JP2008193581A - Piezoelectric vibrator, and manufacturing method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator and a manufacturing method thereof such that a lid is prevented from breaking and/or cracking and the lid and a package are joined with a small width to prevent a wax material from spreading. <P>SOLUTION: A piezoelectric vibrator has a bottom portion 62 where a piezoelectric vibration chip 1 is fixed and a frame wall portion 64 enclosing the bottom portion 62, and has the package 60 having an opening above the bottom portion 62. The lid 72 overlaps the bottom portion 62 and frame wall portion 64 to close the opening of the package 60. The wax material 78 is interposed between an upper end surface 66 of the frame wall portion 64 and the lid 72 to join the frame wall portion 64 and lid 72. The upper end surface 66 is made of metal. The lid 72 is characterized in that at least portion of a region 82 opposed to the upper end surface 66 is made of metal and a leak prevention region 80 which comprises a surface made of oxide or an organic substance and one of frame-shaped projection and recess surfaces made of metal and prevents wet spreading of a fused solder material 78 is formed on a sealing space side inside at least the opposed region 82. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a piezoelectric vibrator and a manufacturing method thereof.

  It is known that a piezoelectric vibrating piece is fixed in a package and sealed with a metal lid (Patent Document 1). FIG. 8 is a diagram showing a piezoelectric vibrator according to Patent Document 1. As shown in FIG. The piezoelectric vibrator includes a package member 911, a lid 912, and a brazing material 919 that joins the package member 911 and the lid 912. The lid 912 has a concave portion 918 corresponding to the convex portion 915 of the package member 911. The brazing material 919 is disposed on the outer periphery of the convex portion 915 of the package member 911, and the brazing material 919 is melted so that the lid 912 and the package 912 are packaged. The member 911 is joined.

Conventionally, since the lid is joined to the package by a brazing material, there is a drawback that the surface of the metal lid is spread. In addition, in joining using a resin adhesive, since it is inferior to airtightness, vacuum sealing cannot be performed. Alternatively, it is also known that a glass lid and a package are bonded using low-melting glass (Patent Document 2). However, since the low melting point glass has low strength, a wide bonding width is required, which is not suitable for downsizing of the package. In addition, if the entire lid is made of glass, there is a problem that cracks occur. Patent Document 3 describes that the flow of the brazing material is obstructed by the rough surface, but the effect of the rough surface is ineffective because there are a portion that obstructs the flow and a portion that does not obstruct the flow when observed closely. It is enough.
JP-A-10-335970 JP 2006-196932 A JP 2005-302990 A

  An object of the present invention is to prevent the lid from cracking and cracking, joining the lid and the package with a small width, and preventing the brazing material from spreading.

