JP2008175657A - Packing device for x-ray detector - Google Patents

Packing device for x-ray detector Download PDF

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JP2008175657A
JP2008175657A JP2007008610A JP2007008610A JP2008175657A JP 2008175657 A JP2008175657 A JP 2008175657A JP 2007008610 A JP2007008610 A JP 2007008610A JP 2007008610 A JP2007008610 A JP 2007008610A JP 2008175657 A JP2008175657 A JP 2008175657A
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ray detector
cooled
module
thermo module
ray
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Minoru Yamada
実 山田
Masaru Shimada
勝 島田
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Shimadzu Corp
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Shimadzu Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a packing device for an X-ray detector, wherein a multi-stage thermo-module whose proof stress is considered to be mechanically small against a lateral force, out of a substance to be cooled constituting a part of the X-ray detector, and the multi-stage thermo-module for cooling this substance, is less affected by vibrations and shocks in the course of conveyance, is hardly damaged, and does not become a cause of a degradation. <P>SOLUTION: The substance to be cooled 40 is constituted of an X-ray detecting element 41, an FET 42, a mount section for fixing these to the multi-stage thermo-module 43, electrical wiring conductors, etc. A supporting frame 11 and a supporting frame 12 for supporting the X-ray detector 4 are installed in a packing box 10 so that the direction of the center axis (axis shown by a center line A, A') of the substance 40 and the multi-stage thermo-module 43 arranged below it may turn vertical. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、被冷却物とこれを冷却する多段サーモ・モジュールを備える分析装置の検出器の梱包に関し、特には被冷却物とこれを冷却する多段サーモ・モジュールを備えるエネルギー分散型蛍光X線分析装置のX線検出器の梱包に関する。   The present invention relates to a package of a detector of an analyzer equipped with an object to be cooled and a multistage thermo module for cooling the object, and in particular, energy dispersive X-ray fluorescence analysis comprising an object to be cooled and a multistage thermo module for cooling the object to be cooled. It relates to the packaging of the X-ray detector of the apparatus.

エネルギー分散型蛍光X線分析装置の概要について説明する。図2は、エネルギー分散型蛍光X線分析装置の構成の一部を示す図である。X線管1で発生したX線は、測定室3内に載置された試料2に照射される。試料2からは色々の蛍光X線が発生し、これをX線検出器4で検出する。X線検出器4の出力は、データ処理されて、定性分析、定量分析が行われる。X線検出器4は、X線を検出し電荷を生成するX線検出素子41と、電荷を電圧に変換するプリアンプ44と、その入力段に配設されるFET42と、被冷却物40を冷却する多段サーモ・モジュール43と、真空容器45と、真空容器45を真空に保持するイオンポンプ46等で構成される。   An outline of the energy dispersive X-ray fluorescence analyzer will be described. FIG. 2 is a diagram showing a part of the configuration of the energy dispersive X-ray fluorescence analyzer. X-rays generated in the X-ray tube 1 are applied to the sample 2 placed in the measurement chamber 3. Various fluorescent X-rays are generated from the sample 2 and detected by the X-ray detector 4. The output of the X-ray detector 4 is processed for qualitative analysis and quantitative analysis. The X-ray detector 4 detects an X-ray and generates an electric charge, an X-ray detection element 41, a preamplifier 44 that converts the electric charge into a voltage, an FET 42 arranged at an input stage thereof, and an object 40 to be cooled. A multistage thermo module 43, a vacuum vessel 45, an ion pump 46 for holding the vacuum vessel 45 in a vacuum, and the like.

被冷却物40は、X線検出素子41と、FET42と、これらを多段サーモ・モジュール43に固定するマウント部分および電気配線(図示しない)で構成され、周囲温度の影響が少ない真空容器45内に配設されている。マウント部分は効果的に冷却できるように通常金属で構成され、被冷却物40の重量は例えば約0.5N程度である。   The object to be cooled 40 is composed of an X-ray detection element 41, an FET 42, a mount portion for fixing them to the multistage thermo module 43, and electrical wiring (not shown), and is contained in a vacuum vessel 45 that is less affected by ambient temperature. It is arranged. The mount portion is usually made of metal so that it can be cooled effectively, and the weight of the object to be cooled 40 is about 0.5 N, for example.

