JP2008180706A - Defect detection device for optically transparent film - Google Patents

Defect detection device for optically transparent film Download PDF

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JP2008180706A
JP2008180706A JP2007332903A JP2007332903A JP2008180706A JP 2008180706 A JP2008180706 A JP 2008180706A JP 2007332903 A JP2007332903 A JP 2007332903A JP 2007332903 A JP2007332903 A JP 2007332903A JP 2008180706 A JP2008180706 A JP 2008180706A
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light transmissive
film
observation
transmissive film
auxiliary member
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JP4989453B2 (en
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Mitsuo Furukawa
満夫 古川
Masakazu Aoi
応和 青井
Hiroki Watanabe
寛基 渡辺
Hirohiko Tougeyama
裕彦 峠山
Tomotaro Miyazaki
智太郎 宮崎
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Panasonic Electric Works Co Ltd
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Matsushita Electric Works Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To detect a defect with high accuracy by preventing misrecognition of the air, entering between an optically transparent film and an auxiliary member for observation as a defect. <P>SOLUTION: This device is equipped with a film transport means for conveying the optically transparent film 1 which is an inspection object; an imaging part 5 for imaging the appearance of the optically transparent film; an auxiliary member 2 for observation, arranged on the back of the optically transparent film imaged by the imaging part; an operation part 6 for detecting a defect by analyzing an image acquired by the imaging part; and a film-adhering means for making the optically transparent film adhere to the surface of the auxiliary member for observation. The auxiliary member for observation has substantially the same light reflection characteristic as that of a member on which the optically transparent film is to be stuck as a final product. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、光学用途、建築用途、車載用途などの用途において、反射防止、飛散防止、熱線防止(遮断)、断熱、防汚、耐久性(保護)などの目的で使用される光透過性フィルム(光透過性を有するフィルム)の欠陥を検出するための装置に関するものであり、殊に表面に微小膜厚のコーティング層が形成されている光透過性フィルムの欠陥を検出する欠陥検出装置に関するものである。   The present invention is a light transmissive film used for the purposes of antireflection, scattering prevention, heat ray prevention (blocking), heat insulation, antifouling, durability (protection), etc. in applications such as optical applications, architectural applications, and automotive applications The present invention relates to a device for detecting defects in (light-transmitting film), and more particularly to a defect detecting device for detecting defects in a light-transmitting film in which a coating layer having a small film thickness is formed on the surface. It is.

光学用途、建築用途、車載用途等に用いられる上記のような光透過性フィルムとしては、例えば、複数のコーティング層を形成した光透過性フィルムである反射防止フィルムを挙げることができる。このような光透過性フィルムは、プラズマディスプレーや液晶ディスプレーなどのディスプレイの表面に反射防止フィルターとして適用することができる。波長透過特性機能を持たせるための上記コーティング層は、その厚みが1μm以下の厚みのものを例示することができる。   Examples of the light transmissive film used in optical applications, architectural applications, vehicle-mounted applications, and the like include an antireflection film that is a light transmissive film in which a plurality of coating layers are formed. Such a light transmissive film can be applied as an antireflection filter to the surface of a display such as a plasma display or a liquid crystal display. The said coating layer for giving a wavelength transmission characteristic function can illustrate the thing whose thickness is 1 micrometer or less.

このコーティング層を有する光透過性フィルムにおいて、フィルムとコーティング層との間に異物が入り込んで生じる欠陥(核有り欠陥)は目視によっても検出することができるが、コーティング層の厚みのばらつきによって微妙に周囲と色目が違う部分として発生する欠陥(核無し欠陥)は、目視による検出がきわめて困難であり、目視検査では90%ほどの不良を見逃してしまうことになる。   In the light-transmitting film having this coating layer, defects (defects with nuclei) caused by foreign matter entering between the film and the coating layer can be detected by visual observation, but are subtle due to variations in the thickness of the coating layer. Defects (nuclear-free defects) that occur as parts with different colors from the surroundings are extremely difficult to detect visually, and about 90% of defects are missed by visual inspection.

このために特許文献1には、黒色のガイドローラの表面に位置する光透過性フィルムに対して、光透過性フィルムに形成されたコーティング層の表裏面で反射した光が干渉するように照明を行い、その干渉模様を撮像することで欠陥を検出することが提案されている。   For this purpose, Patent Document 1 illuminates the light transmissive film located on the surface of the black guide roller so that the light reflected by the front and back surfaces of the coating layer formed on the light transmissive film interferes. It has been proposed to detect defects by imaging the interference pattern.

