WO2012044054A3 - Method for forming nanostructure for implementing highly transparent and super water-repellent surface - Google Patents

Method for forming nanostructure for implementing highly transparent and super water-repellent surface Download PDF

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Publication number
WO2012044054A3
WO2012044054A3 PCT/KR2011/007132 KR2011007132W WO2012044054A3 WO 2012044054 A3 WO2012044054 A3 WO 2012044054A3 KR 2011007132 W KR2011007132 W KR 2011007132W WO 2012044054 A3 WO2012044054 A3 WO 2012044054A3
Authority
WO
WIPO (PCT)
Prior art keywords
highly transparent
super water
nanostructure
forming
substrate
Prior art date
Application number
PCT/KR2011/007132
Other languages
French (fr)
Korean (ko)
Other versions
WO2012044054A2 (en
Inventor
김윤택
양순석
조상무
김병찬
Original Assignee
바코스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 바코스 주식회사 filed Critical 바코스 주식회사
Publication of WO2012044054A2 publication Critical patent/WO2012044054A2/en
Publication of WO2012044054A3 publication Critical patent/WO2012044054A3/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/18—Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D127/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers
    • C09D127/02—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment
    • C09D127/12—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/5853—Oxidation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5846—Reactive treatment
    • C23C14/586—Nitriding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation

Abstract

The present invention relates to a method for forming a nanostructure for implementing a highly transparent and super water-repellent surface, and more specifically, to a method for forming a highly transparent and super water-repellent nanostructured surface, comprising the following steps: forming island-shaped fine metal particles on the surface of a substrate; etching the surface of the substrate using the island-shaped metal fine particles as a protective mask; and removing the metal fine particles remaining on the surface of the etched substrate. According to the formation method of a nanostructure of the present invention, it is easy to form a random fine uneven surface on the surface of a substrate even without using an expensive inefficient method such as lithography, and thus to produce a highly transparent and super water-repellent surface on which a nanostructure is formed, at a low cost and with high efficiency.
PCT/KR2011/007132 2010-09-30 2011-09-28 Method for forming nanostructure for implementing highly transparent and super water-repellent surface WO2012044054A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0095523 2010-09-30
KR1020100095523A KR101283665B1 (en) 2010-09-30 2010-09-30 Forming Method Of Nano Structure For High Light-Transmissive And Super-Water-Repellent Surface

Publications (2)

Publication Number Publication Date
WO2012044054A2 WO2012044054A2 (en) 2012-04-05
WO2012044054A3 true WO2012044054A3 (en) 2012-06-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/007132 WO2012044054A2 (en) 2010-09-30 2011-09-28 Method for forming nanostructure for implementing highly transparent and super water-repellent surface

Country Status (2)

Country Link
KR (1) KR101283665B1 (en)
WO (1) WO2012044054A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140068289A (en) * 2012-11-20 2014-06-09 (주)에스이피 Manufacturing method of anti-reflection surface having improved light transmitting property and durability, and substrate having anti-reflection surface
KR101374095B1 (en) * 2012-12-03 2014-03-13 한국기계연구원 Nano structure for superhydrophobic and superoleophobic surface and forming method thereof
KR20170002657A (en) * 2014-05-27 2017-01-06 사빅 글로벌 테크놀러지스 비.브이. self-cleansing super-hydrophobic polymeric materials for anti-soiling
DE102014113097A1 (en) * 2014-09-11 2016-03-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. A method of reducing soil adhesion to a substrate
JP2019008028A (en) * 2017-06-21 2019-01-17 ミツミ電機株式会社 Hydrophobic antireflection structure and manufacturing method of hydrophobic antireflection structure
KR20190023771A (en) 2017-08-30 2019-03-08 영남대학교 산학협력단 Method of manufacturing super-hydrophobic surface
JP2020038311A (en) * 2018-09-05 2020-03-12 ミツミ電機株式会社 Water-repellent antireflection structure
CN109534684A (en) * 2018-12-27 2019-03-29 河南豫科玻璃技术股份有限公司 A kind of etching glass and its etching technics based on nanoscale without flash-point anti-dazzle technology
KR20220055136A (en) 2020-10-26 2022-05-03 영남대학교 산학협력단 Substrate manufacturing method with super-hydrophobic surface and a substrate fabricated by it and surface structure having the substrate
CN114133611B (en) * 2021-11-02 2023-02-07 北京大学 Method for preparing nano cilium structure on surface of polymer material
CN114682922B (en) * 2022-03-08 2023-03-21 江苏大学 Method for regulating and controlling super-hydrophobic surface stress and texture morphology of aluminum alloy prepared by laser etching

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008143162A (en) * 2006-11-15 2008-06-26 National Institute Of Advanced Industrial & Technology Die for molding optical element having antireflection structure, its manufacturing process, and optical element
JP2009128538A (en) * 2007-11-21 2009-06-11 Panasonic Corp Method for manufacturing antireflection structure
JP2009128543A (en) * 2007-11-21 2009-06-11 Panasonic Corp Method for manufacturing antireflection structure
KR20100070516A (en) * 2008-12-18 2010-06-28 한국기계연구원 Manufacturing method for anti-reflective surface and super water-repellent surface

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008143162A (en) * 2006-11-15 2008-06-26 National Institute Of Advanced Industrial & Technology Die for molding optical element having antireflection structure, its manufacturing process, and optical element
JP2009128538A (en) * 2007-11-21 2009-06-11 Panasonic Corp Method for manufacturing antireflection structure
JP2009128543A (en) * 2007-11-21 2009-06-11 Panasonic Corp Method for manufacturing antireflection structure
KR20100070516A (en) * 2008-12-18 2010-06-28 한국기계연구원 Manufacturing method for anti-reflective surface and super water-repellent surface

Also Published As

Publication number Publication date
KR101283665B1 (en) 2013-07-08
WO2012044054A2 (en) 2012-04-05
KR20120033805A (en) 2012-04-09

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