X線検出素子41は、半導体例えばシリコンリチウムで構成され、FET42と共に熱雑音を抑えるために冷却して使用される。熱雑音は冷却温度の上昇と共に増大し、エネルギー分解能は熱雑音の増加と共に低下する。一般に蛍光X線分析においては、エネルギー分解能は150eV以下であることが求められている。この要求を満たすには、−80℃以下に冷却する必要がある(例えば特許文献1参照)。   The X-ray detection element 41 is made of a semiconductor such as silicon lithium, and is cooled and used together with the FET 42 in order to suppress thermal noise. Thermal noise increases with increasing cooling temperature and energy resolution decreases with increasing thermal noise. Generally, in X-ray fluorescence analysis, the energy resolution is required to be 150 eV or less. In order to satisfy this requirement, it is necessary to cool to −80 ° C. or lower (see, for example, Patent Document 1).

例えば液体窒素による冷却では、冷却温度は液体窒素温度(−196℃)あるが、ペルチェ素子を用いた場合、多段式サーモ・モジュールを構成することにより冷却の最低到達温度は−100℃程度となる。   For example, in the cooling with liquid nitrogen, the cooling temperature is the liquid nitrogen temperature (−196 ° C.), but when a Peltier element is used, the lowest reached temperature of cooling becomes about −100 ° C. by configuring a multistage thermo module. .

図3は、多段式サーモ・モジュールの概要を示す図である。図3で、多段サーモ・モジュール43は、数十から百個以上のペルチェ素子50をセラミック板51の間に挟んで構成される1段モジュールをピラミッド式に複数重ねて形成される。この最上段と最下段の温度差は100℃程度で大きいが、吸熱量は小さい。ペルチェ素子50とセラミック板51が特殊なはんだ材で接着され形成される多段サーモ・モジュール43は、縦方向の力にはある程度耐えることができるが、横方向の力には機械的に耐力が小さいとされている。   FIG. 3 is a diagram showing an outline of a multistage thermo module. In FIG. 3, the multistage thermo module 43 is formed by stacking a plurality of one-stage modules in a pyramidal manner by sandwiching several tens to one hundred or more Peltier elements 50 between ceramic plates 51. The temperature difference between the uppermost stage and the lowermost stage is large at about 100 ° C., but the endothermic amount is small. The multi-stage thermo module 43 in which the Peltier element 50 and the ceramic plate 51 are bonded with a special solder material can withstand a certain amount of longitudinal force, but mechanical strength is small against lateral force. It is said that.

エネルギー分散型蛍光X線分析装置は、図2に示すように、試料2が上方に配置され遮蔽された測定室3に載置されるため、X線管1とX線検出器4は下方に所定の角度例えば鉛直方向に対して45度の角度で配設される。したがって、図4に示すように、多段サーモ・モジュール43の横方向には、被冷却物40の重量約0.5Nの45度成分である約0.35Nが作用する。しかし、X線検出器4が装置に組み込まれている場合は、移送時に生じる振動がなく多段サーモ・モジュール43の横方向に作用する力は約0.35Nだけであり、多段サーモ・モジュール43はこれに十分耐えることができる。   As shown in FIG. 2, the energy dispersive X-ray fluorescence analyzer is placed in the measurement chamber 3 in which the sample 2 is placed and shielded upward, so that the X-ray tube 1 and the X-ray detector 4 are placed downward. It is disposed at a predetermined angle, for example, an angle of 45 degrees with respect to the vertical direction. Therefore, as shown in FIG. 4, about 0.35 N that is a 45 degree component of the weight of the object to be cooled 40 of about 0.5 N acts in the lateral direction of the multistage thermo module 43. However, when the X-ray detector 4 is incorporated in the apparatus, there is no vibration generated during the transfer, and the force acting in the lateral direction of the multistage thermo module 43 is only about 0.35 N, and the multistage thermo module 43 is It can withstand this.

