencies in these methods, can not efficiently solve micro-nano-scale material reality
Problem present in the application of border.
The content of the invention
The shortcomings that it is an object of the invention to overcome above-mentioned prior art, there is provided a kind of good mechanical performance it is micro-nano
Sized materials and preparation method thereof, the micro-nano-scale material have good deformation stability and significantly process hardening
Can, and preparation method is simple.
To reach above-mentioned purpose, the micro-nano-scale material of good mechanical performance of the present invention includes micro-nano-scale material
Material matrix and the dense film for being covered in micro-nano-scale material matrix surface.
The thickness of the dense film is 1nm-1000nm.
The material of the dense film is oxide, nitride, carbide, oxycarbide or nitrogen oxides.
The material of the dense film is aluminum oxide.
The preparation method of the micro-nano-scale material of good mechanical performance of the present invention comprises the following steps：Choose base
Material, then base material is processed as micro-nano-scale material matrix, then using generation or artificial synthesized method naturally micro-nano
The surface of sized materials matrix prepares dense film, obtains the micro-nano-scale material of good mechanical performance.
The preparation method of the micro-nano-scale material of good mechanical performance of the present invention comprises the following steps：Choose base
Material, then dense film is prepared on the surface of base material by generation naturally or artificial synthesized method, then base material is processed as required
Micro-or nano size, obtain the micro-nano-scale material of good mechanical performance.
The invention has the advantages that：
The micro-nano-scale material of good mechanical performance of the present invention includes micro-nano-scale material matrix, the micro-nano
The surface of metrical scale material matrix is provided with dense film, and the stabilization of micro-nano-scale matrix is effectively improved by the dense film
Property and work hardening ability, simple in construction, function admirable.In the preparation, generation or artificial synthesized side naturally can be passed through
Method prepares dense film, and preparation method is simple, controllability is preferable.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the present invention；
Fig. 2 is another structural representation of the present invention；
Fig. 3 is a kind of flow chart of the present invention；
Fig. 4 is another flow chart of the present invention；
Fig. 5 is transmission electron microscope picture of the invention in embodiment one；
Fig. 6 is partial enlargement transmission electron microscope picture of the invention in embodiment one；
Fig. 7 is tensile property test result figure of the invention in embodiment one.
Wherein, 1 it is micro-nano-scale material matrix, 2 is dense film.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings：
With reference to figure 1 and Fig. 2, the micro-nano-scale material of good mechanical performance of the present invention includes micro-nano-scale material
Material matrix 1 and the dense film 2 for being covered in the surface of micro-nano-scale material matrix 1, wherein, the thickness of the dense film 2 is
1nm-1000nm；The material of dense film 2 is oxide, nitride, carbide, oxycarbide or nitrogen oxides.
Include following step with reference to the preparation method of the micro-nano-scale material of 3 good mechanical performance of the present invention of figure
Suddenly：Base material is chosen, then base material is processed as micro-nano-scale material matrix 1, then using generation or artificial synthesized side naturally
Method prepares dense film 2 on the surface of micro-nano-scale material matrix 1, obtains the micro-nano-scale material of good mechanical performance.
With reference to figure 4, the preparation method of the micro-nano-scale material of good mechanical performance of the present invention includes following step
Suddenly：Base material is chosen, then dense film 2 is prepared on the surface of base material by generation naturally or artificial synthesized method, then by base material
Required micro-or nano size is processed as, obtains the micro-nano-scale material of good mechanical performance.
The test result of the present invention shows, material matrix cover by generation naturally or artificial synthesized method thin
Film process, the dense film 2 that can be evenly distributed on its surface；To micro-nano-scale material matrix 1 and of the present invention
Micro-nano-scale material carries out in-situ tensile test discovery, and deformation stability of the invention and work hardening capacity are far above phase
Answer micro-nano-scale material matrix 1；The present invention be able to can effectively improve micro- as the stressed member in micro-nano Mechatronic Systems
The stability and service life of Nano electro-mechanical system.
Embodiment one
Micro-nano-scale material matrix 1 is processed on aluminum alloy flake using focused ion beam under vacuum condition, taken out
Micro-nano-scale material matrix 1, then 48 hours autoxidations in dry air are placed in, obtained on the surface of micro/nano-scale material matrix 1
To aluminum oxide dense film 2, wherein, the thickness of aluminum alloy flake is 10 μm, a diameter of 300nm of micro-nano-scale material matrix 1,
The length of micro-nano-scale material matrix 1 is 1 μm.
With reference to figure 5 and Fig. 6, the surface of micro-nano-scale material matrix 1 after autoxidation is handled cover one layer uniformly and
Fine and close aluminum oxide dense film 2, the aluminum oxide dense film 2 are combined closely with micro-nano-scale material matrix 1, aluminum oxide dense film
2 thickness is about 4.3 nanometers.
Stretching experiment is carried out to the present invention, experimental result does not go out in deformation process of the present invention as shown in fig. 7, Fig. 7 shows
Saltation electrophoresis is now strained, deformation is sufficiently stable；After present invention surrender, good work hardening capacity is shown, is had higher
Tensile strength.
In addition, those skilled in the art can also do other changes in spirit of the invention, these are according to present invention spirit
The change done, it should all be included in scope of the present invention.
Claims (4)
- A kind of 1. micro-nano-scale material of good mechanical performance, it is characterised in that including micro-nano-scale material matrix (1) with And it is covered in the dense film (2) on micro-nano-scale material matrix (1) surface；The thickness of the dense film (2) is 1nm-1000nm；The material of the dense film (2) is oxide, nitride, carbide, oxycarbide or nitrogen oxides.
- 2. the micro-nano-scale material of good mechanical performance according to claim 1, it is characterised in that the dense film (2) material is aluminum oxide.
- 3. the preparation method of the micro-nano-scale material of a kind of good mechanical performance, it is characterised in that comprise the following steps：Choose Base material, then base material is processed as micro-nano-scale material matrix (1), then using generation or artificial synthesized method naturally micro- The surface of nanometer sized materials matrix (1) prepares dense film (2), obtains the micro-nano-scale material of good mechanical performance.
- 4. the preparation method of the micro-nano-scale material of a kind of good mechanical performance, it is characterised in that comprise the following steps：Choose Base material, then dense film (2) is prepared on the surface of base material by generation naturally or artificial synthesized method, then base material is processed as Required micro-or nano size, obtain the micro-nano-scale material of good mechanical performance.
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| CN106044695B true CN106044695B (en) | 2018-03-02 |
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