この場合、上記核有り欠陥はもちろん上記核無し欠陥も検出することができるが、ガイドローラの表面状態で反射が変わり、少しでも空気の隙間があると、この部分でも干渉縞が生じるために、欠陥として検出してしまう。   In this case, the defect without core as well as the defect with nucleus can be detected, but the reflection changes depending on the surface state of the guide roller. It will be detected as a defect.

また、上記検査でOKとなった光透過性フィルムも、最終製品であるディスプレーに用いた時、上記検査時に観察用補助部材として機能していたガイドローラと、ディスプレーにおいて光透過性フィルムが実際に貼り付けられる部材(一般的には黒色ガラス)との光反射特性の違いのために、実際上は欠陥が存在するものとなってしまうことが多々ある。
特開2006−208196号公報
In addition, when the light-transmitting film that is OK in the above inspection is used for the display as the final product, the guide roller that functioned as an auxiliary member for observation at the time of the inspection and the light-transmitting film in the display actually Due to the difference in light reflection characteristics from a member to be attached (generally black glass), there are many cases where defects actually exist.
JP 2006-208196 A

本発明は上記の従来の問題点に鑑みて発明したものであって、欠陥検出を高精度で行うことができる光透過性フィルムの欠陥検出装置を提供することを課題とするものである。   This invention is invented in view of said conventional problem, Comprising: It aims at providing the defect detection apparatus of the light transmissive film which can perform a defect detection with high precision.

上記課題を解決するために本発明に係る光透過性フィルムの欠陥検出装置は、検査対象である光透過性フィルムを搬送するフィルム搬送手段と、光透過性フィルムの外観を撮像する撮像部と、撮像部で撮像される光透過性フィルムの背後に配された観察用補助部材と、撮像部で得られた画像を分析して欠陥を検出する演算部とを備えているとともに、上記光透過性フィルムを観察用補助部材の表面に密着させるフィルム密着手段を備え、上記観察用補助部材は光透過性フィルムが最終製品において貼り付けられる部材とほぼ同一の光反射特性を有していることを特徴とする。   In order to solve the above problems, a defect detection apparatus for a light transmissive film according to the present invention includes a film transport unit that transports a light transmissive film to be inspected, an imaging unit that captures an appearance of the light transmissive film, An auxiliary member for observation arranged behind the light transmissive film imaged by the imaging unit, and a calculation unit for analyzing the image obtained by the imaging unit to detect a defect, and A film adhesion means for bringing the film into close contact with the surface of the auxiliary member for observation is provided, and the auxiliary member for observation has almost the same light reflection characteristics as the member to which the light transmissive film is attached in the final product. And

上記フィルム密着手段としては、光透過性フィルムと観察用補助部材との間にフィルムを浸食しない液体を介在させる液体充填手段を好適に用いることができる。   As the film contact means, a liquid filling means in which a liquid that does not erode the film is interposed between the light transmissive film and the observation auxiliary member can be suitably used.

撮像部はラインカメラであることが、観察用補助部材の大きさを小さくすることが可能で検査スペースを小さくできる点で有利である。   It is advantageous that the imaging unit is a line camera in that the size of the observation auxiliary member can be reduced and the inspection space can be reduced.

本発明は、観察用補助部材を背面に配しているために、光透過性フィルム単体で見る時よりも欠陥が見つけやすいものであり、しかも光透過性フィルムと観察用補助部材との間に空気が入りこんで欠陥と認識されてしまうことがなく、また光透過性フィルムが観察用補助部材上にある時と、光透過性フィルムが最終製品において貼り付けられる部材上にある時とでの欠陥の出具合がほぼ同じとなるために、欠陥と判断する際の判断レベルの設定が容易となるとともに、欠陥がないと判断したものが実使用に際して欠陥があると認識されてしまうような事態を招くことがなくなる。   In the present invention, since the auxiliary member for observation is arranged on the back surface, it is easier to find defects than when the light transmissive film is viewed alone, and between the light transmissive film and the auxiliary member for observation. Defects when air enters and is not recognized as a defect, and when the light-transmitting film is on the auxiliary member for observation and when the light-transmitting film is on the member to be attached in the final product Since the output level of the product is almost the same, it is easy to set the judgment level when judging that it is a defect. You will never be invited.

以下、本発明を添付図面に示す実施形態に基いて説明すると、図1において、1は表面に多層膜コーティングが施された反射防止フィルムとしての光透過性フィルムであり、巻き出しドラム10に巻かれている光透過性フィルム1はモータ11駆動による巻き出しによって巻き取りドラム12側に送られる。   Hereinafter, the present invention will be described with reference to an embodiment shown in the accompanying drawings. In FIG. 1, reference numeral 1 denotes a light-transmitting film as an antireflection film having a multilayer coating on the surface. The light transmissive film 1 is fed to the take-up drum 12 side by unwinding by driving the motor 11.