通常、エネルギー分散型蛍光X線分析装置の移送時、X線検出器4は取り外して専用の梱包箱に格納される。従来、この梱包箱は、最も小形になるように設計されるか、X線検出器4の梱包箱への格納方向と設置方向が同一になるように設計される。   Usually, when the energy dispersive X-ray fluorescence analyzer is transferred, the X-ray detector 4 is removed and stored in a dedicated packing box. Conventionally, this packaging box is designed to be the smallest or designed so that the storage direction of the X-ray detector 4 in the packaging box and the installation direction are the same.

図5は、従来のX線検出器の梱包器を示す図である。図5において、被冷却物40は、X線検出素子41と、FET42と、これらを多段サーモ・モジュール43に固定するマウント部分および電気配線(図示しない)で構成されている。被冷却物40とその下方に配設されている多段サーモ・モジュール43の中心軸(中心線A、A´で示す軸)の方向が、鉛直方向に対して45度になるようにX線検出器4を支持する支持枠62と支持枠61が梱包箱60に装填されている。この梱包器では図4に示すように、多段サーモ・モジュール43の横方向に約0.35Nの力が作用しており、この力に移送中の主に路面の段差等で生ずる鉛直方向の振動・衝撃による力の45度成分が加わり、この影響で多段サーモ・モジュール43を損傷したり、劣化の原因を生起する可能性がある。
特開2005−308632号公報
FIG. 5 is a view showing a conventional X-ray detector packing device. In FIG. 5, an object to be cooled 40 includes an X-ray detection element 41, an FET 42, a mount portion for fixing them to a multistage thermo module 43, and electrical wiring (not shown). X-ray detection so that the direction of the central axis (the axes indicated by the center lines A and A ′) of the object to be cooled 40 and the multistage thermo module 43 disposed below it is 45 degrees with respect to the vertical direction. A support frame 62 and a support frame 61 that support the container 4 are loaded in the packing box 60. As shown in FIG. 4, a force of about 0.35 N is applied in the lateral direction of the multistage thermo module 43 in this packing machine, and the vertical vibration generated mainly by a step or the like on the road surface is being transferred to this force. A 45-degree component of force due to impact is added, and this effect may damage the multistage thermo module 43 or cause deterioration.
JP 2005-308632 A

被冷却物40と、これを冷却する多段サーモ・モジュール43はX線検出器4の一部を構成している。横方向の力には機械的に耐力が小さいとされている多段サーモ・モジュール43について、移送中の振動・衝撃が及ぼす影響が少なく、損傷し難く、劣化の原因を生起しないようなX線検出器4の梱包器を提供する。   The object to be cooled 40 and the multistage thermo module 43 for cooling the object 40 constitute a part of the X-ray detector 4. X-ray detection for multi-stage thermo module 43, which is considered to have low mechanical strength against lateral force, is less affected by vibration and shock during transfer, is less likely to be damaged, and does not cause deterioration A packaging device for the container 4 is provided.

被冷却物とそれを冷却する多段サーモ・モジュールを備えたX線検出器に対して、前記被冷却物とその下方に配設される多段サーモ・モジュールの中心軸が重力の方向と同一に支持する支持枠を水平に置かれる梱包箱に装填する梱包器。   For the X-ray detector equipped with an object to be cooled and a multi-stage thermo module for cooling it, the center axis of the object to be cooled and the multi-stage thermo module disposed below is supported in the same direction as the direction of gravity. A packing machine that loads the supporting frame into a packing box placed horizontally.

支持枠が複数個の分割体で構成されている梱包器。   A packaging machine in which the support frame is composed of a plurality of divided bodies.

被冷却物とその下方に配設される多段サーモ・モジュールは、その中心軸の方向が重力の方向と同一になるように梱包箱に格納されているため、横方向の力には機械的に耐力が小さいとされる多段サーモ・モジュールに作用する重力の横方向の成分は、静止時にはゼロとなる。また、移送中の多段サーモ・モジュールの場合も、移送中の主に路面の段差等で生ずる鉛直方向の振動・衝撃による力の横方向の成分はゼロであり、損傷および劣化の原因を生起する可能性は少ない。   Since the object to be cooled and the multistage thermo-module disposed below it are stored in the packing box so that the direction of the central axis is the same as the direction of gravity, mechanical force is applied to the lateral force. The lateral component of gravity acting on the multi-stage thermo module, which is considered to have a low yield strength, is zero when stationary. Also, in the case of a multistage thermo module being transported, the lateral component of the force due to vertical vibrations / impacts mainly caused by steps on the road surface during transport is zero, causing damage and deterioration. There is little possibility.

