JP2008203077A - Circuit inspection device and method - Google Patents

Circuit inspection device and method Download PDF

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JP2008203077A
JP2008203077A JP2007039194A JP2007039194A JP2008203077A JP 2008203077 A JP2008203077 A JP 2008203077A JP 2007039194 A JP2007039194 A JP 2007039194A JP 2007039194 A JP2007039194 A JP 2007039194A JP 2008203077 A JP2008203077 A JP 2008203077A
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circuit
inspection
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insulation
circuits
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Yorio Hidehira
頼夫 秀平
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MicroCraft KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a circuit inspection device and method capable of discovering a fine insulation failure more accurately even when an impurity exists. <P>SOLUTION: When a measured resistance value is higher than a reference value, control is performed so that a high voltage 3 having a polarity different from that of a high voltage 2 is output. After switching the polarity at a prescribed timing, a measuring part 13 measures a current flowing between probes 11. Then, a measured resistance value between circuits is compared with a reference value. When the measured resistance value is lower than the reference value, it is determined that an insulation failure is generated, and the results are recorded in a recording part 15. When the measured resistance value is higher than the reference value, it is determined that the interval between the circuits is nondefective, and an insulation inspection between the circuits is finished. An insulation failure can be discovered precisely without overlooking even a fine insulation failure, and without generating deterioration such as a damage by a fire of an insulation failure spot. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、電子回路、とりわけ検査対象回路がプリント配線板の検査装置及び方法に関し、特にプリント配線板中の回路の絶縁不良を検出するプリント配線板検査装置及び方法に関する。   The present invention relates to an inspection apparatus and method for an electronic circuit, particularly a circuit to be inspected, for a printed wiring board, and more particularly to a printed wiring board inspection apparatus and method for detecting an insulation failure of a circuit in the printed wiring board.

一般に、プリント配線板は、スルーホール等を用いて電気的に接続された回路を複数有しており、製造されたプリント配線板の回路が設計通り正しく形成されているかどうか、すなわち、プリント配線板中の回路が断線していて導通不良を生じたり、他の回路と短絡していて絶縁不良を生じたりせずに設計通りに形成されているかを電気的に検査する必要がある。   Generally, a printed wiring board has a plurality of circuits electrically connected using through holes or the like, and whether the circuit of the manufactured printed wiring board is correctly formed as designed, that is, the printed wiring board. It is necessary to electrically inspect whether the circuit is formed as designed without disconnecting the internal circuit and causing a continuity failure or short-circuiting with other circuits and causing an insulation failure.

絶縁検査(短絡検査)の電気的検査方法として、検査対象となる回路間に電圧を印加し、その時の電圧と測定した電流とにより回路間の絶縁抵抗を求め、絶縁抵抗が基準値以下であった場合、その部分が絶縁不良箇所であると判定する方法が知られている。   As an electrical inspection method for insulation inspection (short-circuit inspection), a voltage is applied between the circuits to be inspected, and the insulation resistance between the circuits is determined from the voltage at that time and the measured current. The insulation resistance is below the reference value. In such a case, there is known a method for determining that the portion is an insulation failure portion.

また、マイクロショートと呼ばれる微細な絶縁不良があった場合、不良箇所を焼損しないように、まず、低い電圧を印加して検査を行い、絶縁抵抗が基準値以下であった場合、絶縁不良箇所であると判断し、絶縁抵抗が基準値以上であった場合にはこれらの回路間にのみ、高い電圧を印加して検査を行う検査方法が下記特許文献1等によって知られている。   In addition, when there is a minute insulation failure called micro short, in order not to burn out the defective portion, first, a low voltage is applied to inspect, and if the insulation resistance is below the reference value, If it is determined that there is an insulation resistance greater than or equal to a reference value, an inspection method in which a high voltage is applied only between these circuits for inspection is known from Patent Document 1 below.