図中2はローラ状の観察用補助部材であり、純水が供給される水槽20に下部を浸漬して配置されており、上記光透過性フィルム1はこのローラ状の観察用補助部材2の表面に接した状態で送られる。上記純水の代わりに、メチルエチルケトンなどの揮発性溶剤やエッセンシャルオイルなどの油脂系液体を用いてもよい。   In the figure, reference numeral 2 denotes a roller-shaped auxiliary member for observation, which is disposed by immersing the lower part in a water tank 20 to which pure water is supplied. The light-transmitting film 1 is composed of the roller-shaped auxiliary member for observation 2. Sent while touching the surface. Instead of the pure water, a volatile solvent such as methyl ethyl ketone or an oil-based liquid such as essential oil may be used.

観察用補助部材2の上方には三波長蛍光灯である照明部4が配置されて、光透過性フィルム1における観察用補助部材2に裏面が接している部分の表面を照明する。また、照明部4で照明された部分を撮像するラインカメラで構成された撮像部5を備えており、撮像部5で得られた画像を分析した欠陥を検出する演算部6に撮像部5が接続されている。   An illumination unit 4 that is a three-wavelength fluorescent lamp is disposed above the observation auxiliary member 2 to illuminate the surface of the portion of the light transmissive film 1 that is in contact with the observation auxiliary member 2. Further, the imaging unit 5 includes a line camera that captures a portion illuminated by the illumination unit 4, and the imaging unit 5 is included in the calculation unit 6 that detects a defect obtained by analyzing the image obtained by the imaging unit 5. It is connected.

図中61は光透過性フィルム1に付着した水分を落とすための水切りドクター、62はエアブロアである。   In the figure, 61 is a draining doctor for removing water adhering to the light transmissive film 1, and 62 is an air blower.

光透過性フィルム1の欠陥検出にあたっては、上記ローラ状の観察用補助部材2を回転させることで観察用補助部材2の表面を純水で濡らすとともに、テンションをかけた状態の光透過性フィルム1を上記観察用補助部材2に接触させる。この時、上記純水により、光透過性フィルム1と観察用補助部材2との間に空気層が生じることを防いで、光透過性フィルム1の背面を観察用補助部材2の表面に密着させる。   In detecting the defect of the light transmissive film 1, the roller-shaped auxiliary observation member 2 is rotated to wet the surface of the auxiliary observation member 2 with pure water and the light transmissive film 1 in a tensioned state. Is brought into contact with the observation auxiliary member 2. At this time, the pure water prevents the air layer from being generated between the light transmissive film 1 and the observation auxiliary member 2, and the back surface of the light transmissive film 1 is brought into close contact with the surface of the observation auxiliary member 2. .

また、ここで用いている観察用補助部材2は、光透過性フィルム1が最終的に使用される製品上で貼り付けられる部材の光反射特性とほぼ同一の光反射特性を有する表面を備えるものとなっている。上記部材と全く同一の材質で観察用補助部材2を構成することが最も好ましいが、光反射特性がほぼ同一であれば、他の材質のものであってもよい。上記部材が前述のようにガラス部材であり、観察用補助部材2がアルミニウムや鉄であっても、その表面処理でほぼ同一の光反射特性を持たせることができればよい。フィルム密着手段として水を用いる場合は、その表面が親水性を有していることが好ましい。   Further, the observation auxiliary member 2 used here has a surface having light reflection characteristics substantially the same as the light reflection characteristics of a member to be attached on a product in which the light transmissive film 1 is finally used. It has become. Most preferably, the observation auxiliary member 2 is made of the same material as the above member, but may be made of other materials as long as the light reflection characteristics are substantially the same. Even if the member is a glass member as described above and the observation auxiliary member 2 is aluminum or iron, it is only necessary that the surface treatment can provide substantially the same light reflection characteristics. When water is used as the film adhesion means, the surface thereof is preferably hydrophilic.