X線検出器は、適切なクッションで覆いがたつきのない状態で梱包箱に格納する。   The X-ray detector is stored in a packing box with an appropriate cushion so as not to be covered.

梱包箱の外表面には、「割れ物注意」、「横積み不可」、「転倒不可」の表示をする。   On the outer surface of the packing box, “Caution for broken objects”, “No horizontal loading” and “No falling” are displayed.

以下、本発明の実施例について図1を参照して説明する。図1は、本発明のX線検出器の梱包器を示す図である。図1において、被冷却物40は、X線検出素子41と、FET42と、これらを多段サーモ・モジュール43に固定するマウント部分および電気配線(図示しない)で構成されている。被冷却物40とその下方に配設される多段サーモ・モジュール43の中心軸(中心線A、A´で示す軸)の方向が、鉛直方向になるようにX線検出器4を支持する支持枠12と支持枠11が梱包箱10に装填されている。   An embodiment of the present invention will be described below with reference to FIG. FIG. 1 is a view showing a packaging device for an X-ray detector according to the present invention. In FIG. 1, an object to be cooled 40 includes an X-ray detection element 41, an FET 42, a mount portion for fixing them to a multistage thermo module 43, and electrical wiring (not shown). Support for supporting the X-ray detector 4 so that the direction of the central axis (the axes indicated by the center lines A and A ′) of the object to be cooled 40 and the multistage thermo module 43 disposed below the object 40 is vertical. A frame 12 and a support frame 11 are loaded in the packing box 10.

本発明は以上の構成であるから、被冷却物40とその下方に配設されている多段サーモ・モジュール43は、その中心軸(中心線A、A´で示す軸)の方向が重力の方向と同一になるように梱包箱10に格納されているため、横方向の力には機械的に耐力が小さいとされる多段サーモ・モジュール43に作用する重力の横方向の成分は、静止時にはゼロとなる。また、移送中の多段サーモ・モジュール43の場合も、移送中の主に路面の段差等で生ずる鉛直方向の振動・衝撃による力の横方向の成分はゼロであり、損傷および劣化の原因が生起する可能性が少なくなる。   Since the present invention has the above configuration, the direction of the center axis (the axes indicated by the center lines A and A ′) of the object to be cooled 40 and the multistage thermo module 43 disposed below the object 40 is the direction of gravity. The lateral component of gravity acting on the multistage thermo module 43, which is considered to be mechanically resistant to the lateral force, is zero when stationary. It becomes. Also, in the case of the multistage thermo module 43 being transferred, the lateral component of the force due to vertical vibrations / impacts mainly caused by steps on the road surface during transfer is zero, causing damage and deterioration. Less likely to do.

図1に示す実施例においては、被冷却物40が上方になるようにX線検出器4が配置され、梱包箱10に格納されているが、上下を逆にして、被冷却物40が下方になるようにX線検出器4が配置され、梱包箱10に格納されても本発明は適用可能であり梱包器は図示例に限定されない。また支持枠の形状、個数も図示例や2個に限定されず3個ないし4個の組合せとすることができる。   In the embodiment shown in FIG. 1, the X-ray detector 4 is arranged so that the object to be cooled 40 is on the upper side and stored in the packing box 10. Even if the X-ray detector 4 is arranged and stored in the packaging box 10, the present invention is applicable, and the packaging device is not limited to the illustrated example. Further, the shape and the number of the support frames are not limited to the illustrated example and are not limited to two, and may be a combination of three to four.

また、実施例では支持枠11が上方に支持枠12が下方に装填されているが、上方の支持枠11を削除しX線検出器4を帯等で支持枠12に固定し、支持枠12をボルト等で梱包箱10の底に固定しても本発明は適用可能である。また支持枠12の形状、個数も図示例や1個に限定されず複数個の組合せとすることができる。このように梱包器は種々の構成とすることができ、本発明はこれら変形例を包含する。   In the embodiment, the support frame 11 is mounted on the upper side and the support frame 12 is loaded on the lower side. However, the upper support frame 11 is deleted and the X-ray detector 4 is fixed to the support frame 12 with a band or the like. The present invention can be applied even if the bolt is fixed to the bottom of the packaging box 10 with a bolt or the like. Further, the shape and the number of the support frames 12 are not limited to the illustrated example and are not limited to one, and a plurality of combinations can be used. Thus, the packaging device can have various configurations, and the present invention includes these modifications.