(1) The piezoelectric vibrator according to the present invention is
A piezoelectric vibrating piece;
A package including a bottom portion to which the piezoelectric vibrating piece is fixed and a frame wall portion surrounding the bottom portion, and having an opening above the bottom portion;
A lid that overlaps the bottom and the frame wall and closes the opening of the package;
A brazing material that is interposed between the upper end surface of the frame wall and the lid, and joins the frame wall and the lid;
Have
The upper end surface is formed of metal;
In the lid, at least a part of a region facing the upper end surface is made of metal, and at least one of a surface made of an oxide or an organic substance and a frame-like convex surface or concave surface made of metal on a surface other than the facing region. A wettability prevention region that prevents the spread of the molten brazing filler metal from one surface is formed. According to the present invention, since at least a part of the lid is made of metal, it is possible to prevent cracks and cracks, and since the brazing material is used for joining the lid and the package, the joining area can be reduced. Moreover, the wetting and spreading of the brazing material is prevented by the wetting prevention region that prevents the wetting and spreading of the molten brazing material. When the wetting prevention region is a convex surface or a concave surface, it has a frame shape, so that it is possible to completely prevent the brazing material from spreading into the region surrounded by the frame. Note that the surface of the lid other than the region facing the upper end surface of the frame wall portion is opposed to the region (or the region facing the bottom) inside (or the center of the lid) the facing region on the surface on the sealing space side. It includes a surface opposite to the surface including the region (surface on the sealing space side) (or a surface opposite to the sealing space) and a side surface.
(2) In this piezoelectric vibrator,
The wetting prevention region may be formed adjacent to the facing region while avoiding the facing region.
(3) In this piezoelectric vibrator,
The wetting prevention region may be continuously formed on a part of the surface other than the facing region from a part of the facing region.
(4) In this piezoelectric vibrator,
The lid includes a frame made of metal,
The frame may be opposed to the upper end surface of the frame wall portion.
(5) In this piezoelectric vibrator,
The frame body may be formed with a groove constituting the concave surface as the wetting prevention region.
(6) In this piezoelectric vibrator,
The said groove | channel may be formed in the surface on the opposite side to the surface containing the said opposing area | region of the said frame.
(7) In this piezoelectric vibrator,
The groove may be formed in a region facing the bottom of the frame.
(8) In this piezoelectric vibrator,
The lid includes glass fitted into the frame,
The surface of the glass may be the wetting prevention region as the oxide.
(9) In this piezoelectric vibrator,
The boundary between the glass and the frame body may overlap the side on the bottom side of the upper end surface of the frame wall portion.
(10) In this piezoelectric vibrator,
The edge part of the said glass may be provided so that it may overlap with a part of said upper end surface of the said frame wall part.
(11) A method for manufacturing a piezoelectric vibrator according to the present invention includes:
Preparing a package including a bottom portion and a frame wall portion surrounding the bottom portion and having an opening above the bottom portion, and fixing a piezoelectric vibrating piece to the bottom portion;
A lid is disposed so as to overlap the bottom portion and the frame wall portion, and a brazing material is interposed between the upper end surface of the frame wall portion and the lid, and the frame wall is melted and solidified. Joining the portion and the lid, and closing the opening of the package with the lid;
Including
The upper end surface is formed of metal;
In the lid, at least a part of a region facing the upper end surface is made of metal, and at least one of a surface made of an oxide or an organic substance and a frame-like convex surface or concave surface made of metal on a surface other than the facing region. A wettability prevention region that prevents the spread of the molten brazing filler metal from one surface is formed. According to the present invention, since at least a part of the lid is made of metal, it is possible to prevent cracks and cracks, and since the brazing material is used for joining the lid and the package, the joining area can be reduced. Further, the wetting and spreading of the brazing material can be prevented by the wetting prevention region that prevents the molten brazing material from spreading and wetting. In addition, when the wetting prevention region is a convex surface or a concave surface, since it has a frame shape, wetting of the brazing material to the region surrounded by the frame can be completely prevented. In addition, the surface of the lid other than the region facing the upper end surface of the frame wall portion is opposed to the region (or the region facing the bottom) inside the facing region (or the region facing the bottom) of the surface on the sealing space side. It includes a surface opposite to the surface including the region (surface on the sealing space side) (or a surface opposite to the sealing space) and a side surface.
(12) In this method of manufacturing a piezoelectric vibrator,
The wetting prevention region may be formed adjacent to the facing region while avoiding the facing region.
(13) In this method of manufacturing a piezoelectric vibrator,
The wetting prevention region may be continuously formed on a part of the surface other than the facing region from a part of the facing region.

(Piezoelectric vibrating piece)
FIG. 1A is a plan view showing a piezoelectric vibrating piece (tuning fork type piezoelectric vibrating piece) included in a piezoelectric vibrator according to an embodiment of the present invention. Note that the bottom view of the piezoelectric vibrating piece 1 appears symmetrically with the plan view, and thus description thereof is omitted. The piezoelectric vibrating piece 1 is made of a piezoelectric material such as quartz, lithium tantalate, or lithium niobate. The piezoelectric vibrating reed 1 includes a base 10 and a pair of vibrating arms 12 extending from the base 10.

  FIG. 1B is an enlarged cross-sectional view taken along the line IB-IB of the piezoelectric vibrating piece shown in FIG. The vibrating arm 12 has front and back surfaces 14 and 16 facing opposite to each other, and first and second side surfaces 18 and 20 that connect the front and back surfaces 14 and 16 on both sides. When the piezoelectric vibrating reed 1 is made of quartz, the front and back surfaces 14 and 16 face the Z-axis direction, the first side face 18 faces the + direction of the X axis, and the second side face 20 faces the X axis. -Configure to face the direction.