特開平6−230058号JP-A-6-230058

しかし、特許文献1に記載されている検査方法では、導体の存在によって抵抗値が低下して短絡が発生しかかっている場合には、絶縁不良を発見することができるが、不純物によって短絡しかかっている場合、当該回路は、単純に直流電圧に対する電圧の低下として検出できない場合があり、たとえば交流電流を印加した場合におけるダイオードのような特性やコンデンサのような特性を示すことがあり、絶縁不良を発見しにくいという問題がある。   However, in the inspection method described in Patent Document 1, when the resistance value decreases due to the presence of a conductor and a short circuit is about to occur, an insulation failure can be found, but the short circuit is about to occur due to impurities. In some cases, the circuit may not be detected simply as a drop in voltage with respect to the DC voltage. For example, when an AC current is applied, the circuit may exhibit diode-like characteristics or capacitor-like characteristics. There is a problem that it is difficult to do.

本発明は上記欠点を解決し、不純物があった場合でも、より精度良く微細な絶縁不良を発見できるようにした回路検査装置及び検査方法を提供することを目的としている。   An object of the present invention is to provide a circuit inspection apparatus and an inspection method which can solve the above-described drawbacks and can detect fine insulation defects with higher accuracy even when impurities are present.

上記目的を達成するため、本件発明は以下のように構成される。本件発明の1つの特徴によれば、複数の検査電圧を用いて対象回路の検査をおこなう回路検査装置において、
第1の電圧を検査対象回路に印加する第1印加手段と、
前記第1の電圧より高い第2の電圧を前記検査対象回路に印加する第2印加手段と、
前記第2の電圧と同一の電圧でかつ異なる極性の電圧を印加する第3印加手段とを備えたことを特徴とする回路検査装置が提供される。
In order to achieve the above object, the present invention is configured as follows. According to one feature of the present invention, in a circuit inspection apparatus for inspecting a target circuit using a plurality of inspection voltages,
First application means for applying a first voltage to the circuit under test;
Second application means for applying a second voltage higher than the first voltage to the circuit to be inspected;
There is provided a circuit inspection apparatus comprising: a third application unit that applies a voltage having the same voltage as the second voltage and a different polarity.

好ましい態様では前記検査対象回路がプリント板上に形成される。   In a preferred embodiment, the circuit to be inspected is formed on a printed board.

本発明の別の特徴によれば、複数の検査電圧を用いて対象回路の検査を行う回路検査方法において、
第1の電圧を対象回路に印加することにより検査を行う段階と、
前記第1の電圧より高い第2の電圧を前記対象回路に印加して検査を行う段階と、
前記第2の電圧と同一の電圧でかつ異なる極性の電圧を前記対象回路に印加して、さらに検査を行う段階とを備えた回路検査方法が提供される。
According to another feature of the present invention, in a circuit inspection method for inspecting a target circuit using a plurality of inspection voltages,
Performing an inspection by applying a first voltage to the target circuit;
Performing a test by applying a second voltage higher than the first voltage to the target circuit;
There is provided a circuit inspection method including a step of applying a voltage having the same voltage as the second voltage and a different polarity to the target circuit, and further performing an inspection.

典型的な態様では、本発明に従う検査装置は、プリント配線板の回路に接触可能な複数のプローブと印加電圧可変直流電源を具備している。   In a typical embodiment, an inspection apparatus according to the present invention includes a plurality of probes that can contact a circuit of a printed wiring board and a DC voltage source with variable applied voltage.

検査にあたって、先ず、第一段階として、複数のプローブを回路の各検査点に接触させ、順次一対のプローブ間に任意の第1の直流電圧を印加して電流を測定する。次いで、前記の第一段階で印加した電圧より高い第2の電圧を前記プローブ間に印加して電流を測定する。続いて、前記第2の電圧と同一の電圧でかつ極性を変えた電圧を回路に印加する。   In the inspection, first, as a first step, a plurality of probes are brought into contact with each inspection point of the circuit, and an arbitrary first DC voltage is sequentially applied between the pair of probes to measure a current. Next, a second voltage higher than the voltage applied in the first stage is applied between the probes, and the current is measured. Subsequently, a voltage having the same voltage as the second voltage but having a different polarity is applied to the circuit.

