JP2008193581A5 - - Google Patents
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- Publication number
- JP2008193581A5 JP2008193581A5 JP2007028045A JP2007028045A JP2008193581A5 JP 2008193581 A5 JP2008193581 A5 JP 2008193581A5 JP 2007028045 A JP2007028045 A JP 2007028045A JP 2007028045 A JP2007028045 A JP 2007028045A JP 2008193581 A5 JP2008193581 A5 JP 2008193581A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- region
- lid
- frame
- bottom portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- 230000002265 prevention Effects 0.000 claims 8
- 239000002184 metal Substances 0.000 claims 7
- 238000004519 manufacturing process Methods 0.000 claims 5
- 238000009736 wetting Methods 0.000 claims 5
- 238000005219 brazing Methods 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- 239000011521 glass Substances 0.000 claims 2
- 239000011368 organic material Substances 0.000 claims 2
- 238000003892 spreading Methods 0.000 claims 2
- 238000005304 joining Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000009751 slip forming Methods 0.000 claims 1
Claims (11)
前記圧電振動片が固定される底部と、前記底部を囲む枠壁部と、を含み、前記底部の上方に開口を有するパッケージと、
前記底部及び前記枠壁部とオーバーラップして前記パッケージの前記開口を塞ぐ蓋と、
前記枠壁部の上端面と前記蓋の間に介在して前記枠壁部及び前記蓋を接合するろう材と、
を有し、
前記上端面は、金属から形成され、
前記蓋は、前記上端面との対向領域の少なくとも一部が金属から形成され、少なくとも前記対向領域以外の表面に、酸化物又は有機物からなる面と金属からなる枠状の凸面又は凹面との少なくともいずれか一つの面からなる、溶融した前記ろう材の濡れ拡がりを妨げる濡れ防止領域が形成されてなる圧電振動子。 A piezoelectric vibrating piece;
A package including a bottom portion to which the piezoelectric vibrating piece is fixed, and a frame wall portion surrounding the bottom portion, and having an opening above the bottom portion;
A lid that overlaps the bottom and the frame wall and closes the opening of the package;
A brazing material that is interposed between the upper end surface of the frame wall and the lid, and joins the frame wall and the lid;
Have
The upper end surface is formed of metal;
The lid, at least a portion of the opposing region between the upper end surface is formed of metal, the surface other than at least the opposing region, at least of the frame-like convex or concave comprising a surface and a metal of an oxide or an organic material A piezoelectric vibrator comprising a wet prevention region formed by any one surface and preventing the molten brazing material from spreading.
前記濡れ防止領域は、前記対向領域を避けて前記対向領域と隣接して形成されてなる圧電振動子。 The piezoelectric vibrator according to claim 1,
The wetting prevention region is a piezoelectric vibrator formed so as to be adjacent to the facing region while avoiding the facing region.
前記濡れ防止領域は、前記対向領域の一部から前記対向領域以外の前記表面に連続的に形成されてなる圧電振動子。 The piezoelectric vibrator according to claim 1,
The wetting prevention region is a piezoelectric vibrator formed continuously from a part of the opposing region to the surface other than the opposing region.
前記蓋は、金属からなる枠体を含み、
前記枠体が前記枠壁部の前記上端面と対向する圧電振動子。 The piezoelectric vibrator according to claim 1,
The lid includes a frame made of metal,
A piezoelectric vibrator in which the frame body faces the upper end surface of the frame wall portion.
前記枠体に、前記濡れ防止領域として前記凹面を構成する溝が形成されてなる圧電振動子。 The piezoelectric vibrator according to claim 4,
A piezoelectric vibrator in which a groove constituting the concave surface is formed as the wet prevention region in the frame.
前記溝は、前記枠体の前記対向領域を含む面とは反対側の面に形成されてなる圧電振動子。 The piezoelectric vibrator according to claim 5,
The groove is a piezoelectric vibrator formed on a surface of the frame opposite to a surface including the facing region.
前記溝は、前記枠体の前記底部と対向する領域に形成されてなる圧電振動子。 In the piezoelectric vibrator according to claim 5 or 6,
The groove is a piezoelectric vibrator formed in a region facing the bottom of the frame.
前記蓋は、前記枠体にはめ込まれたガラスを含み、
前記ガラスの表面が、前記酸化物としての前記濡れ防止領域である圧電振動子。 The piezoelectric vibrator according to any one of claims 4 to 7,
The lid includes glass fitted into the frame,
A piezoelectric vibrator in which a surface of the glass is the wetting prevention region as the oxide.