このものにおいては、光透過性フィルム1が観察用補助部材2に密着しているために、光透過性フィルム1と観察用補助部材2との間の空気が欠陥検出に際して誤った結果を導いてしまうことがない。また、前記核無し欠陥は、光源の種類が変われば見えなくなってしまうことが生じるものであるが、観察用補助部材2の表面の光反射特性が光透過性フィルムが最終製品において貼り付けられる部材の光反射特性とほぼ同一となっているために、観察用補助部材2上に光透過性フィルム1がある時と、光透過性フィルムが最終製品において貼り付けられる部材上にある時とで欠陥の出具合がほぼ同じとなるものであり、このために欠陥と判断する際の判断レベルの設定が容易となるとともに、欠陥がないと判断したものが実使用に際して欠陥があると認識されてしまうような事態を招くことがないものである。   In this case, since the light transmissive film 1 is in close contact with the observation auxiliary member 2, the air between the light transmissive film 1 and the observation auxiliary member 2 leads to an erroneous result in detecting a defect. There is no end. Further, the defect without the nucleus may be invisible if the type of the light source is changed. However, the light reflection characteristic of the surface of the auxiliary member for observation 2 is a member to which the light transmissive film is attached in the final product. Since the light reflection characteristics are substantially the same, there are defects when the light transmissive film 1 is on the observation auxiliary member 2 and when the light transmissive film is on the member to be attached in the final product. Therefore, it is easy to set the judgment level when judging that it is defective, and it is recognized that there is no defect when actually used. It does not cause such a situation.

図2に他例を示す。ここでは観察用補助部材2として平板状のものを用いると同時に、フィルム密着手段として、純水を光透過性フィルム1と観察用補助部材2との間に注入する注水手段71と、光透過性フィルム1を観察用補助部材2に押し付けるローラ72とを備えている。図中73は水受け皿である。観察用補助部材2を光透過性フィルム1側に押し付けて密着させるものであってもよい。   FIG. 2 shows another example. Here, a flat plate-like member is used as the observation auxiliary member 2, and at the same time, water injection means 71 for injecting pure water between the light transmissive film 1 and the observation auxiliary member 2 as a film adhesion means, and light transmission property. And a roller 72 for pressing the film 1 against the observation auxiliary member 2. In the figure, 73 is a water tray. The auxiliary member for observation 2 may be pressed against the light transmissive film 1 to be in close contact therewith.

この場合、観察用補助部材2として平板状のものを用いることから、光透過性フィルムが最終製品において貼り付けられる部材そのものを利用することが容易となる。   In this case, since the observation auxiliary member 2 is a flat plate, it is easy to use the member itself to which the light transmissive film is attached in the final product.

本発明の実施の形態の一例のブロック図である。It is a block diagram of an example of an embodiment of the invention. 同上の他例のブロック図である。It is a block diagram of the other example same as the above.

符号の説明Explanation of symbols

1 光透過性フィルム
2 観察用補助部材
5 撮像部
6 演算部
DESCRIPTION OF SYMBOLS 1 Light transmissive film 2 Auxiliary member for observation 5 Imaging part 6 Calculation part

Claims (3)

検査対象である光透過性フィルムを搬送するフィルム搬送手段と、光透過性フィルムの外観を撮像する撮像部と、撮像部で撮像される光透過性フィルムの背後に配された観察用補助部材と、撮像部で得られた画像を分析して欠陥を検出する演算部とを備えているとともに、上記光透過性フィルムを観察用補助部材の表面に密着させるフィルム密着手段を備え、上記観察用補助部材は光透過性フィルムが最終製品において貼り付けられる部材とほぼ同一の光反射特性を有していることを特徴とする光透過性フィルムの欠陥検出装置。   Film transporting means for transporting the light transmissive film to be inspected, an image pickup section for picking up the appearance of the light transmissive film, and an observation auxiliary member disposed behind the light transmissive film picked up by the image pickup section And an arithmetic unit for analyzing the image obtained by the imaging unit to detect defects, and a film contact means for bringing the light transmissive film into close contact with the surface of the auxiliary member for observation. A member for detecting a defect in a light transmissive film, characterized in that the member has substantially the same light reflection characteristics as a member to which the light transmissive film is pasted in the final product. フィルム密着手段は光透過性フィルムと観察用補助部材との間にフィルムを浸食しない液体を介在させる液体充填手段であることを特徴とする請求項1記載の光透過性フィルムの欠陥検出装置。   2. The defect detecting device for a light transmissive film according to claim 1, wherein the film contact means is a liquid filling means for interposing a liquid that does not erode the film between the light transmissive film and the observation auxiliary member. 撮像部はラインカメラであることを特徴とする請求項1または2に記載の光透過性フィルムの欠陥検出装置。   The defect detection apparatus for a light transmissive film according to claim 1, wherein the imaging unit is a line camera.
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JP5255341B2 (en) * 2008-06-25 2013-08-07 パナソニック株式会社 Defect detection device for light transmissive film
CN117074423B (en) * 2023-10-16 2023-12-12 江苏图恩视觉科技有限公司 Film defect detection system and working method thereof

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