本発明は、被冷却物とこれを冷却する多段サーモ・モジュールを備える分析装置の検出器の梱包に関し、特には被冷却物とこれを冷却する多段サーモ・モジュールを備えるエネルギー分散型蛍光X線分析装置のX線検出器の梱包に関する。   The present invention relates to a package of a detector of an analyzer equipped with an object to be cooled and a multistage thermo module for cooling the object, and in particular, energy dispersive X-ray fluorescence analysis comprising an object to be cooled and a multistage thermo module for cooling the object to be cooled. It relates to the packaging of the X-ray detector of the apparatus.

本発明のX線検出器の梱包器を示す図である。It is a figure which shows the packaging device of the X-ray detector of this invention. エネルギー分散型蛍光X線分析装置の構成の一部を示す図である。It is a figure which shows a part of structure of an energy dispersive X-ray-fluorescence analyzer. 多段式サーモ・モジュールの概要を示す図である。It is a figure which shows the outline | summary of a multistage type thermo module. 多段式サーモ・モジュールに作用する力の概要を示す図である。It is a figure which shows the outline | summary of the force which acts on a multistage thermo module. 従来のX線検出器の梱包器を示す図である。It is a figure which shows the packaging device of the conventional X-ray detector.

符号の説明Explanation of symbols

1 X線管
2 試料
3 測定室
4 X線検出器
10 梱包箱
11 支持枠
12 支持枠
40 被冷却物
41 X線検出素子
42 FET
43 多段サーモ・モジュール
44 プリアンプ
45 真空容器
46 イオンポンプ
50 ペルチェ素子
51 セラミック板
60 梱包箱
61 支持枠
62 支持枠
1 X-ray tube 2 Sample 3 Measurement chamber 4 X-ray detector 10 Packing box 11 Support frame 12 Support frame 40 Object to be cooled 41 X-ray detection element 42 FET
43 Multistage thermo module 44 Preamplifier 45 Vacuum vessel 46 Ion pump 50 Peltier element 51 Ceramic plate 60 Packing box 61 Support frame 62 Support frame

Claims (2)

被冷却物とそれを冷却する多段サーモ・モジュールを備えたX線検出器に対して、前記被冷却物とその下方に配設される多段サーモ・モジュールの中心軸が重力の方向と同一に支持する支持枠を水平に置かれる梱包箱に装填したことを特徴とするX線検出器の梱包器。   For the X-ray detector equipped with an object to be cooled and a multi-stage thermo module for cooling it, the center axis of the object to be cooled and the multi-stage thermo module disposed below is supported in the same direction as the direction of gravity. An X-ray detector packaging device, wherein the supporting frame is loaded in a horizontally placed packaging box. 支持枠が複数個の分割体で構成されていることを特徴とする請求項1記載のX線検出器の梱包器。   2. The X-ray detector packing device according to claim 1, wherein the support frame is composed of a plurality of divided bodies.
JP2007008610A 2007-01-18 2007-01-18 Packing device for x-ray detector Pending JP2008175657A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010249701A (en) * 2009-04-16 2010-11-04 Yoshida Denzai Kogyo Kk Heat insulation device for flat panel
CN104849745A (en) * 2015-06-02 2015-08-19 中国科学院紫金山天文台 Protection structure of satellite-borne space crystal array detector

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010249701A (en) * 2009-04-16 2010-11-04 Yoshida Denzai Kogyo Kk Heat insulation device for flat panel
CN104849745A (en) * 2015-06-02 2015-08-19 中国科学院紫金山天文台 Protection structure of satellite-borne space crystal array detector
CN104849745B (en) * 2015-06-02 2017-06-16 中国科学院紫金山天文台 A kind of protection structure of spaceborne space crystal detector array

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