  The first side surface 18 of the vibrating arm 12 on one side (left side in FIG. 1A) and the second side surface 20 of the vibrating arm 12 on the other side (right side in FIG. 1A) are arranged in parallel. . The first side surface 18 is formed in a mountain shape that increases in the center direction of the thickness of the vibrating arm 12 defined by the distance between the front and back surfaces 14 and 16. The height of the mountain shape drawn by the first side face 18 is more than 0% and not more than 12.5% of the width of the vibrating arm 12 defined by the distance between the first and second side faces 18 and 20.

  The resonating arm 12 is wide at the base portion connected to the base portion 10 toward the base portion 10 and is connected to the base portion 10 with a wide width, so that the rigidity is high. The vibrating arm 12 includes a first taper portion 22 whose width defined by the distance between the first and second side surfaces 18 and 20 becomes narrower from the base portion 10 toward the tip. By forming the first taper portion 22, the vibrating arm 12 is easily vibrated. The vibrating arm 12 includes a second taper portion 24 whose width increases from the first taper portion 22 toward the tip at a position closer to the tip than the first taper portion 22. Since the 2nd taper part 24 fulfill | performs the function of a weight, it can make a vibration frequency low. The vibrating arm 12 is formed so that the width changing point to which the first and second tapered portions 22 and 24 are connected is located closer to the tip than the long groove 26.

  In the vibrating arm 12, long grooves 26 extending in the longitudinal direction are formed on the front and back surfaces 14 and 16, respectively. Since the long arm 26 makes the vibrating arm 12 easy to move and vibrates efficiently, the CI value can be lowered. The long groove 26 has a length of 50 to 70% of the length of the vibrating arm 12. The long groove 26 has a width of 60 to 90% of the width of the vibrating arm 12.

  The long groove 26 includes a first inner surface 28 that extends back to back with the first side surface 18, and a second inner surface 30 that extends back to back with the second side surface 20. The angle of the first inner surface 28 with respect to the front and back surfaces 14 and 16 is closer to the vertical than the second inner surface 30. The first inner surface 28 may be a flat surface. The second inner surface 30 may also be a flat surface, but in the example shown in FIG. 1B, surfaces with different angles are connected. The first and second side surfaces 18 and 20 have an angle with respect to the front and back surfaces 14 and 16 (the angle of the portion connected to the front and back surfaces 14 and 16) closer to the vertical than the second inner surface 30.

  The piezoelectric vibrating reed 1 is a pair of support arms that extend in directions opposite to each other in a direction intersecting with the direction in which the pair of vibrating arms 12 extend from the base 10, and bend in the direction in which the pair of vibrating arms 12 extend. 32 is further included. By bending, the support arm 32 is reduced in size. The support arm 32 is a part that is attached to the package 60, and the vibration arm 12 and the base 10 are brought into a floating state by the attachment by the support arm 32.

  A pair of cuts 34 are formed in the base 10 so as to face each other so that a shape confined to the same surface as the front and back surfaces 14 and 16 of the vibrating arm 12 appears. The pair of cuts 34 is formed in the base 10 adjacent to the pair of support arms 32 on the side where the pair of support arms 32 extends from the base 10 and bends. Since the transmission of the vibration of the vibrating arm 12 is cut off by the notch 34, the transmission of vibration to the outside (vibration leakage) through the base 10 and the support arm 32 can be suppressed, and an increase in the CI value can be prevented. . As the length (depth) of the notch 34 is longer (deeper) within a range in which the strength of the base 10 can be secured, the vibration leakage suppressing effect is larger. The width between the pair of cuts 34 (the width of the portion sandwiched between the pair of cuts 34) may be smaller than the distance between the first and second side surfaces 18 and 20 of the pair of vibrating arms 12 facing each other. However, the distance may be smaller or larger than the distance between the first and second side surfaces 18 and 20 of the pair of vibrating arms 12 facing each other.