本発明においては通常の導体に起因する抵抗値の低下による絶縁不良だけでなく不純物による半導体挙動等に起因する絶縁不良があった場合でも、両極性を付加することにより、より精度良く微細な絶縁不良を発見できる。   In the present invention, even when there is an insulation failure due to a semiconductor behavior due to impurities as well as an insulation failure due to a decrease in resistance value caused by a normal conductor, by adding both polarities, fine insulation can be made with higher accuracy. Can detect defects.

以下、本発明の実施の形態について図を参照しながら説明する。図1に本プリント配線板検査装置10の全体構成を示す構成図を示す。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram showing the overall configuration of the printed wiring board inspection apparatus 10.

プリント配線板検査装置10は、プローブ11、移動機構部12、測定部13、可変直流電源14、記録部15、制御部16により構成されている。移動機構部12には、プローブ支持部17を介してプローブ11が取り付けられており、プローブ11は、検査対象回路を含むプリント配線板18と平行方向(XY方向)及び垂直方向(Z方向)に移動可能である。測定部13はプローブ11に接続されており、プローブ間に電流を流したり、電圧を印加したりすることにより、プリント配線板内の回路の抵抗を測定する。可変直流電源は検査電圧を任意に可変することができる。記録部15は測定した値の演算結果などを一時的に記録する。制御部16は移動機構12の駆動制御や、測定部13によって測定された抵抗値などを不良であるかどうかを判定する処理や、可変直流電源14の電圧制御などを行う。   The printed wiring board inspection apparatus 10 includes a probe 11, a movement mechanism unit 12, a measurement unit 13, a variable DC power supply 14, a recording unit 15, and a control unit 16. A probe 11 is attached to the moving mechanism part 12 via a probe support part 17, and the probe 11 is parallel to the printed wiring board 18 including the circuit to be inspected (XY direction) and perpendicularly (Z direction). It is movable. The measurement unit 13 is connected to the probe 11 and measures the resistance of the circuit in the printed wiring board by passing a current between the probes or applying a voltage. The variable DC power source can arbitrarily change the inspection voltage. The recording unit 15 temporarily records the calculation result of the measured value. The control unit 16 performs drive control of the moving mechanism 12, processing for determining whether the resistance value measured by the measurement unit 13 is defective, voltage control of the variable DC power source 14, and the like.

一方、図2に示すように検査対象のプリント配線板18には、数多くのさまざまな形態の回路19ないし23が形成されている。図3には、回路24及び回路25の2つの所望の製造品質を有する回路が示されている。一方、図4に示す回路では、一方の回路の導体26に導体のバリが生成しており、他方の回路27の近傍まで達している。すなわち回路間で短絡が発生するおそれがある構造になっている。このような場合において、回路26のバリの先端と、回路27の間が接近して、絶縁不良が生じやすくなっている。この場合両者の間に仮に導体でなく半導体の挙動を有するような不純物が介在した場合には、単純に直流電圧を一方向から印加しただけでは絶縁不良を見分けることができない可能性がある。すなわち、回路間にたとえば、半導体挙動を示すような不純物が介在することが原因で短絡しかかっているような場合、そのような回路は、ダイオードのような特性やコンデンサのような特性を示すことがある。本例の検査ではこのような回路の状態に対しても適正に絶縁不良の状態を検出できるように検査装置を動作させるように構成したものである。   On the other hand, as shown in FIG. 2, the printed wiring board 18 to be inspected has a large number of various forms of circuits 19 to 23 formed thereon. FIG. 3 shows a circuit having two desired manufacturing qualities, circuit 24 and circuit 25. On the other hand, in the circuit shown in FIG. 4, a conductor burr is generated in the conductor 26 of one circuit and reaches the vicinity of the other circuit 27. That is, it has a structure in which a short circuit may occur between circuits. In such a case, the tip of the burr of the circuit 26 and the circuit 27 are close to each other, and insulation failure is likely to occur. In this case, if an impurity having a semiconductor behavior instead of a conductor is interposed between the two, there is a possibility that an insulation failure cannot be identified by simply applying a DC voltage from one direction. That is, for example, when a short circuit is about to occur due to the presence of impurities that exhibit semiconductor behavior between the circuits, such a circuit may exhibit diode-like characteristics or capacitor-like characteristics. is there. In the inspection of this example, the inspection apparatus is configured to operate so that the state of insulation failure can be properly detected even for such a circuit state.

