JP2008203271A5 - - Google Patents
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- Publication number
- JP2008203271A5 JP2008203271A5 JP2008122126A JP2008122126A JP2008203271A5 JP 2008203271 A5 JP2008203271 A5 JP 2008203271A5 JP 2008122126 A JP2008122126 A JP 2008122126A JP 2008122126 A JP2008122126 A JP 2008122126A JP 2008203271 A5 JP2008203271 A5 JP 2008203271A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ion beam
- stage
- optical system
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000523 sample Substances 0.000 claims 307
- 238000010884 ion-beam technique Methods 0.000 claims 113
- 230000003287 optical Effects 0.000 claims 59
- 238000002360 preparation method Methods 0.000 claims 44
- 230000001678 irradiating Effects 0.000 claims 19
- 239000004065 semiconductor Substances 0.000 claims 9
- 238000000926 separation method Methods 0.000 claims 3
- 230000001276 controlling effect Effects 0.000 claims 1
- 230000000875 corresponding Effects 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Images
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008122126A JP2008203271A (ja) | 2008-05-08 | 2008-05-08 | 試料作製方法および試料作製装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008122126A JP2008203271A (ja) | 2008-05-08 | 2008-05-08 | 試料作製方法および試料作製装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000342372A Division JP4283432B2 (ja) | 2000-11-06 | 2000-11-06 | 試料作製装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008203271A JP2008203271A (ja) | 2008-09-04 |
| JP2008203271A5 true JP2008203271A5 (ko) | 2008-10-23 |
Family
ID=39780901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008122126A Pending JP2008203271A (ja) | 2008-05-08 | 2008-05-08 | 試料作製方法および試料作製装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008203271A (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10088401B2 (en) * | 2014-06-30 | 2018-10-02 | Hitachi High-Tech Science Corporation | Automatic sample preparation apparatus |
-
2008
- 2008-05-08 JP JP2008122126A patent/JP2008203271A/ja active Pending
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