  An excitation electrode film 40 is formed on the vibrating arm 12. The excitation electrode film 40 may have a multilayer structure including a base Cr film having a thickness of 100 to 300 mm and an Au film having a thickness of 200 to 500 mm formed on the Cr film. It is known that the Cr film has high adhesion to quartz, and the Au film has low electrical resistance and is difficult to oxidize. The excitation electrode film 40 is formed on the first and second side electrode films 42 and 44 formed on the first and second side faces 18 and 20, respectively, and on the first and second inner face 28 and 30 respectively. First and second inner surface electrode films 46 and 48. The excitation electrode film 40 constitutes first and second excitation electrodes 50 and 52.

  The first excitation electrode 50 includes first and second inner surface electrode films 46 and 48 formed in the long groove 26. The first and second inner surface electrode films 46 and 48 formed in one long groove 26 are continuously formed and electrically connected to each other. The first and second inner surface electrode films 46 and 48 formed in the long groove 26 on one side (for example, the front surface) of the front and back surfaces 14 and 16, and the long groove 26 on the other side (for example, the back surface) of the front and back surfaces 14 and 16. The first and second inner surface electrode films 46 and 48 are electrically connected. That is, the pair of first excitation electrodes 50 formed on the front and back surfaces 14 and 16 are electrically connected. A pair of first excitation electrodes 50 formed on one vibrating arm 12 is connected to extraction electrodes 54 formed on the front and back surfaces 14 and 16 on the base 10, respectively, and these extraction electrodes 54 are connected to the other vibration electrode. Electrical connection is established by connecting to the first or second side electrode film 42, 44 of the arm 12.

  The second excitation electrode 52 includes first and second side electrode films 42 and 44. The first and second side electrode films 42 and 44 are electrically connected. The electrical connection is made by a connection electrode 56 formed on at least one (or both) of the front and back surfaces 14 and 16 at a portion (for example, a tip portion) of the vibrating arm 12 where the long groove 26 is not formed.

  The first excitation electrode 50 formed on one vibrating arm 12 and the second excitation electrode 52 formed on the other vibrating arm 12 are electrically connected by a lead electrode 54 on the base 10. . The extraction electrode 54 is formed up to the support arm 32 arranged next to the vibrating arm 12 on which the second excitation electrode 52 is formed. The extraction electrode 54 is formed on the front and back surfaces (or further side surfaces) of the support arm 32. On the support arm 32, the extraction electrode 54 can be an electrical connection portion with the outside.

  In the present embodiment, a voltage is applied between the first side electrode film 42 and the first inner surface electrode film 46, and a voltage is applied between the second side electrode film 44 and the second inner surface electrode film 48. Is applied, the one side end of the vibrating arm 12 is extended, the other side end is contracted, and the vibrating arm 12 is bent to vibrate. In other words, in one vibrating arm 12, a voltage is applied between the first and second excitation electrodes 50 and 52 to expand and contract the first and second side surfaces 18 and 20 of the vibrating arm 12. 12 is vibrated. It is known that the CI value of the first and second excitation electrodes 50 and 52 decreases as the length increases to 70% of the vibrating arm 12.

  FIG. 2 is a diagram for explaining the operation of the piezoelectric vibrating piece according to the present embodiment. As shown in FIG. 2, a voltage is applied to the first and second excitation electrodes 50 and 52 of one vibrating arm 12, and a voltage is applied to the first and second excitation electrodes 50 and 52 of the other vibrating arm 12. Applied. Here, the first excitation electrode 50 of one (left side) vibrating arm 12 and the second excitation electrode 52 of the other (right side) vibrating arm 12 have the same potential (+ potential in the example of FIG. 2), and one ( The first excitation so that the second excitation electrode 52 of the left (vibrating) arm 12 and the first excitation electrode 50 of the other (right) vibrating arm 12 have the same potential (-potential in the example of FIG. 2). The electrode 50 and the second excitation electrode 52 are connected to an AC power supply by a cross wiring, and an alternating voltage is applied as a drive voltage. An electric field is generated by the applied voltage as indicated by an arrow in FIG. 2, whereby the vibrating arms 12 are excited so as to be in opposite phase vibrations (so that the distal ends of the vibrating arms 12 approach and separate from each other). Bends and vibrates. The alternating voltage is adjusted so as to vibrate in the basic mode.