以下、図5を参照しつつプリント配線板検査装置による絶縁検査処理動作について説明する。   Hereinafter, the insulation inspection processing operation by the printed wiring board inspection apparatus will be described with reference to FIG.

まず、検査対象回路を含むプリント配線板18をプリント配線板固定具(図示せず)を用いて固定する。次に、制御部16が移動機構部12を制御してプローブ11を制御して移動させ回路の検査対象となる所定の端子に位置決めして、相互に絶縁されている一対の回路にそれぞれ接触させる(ステップ1)。続いて制御部16はまず第1の電圧すなわち低い電圧V1を出力するように制御を行う(ステップ2)。続いて、測定部13はプローブ11間に流れる電流を測定する。測定された電流をIo印加電圧をVとすると、回路間の抵抗Rは、R=V/Ioとして測定される。 First, the printed wiring board 18 including the circuit to be inspected is fixed using a printed wiring board fixing tool (not shown). Next, the control unit 16 controls the moving mechanism unit 12 to control and move the probe 11 so that the probe 11 is positioned at a predetermined terminal to be inspected by the circuit and brought into contact with a pair of circuits that are insulated from each other. (Step 1). Subsequently, the control unit 16 performs control so as to output the first voltage, that is, the low voltage V1 (step 2). Subsequently, the measurement unit 13 measures the current flowing between the probes 11. When the measured current is Io applied voltage and V is V, the resistance R between the circuits is measured as R = V / Io .

続いて測定した回路間の抵抗値を基準値と比較して絶縁不良かどうかを判定する(ステップ3)。測定した抵抗値が基準値より低い場合には絶縁不良であると判定して、前記回路間については絶縁検査を終了として、ステップ1に戻って、再び別の回路間にプローブ11を移動して、同様の動作をおこなう。また、ステップ3において測定した抵抗値が基準値より高い場合には、高い電圧2を出力するように制御を行う(ステップ5)。続いて測定部はプローブ11間に流れる電流を測定する。続いて測定した回路間の抵抗値を基準値と比較する(ステップ6)。測定した抵抗値が基準値より低い場合にはマイクロショートによる絶縁不良であると判定する(ステップ7)。そして、当該回路の絶縁検査を終了するとともに検査対象回路を特定した上で結果を記録部15に記録する。なお、マイクロショートは絶縁不良の一種であり、微小の髭状の導体で回路間が短絡している場合などに生じ、一般的には抵抗値が高いものが多い(数MΩ以上)。絶縁不良は回路間の絶縁が十分でないものを呼び、完全な短絡(抵抗値=0Ω)のものから、数十MΩのものまでが一般的であるが、特殊用途のプリント配線板の場合には1GΩでも絶縁不良として扱われる。   Subsequently, the measured resistance value between the circuits is compared with a reference value to determine whether there is an insulation failure (step 3). If the measured resistance value is lower than the reference value, it is determined that the insulation is defective, the insulation inspection is terminated between the circuits, the process returns to Step 1, and the probe 11 is moved again between other circuits. , Perform the same operation. When the resistance value measured in step 3 is higher than the reference value, control is performed so as to output a high voltage 2 (step 5). Subsequently, the measurement unit measures the current flowing between the probes 11. Subsequently, the measured resistance value between the circuits is compared with a reference value (step 6). If the measured resistance value is lower than the reference value, it is determined that there is an insulation failure due to a micro short (step 7). Then, the insulation inspection of the circuit is finished and the inspection target circuit is specified, and the result is recorded in the recording unit 15. Note that a micro short is a kind of insulation failure, and occurs when a circuit is short-circuited with a minute hook-shaped conductor, and generally has a high resistance value (several MΩ or more). Insulation failures are those with insufficient insulation between circuits, and are generally from short-circuited (resistance value = 0Ω) to tens of MΩ, but in the case of printed wiring boards for special applications Even 1 GΩ is treated as an insulation failure.