前記底部及び前記枠壁部とオーバーラップするように蓋を配置し、かつ、前記枠壁部の上端面と前記蓋の間にろう材を介在させ、前記ろう材の溶融及び凝固によって前記枠壁部及び前記蓋を接合して、前記パッケージの前記開口を前記蓋によって塞ぐ工程と、
を含み、
前記上端面は、金属から形成され、
前記蓋は、前記上端面との対向領域の少なくとも一部が金属から形成され、少なくとも前記対向領域以外の表面に、酸化物又は有機物からなる面と金属からなる枠状の凸面又は凹面との少なくともいずれか一つの面からなる、溶融した前記ろう材の濡れ拡がりを防ぐ濡れ防止領域が形成されてなる圧電振動子の製造方法。 Preparing a package including a bottom portion and a frame wall portion surrounding the bottom portion and having an opening above the bottom portion, and fixing a piezoelectric vibrating piece to the bottom portion;
A lid is disposed so as to overlap the bottom portion and the frame wall portion, and a brazing material is interposed between the upper end surface of the frame wall portion and the lid, and the frame wall is melted and solidified. Joining the portion and the lid, and closing the opening of the package with the lid;
Including
The upper end surface is formed of metal;
The lid, at least a portion of the opposing region between the upper end surface is formed of metal, the surface other than at least the opposing region, at least of the frame-like convex or concave comprising a surface and a metal of an oxide or an organic material A method for manufacturing a piezoelectric vibrator comprising a wet prevention region formed by any one surface and preventing the molten brazing material from spreading out.
前記濡れ防止領域は、前記対向領域を避けて前記対向領域と隣接して形成されてなる圧電振動子の製造方法。 In the manufacturing method of the piezoelectric vibrator according to claim 9 ,
The method of manufacturing a piezoelectric vibrator, wherein the wetting prevention region is formed adjacent to the facing region while avoiding the facing region.
前記濡れ防止領域は、前記対向領域の一部から前記対向領域以外の前記表面に連続的に形成されてなる圧電振動子の製造方法。 In the manufacturing method of the piezoelectric vibrator according to claim 9 ,
The method of manufacturing a piezoelectric vibrator in which the wetting prevention region is continuously formed from a part of the facing region to the surface other than the facing region.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007028045A JP2008193581A (en) | 2007-02-07 | 2007-02-07 | Piezoelectric vibrator, and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007028045A JP2008193581A (en) | 2007-02-07 | 2007-02-07 | Piezoelectric vibrator, and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008193581A JP2008193581A (en) | 2008-08-21 |
| JP2008193581A5 true JP2008193581A5 (en) | 2010-03-18 |
Family
ID=39753212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007028045A Withdrawn JP2008193581A (en) | 2007-02-07 | 2007-02-07 | Piezoelectric vibrator, and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008193581A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5476964B2 (en) | 2009-12-09 | 2014-04-23 | セイコーエプソン株式会社 | Vibrators, oscillators, gyros and electronic equipment |
| ITTO20110876A1 (en) | 2011-09-30 | 2013-03-31 | Stmicroelectronics Malta Ltd | WELDING METHOD OF A HOOD WITH A SUPPORT LAYER |
| JP2019047309A (en) * | 2017-09-01 | 2019-03-22 | 株式会社村田製作所 | Piezoelectric vibrator |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002151614A (en) * | 2000-11-10 | 2002-05-24 | Kyocera Corp | Package for accommodating semiconductor element |
| JP4384348B2 (en) * | 2000-11-24 | 2009-12-16 | 京セラ株式会社 | Package for storing semiconductor elements |
| JP4114149B2 (en) * | 2003-10-22 | 2008-07-09 | セイコーエプソン株式会社 | Piezoelectric device, manufacturing method thereof, mobile phone device using piezoelectric device, and electronic apparatus using piezoelectric device |
| JP4292575B2 (en) * | 2003-11-18 | 2009-07-08 | セイコーエプソン株式会社 | Piezoelectric device and method of manufacturing lid |
| JP4494849B2 (en) * | 2004-04-12 | 2010-06-30 | シチズンファインテックミヨタ株式会社 | Sealing plate with brazing material for package and manufacturing method thereof |
| JP2006114601A (en) * | 2004-10-13 | 2006-04-27 | Matsushita Electric Ind Co Ltd | Package for lid body and electronic component |
-
2007
- 2007-02-07 JP JP2007028045A patent/JP2008193581A/en not_active Withdrawn
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