(First embodiment)
3A to 3C are diagrams for explaining the piezoelectric vibrator and the manufacturing method thereof according to the first embodiment of the present invention. In the present embodiment, the above-described piezoelectric vibrating piece 1 is prepared. A metal film 58 as a weight is formed on the vibrating arm 12 of the piezoelectric vibrating piece 1. In addition to this, a package 60 is prepared. The package 60 includes a bottom portion 62 and a frame wall portion 64 joined thereto, forms a sealing space for housing the piezoelectric vibrating reed 1, and has an opening above the bottom portion 62. The upper end surface 66 of the frame wall portion 64 is made of metal. The package 60 may be entirely formed of metal, but when the package 60 is formed of non-metal such as ceramic, the upper end surface 66 of the frame wall 64 is made of metal by plating or the like. Au or W is used as the metal of the upper end surface 66 of the frame wall portion 64. A through hole 68 for evacuation is formed in the bottom 62. Further, when the bottom 62 is formed of two layers of upper and lower ceramics, a through hole 68 is formed in the lower layer ceramic of the bottom 62, and the upper layer ceramic closes a joining region with the frame wall portion 64 and a part of the through hole 68. It is formed in a frame shape that leaves a region.

  As shown in FIG. 3A, the piezoelectric vibrating reed 1 is fixed to the bottom 62 of the package 60. Specifically, the support arm 32 is fixed to the package 60 with the adhesive 70 so that the vibrating arm 12 is lifted from the package 60. The bottom 62 has a low area facing the tip of the vibrating arm 12 so that the vibrating arm 12 does not contact the bottom 62. A conductive adhesive is used as the adhesive 70 and is electrically connected to the extraction electrode 54 (see FIG. 1) of the support arm 32. The adhesive 70 is provided on a wiring pattern (not shown) formed on the bottom 62 of the package 60 and is electrically connected. If the wiring pattern extends to the outside of the package 60, the piezoelectric resonator element 1 can be electrically connected to the outside of the package 60.

  Also, a lid 72 is prepared. The lid 72 includes a frame body 74 made of metal. Since at least a part of the lid 72 is made of metal, cracking / cracking can be prevented. Glass 76 is fitted into the frame 74. The glass 76 is an oxide. As a modified example, an organic resin may be fitted into the frame 74. The lid 72 has a wetting prevention area 80 that prevents the molten brazing material 78 from spreading out. The wetting prevention region 80 is a surface made of an oxide (for example, glass 76) or an organic substance (resin). The portion constituting the wetting prevention region 80 is transparent.

  Between the upper end surface 66 of the frame wall portion 64 and the lid 72, a brazing material 78 (for example, an Au—Sn alloy known to have a relatively low melting point or a melting point higher than an Au—Sn alloy, reflow of lead-free solder) The lid 72 is disposed so as to overlap the bottom portion 62 and the frame wall portion 64 with an Au—Ge alloy that does not melt at a low temperature applied at the time. The frame body 74 is opposed to the upper end surface 66 of the frame wall portion 64. In the lid 72, at least a part of the region 82 facing the upper end surface 66 (that is, the frame body 74) is made of metal.