一方、測定した抵抗値が基準値より高い場合には、高い電圧2と極性が異なる高い電圧3を出力するように制御を行う(ステップ8)。この場合、回路切換の構成はたとえば、図6に示されるような回路構成とすることができる。すなわち、極性切換回路30は、プリント配線基板上の検査対象回路18に対して印加される可変直流電源14を切り換えるために制御部16に接続された切換スイッチ31を備えている。この電源の切換をおこなうために電源回路の電流を計測する電流計32及びこの電流計からの電流値を変換して制御部に入力するA/Dコンバータ33とを備えている。   On the other hand, when the measured resistance value is higher than the reference value, control is performed so as to output a high voltage 3 having a polarity different from that of the high voltage 2 (step 8). In this case, the circuit switching configuration can be, for example, a circuit configuration as shown in FIG. That is, the polarity switching circuit 30 includes a change-over switch 31 connected to the control unit 16 in order to switch the variable DC power source 14 applied to the inspection target circuit 18 on the printed wiring board. In order to switch the power supply, an ammeter 32 for measuring the current of the power supply circuit and an A / D converter 33 for converting the current value from the ammeter and inputting it to the control unit are provided.

所定のタイミングで極性切換をおこなったのち、測定部13はプローブ11間に流れる電流を測定する。続いて測定した回路間の抵抗値を基準値と比較する(ステップ9)。測定した抵抗値が基準値より低い場合には絶縁不良であると判定し(ステップ7)、結果を記録部15に記録する。測定した抵抗値が基準値より高い場合には、前記回路間を良品と判定して、当該回路間の絶縁検査を終了する。上記手順が終了した後、プローブを移動させ、他の回路間についても上記手順を行いすべての検査対象回路の検査が終了したかどうかを判定する(ステップ10)。予め決められた全ての検査対象回路間について上記手順で検査動作を行い、全ての対象検査回路間において良品と判定された場合には、プリント配線板は良品であると判定するが、1箇所でも不良箇所がある場合には、不良品であると判定しかつ不良個所に係る回路を特定した上で記録し、検査の動作をすべて終了する。   After switching the polarity at a predetermined timing, the measurement unit 13 measures the current flowing between the probes 11. Subsequently, the measured resistance value between the circuits is compared with a reference value (step 9). If the measured resistance value is lower than the reference value, it is determined that the insulation is defective (step 7), and the result is recorded in the recording unit 15. If the measured resistance value is higher than the reference value, the circuit is determined to be non-defective and the insulation test between the circuits is terminated. After the above procedure is completed, the probe is moved and the above procedure is performed between other circuits to determine whether or not the inspection of all the circuits to be inspected has been completed (step 10). The inspection operation is performed in the above procedure between all the predetermined inspection target circuits, and when it is determined as a non-defective product among all the target inspection circuits, the printed wiring board is determined as a non-defective product, but even at one place If there is a defective portion, it is determined that the product is defective and a circuit related to the defective portion is specified and recorded, and all the inspection operations are terminated.

前述のとおり、一般的な絶縁検査は、任意の電圧を印加し、検査を行う。また、微細な絶縁不良を焼損させたくない場合には、まず、低い電圧を印加して検査を行い、絶縁抵抗が基準値以下であった場合、その部分が絶縁不良箇所であると判断し、絶縁抵抗が基準値以上であった場合にはこれらの回路間にのみ高い電圧を印加して検査を行う。   As described above, a general insulation test is performed by applying an arbitrary voltage. Also, if you do not want to burn fine insulation failure, first, apply a low voltage to inspect, and if the insulation resistance is below the reference value, determine that the part is an insulation failure location, When the insulation resistance is equal to or higher than the reference value, the inspection is performed by applying a high voltage only between these circuits.

本発明による検査では、まず、低い電圧を印加して検査を行い、絶縁抵抗が基準値以下であった場合、その部分が絶縁不良箇所であると判断し、絶縁抵抗が基準値以上であった場合にはこれらの回路間にのみ、高い電圧を印加して検査を行い、さらに、高い電圧で極性を変えた検査を行うため、従来の検査方法と比べて検査に時間がかかってしまう。   In the inspection according to the present invention, first, a low voltage is applied and the inspection is performed. When the insulation resistance is less than the reference value, it is determined that the portion is an insulation failure portion, and the insulation resistance is more than the reference value. In some cases, the inspection is performed by applying a high voltage only between these circuits, and further, the inspection is performed with the polarity changed at a high voltage. Therefore, the inspection takes time as compared with the conventional inspection method.