  When the brazing material 78 is melted (see FIG. 3B) and solidified again, the frame wall portion 64 and the lid 72 can be joined. Thus, the opening of the package 60 can be sealed with the lid 72 and sealed. Since the brazing material 78 is used for joining the lid 72 and the package 60, hermetic sealing with a small joining width can be performed. The lid 72 has at least a surface (upper surface) opposite to the region 82 facing the upper end surface 66 of the frame wall portion 64, and prevents the wetting and spreading of the molten brazing material 78 made of a surface made of oxide or organic matter. Region 80 is formed. The surface of the glass 76 is a wetting prevention region 80 as an oxide. By this wetting prevention region 80, wetting and spreading of the brazing material 78 can be prevented. Further, the wetting prevention region 80 is formed adjacent to the facing region 82, avoiding the facing region 82 with the frame wall portion 64. That is, on the sealing space side of the package 60, the boundary between the surface of the glass 76 (wetting prevention region 80) and the frame body 74 overlaps the side on the bottom 62 side of the upper end surface 66 of the frame wall portion 64. The melted brazing material 78 stops inside the package 60 so as not to exceed the side on the bottom 62 side of the upper end surface 66 of the frame wall portion 64. Further, the glass 76 is exposed on the surface of the package 60 opposite to the sealed space, and the exposed surface also becomes the wetting prevention region 80. Therefore, the melted brazing material 78 goes around the outside of the frame body 74 and stops before the glass 76. That is, the brazing material 78 covers the entire surface of the frame 74 other than the contact surface with the glass 76. According to this, the frame 74 can be protected by the brazing material 78, and the process of covering the frame 74 is naturally performed in the joining process of the lid 72.

  Subsequently, the sealing space of the package 60 is evacuated through the through hole 68 to close the through hole 68 as shown in FIG. Alternatively, gas may be injected into the sealed space of the package 60. Further, a part of the metal film 58 as a weight is removed, the weight of the vibrating arm 12 is reduced, and the vibration frequency of the vibrating arm 12 is adjusted. The removal of the metal film 58 may be performed by a laser. In that case, the metal film 58 may be recognized through the glass 76. FIG. 3C shows a piezoelectric vibrator manufactured through the above process.

  The piezoelectric vibrator according to this embodiment includes a package 60 that includes a bottom portion 62 to which the above-described piezoelectric vibrating piece 1 is fixed and a frame wall portion 64 that surrounds the bottom portion 62, and has an opening above the bottom portion 62. . The lid 72 covers the opening of the package 60 so as to overlap the bottom portion 62 and the frame wall portion 64. A brazing material 78 is interposed between the upper end surface 66 of the frame wall portion 64 and the lid 72 to join the frame wall portion 64 and the lid 72. The upper end surface 66 is made of metal. The lid 72 includes a frame body 74 made of metal. The frame body 74 faces the upper end surface 66 of the frame wall portion 64. In the lid 72, at least a part of a region 82 facing the upper end surface 66 of the frame wall portion 64 is made of metal. The lid 72 has at least a surface (upper surface) opposite to the region 82 facing the upper end surface 66 of the frame wall portion 64, and prevents the wetting and spreading of the molten brazing material 78 made of a surface made of oxide or organic matter. Region 80 is formed. The wetting prevention area 80 is formed adjacent to the facing area 82 while avoiding the facing area 82 with the upper end surface 66 of the frame wall portion 64. The lid 72 includes a glass 76 fitted into the frame body 74. The surface of the glass 76 is a wetting prevention region 80 as an oxide. The boundary between the glass 76 and the frame body 74 overlaps the side of the upper end surface 66 of the frame wall portion 64 on the bottom 62 side. The piezoelectric vibrator includes contents that can naturally be derived from the description of the manufacturing method described above.

  According to the present embodiment, since at least a part of the lid 72 is made of metal, it is possible to prevent cracking and cracking, and the brazing material 78 is used for joining the lid 72 and the package 60, so that the joining width is reduced. Can be small. Further, the wetting and spreading of the brazing material 78 is prevented by the wetting prevention region 80 that prevents the wetting and spreading of the molten brazing material 78.

(Second Embodiment)
4 and 5 are a cross-sectional view and a plan view, respectively, for explaining the piezoelectric vibrator according to the second embodiment of the present invention. In the present embodiment, a wetting prevention region 180 that is formed of a frame-like concave surface and prevents wetting and spreading of the molten brazing material 178 is formed. The wetting prevention region 180 is formed on the outer surface of the package 60 opposite to the sealing space. A groove that forms a concave surface as a wet prevention region 180 is formed in the frame body 174. The groove may be any of a U-shaped groove, a round groove, a square groove, and a V groove. The groove is formed on the surface of the frame body 174 opposite to the surface including the facing region 182 with the upper end surface 66 of the frame wall portion 64. Alternatively, the groove may be formed on the side surface of the frame body 174. The wetting prevention region 180 may be formed by a convex surface instead of the concave surface. In that case, a ridge is formed instead of the groove. Even if the wetting prevention region 180 is a convex surface or a concave surface, since it has a frame shape, wetting of the brazing material 178 to the region surrounded by the frame can be completely prevented. About the structure of other than that and a manufacturing method, the content demonstrated in 1st Embodiment corresponds.