実験の結果では、一般的な絶縁検査を行った場合の検査時間を100とすると(実験では検査電圧は30Vに設定)、まず、低い電圧(30V)を印加して検査を行った後、高い電圧(実験では250Vに設定)を印加して検査を行った場合の検査時間は114であった。また、本発明による検査方法による検査時間は139であった(実験では低い電圧を30V、高い電圧を250V、高い電圧で極性を変えた電圧を−250Vに設定)。   As a result of the experiment, assuming that the inspection time when a general insulation inspection is performed is 100 (in the experiment, the inspection voltage is set to 30 V), first, a low voltage (30 V) is applied, and then the inspection is performed. The inspection time was 114 when the inspection was performed by applying a voltage (set to 250 V in the experiment). Further, the inspection time by the inspection method according to the present invention was 139 (in the experiment, the low voltage was set to 30V, the high voltage was set to 250V, and the voltage changed in polarity with the high voltage was set to -250V).

上記の結果からも明らかなように、本発明では、従来の絶縁検査方法と比べても、従来方法に比して検査工程が増大するが検査時間はそれほど大きくならず、従来では検出不可能であった微妙な絶縁不良も見逃すことなく、かつ当該絶縁不良箇所を焼損等の変質を生じさせることなく、的確に絶縁不良を発見することができる。   As is apparent from the above results, the present invention increases the number of inspection steps compared to the conventional insulation inspection method compared to the conventional insulation inspection method, but the inspection time is not so long and cannot be detected by the conventional method. It is possible to accurately detect the insulation failure without overlooking the subtle insulation failure and without causing deterioration such as burnout in the insulation failure portion.

本発明は、プリント配線板の検査に利用することができる。   The present invention can be used for inspection of a printed wiring board.

実施の形態に係るプリント配線板検査装置の構成を示す構成図。The block diagram which shows the structure of the printed wiring board inspection apparatus which concerns on embodiment. 検査対象回路を含むプリント配線板の一例を示す図。The figure which shows an example of the printed wiring board containing a test object circuit. 2つの回路が所望の品質を有する状態を示す図。The figure which shows the state in which two circuits have desired quality. 短絡する恐れを有する2つの回路を示す図。The figure which shows two circuits which have a possibility of short-circuiting. 本発明の実施の形態にかかるプリント配線板検査装置の絶縁検査の流れを示すフローチャート。The flowchart which shows the flow of the insulation test | inspection of the printed wiring board test | inspection apparatus concerning embodiment of this invention. 極性切換回路の一例を示す概略説明図。Schematic explanatory drawing which shows an example of a polarity switching circuit.

符号の説明Explanation of symbols

10 回路検査装置
11 プローブ
12 移動機構部
13 測定部
14 可変直流電源
15 記録部
16 制御部
17 プローブ支持部
18 検査対象回路を含むプリント配線基板
19〜27 検査対象回路
31 スイッチ
32 電流計
33 A/Dコンバータ
DESCRIPTION OF SYMBOLS 10 Circuit test | inspection apparatus 11 Probe 12 Movement mechanism part 13 Measurement part 14 Variable direct-current power supply 15 Recording part 16 Control part 17 Probe support part 18 Printed wiring board 19-27 containing a test object circuit 31 Test object circuit 31 Switch 32 Ammeter 33 A / D converter

Claims (4)