(Third embodiment)
FIG. 6 is a diagram for explaining a piezoelectric vibrator according to a third embodiment of the present invention. In the present embodiment, a wetting prevention region 280 made of a frame-shaped concave surface and preventing wetting and spreading of the molten brazing material 278 is formed on the inner surface of the package 60 on the sealed space side. A part of the frame body 274 protrudes inward from the frame wall portion 64, and a groove constituting a concave surface is formed as a wetting prevention region 280 in a region facing the bottom portion 62 of the protruding portion. The groove may be any of a U-shaped groove, a round groove, a square groove, and a V groove. The wetting prevention region 280 may be formed adjacent to the facing region 282 while avoiding the facing region 282 with the frame wall portion 64. The wetting prevention region 280 may be formed by a convex surface instead of the concave surface. In that case, a ridge is formed instead of the groove. Even if the wetting prevention region 280 is a convex surface or a concave surface, since it has a frame shape, wetting of the brazing material 278 to the region surrounded by the frame can be completely prevented. Therefore, the glass 276 can be made smaller than the example shown in FIG. About the structure and manufacturing method other than that, the content demonstrated by 1st or 2nd embodiment corresponds. In the prior art of FIG. 8, the brazing material 919 is wetted and spreads between the convex portion 915 and the concave portion 918.

(Fourth embodiment)
FIG. 7 is a diagram for explaining a piezoelectric vibrator according to a fourth embodiment of the invention. This embodiment is different from the second embodiment (FIG. 4) in that the end portion of the glass 376 is provided so as to overlap a part of the upper end surface 66 of the frame wall portion 364. Yes. That is, the wetting prevention region 380 is continuously formed from a part of the facing region 382 to the frame wall 64 to the inside of the facing region 382 (the center side of the lid 372). According to this, the brazing material 378 is provided so as not to reach the end of the upper end surface 66 of the frame wall 64 on the bottom 62 side due to the presence of the wetting prevention region 380. In that region, a gap is formed between the glass 376 and the frame wall portion 64. About the structure and manufacturing method other than that, the content demonstrated by 1st or 2nd embodiment corresponds.

  The present invention is not limited to the above-described embodiments, and various modifications can be made. For example, the present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same purposes and results). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

1A is a plan view showing a piezoelectric vibrating piece included in the piezoelectric vibrator according to the embodiment of the present invention, and FIG. 1B is an IB of the piezoelectric vibrating piece shown in FIG. FIG. FIG. 2 is a diagram for explaining the operation of the piezoelectric vibrating piece according to the present embodiment. 3A to 3C are diagrams for explaining the piezoelectric vibrator and the manufacturing method thereof according to the first embodiment of the present invention. FIG. 4 is a cross-sectional view for explaining a piezoelectric vibrator according to a second embodiment of the present invention. FIG. 5 is a plan view for explaining a piezoelectric vibrator according to a second embodiment of the present invention. FIG. 6 is a diagram for explaining a piezoelectric vibrator according to a third embodiment of the present invention. FIG. 7 is a diagram for explaining a piezoelectric vibrator according to a fourth embodiment of the invention. FIG. 8 is a diagram illustrating a piezoelectric vibrator according to a conventional technique.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Piezoelectric vibration piece, 10 ... Base part, 12 ... Vibrating arm, 14, 16 ... Front and back, 18 ... 1st side surface, 20 ... 2nd side surface, 22 ... 1st taper part, 24 ... 2nd taper 26: long groove 28 ... first inner surface 30 ... second inner surface 32 ... support arm 34 ... notch 40 ... excitation electrode film 42 ... first side electrode film 44 ... second side Electrode film 46... First inner electrode film 48. Second inner electrode film 50. First excitation electrode 52. Second excitation electrode 54. Electrode 56. Connection electrode 58. Metal film , 60 ... package, 62 ... bottom part, 64 ... frame wall part, 66 ... upper end surface, 68 ... through hole, 70 ... adhesive, 72 ... lid, 74 ... frame body, 76 ... glass, 78 ... brazing material, 80 ... Wetting prevention area 82 ... Opposing area 174 ... Frame body 180 ... Wetting Stop region 182 ... opposed region 274 ... frame, 276 ... glass, 280 ... wetting prevention region, 282 ... opposed region 364 ... frame wall, 376 ... glass, 380 ... wetting prevention region, 382 ... opposed region

Claims (13)

A piezoelectric vibrating piece;
A package including a bottom portion to which the piezoelectric vibrating piece is fixed and a frame wall portion surrounding the bottom portion, and having an opening above the bottom portion;
A lid that overlaps the bottom and the frame wall and closes the opening of the package;
A brazing material that is interposed between the upper end surface of the frame wall and the lid, and joins the frame wall and the lid;
Have
The upper end surface is formed of metal;
In the lid, at least a part of a region facing the upper end surface is made of metal, and at least one of a surface made of an oxide or an organic substance and a frame-like convex surface or concave surface made of metal on a surface other than the facing region. A piezoelectric vibrator having a wettability prevention region that prevents the spread of the melted brazing filler metal from one surface. The piezoelectric vibrator according to claim 1,
The wetting prevention region is a piezoelectric vibrator formed so as to be adjacent to the facing region while avoiding the facing region. The piezoelectric vibrator according to claim 1,
The wetting prevention region is a piezoelectric vibrator formed continuously from a part of the opposing region to the surface other than the opposing region. The piezoelectric vibrator according to claim 1,
The lid includes a frame made of metal,
A piezoelectric vibrator in which the frame body faces the upper end surface of the frame wall portion. The piezoelectric vibrator according to claim 4,
A piezoelectric vibrator in which a groove constituting the concave surface is formed as the wet prevention region in the frame. The piezoelectric vibrator according to claim 5,
The said groove | channel is a piezoelectric vibrator formed in the surface on the opposite side to the surface containing the said opposing area | region of the said frame. In the piezoelectric vibrator according to claim 5 or 6,
The groove is a piezoelectric vibrator formed in a region facing the bottom of the frame. The piezoelectric vibrator according to any one of claims 4 to 7,
The lid includes glass fitted into the frame,
A piezoelectric vibrator in which a surface of the glass is the wetting prevention region as the oxide. The piezoelectric vibrator according to claim 8, wherein
A piezoelectric vibrator in which a boundary between the glass and the frame is overlapped with a side on the bottom side of the upper end surface of the frame wall. The piezoelectric vibrator according to claim 8, wherein
A piezoelectric vibrator in which an end portion of the glass is provided so as to overlap a part of the upper end surface of the frame wall portion. Preparing a package including a bottom portion and a frame wall portion surrounding the bottom portion and having an opening above the bottom portion, and fixing a piezoelectric vibrating piece to the bottom portion;
A lid is disposed so as to overlap the bottom portion and the frame wall portion, and a brazing material is interposed between the upper end surface of the frame wall portion and the lid, and the frame wall is melted and solidified. Joining the portion and the lid, and closing the opening of the package with the lid;
Including
The upper end surface is formed of metal;
In the lid, at least a part of a region facing the upper end surface is made of metal, and at least one of a surface made of an oxide or an organic substance and a frame-like convex surface or concave surface made of metal on a surface other than the facing region. A method for manufacturing a piezoelectric vibrator, comprising a wettability prevention region that prevents the spread of the melted brazing filler metal from one surface. In the manufacturing method of the piezoelectric vibrator according to claim 11,
The method of manufacturing a piezoelectric vibrator, wherein the wetting prevention region is formed adjacent to the facing region while avoiding the facing region. In the manufacturing method of the piezoelectric vibrator according to claim 11,
The method of manufacturing a piezoelectric vibrator in which the wetting prevention region is continuously formed from a part of the facing region to the surface other than the facing region.