複数の検査電圧を用いて対象回路の検査をおこなう回路検査装置において、
第1の電圧を検査対象回路に印加する第1印加手段と、
前記第1の電圧より高い第2の電圧を前記検査対象回路に印加する第2印加手段と、
前記第2の電圧と同一の電圧でかつ異なる極性の電圧を印加する第3印加手段とを備えたことを特徴とする回路検査装置。
In a circuit inspection device that inspects a target circuit using a plurality of inspection voltages,
First application means for applying a first voltage to the circuit under test;
Second application means for applying a second voltage higher than the first voltage to the circuit to be inspected;
A circuit inspection apparatus comprising: third application means for applying a voltage having the same voltage as the second voltage but having a different polarity.
前記検査対象回路がプリント板上に形成されていることを特徴とする請求項1に記載の回路検査装置。   The circuit inspection apparatus according to claim 1, wherein the circuit to be inspected is formed on a printed board. 複数の検査電圧を用いて対象回路の検査を行う回路検査方法において、
第1の電圧を対象回路に印加することにより検査を行う段階と、
前記第1の電圧より高い第2の電圧を前記対象回路に印加して検査を行う段階と、
前記第2の電圧と同一の電圧でかつ異なる極性の電圧を前記対象回路に印加して、さらに検査を行う段階とを備えた回路検査方法。
In a circuit inspection method for inspecting a target circuit using a plurality of inspection voltages,
Performing an inspection by applying a first voltage to the target circuit;
Performing a test by applying a second voltage higher than the first voltage to the target circuit;
Applying a voltage having the same voltage as the second voltage and a different polarity to the target circuit, and further performing a test.
前記検査対象回路がプリント板上に形成されていることを特徴とする請求項3に記載の回路検査方法。   The circuit inspection method according to claim 3, wherein the circuit to be inspected is formed on a printed board.
JP2007039194A 2007-02-20 2007-02-20 Circuit inspection device and method Pending JP2008203077A (en)

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Cited By (8)

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Publication number Priority date Publication date Assignee Title
JP2011242137A (en) * 2010-05-14 2011-12-01 Hioki Ee Corp Circuit board inspection device and circuit board inspection method
JP2013083462A (en) * 2011-10-06 2013-05-09 Nidec-Read Corp Substrate checkup device
CN103516345A (en) * 2012-06-22 2014-01-15 株式会社东海理化电机制作所 Electrostatic capacitance detection device
JP2015227829A (en) * 2014-06-02 2015-12-17 日本電産リード株式会社 Substrate inspection device and substrate inspection method
JP2016003988A (en) * 2014-06-18 2016-01-12 日置電機株式会社 Inspection equipment
JP2019086459A (en) * 2017-11-09 2019-06-06 日置電機株式会社 Inspection apparatus and inspection method
CN111781425A (en) * 2020-08-07 2020-10-16 锦浪科技股份有限公司 Control method for insulation detection module of photovoltaic energy storage system
JP7041376B1 (en) 2020-10-05 2022-03-24 イビデン株式会社 Inspection method of printed wiring board

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JP2003158361A (en) * 2001-11-20 2003-05-30 Hitachi Chem Co Ltd Method of examining insulation reliability of printed wiring board

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JP2003158361A (en) * 2001-11-20 2003-05-30 Hitachi Chem Co Ltd Method of examining insulation reliability of printed wiring board

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011242137A (en) * 2010-05-14 2011-12-01 Hioki Ee Corp Circuit board inspection device and circuit board inspection method
JP2013083462A (en) * 2011-10-06 2013-05-09 Nidec-Read Corp Substrate checkup device
CN103516345A (en) * 2012-06-22 2014-01-15 株式会社东海理化电机制作所 Electrostatic capacitance detection device
US9261547B2 (en) 2012-06-22 2016-02-16 Kabushiki Kaisha Tokai Rika Denki Seisakusho Electrostatic capacitance detection device
JP2015227829A (en) * 2014-06-02 2015-12-17 日本電産リード株式会社 Substrate inspection device and substrate inspection method
JP2016003988A (en) * 2014-06-18 2016-01-12 日置電機株式会社 Inspection equipment
JP2019086459A (en) * 2017-11-09 2019-06-06 日置電機株式会社 Inspection apparatus and inspection method
CN111781425A (en) * 2020-08-07 2020-10-16 锦浪科技股份有限公司 Control method for insulation detection module of photovoltaic energy storage system
CN111781425B (en) * 2020-08-07 2022-05-17 锦浪科技股份有限公司 Control method for insulation detection module of photovoltaic energy storage system
JP7041376B1 (en) 2020-10-05 2022-03-24 イビデン株式会社 Inspection method of printed wiring board
JP2022060731A (en) * 2020-10-05 2022-04-15 イビデン株式会社 Inspection method for printed board

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